JP2013539040A5 - - Google Patents
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- JP2013539040A5 JP2013539040A5 JP2013531587A JP2013531587A JP2013539040A5 JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5 JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5
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- Prior art keywords
- conductive electrode
- dielectric layer
- sensor element
- conductive
- shitsupo
- Prior art date
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Claims (3)
- 第１導電性電極と、
内在微小多孔質ポリマーを含む吸収性誘電体層と、
第２導電性電極と、を備え、
前記第２導電性電極が、カーボンナノチューブを含むと共に、少なくとも１種類の有機蒸気に対して透過性であり、
前記吸収性誘電体層が、前記第１導電性電極と前記第２導電性電極との間に少なくとも部分的に配置されている、センサー素子。 - 内在微小多孔質ポリマーを含む吸収性誘電体層を第１導電性電極の上に配置する工程と、
前記吸収性誘電体層の少なくとも一部に近接して第２導電性電極を配置する工程とを含み、
前記第２導電性電極が、カーボンナノチューブを含むと共に、少なくとも１種類の有機蒸気に対して透過性であり、
前記吸収性誘電体層が、前記第１導電性電極と前記第２導電性電極との間に少なくとも部分的に配置されている、方法。 - 入口開口部を有するセンサーチャンバと、
静電容量を有し、前記センサーチャンバ内に配置され、前記入口開口部と流体的に連通するセンサー素子であって、
電気的に結合された第１導電性部材を有する第１導電性電極と、
内在微小多孔質ポリマーを含む吸収性誘電体層と、
電気的に結合された第２導電性部材を有する第２導電性電極とを含み、
前記第２導電性電極が、カーボンナノチューブを含むと共に、少なくとも１種類の有機蒸気に対して透過性であり、
前記吸収性誘電体層が、前記第１導電性電極と前記第２導電性電極との間に少なくとも部分的に配置されている、センサー素子と、
前記センサー素子と電気的に導通する動作回路とを備え、
前記センサー素子が電源に接続されている場合に、前記動作回路が前記センサー素子の前記静電容量を測定する、センサー装置。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38813010P | 2010-09-30 | 2010-09-30 | |
| US61/388,130 | 2010-09-30 | ||
| PCT/US2011/049145 WO2012044419A1 (en) | 2010-09-30 | 2011-08-25 | Sensor element, method of making the same, and sensor device including the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013539040A JP2013539040A (ja) | 2013-10-17 |
| JP2013539040A5 true JP2013539040A5 (ja) | 2014-09-25 |
| JP5932806B2 JP5932806B2 (ja) | 2016-06-08 |
Family
ID=44681415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013531587A Expired - Fee Related JP5932806B2 (ja) | 2010-09-30 | 2011-08-25 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9341588B2 (ja) |
| EP (1) | EP2622334B1 (ja) |
| JP (1) | JP5932806B2 (ja) |
| CN (1) | CN103154714A (ja) |
| WO (1) | WO2012044419A1 (ja) |
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| US9279792B2 (en) | 2011-04-13 | 2016-03-08 | 3M Innovative Properties Company | Method of using an absorptive sensor element |
| US9506888B2 (en) | 2011-04-13 | 2016-11-29 | 3M Innovative Properties Company | Vapor sensor including sensor element with integral heating |
| EP2718706B1 (en) | 2011-06-08 | 2015-03-11 | 3M Innovative Properties Company | Humidity sensor and sensor element therefor |
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| US9876160B2 (en) | 2012-03-21 | 2018-01-23 | Parker-Hannifin Corporation | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
| WO2013180936A1 (en) | 2012-05-29 | 2013-12-05 | 3M Innovative Properties Company | Humidity sensor and sensor element |
| KR20150031285A (ko) | 2012-06-18 | 2015-03-23 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | 연신 공정을 위한 연신 프레임 |
| EP2864770B1 (en) | 2012-06-25 | 2017-09-27 | 3M Innovative Properties Company | Sensor element, method of making, and method of using the same |
| JP6263179B2 (ja) | 2012-08-02 | 2018-01-17 | スリーエム イノベイティブ プロパティズ カンパニー | 携帯用電子装置及び蒸気センサカード |
| US9317068B2 (en) | 2012-09-24 | 2016-04-19 | Donaldson Company, Inc. | Venting assembly and microporous membrane composite |
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| CN105578969B (zh) * | 2013-09-26 | 2019-01-22 | 3M创新有限公司 | 适用于检测在皮肤部位处的醇残留的蒸汽传感器 |
| CN103698360A (zh) * | 2013-12-13 | 2014-04-02 | 苏州纳格光电科技有限公司 | 半导体气体传感器 |
| KR102414098B1 (ko) * | 2014-02-27 | 2022-06-29 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 주변-미만 온도 증기 센서 및 이용 방법 |
| SG10201900469PA (en) | 2014-07-22 | 2019-02-27 | Brewer Science Inc | Thin-film resistive-based sensor |
| EP3232905B1 (en) * | 2014-12-18 | 2021-02-17 | Koninklijke Philips N.V. | Hydration state indicator |
| US10083883B2 (en) * | 2016-06-20 | 2018-09-25 | Applied Materials, Inc. | Wafer processing equipment having capacitive micro sensors |
| WO2018047936A1 (ja) * | 2016-09-09 | 2018-03-15 | 北陸電気工業株式会社 | 容量型ガスセンサ |
| US10209186B2 (en) * | 2017-01-03 | 2019-02-19 | International Business Machines Corporation | Chemical sensing based on plasmon resonance in carbon nanotubes |
| CN111225604A (zh) * | 2017-06-20 | 2020-06-02 | 穆罕默德.阿波拉哈德 | 用于对癌症可疑区域进行体外和体内检测的实时无标记分析仪 |
| EP3762391A4 (en) | 2018-03-08 | 2022-08-03 | ExxonMobil Technology and Engineering Company | SPIROCENTRIC COMPOUNDS AND POLYMERS THEREOF |
| WO2020036171A1 (ja) * | 2018-08-17 | 2020-02-20 | 富士フイルム株式会社 | センサ |
| CN109546890B (zh) * | 2019-01-18 | 2020-07-31 | 清华大学 | 湿气发电方法及装置 |
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| US7217354B2 (en) | 2003-08-29 | 2007-05-15 | Ut-Battelle, Llc | Method and apparatus for detection of chemical vapors |
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| US8293340B2 (en) | 2005-12-21 | 2012-10-23 | 3M Innovative Properties Company | Plasma deposited microporous analyte detection layer |
| US7767143B2 (en) | 2006-06-27 | 2010-08-03 | 3M Innovative Properties Company | Colorimetric sensors |
| US8067110B2 (en) | 2006-09-11 | 2011-11-29 | 3M Innovative Properties Company | Organic vapor sorbent protective device with thin-film indicator |
| CN101689607A (zh) | 2007-06-28 | 2010-03-31 | 3M创新有限公司 | 结合界面导电簇的薄膜晶体管 |
| US20090091337A1 (en) | 2007-10-04 | 2009-04-09 | Robinson Joshua A | Carbon film composite, method of manufacturing a carbon film composite and sensor made therewith |
| BRPI0816493A2 (pt) | 2007-10-05 | 2019-02-26 | 3M Innovatie Properties Company | sensor e método para detectar um analito químico orgânico e métodos de fabricação de um elemento de detecção de analito químico orgânico |
| WO2009045733A2 (en) | 2007-10-05 | 2009-04-09 | 3M Innovative Properties Company | Organic chemical sensor comprising microporous polymer, and method of use |
| JP5128380B2 (ja) * | 2008-06-19 | 2013-01-23 | 一般財団法人電力中央研究所 | 分解ガスセンサ |
| JP5662945B2 (ja) | 2008-12-23 | 2015-02-04 | スリーエム イノベイティブ プロパティズ カンパニー | 微多孔性有機ケイ酸塩材料を有する有機化学センサ |
| CN101811658B (zh) | 2009-02-20 | 2012-09-19 | 清华大学 | 碳纳米管阵列传感器及其制备方法 |
| AU2010235022B2 (en) | 2009-03-30 | 2013-08-22 | 3M Innovative Properties Company | Optoelectronic methods and devices for detection of analytes |
| EP2583090B1 (en) | 2010-06-15 | 2016-04-06 | 3M Innovative Properties Company | Variable capacitance sensors and methods of making the same |
| WO2012050686A1 (en) | 2010-09-30 | 2012-04-19 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| WO2012141925A1 (en) | 2011-04-13 | 2012-10-18 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
-
2011
- 2011-08-25 CN CN2011800475842A patent/CN103154714A/zh active Pending
- 2011-08-25 JP JP2013531587A patent/JP5932806B2/ja not_active Expired - Fee Related
- 2011-08-25 WO PCT/US2011/049145 patent/WO2012044419A1/en active Application Filing
- 2011-08-25 EP EP11761429.7A patent/EP2622334B1/en not_active Not-in-force
- 2011-08-25 US US13/825,663 patent/US9341588B2/en active Active
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