JP2014000811A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2014000811A5 JP2014000811A5 JP2013127140A JP2013127140A JP2014000811A5 JP 2014000811 A5 JP2014000811 A5 JP 2014000811A5 JP 2013127140 A JP2013127140 A JP 2013127140A JP 2013127140 A JP2013127140 A JP 2013127140A JP 2014000811 A5 JP2014000811 A5 JP 2014000811A5
- Authority
- JP
- Japan
- Prior art keywords
- sacrificial layer
- thin film
- substrate
- multilayer thin
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 33
- 239000010409 thin film Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical compound ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 claims description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 claims description 4
- RELMFMZEBKVZJC-UHFFFAOYSA-N 1,2,3-trichlorobenzene Chemical compound ClC1=CC=CC(Cl)=C1Cl RELMFMZEBKVZJC-UHFFFAOYSA-N 0.000 claims description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims description 2
- 239000003513 alkali Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 150000002576 ketones Chemical class 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 229910000160 potassium phosphate Inorganic materials 0.000 claims description 2
- 235000011009 potassium phosphates Nutrition 0.000 claims description 2
- 239000001294 propane Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000001632 sodium acetate Substances 0.000 claims description 2
- 235000017281 sodium acetate Nutrition 0.000 claims description 2
- 238000003980 solgel method Methods 0.000 claims description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 2
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 claims description 2
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/527,996 | 2012-06-20 | ||
| US13/527,996 US20120256333A1 (en) | 2010-12-21 | 2012-06-20 | Process for manufacturing a stand-alone multilayer thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014000811A JP2014000811A (ja) | 2014-01-09 |
| JP2014000811A5 true JP2014000811A5 (https=) | 2016-07-07 |
Family
ID=50034427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013127140A Pending JP2014000811A (ja) | 2012-06-20 | 2013-06-18 | 独立多層薄フィルムの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014000811A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3095777B1 (fr) | 2019-05-09 | 2023-09-29 | Oreal | Materiau multicouches pour filtrer les ultraviolets, composition le comprenant, procede de traitement de matieres keratiniques le mettant en œuvre, et procede de preparation du materiau |
| JP7456728B2 (ja) | 2019-05-09 | 2024-03-27 | ロレアル | 日焼け止め用の多層粒子 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0827408B2 (ja) * | 1990-04-25 | 1996-03-21 | 株式会社コパル | 光学多層膜フイルタ素子の製造方法 |
| JP2006058592A (ja) * | 2004-08-20 | 2006-03-02 | Nikon Corp | 光学薄膜の製造方法 |
| US10035337B2 (en) * | 2006-10-27 | 2018-07-31 | Nanotheta Co, Ltd. | Thin film polymer structure having different modification on opposite sides thereof |
| US8749881B2 (en) * | 2007-08-12 | 2014-06-10 | Toyota Motor Engineering & Manufacturing North America, Inc. | Narrow band omnidirectional reflectors and their use as structural colors |
| US7903339B2 (en) * | 2007-08-12 | 2011-03-08 | Toyota Motor Engineering & Manufacturing North America, Inc. | Narrow band omnidirectional reflectors and their use as structural colors |
| JP5902373B2 (ja) * | 2009-02-19 | 2016-04-13 | トヨタ モーター エンジニアリング アンド マニュファクチャリング ノース アメリカ，インコーポレイティド | 全方向反射特性を有する多層フォトニック構造および該構造を取り入れたコーティング |
-
2013
- 2013-06-18 JP JP2013127140A patent/JP2014000811A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10957878B2 (en) | Structured lamination transfer films and methods | |
| Askar et al. | Self-assembled self-cleaning broadband anti-reflection coatings | |
| CN106711354A (zh) | 有机半导体器件的封装方法 | |
| US9650741B2 (en) | Mask and a method of manufacturing the same | |
| Zada et al. | Angle dependent antireflection property of TiO2 inspired by cicada wings | |
| JP2016027559A5 (https=) | ||
| CN102792465A (zh) | 掩模糊料以及用于制造部分透明的薄膜光伏板的方法 | |
| JP2014000811A5 (https=) | ||
| KR102268992B1 (ko) | 부분적으로 자립하는 그라핀 결정막을 제조하는 방법 및 이러한 막을 포함하는 디바이스 | |
| JP2020535604A (ja) | 発熱フィルムおよびその製造方法 | |
| CN102338892A (zh) | 一种ZnS基底1064nm、8μm～10μm光波段大入射角增透膜及ZnS光窗 | |
| CN104591074A (zh) | 一种基于三明治结构的柔性硅薄膜及其制备方法 | |
| CN106415873B (zh) | 阻挡层叠层、用于制造阻挡层叠层的方法以及超高阻挡层与抗反射系统 | |
| CN104718582B (zh) | 叠层膜及其膜卷、以及可由其得到的透光性导电膜及利用其的触摸板 | |
| JP2015525679A (ja) | Ｍｅｍｓチップ及びその製造方法 | |
| WO2015100742A1 (zh) | 一种保护片、保护片的制作方法及电子设备 | |
| TW201938366A (zh) | 用以製造薄膜裝置的無溶劑方法 | |
| JP2014000811A (ja) | 独立多層薄フィルムの製造方法 | |
| TWI877157B (zh) | 導電膜之形成 | |
| US8309165B2 (en) | Color filter by copper and silver film and method for making same | |
| US20160189822A1 (en) | Conductive Film and Method for Preparing the Same | |
| JP6267056B2 (ja) | タッチセンサ | |
| JP6012644B2 (ja) | タッチセンサ | |
| CN104103774A (zh) | 一种柔性微透镜阵列与oled阵列的集成方法及其产品 | |
| CN105045036B (zh) | 一种蜡纸掩模及其制备方法 |