JP2013535805A - イオン制御式三端子素子 - Google Patents
イオン制御式三端子素子 Download PDFInfo
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- 150000002500 ions Chemical class 0.000 claims abstract description 188
- 239000000463 material Substances 0.000 claims abstract description 66
- 238000003860 storage Methods 0.000 claims abstract description 55
- 238000007599 discharging Methods 0.000 claims abstract description 3
- 239000010416 ion conductor Substances 0.000 claims description 78
- 239000001301 oxygen Substances 0.000 claims description 33
- 229910052760 oxygen Inorganic materials 0.000 claims description 33
- 239000013078 crystal Substances 0.000 claims description 30
- 230000008859 change Effects 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 20
- 230000004913 activation Effects 0.000 claims description 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 16
- -1 oxygen ions Chemical class 0.000 claims description 15
- 239000007784 solid electrolyte Substances 0.000 claims description 15
- 230000007547 defect Effects 0.000 claims description 13
- 230000004888 barrier function Effects 0.000 claims description 12
- 230000007704 transition Effects 0.000 claims description 12
- 150000001768 cations Chemical class 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000002887 superconductor Substances 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 7
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 239000007787 solid Substances 0.000 claims description 6
- 150000001450 anions Chemical class 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 5
- 150000002910 rare earth metals Chemical group 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 239000003792 electrolyte Substances 0.000 claims description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 230000005670 electromagnetic radiation Effects 0.000 claims 1
- 238000009826 distribution Methods 0.000 abstract description 5
- 108091006146 Channels Proteins 0.000 description 138
- 230000005684 electric field Effects 0.000 description 24
- 230000015654 memory Effects 0.000 description 18
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000010949 copper Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 5
- 230000005669 field effect Effects 0.000 description 5
- 238000005342 ion exchange Methods 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 108090000862 Ion Channels Proteins 0.000 description 4
- 102000004310 Ion Channels Human genes 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 230000009191 jumping Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910002367 SrTiO Inorganic materials 0.000 description 3
- 229910052788 barium Inorganic materials 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 229910052712 strontium Inorganic materials 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 241000877463 Lanio Species 0.000 description 2
- 229910010707 LiFePO 4 Inorganic materials 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 230000009022 nonlinear effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 description 2
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 241000238366 Cephalopoda Species 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229910002264 La1.85Sr0.15CuO4 Inorganic materials 0.000 description 1
- 229910002340 LaNiO3 Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 239000002228 NASICON Substances 0.000 description 1
- 229910003249 Na3Zr2Si2PO12 Inorganic materials 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- 229910003200 NdGaO3 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- 229910004121 SrRuO Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- VUBFDPHDHBTRIR-UHFFFAOYSA-N [Br].CCO Chemical compound [Br].CCO VUBFDPHDHBTRIR-UHFFFAOYSA-N 0.000 description 1
- CNEWPRQQHICZBP-UHFFFAOYSA-N [O].[Cu].[Ba].[La] Chemical compound [O].[Cu].[Ba].[La] CNEWPRQQHICZBP-UHFFFAOYSA-N 0.000 description 1
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 description 1
- SRLKNPULPPBANK-UHFFFAOYSA-L [Rb+].[Ag+].[I-].[I-] Chemical compound [Rb+].[Ag+].[I-].[I-] SRLKNPULPPBANK-UHFFFAOYSA-L 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052946 acanthite Inorganic materials 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000009021 linear effect Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- KJXBRHIPHIVJCS-UHFFFAOYSA-N oxo(oxoalumanyloxy)lanthanum Chemical compound O=[Al]O[La]=O KJXBRHIPHIVJCS-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 229940054334 silver cation Drugs 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- PWYYWQHXAPXYMF-UHFFFAOYSA-N strontium(2+) Chemical compound [Sr+2] PWYYWQHXAPXYMF-UHFFFAOYSA-N 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/10—Junction-based devices
- H10N60/12—Josephson-effect devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0007—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising metal oxide memory material, e.g. perovskites
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N60/00—Superconducting devices
- H10N60/10—Junction-based devices
- H10N60/128—Junction-based devices having three or more electrodes, e.g. transistor-like structures
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N60/00—Superconducting devices
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- H10N60/205—Permanent superconducting devices having three or more electrodes, e.g. transistor-like structures
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- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/253—Multistable switching devices, e.g. memristors having three or more electrodes, e.g. transistor-like devices
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- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/823—Device geometry adapted for essentially horizontal current flow, e.g. bridge type devices
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- H10N70/883—Oxides or nitrides
- H10N70/8836—Complex metal oxides, e.g. perovskites, spinels
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- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/10—Resistive cells; Technology aspects
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- G—PHYSICS
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- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
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Abstract
Description
rL > rK *l2 /(dL *dK )
ここで、dL とdK は、イオン伝導体とチャネルの厚さであり、lは、ソース電極とドレイン電極の間のチャネルの長さである。チャネルを短くした場合、イオン伝導体の所要の固有抵抗rL は指数関数的に低下する。本素子を横方向に関して小型化することが有利な場合、それによって、多くの材料がイオン伝導体として使用可能となる。
Claims (30)
- ソース電極と、ドレイン電極と、ソース電極とドレイン電極の間を接続する、イオンの供給及び/又は排出により電子伝導率が変化する材料から成るチャネルとを備えた三端子素子において、
ゲート電極と接触するイオン貯留域を備え、このイオン貯留域が、ゲート電極に電圧を印加した場合にチャネルとイオンを交換できるように、チャネルと接続されていることを特徴とする三端子素子。 - 当該のイオン貯留域が標準状態で固体であることを特徴とする請求項1に記載の三端子素子。
- 当該のイオン貯留域は、イオン価が可変である少なくとも一つの陽イオン又は陰イオンを有することを特徴とする請求項2に記載の三端子素子。
- 当該のイオン貯留域は、電子伝導率がチャネルよりも少なくとも一桁悪いイオン伝導体を介してチャネルと接続されていることを特徴とする請求項1から3までのいずれか一つに記載の三端子素子。
- 当該のイオン伝導体を介してイオンを移動させるための活性化エネルギーが、その移動方向に依存することを特徴とする請求項4に記載の三端子素子。
- 当該のイオン伝導体の厚さが100ナノメートル以下であることを特徴とする請求項4又は5に記載の三端子素子。
- 当該のイオン貯留域が同時にイオン伝導体であることを特徴とする請求項4から6までのいずれか一つに記載の三端子素子。
- 当該のイオン伝導体、イオン貯留域及び/又はチャネルがそれぞれ固定電解質で構成されていることを特徴とする請求項1から7までのいずれか一つに記載の三端子素子。
- 当該の固定電解質は、400°C以上の温度における酸素イオンを拡散させるための活性化エネルギーが1eV以内、有利には、0.1eV以内の材料であることを特徴とする請求項8に記載の三端子素子。
- 当該のイオン伝導体及び/又は固体電解質が異方性のイオン移動度を有することを特徴とする請求項1から9までのいずれか一つに記載の三端子素子。
- 当該のチャネルは、イオン貯留域との間のイオンの導入又は除去により電気抵抗が少なくとも一桁変化する金属酸化物で構成されることを特徴とする請求項1から10までのいずれか一つに記載の三端子素子。
- 当該のイオン貯留域とチャネルが同じ型(p型又はn型)にドーピングされた半導体で構成され、当該のイオン伝導体がそれと逆の型にドーピングされた半導体で構成されることを特徴とする請求項1から11までのいずれか一つに記載の三端子素子。
- 当該のイオン貯留域とチャネルが互いに逆の型(p型とn型)にドーピングされた半導体で構成されることを特徴とする請求項1から12までのいずれか一つに記載の三端子素子。
- 当該のチャネルによってブリッジングされたソース電極とドレイン電極の間の間隔が20nm〜10μmであることを特徴とする請求項1から13までのいずれか一つに記載の三端子素子。
- 当該のチャネルが3〜50nmの厚さの薄い層として構成されていることを特徴とする請求項1から14までのいずれか一つに記載の三端子素子。
- 当該のイオン貯留域がチャネルと酸素イオンを交換できることを特徴とする請求項1から15までのいずれか一つに記載の三端子素子。
- 当該のチャネル、イオン貯留域及び/又はイオン伝導体が、それぞれイオン貯留域とチャネルの間でイオンを交換した場合に変化しない結晶構造を有するか、或いはアモルファスであることを特徴とする請求項1から16までのいずれか一つに記載の三端子素子。
- 当該のチャネルの材料は、化学量論的な組成と比べて、チャネルとイオン貯留域の間でイオンを交換できる元素の含有量を増減された材料であることを特徴とする請求項1から17までのいずれか一つに記載の三端子素子。
- 当該のチャネルは、伝導率が少なくとも一桁悪い二つの材料の間に導電性の境界層を備えていることを特徴とする請求項1から18までのいずれか一つに記載の三端子素子。
- 当該のチャネルの少なくとも一つの区画が転移温度を有し、その温度以下で超伝導となることを特徴とする請求項1から19までのいずれか一つに記載の三端子素子。
- 当該の区画内では、多数の欠陥が電気的に直列に繋がっていることを特徴とする請求項20に記載の三端子素子。
- 当該のチャネルの転移温度以下で超伝導となる二つの区画が、イオン貯留域とイオンを交換できる障壁によって分離されていることを特徴とする請求項20又は21に記載の三端子素子。
- 当該のチャネルがジョセフソン接点として構成され、その弱結合部が当該の障壁であることを特徴とする請求項22に記載の三端子素子。
- 当該の区画が同じ超伝導材料から構成されているが、異なる結晶方向を有し、そのため、それらの区画の間の粒界が当該の障壁を構成することを特徴とする請求項22又は23に記載の三端子素子。
- 当該の区画が、その区画を上に配置した基板と同じ結晶方向を有することを特徴とする請求項22から24までのいずれか一つに記載の三端子素子。
- 当該の転移温度が77K以上であることを特徴とする請求項20から25までのいずれか一つに記載の三端子素子。
- 当該のチャネルが、クプラート、特に、化学式RBa2 Cu3 O7-x のクプラート又は化学式R2 CuO4+x のアルカリ土類をドーピングしたクプラートで構成され、ここで、Rは希土類金属であるか、或いは希土類金属の組合せであることを特徴とする請求項20から26までのいずれか一つに記載の三端子素子。
- 当該のチャネルが、鉄プニクチド又は鉄オキシプニクチド類から成る材料で構成されることを特徴とする請求項20から27までのいずれか一つに記載の三端子素子。
- 当該のチャネルが、酸素含有量又はフッ素含有量を変えることによって常伝導体から超伝導体に変更できる材料で構成されることを特徴とする請求項20から28までのいずれか一つに記載の三端子素子。
- 請求項20から29までのいずれか一つに記載の少なくとも一つの三端子素子を備えた量子電子素子、特に、超伝導量子干渉計又は0.1〜10THzの周波数帯域の電磁放射線用の電波源又は検出器。
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US20130079230A1 (en) | 2013-03-28 |
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