CN103154714A - 传感器元件及其制备方法和包括所述传感器元件的传感器装置 - Google Patents

传感器元件及其制备方法和包括所述传感器元件的传感器装置 Download PDF

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Publication number
CN103154714A
CN103154714A CN2011800475842A CN201180047584A CN103154714A CN 103154714 A CN103154714 A CN 103154714A CN 2011800475842 A CN2011800475842 A CN 2011800475842A CN 201180047584 A CN201180047584 A CN 201180047584A CN 103154714 A CN103154714 A CN 103154714A
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China
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conductive electrode
sensor element
dielectric layer
carbon nano
conductive
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CN2011800475842A
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Chinese (zh)
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M·C·帕拉佐托
S·H·格里斯卡
李子成
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nanotechnology (AREA)
  • Power Engineering (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN2011800475842A 2010-09-30 2011-08-25 传感器元件及其制备方法和包括所述传感器元件的传感器装置 Pending CN103154714A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US38813010P 2010-09-30 2010-09-30
US61/388,130 2010-09-30
PCT/US2011/049145 WO2012044419A1 (en) 2010-09-30 2011-08-25 Sensor element, method of making the same, and sensor device including the same

Publications (1)

Publication Number Publication Date
CN103154714A true CN103154714A (zh) 2013-06-12

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Country Status (5)

Country Link
US (1) US9341588B2 (enExample)
EP (1) EP2622334B1 (enExample)
JP (1) JP5932806B2 (enExample)
CN (1) CN103154714A (enExample)
WO (1) WO2012044419A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103698360A (zh) * 2013-12-13 2014-04-02 苏州纳格光电科技有限公司 半导体气体传感器
CN105578969A (zh) * 2013-09-26 2016-05-11 3M创新有限公司 适用于检测在皮肤部位处的醇残留的蒸汽传感器
CN109546890A (zh) * 2019-01-18 2019-03-29 清华大学 湿气发电方法及装置

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009006318A1 (en) 2007-06-29 2009-01-08 Artificial Muscle, Inc. Electroactive polymer transducers for sensory feedback applications
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
JP2014513510A (ja) 2011-03-01 2014-05-29 バイエル・インテレクチュアル・プロパティ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 変形可能なポリマー装置及び変形可能なポリマーフィルムを作るための自動化された製造プロセス
US9195058B2 (en) 2011-03-22 2015-11-24 Parker-Hannifin Corporation Electroactive polymer actuator lenticular system
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
JP5908069B2 (ja) 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子
EP2721393B1 (en) 2011-06-16 2018-02-28 3M Innovative Properties Company Surface plasmon resonance sensor element and sensor including the same
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
WO2013142552A1 (en) 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
EP2856128B1 (en) 2012-05-29 2016-09-14 3M Innovative Properties Company Humidity sensor and sensor element
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
EP2864770B1 (en) 2012-06-25 2017-09-27 3M Innovative Properties Company Sensor element, method of making, and method of using the same
US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
US9317068B2 (en) 2012-09-24 2016-04-19 Donaldson Company, Inc. Venting assembly and microporous membrane composite
TW201436311A (zh) * 2012-10-16 2014-09-16 拜耳智慧財產有限公司 金屬化介電膜之方法
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
US10161896B2 (en) * 2014-02-27 2018-12-25 3M Innovative Properties Company Sub-ambient temperature vapor sensor and method of use
KR20170033865A (ko) * 2014-07-22 2017-03-27 브레우어 사이언스 인코포레이션 박막형 저항방식 센서
CN107205648B (zh) * 2014-12-18 2020-10-27 皇家飞利浦有限公司 水合状态指示器
US10083883B2 (en) * 2016-06-20 2018-09-25 Applied Materials, Inc. Wafer processing equipment having capacitive micro sensors
GB2568196B (en) * 2016-09-09 2022-04-20 Hokuriku Elect Ind Capacitive gas sensor
US10209186B2 (en) * 2017-01-03 2019-02-19 International Business Machines Corporation Chemical sensing based on plasmon resonance in carbon nanotubes
CN111225604A (zh) * 2017-06-20 2020-06-02 穆罕默德.阿波拉哈德 用于对癌症可疑区域进行体外和体内检测的实时无标记分析仪
EP3762391A4 (en) 2018-03-08 2022-08-03 ExxonMobil Technology and Engineering Company SPIROCENTRIC COMPOUNDS AND POLYMERS THEREOF
WO2020036171A1 (ja) * 2018-08-17 2020-02-20 富士フイルム株式会社 センサ
WO2022101913A2 (en) * 2020-11-11 2022-05-19 B. G. Negev Technologies And Applications Ltd., At Ben-Gurion University Device and methods for detecting pathogens

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006099518A2 (en) * 2005-03-15 2006-09-21 The Goverment of the United States of America, as represented by the Secretary of the Navy Capacitance-based sensing of molecular absorbates on the surface of single walled carbon nanotubes
CN101815936A (zh) * 2007-10-05 2010-08-25 3M创新有限公司 包含微孔聚合物的有机化学传感器及使用方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9704329D0 (sv) * 1997-11-25 1997-11-25 Siemens Elema Ab Gasmätare
US6085576A (en) * 1998-03-20 2000-07-11 Cyrano Sciences, Inc. Handheld sensing apparatus
JP2003227806A (ja) * 2002-02-01 2003-08-15 Kansai Research Institute 気体物質検知方法
US20070048180A1 (en) 2002-09-05 2007-03-01 Gabriel Jean-Christophe P Nanoelectronic breath analyzer and asthma monitor
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
US7217354B2 (en) * 2003-08-29 2007-05-15 Ut-Battelle, Llc Method and apparatus for detection of chemical vapors
GB0322832D0 (en) 2003-09-30 2003-10-29 Epigem Ltd Sensor platforms utilising nanoporous membranes
US6997039B2 (en) 2004-02-24 2006-02-14 Clemson University Carbon nanotube based resonant-circuit sensor
WO2005095924A1 (en) * 2004-03-31 2005-10-13 Agency For Science, Technology And Research A sensor for measuring gas permeability of a test material
US8052932B2 (en) 2006-12-22 2011-11-08 Research Triangle Institute Polymer nanofiber-based electronic nose
US7837844B2 (en) * 2005-04-26 2010-11-23 Seacoast Science, Inc. Interdigitated chemical sensors, and methods of making and using the same
US7208327B2 (en) * 2005-05-25 2007-04-24 Intel Corporation Metal oxide sensors and method of forming
US8293340B2 (en) 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US7767143B2 (en) 2006-06-27 2010-08-03 3M Innovative Properties Company Colorimetric sensors
US8067110B2 (en) 2006-09-11 2011-11-29 3M Innovative Properties Company Organic vapor sorbent protective device with thin-film indicator
EP2171775A1 (en) 2007-06-28 2010-04-07 3M Innovative Properties Company Thin film transistors incorporating interfacial conductive clusters
US20090091337A1 (en) 2007-10-04 2009-04-09 Robinson Joshua A Carbon film composite, method of manufacturing a carbon film composite and sensor made therewith
KR101476487B1 (ko) 2007-10-05 2014-12-24 쓰리엠 이노베이티브 프로퍼티즈 컴파니 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법
JP5128380B2 (ja) * 2008-06-19 2013-01-23 一般財団法人電力中央研究所 分解ガスセンサ
JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
CN101811658B (zh) * 2009-02-20 2012-09-19 清华大学 碳纳米管阵列传感器及其制备方法
AU2010235022B2 (en) 2009-03-30 2013-08-22 3M Innovative Properties Company Optoelectronic methods and devices for detection of analytes
EP2583090B1 (en) 2010-06-15 2016-04-06 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006099518A2 (en) * 2005-03-15 2006-09-21 The Goverment of the United States of America, as represented by the Secretary of the Navy Capacitance-based sensing of molecular absorbates on the surface of single walled carbon nanotubes
CN101815936A (zh) * 2007-10-05 2010-08-25 3M创新有限公司 包含微孔聚合物的有机化学传感器及使用方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105578969A (zh) * 2013-09-26 2016-05-11 3M创新有限公司 适用于检测在皮肤部位处的醇残留的蒸汽传感器
CN105578969B (zh) * 2013-09-26 2019-01-22 3M创新有限公司 适用于检测在皮肤部位处的醇残留的蒸汽传感器
CN103698360A (zh) * 2013-12-13 2014-04-02 苏州纳格光电科技有限公司 半导体气体传感器
CN109546890A (zh) * 2019-01-18 2019-03-29 清华大学 湿气发电方法及装置
WO2020147443A1 (zh) * 2019-01-18 2020-07-23 清华大学 湿气发电方法及装置

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Publication number Publication date
EP2622334A1 (en) 2013-08-07
JP5932806B2 (ja) 2016-06-08
JP2013539040A (ja) 2013-10-17
US20130186177A1 (en) 2013-07-25
US9341588B2 (en) 2016-05-17
EP2622334B1 (en) 2016-05-25
WO2012044419A1 (en) 2012-04-05

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Application publication date: 20130612