JP2013539301A5 - - Google Patents
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- Publication number
- JP2013539301A5 JP2013539301A5 JP2013530313A JP2013530313A JP2013539301A5 JP 2013539301 A5 JP2013539301 A5 JP 2013539301A5 JP 2013530313 A JP2013530313 A JP 2013530313A JP 2013530313 A JP2013530313 A JP 2013530313A JP 2013539301 A5 JP2013539301 A5 JP 2013539301A5
- Authority
- JP
- Japan
- Prior art keywords
- metallization layer
- conductive vias
- transmission line
- portions
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001465 metallisation Methods 0.000 claims 74
- 230000005540 biological transmission Effects 0.000 claims 19
- 239000003990 capacitor Substances 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 10
- 239000012212 insulator Substances 0.000 claims 9
- 229910052751 metal Inorganic materials 0.000 claims 8
- 239000002184 metal Substances 0.000 claims 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/888,208 | 2010-09-22 | ||
| US12/888,208 US8476687B2 (en) | 2010-09-22 | 2010-09-22 | Low impedance transmisson line |
| PCT/US2011/052767 WO2012040468A2 (en) | 2010-09-22 | 2011-09-22 | Low impedance transmission line |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013539301A JP2013539301A (ja) | 2013-10-17 |
| JP2013539301A5 true JP2013539301A5 (https=) | 2014-10-16 |
| JP5854440B2 JP5854440B2 (ja) | 2016-02-09 |
Family
ID=45816957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013530313A Active JP5854440B2 (ja) | 2010-09-22 | 2011-09-22 | 低インピーダンス送信ライン |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8476687B2 (https=) |
| JP (1) | JP5854440B2 (https=) |
| CN (1) | CN103098210B (https=) |
| WO (1) | WO2012040468A2 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9166270B2 (en) | 2012-11-21 | 2015-10-20 | Texas Instruments Incorporated | Balun with integrated decoupling as ground shield |
| CN103337682B (zh) * | 2013-07-24 | 2015-03-25 | 东南大学 | 一种宽带、低损耗、高平衡度的片上巴伦 |
| SG10201803274QA (en) * | 2013-10-30 | 2018-06-28 | Nestec Sa | Machine and system for preparing a cooled food product with aerated or whipped texture in controlled manner |
| CN105938931A (zh) * | 2016-02-29 | 2016-09-14 | 中国电力科学研究院 | 一种平衡不平衡转换器及其设计方法 |
| CN105789803A (zh) * | 2016-02-29 | 2016-07-20 | 中国电力科学研究院 | 一种平衡不平衡转换器及其设计方法 |
| US10692967B1 (en) * | 2018-12-04 | 2020-06-23 | Analog Devices, Inc. | High density self-routing metal-oxide-metal capacitor |
| CN115528024A (zh) * | 2021-06-25 | 2022-12-27 | 瑞昱半导体股份有限公司 | 紧凑的电容结构 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5281769A (en) | 1990-11-05 | 1994-01-25 | Nippon Telegraph And Telephone Corporation | Dewall plating technique |
| JP2001111408A (ja) | 1999-10-08 | 2001-04-20 | Hitachi Ltd | 高速信号伝送配線実装構造 |
| US6714113B1 (en) * | 2000-11-14 | 2004-03-30 | International Business Machines Corporation | Inductor for integrated circuits |
| JP2005027005A (ja) | 2003-07-02 | 2005-01-27 | Matsushita Electric Ind Co Ltd | 高周波信号発生装置 |
| US7414275B2 (en) * | 2005-06-24 | 2008-08-19 | International Business Machines Corporation | Multi-level interconnections for an integrated circuit chip |
| EP1929285B1 (en) * | 2005-09-30 | 2017-02-22 | Silicon Laboratories Inc. | An integrated electronic sensor and method for its production |
| JP4799992B2 (ja) | 2005-10-18 | 2011-10-26 | 学校法人明星学苑 | 半導体装置及び半導体装置の特性調整方法 |
| JP2007115357A (ja) * | 2005-10-21 | 2007-05-10 | Matsushita Electric Ind Co Ltd | データ記録装置及びデータ記録方法 |
| JP5103232B2 (ja) * | 2008-03-18 | 2012-12-19 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
-
2010
- 2010-09-22 US US12/888,208 patent/US8476687B2/en active Active
-
2011
- 2011-09-22 CN CN201180040984.0A patent/CN103098210B/zh active Active
- 2011-09-22 JP JP2013530313A patent/JP5854440B2/ja active Active
- 2011-09-22 WO PCT/US2011/052767 patent/WO2012040468A2/en not_active Ceased
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