TW201938366A - 用以製造薄膜裝置的無溶劑方法 - Google Patents

用以製造薄膜裝置的無溶劑方法 Download PDF

Info

Publication number
TW201938366A
TW201938366A TW108107838A TW108107838A TW201938366A TW 201938366 A TW201938366 A TW 201938366A TW 108107838 A TW108107838 A TW 108107838A TW 108107838 A TW108107838 A TW 108107838A TW 201938366 A TW201938366 A TW 201938366A
Authority
TW
Taiwan
Prior art keywords
layer
multilayer film
web
coating
release
Prior art date
Application number
TW108107838A
Other languages
English (en)
Other versions
TWI705901B (zh
Inventor
艾爾伯特歐 阿爾吉特雅
康寧 梁
強納斯 Ｐ 席迪奧
賈羅史勞 札巴
Original Assignee
美商菲爾薇解析公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商菲爾薇解析公司 filed Critical 美商菲爾薇解析公司
Publication of TW201938366A publication Critical patent/TW201938366A/zh
Application granted granted Critical
Publication of TWI705901B publication Critical patent/TWI705901B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0826—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets
    • B05C1/0834—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets the coating roller co-operating with other rollers, e.g. dosing, transfer rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/086—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line a pool of coating material being formed between a roller, e.g. a dosing roller and an element cooperating therewith
    • B05C1/0865—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line a pool of coating material being formed between a roller, e.g. a dosing roller and an element cooperating therewith the cooperating element being a roller, e.g. a coating roller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/36—Successively applying liquids or other fluent materials, e.g. without intermediate treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0021—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a core coated with only one layer having a high or low refractive index
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0024—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating high and low refractive indices, wherein the first coating layer on the core surface has the high refractive index
    • C09C1/003—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating high and low refractive indices, wherein the first coating layer on the core surface has the high refractive index comprising at least one light-absorbing layer
    • C09C1/0033—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating high and low refractive indices, wherein the first coating layer on the core surface has the high refractive index comprising at least one light-absorbing layer consisting of a metal or an alloy
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0024—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating high and low refractive indices, wherein the first coating layer on the core surface has the high refractive index
    • C09C1/0048—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating high and low refractive indices, wherein the first coating layer on the core surface has the high refractive index comprising at least one optically active layer with at least one organic material layer, e.g. liquid crystal polymers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0051—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating low and high refractive indices, wherein the first coating layer on the core surface has the low refractive index
    • C09C1/0057—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating low and high refractive indices, wherein the first coating layer on the core surface has the low refractive index comprising at least one light-absorbing layer
    • C09C1/006—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating low and high refractive indices, wherein the first coating layer on the core surface has the low refractive index comprising at least one light-absorbing layer consisting of a metal or an alloy
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0051—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating low and high refractive indices, wherein the first coating layer on the core surface has the low refractive index
    • C09C1/0075—Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating low and high refractive indices, wherein the first coating layer on the core surface has the low refractive index comprising at least one optically active layer with at least one organic material layer, e.g. liquid crystal polymers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
    • H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
    • H01L21/02307—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a liquid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H01L21/76846—Layer combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
    • H01L21/76855—After-treatment introducing at least one additional element into the layer
    • H01L21/76859—After-treatment introducing at least one additional element into the layer by ion implantation
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C2200/00—Compositional and structural details of pigments exhibiting interference colours
    • C09C2200/10—Interference pigments characterized by the core material
    • C09C2200/1054—Interference pigments characterized by the core material the core consisting of a metal
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C2200/00—Compositional and structural details of pigments exhibiting interference colours
    • C09C2200/40—Interference pigments comprising an outermost surface coating
    • C09C2200/409—Mixed inorganic-organic coating
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C2220/00—Methods of preparing the interference pigments
    • C09C2220/20—PVD, CVD methods or coating in a gas-phase using a fluidized bed

Abstract

本發明提供一種形成薄膜裝置之方法，該方法包括用多層薄膜塗佈腹板；且施加機械力以使該多層薄膜自該腹板脫模。本發明揭示形成薄膜裝置之額外方法。

Description

用以製造薄膜裝置的無溶劑方法
本揭示內容大體上係關於一種形成薄膜裝置之方法，該方法包括用多層薄膜塗佈腹板；且施加機械力以使多層薄膜自腹板脫模。
薄膜裝置通常在腹板上製得，其中脫模層在多層結構與腹板之間。在一些情況下，脫模層為在塗佈薄膜裝置之前蒸發的氯化鈉脫模層。在其他情況下，脫模層為由聚對苯二甲酸伸乙酯腹板提供之丙酮可溶聚合脫模層。在兩種情況下，薄膜在使用丙酮/水或100%丙酮溶解脫模層的濕式製程中剝離。使用危險及可燃丙酮（溶劑）需要用於剝離、清洗、過濾及乾燥如此剝離之薄膜的特定製程設備。
存在對用脫模層但無需使用苛性鹼溶劑將多層結構自腹板移除之方法，例如使用更簡單且較不昂貴乾式製程而非當前濕式製程之方法的需求。另外或替代地，存在對在無脫模層之情況下將多層結構自腹板移除之方法的需求。此方法將為更簡單的製程且由於消除額外材料而將更具成本效益。
在一態樣中，揭示一種形成薄膜裝置之方法，該方法包括用多層薄膜塗佈腹板；且施加機械力以使多層薄膜自腹板脫模。
在另一態樣中，揭示一種形成薄膜裝置之方法，該方法包括用第一層塗佈腹板；用反射體層塗佈第一層；用第二層塗佈反射體層以形成多層薄膜；且藉由乾式技術使多層薄膜自腹板脫模。
在另一態樣中，揭示一種形成薄膜裝置之方法，該方法包括向腹板提供脫模層；用多層薄膜塗佈脫模層；且施加機械力以使多層薄膜自腹板脫模。
各種具體實例之額外特徵及優點將在以下描述中部分闡述，且將部分自該描述顯而易見，或可藉由各種具體實例之實踐得知。藉助於本文中之描述中特定指出之元件及組合，將實現及達成各種具體實例之目標及其他優點。
應理解，前述通用描述及以下詳細描述兩者皆僅為例示性及解釋性的，且意欲提供對本發明教示之各種具體實例的解釋。各圖式中示出之層/組件可關於特定圖式描述，但應理解，特定層/組件之描述將適用於其他圖式中之等效層/組件。
在本發明之廣泛及變化的具體實例中，揭示一種形成薄膜裝置10之方法，該方法包括用多層薄膜20塗佈腹板40；且施加機械力以使多層薄膜20自腹板40脫模。在一態樣中，腹板40不包括脫模層30且多層薄膜20直接沉積於腹板40上。多層薄膜20可包括二或更多層，諸如3層、4層、5層，或6或更多層，例如，7層。在一態樣中，多層薄膜20可包括3層。在另一態樣中，多層薄膜20可包括5層。多層薄膜20可包括法布里-珀羅結構（Fabry-Perot structure）。法布里-珀羅結構可具有5或更多層以提供薄膜干涉效果。存在於法布里-珀羅結構中的層之數目可視所要光學特性以及例如磁特性之其他特性而變化。方法可用於製造薄膜裝置10，諸如特殊效果顏料。下文更充分地論述包含多層薄膜20之層。
在一態樣中，形成薄膜裝置10之方法可包括用第一層塗佈腹板40；用反射體層塗佈第一層；用第二層塗佈反射體層以形成多層薄膜20；且藉由乾式技術使多層薄膜20自腹板40脫模。在一態樣中，腹板40不包括脫模層30，且諸如第一層之多層薄膜20直接沉積於腹板40上。方法可進一步包括收集經脫模多層薄膜20。方法可進一步包括研磨經脫模多層薄膜20。下文更充分地論述第一層、反射體層及第二層。
在另一態樣中，揭示一種形成薄膜裝置10之方法，該方法包括向腹板40提供脫模層30；用多層薄膜20塗佈脫模層30；且施加機械力以使多層薄膜20自腹板40脫模。在一態樣中，多層薄膜20可包括3層。在另一態樣中，多層薄膜20可包括5層。多層薄膜20可包括法布里-珀羅結構。法布里-珀羅結構可具有5或更多層以提供薄膜干涉效果。存在於法布里-珀羅結構中的層之數目可視所要光學特性以及例如磁特性之其他特性而變化。方法可用於製造薄膜裝置10，諸如特殊效果顏料。下文更充分地論述包含多層薄膜20之層。在一態樣中，塗佈於脫模層30上之多層薄膜20可包括塗佈於脫模層30上之第一層；用反射體層塗佈第一層；及用第二層塗佈反射體層，以形成多層薄膜20。下文更充分地論述第一層、反射體層及第二層。
用於本文中所揭示之方法中的腹板40可為可固持脫模層30及多層薄膜20中之至少一者的任何材料。在一態樣中，腹板40可為微結構化腹板40，諸如聚對苯二甲酸乙二酯（PET）。腹板40可為可撓的。在一些態樣中，腹板40可包括脫模層30。在其他態樣中，腹板40可不存在脫模層30，使得例如第一層之多層薄膜20可直接地塗佈於腹板40上。
用於本文中所揭示之方法中之一些中的脫模層30可以對40之較低黏著力提供於腹板40之表面上。在一態樣中，脫模層30可以與對腹板40之較低黏著力相比對多層薄膜20之第一層之更低黏著力存在。以此方式，脫模層30可更易於自腹板40而非多層薄膜20之第一層移除。在一態樣中，脫模層30可為水溶性的。脫模層30可在研磨製程之後且在鈍化/功能化濕式製程之前自多層薄膜20消除，例如，如與含有諸如鋁之金屬層的顏料一起使用。諸如乾式剝離製程之乾式技術可在不存在脫模層30之情況下進行或可在脫模層30對腹板40具有較低黏著力之情況下進行。脫模層30不需要存在於腹板40與多層薄膜20之間。
脫模層30可選自聚乙烯醇調配物、多醣調配物（聚葡萄糖）、聚丙烯酸調配物、聚乙酸乙烯酯調配物、聚乙烯吡咯啶酮調配物、羧甲基纖維素調配物及其組合。脫模層30可為水溶性的但不可溶於用於塗佈多層薄膜20之溶劑，該多層薄膜包括第一層、反射體層及第二層。另外，可更改脫模層30之分子量以改良水溶性。舉例而言，若第一層具有基於水之調配物，則脫模層30應具有較低水溶性。脫模層30應在塗佈及乾燥多層薄膜20之至少第一層所需要的時間段保持脫模層之完整性。
在一態樣中，脫模層30可為聚乙烯醇（PVA）調配物。此調配物為無毒性、透明及惰性的。其為具有極佳成膜特性之水溶性聚合物。PVA塗層對諸如聚乙烯鄰苯二甲酸酯（PET）之疏水性聚合物之表面具有較低黏著力，且在大部分有機溶劑中不可溶。在將一或多個溶劑性層塗佈於預塗於疏水性聚合物薄板（腹板）上之PVA層上時，PVA層不僅在塗佈製程期間保持完整且亦使得該等層能夠藉由施加機械力適宜地自聚合物薄板（腹板）分離，該機械力諸如來自經壓縮空氣或水流之衝擊力。以此方式，PVA層可充當脫模層30。
PVA層可藉由將水性PVA溶液塗佈於腹板40上來形成。完全水解及部分水解（例如，86-88%水解）PVA兩者皆可用於形成脫模層30。此外，具有範圍介於Mw 10,000至200,000之分子量的PVA可適用於脫模層30。部分水解PVA可產生透明塗層及在冷水中之高溶解性，而完全水解PVA由於其較強分子內氫鍵相互作用可產生更硬的塗層。低分子量可實現快速水溶解及低溶液黏度。相反地，高分子量可產生緩慢水溶解及高溶液黏度。
具有0.01%至30% PVA之調配物可用於塗佈腹板40且可用於形成脫模層30。除PVA之外，諸如界面活性劑、變形劑、有機溶劑、防污劑等之添加劑亦可包括於形成脫模層30以增強塗層效能之調配物中。有效PVA脫模層30視腹板40之特性而定可具有範圍介於約1 nm至約10微米，例如約50 nm to至約1100 nm之層厚度。
PVA可在室溫或高溫下藉由交聯劑交聯。適合交聯劑包括但不限於二醛，諸如乙二醛及戊二醛；二羧酸，諸如丙二酸、丁二酸、戊二酸、己二酸等；硼酸；及一些多價金屬離子，諸如Al3+ 。PVA層之交聯可使其不溶於水且能夠充當水性塗層之脫模材料。
在一態樣中，聚丙烯酸（PAA）-PVA混合物可用作脫模層30。混合物對腹板40之黏著力可藉由添加諸如氫氧化鈉之鹼來調整，以控制經中和羧酸基之含量。在PAA與氫氧化鈉反應時，其形成羧酸鈉鹽。已發現，PAA-PVA脫模層30對腹板40之黏著力可隨著羧酸鹽含量之含量增加而減小。以此方式，有可能藉由控制脫模層30中之羧酸鹽之量來調節多層薄膜20之脫模。
脫模層30可包括無機鹽及/或有機鹽。供用於脫模層30之適合鹽之非限制性實例包括氯化鈉、硫酸鈉、氯化鉀、乙酸鈉及其組合。鹽可修改脫模層30之特性且可減小脫模層30與腹板40之間的黏著力。
多層薄膜20可包括第一層、反射體層、第二層及額外層中之至少一者，額外層諸如吸收層及/或磁性層。額外層可位於多層薄膜20內之各種位置中。舉例而言，多層薄膜20可包括法布里-珀羅結構，諸如吸收層/介電層/反射體層/介電層/吸收層。
在所揭示之方法中，第一層及第二層可各自獨立地為有機層或複合物有機/無機層。第一層及第二層可各自獨立地包括以下中之至少一者：無色粒子、有機著色劑顏料、有機著色劑染料、無機著色粒子、有機吸收劑粒子、無機吸收劑粒子、有機高指數介電粒子、無機高指數介電粒子、有機低指數介電粒子、無機低指數介電粒子、無機金屬粒子、無機複合物及無機合金。第一層及第二層之分子及/或粒子可具有不產生米氏散射（Mie scattering）之大小，米氏散射可在分子或粒度大於入射光之波長時製造。此與在入射光之波長大於粒度時之情況的瑞立散射（Rayleigh scattering）相反。
無機高指數介電粒子及無機低指數粒子之非限制性實例包括SiO2 、TiO2 、Al2 O3 、ZrO2 、WO3 、VO5 、ITO、Ta2 O5 、CeO2 、Y2 O3 、ZnS、ZnO、In2 O3 、La2 O3 、MgO、Nd2 O3 、Pr6 O11 、Fe2 O3 、Fe3 O4 、SiO、SnO2 、FeOx、MgF2 、AlF3 、CeF3 、LaF3 、LiF、CaF2 、TiC、TiN、金屬陶瓷、類金剛石碳、金屬碳化物、金屬氮化物、金屬硼化物、金屬碳氮化物、金屬碳氧化物、金屬氮氧化物、金屬碳氮氧化物、碳化硼及其組合。
有機吸收劑粒子及無機吸收劑粒子之非限制性實例包括碳、石墨、矽、鍺、金屬陶瓷、混合於介電基質中之金屬及能夠在可見光譜中充當均一或選擇性吸收劑的其他物質。金屬陶瓷及不同合金（諸如英高鎳（Inconel）、不鏽鋼、赫史特合金（hastelloys）等）亦可因其光學及物理特性而經使用。一些金屬碳化物、金屬氮化物、金屬硼化物、金屬碳氮化物、金屬碳氧化物、金屬氮氧化物、金屬碳氮氧化物亦可因其在嵌入於有機基質中時之吸收特性而經使用。
第一層及/或第二層可包括可使用之有機單體及聚合物、丙烯酸酯（例如，甲基丙烯酸酯）、環氧樹脂、全氟烯烴、聚四氟乙烯（鐵氟龍（Teflon））、氟化乙烯丙烯（fluorinated ethylene propylene；FEP）、聚酯、聚乙烯、聚醯胺、聚醯亞胺、聚胺甲酸酯、聚丙烯酸酯、聚甲基丙烯酸酯、聚碳酸酯、聚脲、乙酸丁酸纖維素、乙酸丙酸纖維素、硝酸纖維素及其組合。
第一層及/或第二層可包括無機介電粒子以不僅改變視覺外觀且亦改變最終薄膜顏料薄片之其他功能。源於添加無機粒子之功能特性包括但不限於電性及/或磁性特性、螢光特性、升頻轉換特性（例如，將近紅外雷射光束轉換成可見光或使低能量顏色的光（諸如紅色）變成高能量顏色（如藍色或綠色））、阻燃劑及靜電耗散。
有機著色劑顏料及有機著色劑染料之非限制性實例包括苝（perylene）、哌瑞酮（perinone）、喹吖啶酮、喹吖啶酮醌（quinacridonequinone）、蒽嘧啶（anthrapyrimidine）、蒽醌（anthraquinone）、蒽嵌蒽醌（anthanthrone）、苯并咪唑酮、雙偶氮縮合、偶氮、喹諾酮、、甲亞胺、喹啉黃、靛蒽醌（indanthrone）、酞菁（phthalocyanine）、三芳基碳（triarylcarbonium）、二 、胺基蒽醌、異吲哚啉、二酮基吡咯并吡咯、硫靛（thioindigo）、噻靛（thiazineindigo）、異吲哚啉、異吲哚啉酮、皮蒽酮（pyranthrone）、異蒽酮紫（isoviolanthrone）、三芳甲烷（miyoshi methane）、三芳基甲烷、還原染料、硫染料及其混合物。
多層薄膜20可包括第一層環氧樹脂、丙烯酸酯或PVA-PET上之環氧樹脂-丙烯酸酯混合塗層。第一層可使用槽模塗佈機或刮塗塗佈機使用溶劑性調配物來塗佈。在一態樣中，此第一層可藉由諸如空氣剝離方法之所施加機械力自PET腹板40成功地剝離。
在另一態樣中，多層薄膜20可包括所有介電薄膜干涉結構，包括設計，諸如(HL)n、(LH)n、(HL)nH、(LH)nL及其組合，其中n為約1至約100之整數，諸如約2至4。L及H層各自為在所選擇設計波長處之QWOT。其他適合設計亦可藉由組合具有不同光學厚度之高及低介電塗層來獲得，且在一些設計中，一些層可不具有相同波長之QWOT。類似地，一些光學設計可為對稱的。
包括第一層、第二層、反射體層及額外層之多層薄膜20可使用沉積製程來沉積。在一態樣中，各層可使用選自槽模、凹板、微凹版、噴墨、簾式塗佈、計量棒、線棒式塗佈、柔版及平版印刷之製程獨立地應用為塗層。在另一態樣中，各層可使用選自物理氣相沉積及化學氣相沉積之真空下之製程而獨立地應用為塗層。在另一態樣中，第一層及第二層可使用選自槽模、凹板、微凹版、噴墨、簾式塗佈、計量棒、線棒式塗佈、柔版及平版印刷之製程來應用；且反射體層使用選自物理氣相沉積及化學氣相沉積之真空下之製程來應用。
多層薄膜20之反射體層可在真空下沉積。反射體層可包括具有反射特性之任何材料，諸如金屬。具有反射特性之材料之非限制性實例包括鋁、銀、銅、金、鉑、錫、鈦、鈀、鎳、鈷、銠、鈮、鉻及其化合物、組合或合金。其他適合反射合金及化合物之非限制性實例包括青銅、黃銅、氮化鈦及其類似者以及上文所列之金屬合金，諸如銀-鈀。反射體層可具有固有顏色，諸如銅、金、銀銅合金、黃銅、青銅、氮化鈦及其化合物、組合或合金。
反射體層亦可包括併入至有機基質中之具有反射特性的粒子。針對在真空下沉積之反射體層所描述的相同材料可用作至適合有機基質中之添加劑粒子。此外，銀反射體層可使用布拉希爾銀製程（Brashear silver process）之變體來沉積。
基於包括鋁之反射體層的特殊效果顏料可使用鈍化處理來進一步處理以避免鋁層之氧化。
多層薄膜20可在第一層、反射體層、第二層及/或額外層中之每一者中獨立地包括黏合劑及增黏劑材料。此等材料可直接地添加至各層或多層薄膜20之介面。適合增黏劑劑包括但不限於含有羥基、硫醇、胺、羧酸、磷酸或矽氧烷基團的分子及樹脂。
本文中所揭示之方法可包括使用乾式技術，諸如施加機械力以使多層薄膜20自腹板40及/或具有脫模層30之腹板40（若存在）脫模。在一態樣中，施加機械力可使得多層薄膜20形成可經脫模及經進一步處理的薄片。在另一態樣中，施加機械力不形成薄片但形成具有特定光學及功能性設計之無支撐薄膜裝置10。
所施加機械力可包括用以使多層薄膜20破裂以形成薄片的局部張力。在一態樣中，局部張力可由與腹板40之背面接觸的尖刀來輔助。所施加之局部張力隨後可為高速度氣體、空氣或蒸氣之施加。詳言之，空氣剝離製程可包括（1）向腹板40施加張力以誘導多層薄膜20中之裂紋以形成薄膜裝置，諸如薄片，及（2）針對多層薄膜20施加經壓縮空氣流以將多層薄膜20之薄片自腹板40吹離。
在另一態樣中，所施加機械力可包括局部超音波應用。在另一態樣中，所施加機械力可包括自腹板40直接地拉動多層薄膜20。所施加機械力亦可包括在施加振動力時拉伸多層薄膜20。所施加機械力亦可包括藉由將真空刮刀置放於非常接近多層薄膜20以將其吸離腹板40而至收集室中來進行真空抽吸以將多層薄膜20剝離腹板40。收集諸如薄片之薄膜裝置可藉由薄膜裝置傳送方法來實現，諸如圖1中所示。
經脫模多層薄膜20可經進一步處理，諸如收集及/或研磨。在一態樣中，經脫模多層薄膜20呈薄片形式，該薄片可經收集，諸如可藉由適當空氣流排放系統收集至旋風器中。可研磨經收集薄片。研磨可為選自噴射碾磨、低溫研磨、液體介質上之超音波研磨、粉碎及較高剪切力濕式研磨的製程。薄片可接著經沖洗及/或乾燥。在一態樣中，乾燥步驟並非必需的，此係因為一些鋁鈍化製程需要水，諸如十二烷基膦酸鈉、辛基膦酸、十八烷基膦酸、十二烷基磷酸鉀及使用諸如氧化矽、氧化鈦、氧化鋯、氧化鈰、氧化鋁或其組合之材料的溶膠-凝膠囊封處理。
在另一態樣中，薄膜裝置10可包括多層薄膜20及脫模層30。脫模層30可改變光學性質且可將功能併入薄膜裝置10。脫模層30可存在於多層薄膜20之一側上或可存在於多層薄膜20之兩側上，如圖2及3中所示。若脫模層30存在於多層薄膜20之兩側上，則各脫模層30可相同或不同。舉例而言，一個脫模層30可充當最初與腹板40接觸之脫模層30且第二脫模層30可向薄膜提供額外功能。
在一態樣中，脫模層30可塗佈於腹板40之兩側上以減少製造成本，如圖4中所示。首先提出之製造結構將類似於：多層薄膜/脫模層/腹板/脫模層/多層薄膜。
在另一態樣中，脫模層30及多層薄膜20之堆疊可形成於腹板40上以減少製造成本。第二次提出之製造結構將類似於：腹板/脫模層/多層薄膜/脫模層/多層薄膜20，如圖5中所示。此可提供來自腹板40之相同表面的薄片之量的兩倍。另外，首先提出（圖4）及第二次提出（圖5）之製造結構可經組合以進一步減少成本且以提高產量。
實施例1
包括三層之多層薄膜20直接地沉積於PET之腹板40上，亦即，脫模層不存在。多層薄膜20包括具有使用槽模製程沉積之有機紅色著色劑的複合物混合丙烯酸酯-環氧樹脂之第一有機層。鋁反射體層使用真空沉積塗佈於第一層上。第二層使用槽模製程塗佈於反射體層上且包括具有有機紅色著色劑之複合物混合丙烯酸酯-環氧樹脂。
將機械力施加至多層薄膜20以使其自腹板40脫模。機械力包括藉由向腹板40施加張力在尖刀與腹板40之背面接觸之輔助的情況下使多層薄膜20破裂。刀並不直接地接觸多層薄膜20以避免破壞多層薄膜20。塗佈於腹板40上之多層薄膜20接著暴露於高流速/高速度空氣流以吹離破裂之塗層。幾乎同時執行刀之施加（破裂）及空氣之施加。以此方式，多層薄膜20自腹板40脫模且形成為薄膜裝置，諸如薄片。藉由適當空氣流排放系統將薄片收集至旋風器中。薄片（亦即，經脫模多層薄膜20），使用噴射碾磨研磨技術來研磨。
實施例2
包括三層之多層薄膜20直接地沉積於具有由水溶性聚合調配物（PVA）製成之脫模層30的PET之腹板40上。多層薄膜20包括具有使用槽模製程沉積之有機紅色著色劑的複合物混合丙烯酸酯-環氧樹脂之第一有機層。鋁反射體層使用真空沉積塗佈於第一層上。第二層使用槽模製程塗佈於反射體層上且包括具有有機紅色著色劑之複合物混合丙烯酸酯-環氧樹脂。
將機械力施加至多層薄膜20以使其自腹板40脫模。機械力包括藉由向腹板40施加張力在尖刀與腹板40之背面接觸之輔助的情況下使多層薄膜20破裂。刀並不直接地接觸多層薄膜20以避免破壞多層薄膜20。塗佈於腹板40上之多層薄膜20接著暴露於高流速/高速度空氣流以吹離破裂之塗層。幾乎同時執行刀之施加（破裂）及空氣之施加。以此方式，多層薄膜20自腹板40脫模且形成為薄膜裝置，諸如薄片。藉由適當空氣流排放系統將薄片收集至旋風器中。薄片（亦即，經脫模多層薄膜20），使用噴射碾磨研磨技術來研磨。
實施例3
五層薄膜基於第三鉻層、第一硫化鋅層、鋁反射體層、第二硫化鋅層及第四鉻層形成。多層薄膜20具有硫化鋅介電層（第一層及第二層）之光學厚度以產生非綠色或慢綠色色移設計。第一層及第二層使用箱式塗佈機而真空物理氣相沉積於PET腹板40上。PET腹板40包括PVA之脫模層30（60至200 nm）。PVA脫模層30可經空氣剝離且可水溶。綠色多層薄膜20具有以下結構：8 nm Cr/368 nm ZnS/80 nm Al/368 nm ZnS/8 nm Cr。
實施例4
五層薄膜干涉基於第三鉻層、第一氟化鎂層、反射體鋁層、第二氟化鎂層及第四鉻層形成。多層薄膜20具有氟化鎂介電層（第一層及第二層）之光學厚度以產生紅色/金色色移設計。第一層及第二層卷軸式真空物理氣相沉積於PET腹板40上。PET腹板40包括具有不同厚度（60至200 nm）的PVA之脫模層30。PVA層使用K101 Control K-Hand塗佈機使用分別對應於4、12及50微米之濕潤厚度的K桿數0、2及5來進行塗佈。在所有情況下，PVA塗層調配物具有2.2%固體，PVA層之乾燥實體厚度分別為88 nm、264 nm及1100 nm。具有三個PVA脫模層30之多層可經空氣剝離且可水溶。愈厚PVA層傾向於使空氣剝離製程愈高效。紅色/金色多層薄膜20具有以下結構：10 nm Cr/250 nm MgF2 /80 nm Al/250 nm MgF2 /10 nm Cr。
根據前述描述，所屬技術領域中具有通常知識者可瞭解，本發明教示可以各種形式實施。因此，雖然已結合特定具體實例及其實例描述了此等教示，但本發明教示之實際範圍不應限於此。可在不脫離本文中之教示之範圍的情況下進行各種改變及修改。
將廣泛地解釋此範圍揭示內容。意欲本揭示內容揭示用以實現本文中所揭示之裝置、活動及機械動作的等效物、構件、系統及方法。對於所揭示之各裝置、物品、方法、構件、機械元件或機制，意欲本揭示內容在其揭示內容及教示中亦涵蓋用於實踐本文中所揭示之諸多態樣、機制及裝置的等效物、構件、系統及方法。另外，本揭示內容係關於塗層及其許多態樣、特徵及元件。此裝置在其使用及操作中可為動態的，本揭示內容意欲涵蓋使用裝置及/或製品的等效物、構件、系統及方法且其許多態樣與本文中所揭示之操作及功能的描述及精神一致。同樣，應廣泛地解釋本申請案之申請專利範圍。
本文中之發明在其許多具體實例中之描述在本質上僅為例示性的，且因此，不脫離本發明之要旨的變化意欲在本發明之範圍內。此類變化不應視為脫離本發明之精神及範圍。
本揭示內容在其若干態樣及具體實例中可自詳細描述及附圖更充分地理解，其中：
圖1說明根據本揭示內容之實例的用於執行方法之態樣的傳送方法；
圖2為根據本揭示內容之實例的薄膜裝置之截面視圖；
圖3為根據本揭示內容之實例的薄膜裝置之截面視圖；
圖4為根據本揭示內容之實例的薄膜裝置之截面視圖；及
圖5為根據本揭示內容之實例的薄膜裝置之截面視圖。
在本說明書及圖式中，相似參考標號標識相似元件。

Claims (21)

  1. 一種形成薄膜裝置之方法，其包含： 用多層薄膜塗佈腹板；及 施加機械力以使該多層薄膜自該腹板脫模。
  2. 如請求項1所述之方法，其中該多層薄膜包括3層。
  3. 如請求項1所述之方法，其中該多層薄膜包括法布里-珀羅結構（Fabry-Perot structure）。
  4. 一種形成薄膜裝置之方法，其包含： 用第一層塗佈腹板； 用反射體層塗佈該第一層； 用第二層塗佈該反射體層以形成多層薄膜；及 藉由乾式技術使該多層薄膜自該腹板脫模。
  5. 如請求項4所述之方法，其進一步包含收集該經脫模多層薄膜。
  6. 如請求項4所述之方法，其進一步包含研磨該經脫模多層薄膜。
  7. 如請求項4所述之方法，其中該第一層及該第二層各自獨立地為有機層或複合有機/無機層。
  8. 如請求項4所述之方法，其中該乾式技術為產生局部張力以使該多層薄膜破裂，隨後施加高速氣體、空氣或蒸氣所施加機械力。
  9. 如請求項4所述之方法，其中該乾式技術為局部超音波應用所施加機械力。
  10. 如請求項4所述之方法，其中該乾式技術為自該腹板直接地拉動該多層薄膜所施加機械力。
  11. 如請求項4所述之方法，其中該乾式技術為在施加振動力時拉伸該多層薄膜所施加機械力。
  12. 如請求項4所述之方法，其中該乾式技術為藉由緊密鄰近置放真空刮刀來進行真空抽吸以將該多層薄膜剝離該腹板所施加機械力。
  13. 如請求項4所述之方法，其中各塗層使用選自以下之製程獨立地應用：槽模、凹板、微凹版、噴墨、簾式塗佈、計量棒、線棒式塗佈、柔版及平版印刷。
  14. 如請求項4所述之方法，其中各塗層係使用選自物理氣相沉積及化學氣相沉積之真空下之製程獨立地應用。
  15. 如請求項4所述之方法，其中該第一層及該第二層係使用選自槽模、凹板、微凹版、噴墨、簾式塗佈、計量棒、線棒式塗佈、柔版及平版印刷的製程來應用；且該反射體層係使用選自物理氣相沉積及化學氣相沉積之真空下之製程來應用。
  16. 如請求項6所述之方法，其中該研磨為選自以下之製程：噴射碾磨、低溫研磨、液體介質上之超音波研磨、粉碎及較高剪切力濕式研磨。
  17. 如請求項4所述之方法，其中該第一層及該第二層各自獨立地包括以下至少一者：無色粒子、有機著色劑顏料、有機著色劑染料、無機著色粒子、有機吸收劑粒子、無機吸收劑粒子、有機高指數介電粒子、無機高指數介電粒子、有機低指數介電粒子、無機低指數介電粒子、無機金屬粒子、無機複合物及無機合金。
  18. 一種形成薄膜裝置之方法，其包含： 向腹板提供水溶性脫模層； 用多層薄膜塗佈該水溶性脫模層；及 施加機械力以使該多層薄膜自該腹板脫模。
  19. 如請求項18所述之方法，其中該多層薄膜包括法布里-珀羅結構。
  20. 如請求項18所述之方法，其中該多層薄膜包括塗佈於該水溶性脫模層上之第一層； 用反射體層塗佈該第一層；及 用第二層塗佈該反射體層以形成該多層薄膜。
  21. 如請求項18所述之方法，其中該脫模層係選自聚乙烯醇調配物、多醣調配物、聚丙烯酸調配物、聚乙酸乙烯酯調配物、聚乙烯吡咯啶酮調配物、羧甲基纖維素調配物及其組合。
TW108107838A 2018-03-14 2019-03-08 用以製造薄膜裝置的無溶劑方法 TWI705901B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862643038P 2018-03-14 2018-03-14
US62/643,038 2018-03-14

Publications (2)

Publication Number Publication Date
TW201938366A true TW201938366A (zh) 2019-10-01
TWI705901B TWI705901B (zh) 2020-10-01

Family

ID=65801903

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108107838A TWI705901B (zh) 2018-03-14 2019-03-08 用以製造薄膜裝置的無溶劑方法

Country Status (8)

Country Link
US (1) US20190283070A1 (zh)
EP (1) EP3540014A1 (zh)
JP (1) JP7003078B2 (zh)
KR (1) KR102461433B1 (zh)
CN (1) CN110271262A (zh)
CA (1) CA3036194C (zh)
MX (1) MX2019002665A (zh)
TW (1) TWI705901B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110749945B (zh) * 2019-09-27 2020-10-27 宁波融光纳米科技有限公司 一种光学薄膜、结构色颜料及光学薄膜的制备方法
CN117162638B (zh) * 2023-11-02 2023-12-29 山东森荣新材料股份有限公司 膨体聚四氟乙烯复合保温膜的制备方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3138475A (en) * 1959-11-14 1964-06-23 Jenaer Glaswerk Schott & Gen Filler and meterial with an artificial pearly gloss and method of producing the same
US5135812A (en) * 1979-12-28 1992-08-04 Flex Products, Inc. Optically variable thin film flake and collection of the same
JPS6116849A (ja) * 1984-07-04 1986-01-24 尾池工業株式会社 虹彩箔
NZ218573A (en) * 1985-12-23 1989-11-28 Optical Coating Laboratory Inc Optically variable inks containing flakes
EP0240952A3 (en) * 1986-04-10 1989-02-08 Sumitomo Chemical Company, Limited A method for producing a flaky material
US4941865A (en) * 1988-10-24 1990-07-17 Packaging Concepts, Inc. Method and apparatus for forming metallized packaging material
US4879140A (en) * 1988-11-21 1989-11-07 Deposition Sciences, Inc. Method for making pigment flakes
KR100253774B1 (ko) * 1991-10-18 2000-05-01 플레믹 크리스티안 착색 및 피복된 판상 안료
TW245772B (zh) * 1992-05-19 1995-04-21 Akzo Nv
US5968664A (en) * 1997-11-11 1999-10-19 Mitsubishi Polyester Film, Llc Polymeric coated substrates for producing optically variable products
EP0984043A1 (en) * 1998-08-31 2000-03-08 Sicpa Holding S.A. Optically variable pigments providing a colour shift between two distinct colours, coating composition comprising the same, method for producing the same and substrate coated with the coating composition
DE69913982T2 (de) * 1998-10-23 2004-12-09 Avery Dennison Corp., Pasadena Verfahren zur herstellung von metallplättchen
US20030178734A1 (en) * 1998-10-23 2003-09-25 Karl Josephy Process for making angstrom scale and high aspect functional platelets
US6157489A (en) * 1998-11-24 2000-12-05 Flex Products, Inc. Color shifting thin film pigments
DE19906589A1 (de) 1999-02-17 2000-08-24 Basf Ag Cholesterisches Schichtmaterial und Verfahren zu dessen Herstellung
US7667895B2 (en) * 1999-07-08 2010-02-23 Jds Uniphase Corporation Patterned structures with optically variable effects
US6545809B1 (en) * 1999-10-20 2003-04-08 Flex Products, Inc. Color shifting carbon-containing interference pigments
EP1239307A1 (en) * 2001-03-09 2002-09-11 Sicpa Holding S.A. Magnetic thin film interference device
US6749936B2 (en) 2001-12-20 2004-06-15 Flex Products, Inc. Achromatic multilayer diffractive pigments and foils
US6902807B1 (en) 2002-09-13 2005-06-07 Flex Products, Inc. Alignable diffractive pigment flakes
US6692830B2 (en) * 2001-07-31 2004-02-17 Flex Products, Inc. Diffractive pigment flakes and compositions
US7438245B2 (en) * 2004-07-13 2008-10-21 Ricoh Company, Ltd. Milling and classifying apparatus, collision mill, air classifier, toner, and method for producing toner
GB0516968D0 (en) * 2005-08-18 2005-09-28 Dunwilco 1198 Ltd Process
DE102007034928A1 (de) * 2007-07-24 2009-01-29 Eckart Gmbh Mehrschichtige metallische Effektpigmente, Verfahren zu deren Herstellung und Verwendung
JP5579363B2 (ja) 2007-11-26 2014-08-27 ジェイディーエス ユニフェイズ コーポレーション 内密セキュリティ用途向け顔料フレークの周囲のフレームまたは境界の提供
EP2247440B1 (en) * 2008-03-04 2014-11-26 Vast Films, Ltd. Method for producing thin flake particles
DE102009006550A1 (de) * 2009-01-28 2010-07-29 Eckart Gmbh PVD-Metalleffektpigment mit Gradient an nanoskaligen Metallteilchen, Verfahren zu deren Herstellung und Verwendung derselben
US10023000B2 (en) * 2014-02-13 2018-07-17 Sicpa Holding Sa Security threads and stripes

Also Published As

Publication number Publication date
KR20190108505A (ko) 2019-09-24
US20190283070A1 (en) 2019-09-19
EP3540014A1 (en) 2019-09-18
CA3036194C (en) 2023-09-26
CN110271262A (zh) 2019-09-24
CA3036194A1 (en) 2019-09-14
JP2019174799A (ja) 2019-10-10
TWI705901B (zh) 2020-10-01
KR102461433B1 (ko) 2022-10-31
MX2019002665A (es) 2019-09-16
JP7003078B2 (ja) 2022-01-20

Similar Documents

Publication Publication Date Title
EP3393797B1 (en) Acrylic polyvinyl acetal graphic films
CN107407753B (zh) 近红外线遮蔽膜、其制造方法和胶粘剂组合物
TWI705901B (zh) 用以製造薄膜裝置的無溶劑方法
JP6163710B2 (ja) 防汚フィルムおよびその製造方法
JPWO2013111735A1 (ja) 光学フィルム
JP2019502574A (ja) 第２の層を備えたアクリルポリビニルアセタールフィルム
TW201509686A (zh) 製備結構性層合黏合件之方法
WO2013151136A1 (ja) 赤外遮蔽フィルムおよび赤外遮蔽体
US10287459B2 (en) Adhesive printable films
CN105308147A (zh) 具有防雾性能的柔性遮光板和防雾涂料组合物
JP2020115157A (ja) 光反射フィルム及び光反射フィルムの製造方法
JPWO2015115329A1 (ja) 光学フィルム
CN107921751A (zh) 功能性片材
CA3208589A1 (en) Solvent-less method to manufacture thin film devices
JP2023123579A (ja) 有機層を含む多層物品
JP6724912B2 (ja) 光学反射フィルム
JP6520560B2 (ja) 積層反射フィルムおよび積層反射体
JP6326780B2 (ja) 窓貼り用フィルム
JP2018092039A (ja) 光学反射フィルム
CN113461985A (zh) 高亮度高附着性低角度依赖的结构色薄膜制备方法
JP6683249B2 (ja) 光学反射フィルム
JP2023085732A (ja) ガスバリアフィルムおよび積層体
RU2494875C1 (ru) Защитное покрытие для энергосберегающих пленок
JPH1134593A (ja) 多段プレス用転写材
KR100529753B1 (ko) 금속 박편 제조용 폴리에스테르 필름 및 이의 제조 방법