JP2013545700A - ナノ構造体デバイス及びナノ構造体の製造方法 - Google Patents
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Abstract
Description
以下の例は本発明をさらに説明するものであり、本発明の範囲を限定するものではない。
本発明の可能な用途は、集積回路における相互接続の形成である。相互接続は、まず底層が比較的小さな粒子サイズを有する、基材の表面上に導電性底層を付着させることにより製造される。次に、大きな粒子サイズを有する触媒層を付着させ、次いで導電性ナノ構造体を成長させる。この成長したナノ構造体は絶縁層で被覆され、次いでエッチング工程によりナノ構造体の先端が露出される。ナノ構造体の露出された先端は導電性材料と接触し、相互接続デバイスの頂部接触を形成する。
Claims (15)
- 基材(102)上に複数のナノ構造体(101)を製造する方法であって、以下の工程:
基材(102)の上面上に底層(103)を付着させること、この底層(103)は第一の平均粒子サイズを有する粒子を含む;
底層(103)の上面上に触媒層(104)を付着させること、この触媒層(104)は第一の平均粒子サイズとは異なる第二の平均粒子サイズを有する粒子を含み、それにより前記底層(103)及び前記触媒層(104)を含む積層体を形成する;
この積層体を、ナノ構造体(101)が形成する温度に加熱すること、及び
反応体が触媒層(104)と接触するように、反応体を含むガスを提供すること
を含む方法。 - 前記第一の平均粒子サイズ及び前記第二の平均粒子サイズのうち最も大きなものが、第一の平均粒子サイズ及び第二の平均粒子サイズの最も小さいものよりも少なくとも10%大きい、請求項1記載の方法。
- 前記第一の平均粒子サイズが前記第二の平均粒子サイズよりも小さい、請求項1又は2記載の方法。
- 触媒層(104)が第一の材料組成を有し、底層(103)がこの第一の材料組成とは異なる第二の材料組成を有する、請求項1〜3のいずれか1項に記載の方法。
- 以下の工程:
触媒層を付着させる間に、底層(103)と触媒層(104)の少なくとも1つに少なくとも1種の不純物元素を導入することをさらに含む、請求項1〜4のいずれか1項に記載の方法。 - 触媒層を付着させた後に、底層(103)と触媒層(104)の少なくとも1つに少なくとも1種の不純物元素を導入することをさらに含む、請求項1〜5のいずれか1項に記載の方法。
- ナノ構造体の成長の前に前記触媒層(104)をパターン化することの工程をさらに含む、請求項1〜6のいずれか1項に記載の方法。
- より小さな平均粒子サイズを有する前記底層(103)及び触媒層(104)の1つがスパッタリングにより付着されている、請求項1〜7のいずれか1項に記載の方法。
- より大きな平均粒子サイズを有する前記底層(103)及び触媒層(104)の1つが蒸着により付着されている、請求項1〜8のいずれか1項に記載の方法。
- 基材(102);
基材(102)の上面上に配置されている底層(103)、この底層(103)は第一の平均粒子サイズを有する粒子を含む;
底層(103)の上面上に配置されている触媒層(104)、この触媒層(104)は第一の平均粒子サイズとは異なる第二の平均粒子サイズを有する粒子を含み、それにより積層体を形成する;
前記触媒層(104)上に配置された複数のナノ構造体(101)、このナノ構造体(101)の各々は
前記触媒層(104)に隣接したベース(401);
先端(403);及び
前記ベース(401)と先端(403)の間の本体(402)
を含む
を含むナノ構造体デバイス(105)。 - 前記底層(103)及び触媒層(104)がこの底層(103)と触媒層(104)の間の界面において互い混じり合っている、請求項10記載のナノ構造体デバイス。
- 触媒層(104)が第一の材料組成を有し、底層(103)がこの第一の材料組成とは異なる第二の材料組成を有する、請求項10又は11記載のナノ構造体デバイス。
- 前記先端(403)が前記触媒層(104)からの材料を含む、請求項10〜12のいずれか1項に記載のナノ構造体デバイス。
- 小さな平均粒子サイズを有する材料が大きな平均粒子サイズを有する材料よりも高い融点を有する、請求項12又は13記載のナノ構造体デバイス。
- 前記ナノ構造体(101)の本体(402)がカーボンを含む、請求項10〜14のいずれか1項に記載のナノ構造体デバイス。
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