JP2013539040A5 - - Google Patents
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- JP2013539040A5 JP2013539040A5 JP2013531587A JP2013531587A JP2013539040A5 JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5 JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5
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- Prior art keywords
- conductive electrode
- dielectric layer
- sensor element
- conductive
- shitsupo
- Prior art date
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Claims (3)
- 第１導電性電極と、
内在微小多孔質ポリマーを含む吸収性誘電体層と、
第２導電性電極と、を備え、
前記第２導電性電極が、カーボンナノチューブを含むと共に、少なくとも１種類の有機蒸気に対して透過性であり、
前記吸収性誘電体層が、前記第１導電性電極と前記第２導電性電極との間に少なくとも部分的に配置されている、センサー素子。 - 内在微小多孔質ポリマーを含む吸収性誘電体層を第１導電性電極の上に配置する工程と、
前記吸収性誘電体層の少なくとも一部に近接して第２導電性電極を配置する工程とを含み、
前記第２導電性電極が、カーボンナノチューブを含むと共に、少なくとも１種類の有機蒸気に対して透過性であり、
前記吸収性誘電体層が、前記第１導電性電極と前記第２導電性電極との間に少なくとも部分的に配置されている、方法。 - 入口開口部を有するセンサーチャンバと、
静電容量を有し、前記センサーチャンバ内に配置され、前記入口開口部と流体的に連通するセンサー素子であって、
電気的に結合された第１導電性部材を有する第１導電性電極と、
内在微小多孔質ポリマーを含む吸収性誘電体層と、
電気的に結合された第２導電性部材を有する第２導電性電極とを含み、
前記第２導電性電極が、カーボンナノチューブを含むと共に、少なくとも１種類の有機蒸気に対して透過性であり、
前記吸収性誘電体層が、前記第１導電性電極と前記第２導電性電極との間に少なくとも部分的に配置されている、センサー素子と、
前記センサー素子と電気的に導通する動作回路とを備え、
前記センサー素子が電源に接続されている場合に、前記動作回路が前記センサー素子の前記静電容量を測定する、センサー装置。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38813010P | 2010-09-30 | 2010-09-30 | |
| US61/388,130 | 2010-09-30 | ||
| PCT/US2011/049145 WO2012044419A1 (en) | 2010-09-30 | 2011-08-25 | Sensor element, method of making the same, and sensor device including the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013539040A JP2013539040A (ja) | 2013-10-17 |
| JP2013539040A5 true JP2013539040A5 (ja) | 2014-09-25 |
| JP5932806B2 JP5932806B2 (ja) | 2016-06-08 |
Family
ID=44681415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013531587A Expired - Fee Related JP5932806B2 (ja) | 2010-09-30 | 2011-08-25 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9341588B2 (ja) |
| EP (1) | EP2622334B1 (ja) |
| JP (1) | JP5932806B2 (ja) |
| CN (1) | CN103154714A (ja) |
| WO (1) | WO2012044419A1 (ja) |
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| WO2012141925A1 (en) | 2011-04-13 | 2012-10-18 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
| US9279792B2 (en) | 2011-04-13 | 2016-03-08 | 3M Innovative Properties Company | Method of using an absorptive sensor element |
| US9599583B2 (en) | 2011-06-08 | 2017-03-21 | 3M Innovative Properties Company | Humidity sensor and sensor element therefor |
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| KR20150031285A (ko) | 2012-06-18 | 2015-03-23 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | 연신 공정을 위한 연신 프레임 |
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| WO2014066576A1 (en) | 2012-10-24 | 2014-05-01 | Bayer Intellectual Property Gmbh | Polymer diode |
| US10041920B2 (en) | 2013-09-26 | 2018-08-07 | 3M Innovative Properties Company | Vapor sensor suitable for detecting alcoholic residue at a skin site |
| CN103698360A (zh) * | 2013-12-13 | 2014-04-02 | 苏州纳格光电科技有限公司 | 半导体气体传感器 |
| WO2015130548A1 (en) * | 2014-02-27 | 2015-09-03 | 3M Innovative Properties Company | Sub-ambient temperature vapor sensor and method of use |
| TWI711806B (zh) | 2014-07-22 | 2020-12-01 | 美商布魯爾科技公司 | 傳感器、感測器以及偵測條件之存在的方法 |
| US11375949B2 (en) * | 2014-12-18 | 2022-07-05 | Koninklijke Philips N.V. | Hydration state indicator |
| US10083883B2 (en) * | 2016-06-20 | 2018-09-25 | Applied Materials, Inc. | Wafer processing equipment having capacitive micro sensors |
| US11287395B2 (en) | 2016-09-09 | 2022-03-29 | Hokuriku Electric Industry Co., Ltd. | Capacitive gas sensor |
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| CN101811658B (zh) | 2009-02-20 | 2012-09-19 | 清华大学 | 碳纳米管阵列传感器及其制备方法 |
| WO2010117599A2 (en) | 2009-03-30 | 2010-10-14 | 3M Innovative Properties Company | Optoelectronic methods and devices for detection of analytes |
| CN103069269B (zh) | 2010-06-15 | 2016-08-03 | 3M创新有限公司 | 可变电容传感器及其制造方法 |
| JP2013542422A (ja) | 2010-09-30 | 2013-11-21 | スリーエム イノベイティブ プロパティズ カンパニー | センサー素子、その製造方法、及びそれを含むセンサー装置 |
| WO2012141925A1 (en) | 2011-04-13 | 2012-10-18 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
-
2011
- 2011-08-25 CN CN2011800475842A patent/CN103154714A/zh active Pending
- 2011-08-25 EP EP11761429.7A patent/EP2622334B1/en not_active Not-in-force
- 2011-08-25 WO PCT/US2011/049145 patent/WO2012044419A1/en active Application Filing
- 2011-08-25 JP JP2013531587A patent/JP5932806B2/ja not_active Expired - Fee Related
- 2011-08-25 US US13/825,663 patent/US9341588B2/en active Active
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