JP5932806B2 - センサー素子、その製造方法、及びそれを含むセンサー装置 - Google Patents

センサー素子、その製造方法、及びそれを含むセンサー装置 Download PDF

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JP5932806B2
JP5932806B2 JP2013531587A JP2013531587A JP5932806B2 JP 5932806 B2 JP5932806 B2 JP 5932806B2 JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013531587 A JP2013531587 A JP 2013531587A JP 5932806 B2 JP5932806 B2 JP 5932806B2
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conductive electrode
sensor element
dielectric layer
layer
conductive
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JP2013539040A5 (enExample
JP2013539040A (ja
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マイケル シー． パラゾット，
マイケル シー． パラゾット，
ステファン エイチ． グリスカ，
ステファン エイチ． グリスカ，
ツチェン リー，
ツチェン リー，
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nanotechnology (AREA)
  • Power Engineering (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2013531587A 2010-09-30 2011-08-25 センサー素子、その製造方法、及びそれを含むセンサー装置 Expired - Fee Related JP5932806B2 (ja)

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Application Number Priority Date Filing Date Title
US38813010P 2010-09-30 2010-09-30
US61/388,130 2010-09-30
PCT/US2011/049145 WO2012044419A1 (en) 2010-09-30 2011-08-25 Sensor element, method of making the same, and sensor device including the same

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JP2013539040A JP2013539040A (ja) 2013-10-17
JP2013539040A5 JP2013539040A5 (enExample) 2014-09-25
JP5932806B2 true JP5932806B2 (ja) 2016-06-08

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US (1) US9341588B2 (enExample)
EP (1) EP2622334B1 (enExample)
JP (1) JP5932806B2 (enExample)
CN (1) CN103154714A (enExample)
WO (1) WO2012044419A1 (enExample)

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Publication number Publication date
EP2622334A1 (en) 2013-08-07
US20130186177A1 (en) 2013-07-25
EP2622334B1 (en) 2016-05-25
US9341588B2 (en) 2016-05-17
CN103154714A (zh) 2013-06-12
WO2012044419A1 (en) 2012-04-05
JP2013539040A (ja) 2013-10-17

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