JP2013539040A5 - - Google Patents

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Publication number
JP2013539040A5
JP2013539040A5 JP2013531587A JP2013531587A JP2013539040A5 JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5 JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5
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JP
Japan
Prior art keywords
conductive electrode
dielectric layer
sensor element
conductive
shitsupo
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JP2013531587A
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English (en)
Japanese (ja)
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JP5932806B2 (ja
JP2013539040A (ja
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Priority claimed from PCT/US2011/049145 external-priority patent/WO2012044419A1/en
Publication of JP2013539040A publication Critical patent/JP2013539040A/ja
Publication of JP2013539040A5 publication Critical patent/JP2013539040A5/ja
Application granted granted Critical
Publication of JP5932806B2 publication Critical patent/JP5932806B2/ja
Expired - Fee Related legal-status Critical Current
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JP2013531587A 2010-09-30 2011-08-25 センサー素子、その製造方法、及びそれを含むセンサー装置 Expired - Fee Related JP5932806B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US38813010P 2010-09-30 2010-09-30
US61/388,130 2010-09-30
PCT/US2011/049145 WO2012044419A1 (en) 2010-09-30 2011-08-25 Sensor element, method of making the same, and sensor device including the same

Publications (3)

Publication Number Publication Date
JP2013539040A JP2013539040A (ja) 2013-10-17
JP2013539040A5 true JP2013539040A5 (enExample) 2014-09-25
JP5932806B2 JP5932806B2 (ja) 2016-06-08

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Family Applications (1)

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JP2013531587A Expired - Fee Related JP5932806B2 (ja) 2010-09-30 2011-08-25 センサー素子、その製造方法、及びそれを含むセンサー装置

Country Status (5)

Country Link
US (1) US9341588B2 (enExample)
EP (1) EP2622334B1 (enExample)
JP (1) JP5932806B2 (enExample)
CN (1) CN103154714A (enExample)
WO (1) WO2012044419A1 (enExample)

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CN103154712B (zh) 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
US9429537B2 (en) 2011-04-13 2016-08-30 3M Innovative Properties Company Method of detecting volatile organic compounds

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