JP2013539203A5 - - Google Patents

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Publication number
JP2013539203A5
JP2013539203A5 JP2013518671A JP2013518671A JP2013539203A5 JP 2013539203 A5 JP2013539203 A5 JP 2013539203A5 JP 2013518671 A JP2013518671 A JP 2013518671A JP 2013518671 A JP2013518671 A JP 2013518671A JP 2013539203 A5 JP2013539203 A5 JP 2013539203A5
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JP
Japan
Prior art keywords
pair
door
movement
port
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013518671A
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English (en)
Japanese (ja)
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JP5732132B2 (ja
JP2013539203A (ja
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Publication date
Priority claimed from US12/828,236 external-priority patent/US8870516B2/en
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Publication of JP2013539203A publication Critical patent/JP2013539203A/ja
Publication of JP2013539203A5 publication Critical patent/JP2013539203A5/ja
Application granted granted Critical
Publication of JP5732132B2 publication Critical patent/JP5732132B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013518671A 2010-06-30 2011-06-29 ポートドア位置決め装置及び関連の方法 Active JP5732132B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/828,236 2010-06-30
US12/828,236 US8870516B2 (en) 2010-06-30 2010-06-30 Port door positioning apparatus and associated methods
PCT/US2011/042455 WO2012003240A2 (en) 2010-06-30 2011-06-29 Port door positioning apparatus and associated methods

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015081055A Division JP6101302B2 (ja) 2010-06-30 2015-04-10 ポートドア位置決め装置及び関連の方法

Publications (3)

Publication Number Publication Date
JP2013539203A JP2013539203A (ja) 2013-10-17
JP2013539203A5 true JP2013539203A5 (enExample) 2015-03-12
JP5732132B2 JP5732132B2 (ja) 2015-06-10

Family

ID=45398872

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013518671A Active JP5732132B2 (ja) 2010-06-30 2011-06-29 ポートドア位置決め装置及び関連の方法
JP2015081055A Active JP6101302B2 (ja) 2010-06-30 2015-04-10 ポートドア位置決め装置及び関連の方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015081055A Active JP6101302B2 (ja) 2010-06-30 2015-04-10 ポートドア位置決め装置及び関連の方法

Country Status (5)

Country Link
US (2) US8870516B2 (enExample)
JP (2) JP5732132B2 (enExample)
KR (1) KR101545067B1 (enExample)
CN (2) CN106024680B (enExample)
WO (1) WO2012003240A2 (enExample)

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JP2912315B1 (ja) 1998-01-12 1999-06-28 鹿児島日本電気株式会社 蛍光表示管の排気装置
US6918731B2 (en) 2001-07-02 2005-07-19 Brooks Automation, Incorporated Fast swap dual substrate transport for load lock
JP5736686B2 (ja) 2010-08-07 2015-06-17 シンフォニアテクノロジー株式会社 ロードポート
JP5729148B2 (ja) * 2011-06-07 2015-06-03 東京エレクトロン株式会社 基板搬送容器の開閉装置、蓋体の開閉装置及び半導体製造装置
WO2013005363A1 (ja) 2011-07-06 2013-01-10 平田機工株式会社 容器開閉装置
JP5993252B2 (ja) * 2012-09-06 2016-09-14 東京エレクトロン株式会社 蓋体開閉装置及びこれを用いた熱処理装置、並びに蓋体開閉方法
CN103214474B (zh) * 2013-05-02 2016-04-27 南开大学 一类含4,5-二氢噻唑醇酸酯的5-甲基-1,2,3-噻二唑衍生物及其制备方法和用途
US20150345810A1 (en) * 2014-05-30 2015-12-03 Denso International America, Inc. Dual layer door
DK178586B1 (en) * 2015-02-02 2016-07-25 Vestas Wind Sys As Wind turbine access panel and method for securing same
KR101695948B1 (ko) * 2015-06-26 2017-01-13 주식회사 테라세미콘 기판처리 시스템
USD811627S1 (en) 2016-06-16 2018-02-27 Curtis Alan Roys LED lamp
JP6414535B2 (ja) * 2015-10-28 2018-10-31 株式会社ダイフク 収納容器
US10622236B2 (en) * 2017-08-30 2020-04-14 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for handling wafer carrier doors
JP6697428B2 (ja) * 2017-11-01 2020-05-20 ファナック株式会社 ファンユニットを備えるモータ駆動装置
KR101831202B1 (ko) 2017-12-20 2018-02-22 주식회사 싸이맥스 로드포트의 포트도어 구동장치
CN108005549B (zh) * 2018-01-12 2024-03-26 珠海市优氧健康产业有限公司 一种健康舱舱门密封结构
CN109615781B (zh) * 2018-12-17 2023-09-19 航天信息股份有限公司 自动出货装置
TW202312331A (zh) * 2021-07-06 2023-03-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 卡匣蓋開啟裝置
US12077938B2 (en) * 2021-10-12 2024-09-03 Caterpillar Inc. Secondary control system and method for mounting with service orientation

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US659699A (en) * 1900-01-29 1900-10-16 Harold Rowntree Door mechanism.
US4367915A (en) * 1978-06-29 1983-01-11 Georges Michael P Automatic microscope slide
JPH05109863A (ja) * 1991-10-17 1993-04-30 Shinko Electric Co Ltd 機械式インターフエース装置
US5302120A (en) 1992-06-15 1994-04-12 Semitool, Inc. Door assembly for semiconductor processor
DE59611078D1 (de) * 1995-03-28 2004-10-14 Brooks Automation Gmbh Be- und Entladestation für Halbleiterbearbeitungsanlagen
US6082949A (en) * 1996-10-11 2000-07-04 Asyst Technologies, Inc. Load port opener
US6109395A (en) * 1997-07-14 2000-08-29 Vertical Mobility, Llc Convertible lift mechanism having a scissor lift linkage
JPH11145269A (ja) 1997-11-11 1999-05-28 Starlite Co Ltd 密閉式基板用カセット及びそれを用いたデバイスの製造方法
US6106213A (en) 1998-02-27 2000-08-22 Pri Automation, Inc. Automated door assembly for use in semiconductor wafer manufacturing
US6178361B1 (en) * 1998-11-20 2001-01-23 Karl Suss America, Inc. Automatic modular wafer substrate handling device
WO2000051921A1 (en) * 1999-03-05 2000-09-08 Pri Automation, Inc. Material handling and transport system and process
TW484750U (en) * 2000-09-08 2002-04-21 Ind Tech Res Inst Opening/closing device for front-opened type wafer box
US6530736B2 (en) * 2001-07-13 2003-03-11 Asyst Technologies, Inc. SMIF load port interface including smart port door
US6883274B2 (en) * 2001-11-09 2005-04-26 Knaack Manufacturing Company Device and method for opening a door
KR100729699B1 (ko) * 2003-05-15 2007-06-19 티디케이가부시기가이샤 클린 박스 개폐 장치를 구비하는 클린 장치
KR100589702B1 (ko) 2004-08-05 2006-06-19 (주)아이씨디 진공챔버용 도어 조립체
FR2874744B1 (fr) * 2004-08-30 2006-11-24 Cit Alcatel Interface sous vide entre une boite de mini-environnement et un equipement
JP4012190B2 (ja) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 密閉容器の蓋開閉システム及び開閉方法
JP2009070868A (ja) 2007-09-11 2009-04-02 Panasonic Corp 基板収納用容器
JP2009088437A (ja) * 2007-10-03 2009-04-23 Tokyo Electron Ltd 被処理体の導入ポート機構及び処理システム
JP4624458B2 (ja) * 2008-11-11 2011-02-02 Ｔｄｋ株式会社 密閉容器及び該密閉容器の蓋開閉システム
JP4748816B2 (ja) * 2008-11-28 2011-08-17 Ｔｄｋ株式会社 密閉容器の蓋開閉システム

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