JP2013519235A - 結合強度を向上させるためのダイの表面処理 - Google Patents
結合強度を向上させるためのダイの表面処理 Download PDFInfo
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- JP2013519235A JP2013519235A JP2012552103A JP2012552103A JP2013519235A JP 2013519235 A JP2013519235 A JP 2013519235A JP 2012552103 A JP2012552103 A JP 2012552103A JP 2012552103 A JP2012552103 A JP 2012552103A JP 2013519235 A JP2013519235 A JP 2013519235A
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- passivation layer
- coating material
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- semiconductor
- die
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- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Wire Bonding (AREA)
Abstract
Description
102 基板
104、106 ダイ
108 はんだボール
110 バンプ
114 シード層
118、204、218 金属層
120 貫通ビア
122、124 アンダーフィル層
202、216 パッシベーション層
206、214 マイクロバンプ
208、212 Ni層
302 表面
304 被覆材料
Claims (39)
- 第1の結合面上に第1のパッシベーション層を堆積するステップと、
前記第1のパッシベーション層の少なくとも一部を粗面化するステップと、
前記第1のパッシベーション層上に第1の被覆材料を堆積するステップと、
を含む集積回路のパッケージング方法。 - 前記第1の被覆材料の少なくとも一部を粗面化するステップをさらに含む、請求項1に記載の方法。
- 前記少なくとも一部を粗面化するステップが、化学的または機械的工程である、請求項1に記載の方法。
- 前記少なくとも一部を粗面化するステップが、プラズマ衝撃またはエッチング工程を含む、請求項3に記載の方法。
- 前記第1の被覆材料が、疎水性または親水性である、請求項1に記載の方法。
- 前記第1の結合面を第2の結合面に接着するステップをさらに含む、請求項1に記載の方法。
- 前記第2の結合面上に第2のパッシベーション層を堆積するステップと、
前記第2のパッシベーション層の少なくとも一部を粗面化するステップと、
前記第2のパッシベーション層上に第2の被覆材料を堆積するステップと、
をさらに含む、請求項6に記載の方法。 - 前記第1のパッシベーション層と第2のパッシベーション層との間にアンダーフィル材料を堆積するステップをさらに含む、請求項7に記載の方法。
- 前記アンダーフィル材料を堆積するステップが、前記第1のパッシベーション層と前記第2のパッシベーション層との間に多層アンダーフィル材料を堆積するステップを含む、請求項8に記載の方法。
- これらの間の接着力を促進するために、前記アンダーフィル材料、ならびに前記第1および第2の被覆材料を選択するステップをさらに含む、請求項8に記載の方法。
- 前記第1および第2の結合面が、半導体またはパッケージ基板から形成される、請求項6に記載の方法。
- 前記第1または第2の結合面が半導体から形成される場合、該半導体が100μm未満の厚さを有する、請求項11に記載の方法。
- 前記第1または第2の結合面がパッケージ基板から形成される場合、該パッケージ基板が300μm未満の厚さを有する、請求項11に記載の方法。
- 音楽プレーヤ、ビデオプレーヤ、エンターテイメントユニット、ナビゲーション機器、通信機器、携帯情報端末(PDA)、固定ロケーションデータユニット、およびコンピュータからなる群から選択される装置に組み込まれる、請求項1に記載の方法。
- 第1の半導体またはパッケージ基板の第1の結合面と、
前記第1の結合面上に配置された第1のパッシベーション層と、
前記第1のパッシベーション層上に配置された第1の被覆材料と、を備え、
前記第1のパッシベーション層または前記第1の被覆材料の少なくとも一部が接着力の向上のために粗面化されている、電子パッケージ。 - 前記第1の被覆材料が親水性または疎水性である、請求項15に記載の電子パッケージ。
- 前記第1の結合面が半導体の一部である場合、該半導体の厚さが100μm未満である、請求項15に記載の電子パッケージ。
- 前記第1の結合面がパッケージ基板の一部である場合、該パッケージ基板の厚さが300μm未満である、請求項15に記載の電子パッケージ。
- 第2の半導体またはパッケージ基板から形成された第2の結合面と、
前記第2の結合面上に配置された第2のパッシベーション層と、
前記第2のパッシベーション層上に配置された第2の被覆材料と、をさらに備え、
前記第2のパッシベーション層または第2の被覆材料の少なくとも一部が接着力の向上のために粗面化されている、請求項15に記載の電子パッケージ。 - 前記第1のパッシベーション層と前記第2のパッシベーション層との間に配置されたアンダーフィル材料をさらに備える、請求項19に記載の電子パッケージ。
- 前記アンダーフィル材料がアンダーフィル材料の複数の層を含む、請求項20に記載の電子パッケージ。
- 前記第1のパッシベーション層に接触しているアンダーフィル材料が、前記第2のパッシベーション層に接触しているアンダーフィル材料と異なる、請求項21に記載の電子パッケージ。
- 音楽プレーヤ、ビデオプレーヤ、エンターテイメントユニット、ナビゲーション機器、通信機器、携帯情報端末(PDA)、固定ロケーションデータユニット、およびコンピュータからなる群から選択される装置に組み込まれた、請求項15に記載の電子パッケージ。
- その上に第1のパッシベーション層が配置された第1の結合面と、
その上に第2のパッシベーション層が配置された第2の結合面と、
前記第1のパッシベーション層および前記第2のパッシベーション層の上に配置された被覆材料と、を備え、
前記第1のパッシベーション層、第2のパッシベーション層、または被覆材料の1つの少なくとも一部が粗面化されている、電子パッケージシステム。 - 前記第1および第2のパッシベーション層の間に配置されたアンダーフィル材料をさらに備える、請求項24に記載の電子パッケージシステム。
- 前記アンダーフィル材料がアンダーフィル材料の複数の層を含む、請求項25に記載の電子パッケージシステム。
- 前記第1のパッシベーション層上に配置された前記被覆材料が、前記第2のパッシベーション層上に配置された前記被覆材料と異なる、請求項24に記載の電子パッケージシステム。
- 前記被覆材料が疎水性または親水性である、請求項24に記載の電子パッケージシステム。
- 前記第1の結合面が、半導体またはパッケージ基板の一部である、請求項24に記載の電子パッケージシステム。
- 前記第2の結合面が、半導体またはパッケージ基板の一部である、請求項29に記載の電子パッケージシステム。
- 前記第1または第2の結合面の一方が半導体の一部である場合、該半導体の厚さが100μm未満である、請求項30に記載の電子パッケージシステム。
- 前記第1または第2の結合面の一方がパッケージ基板の一部である場合、該パッケージ基板の厚さが300μm未満である、請求項30に記載の電子パッケージシステム。
- 前記第1のパッシベーション層または第2のパッシベーション層の一方の一部が、化学的または機械的工程によって粗面化されている、請求項24に記載の電子パッケージシステム。
- 前記工程が、プラズマ衝撃またはエッチングを含む、請求項33に記載の電子パッケージシステム。
- 音楽プレーヤ、ビデオプレーヤ、エンターテイメントユニット、ナビゲーション機器、通信機器、携帯情報端末(PDA)、固定ロケーションデータユニット、およびコンピュータからなる群から選択される装置に組み込まれた、請求項24に記載の電子パッケージシステム。
- 半導体またはパッケージ基板の結合面と、
前記半導体またはパッケージ基板の前記結合面を保護するための手段と、
回路を別の表面に結合するための手段であって、前記保護するための手段の上に堆積されている、結合するための手段と、を備え、
前記保護するための手段または前記結合するための手段の少なくとも一部分が粗面化されている、電子パッケージにおける集積回路。 - 前記結合するための手段が、親水性または疎水性材料を含む、請求項36に記載の集積回路。
- 前記保護するための手段が、前記結合面上に配置されている、請求項36に記載の集積回路。
- 音楽プレーヤ、ビデオプレーヤ、エンターテイメントユニット、ナビゲーション機器、通信機器、携帯情報端末(PDA)、固定ロケーションデータユニット、およびコンピュータからなる群から選択される装置に組み込まれた、請求項36に記載の集積回路。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/701,201 | 2010-02-05 | ||
US12/701,201 US20110193211A1 (en) | 2010-02-05 | 2010-02-05 | Surface Preparation of Die for Improved Bonding Strength |
PCT/US2011/023726 WO2011097464A1 (en) | 2010-02-05 | 2011-02-04 | Surface preparation of die for improved bonding strength |
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US8525342B2 (en) * | 2010-04-12 | 2013-09-03 | Qualcomm Incorporated | Dual-side interconnected CMOS for stacked integrated circuits |
EP2701189B1 (en) * | 2012-08-24 | 2016-01-20 | Imec | Substrate, fabrication method of such a substrate, method of self-assembly of such substrates and device obtained thereof |
US8846548B2 (en) * | 2013-01-09 | 2014-09-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Post-passivation interconnect structure and methods for forming the same |
US9466547B1 (en) * | 2015-06-09 | 2016-10-11 | Globalfoundries Inc. | Passivation layer topography |
CN106601632A (zh) * | 2015-10-14 | 2017-04-26 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的制造方法 |
US9773741B1 (en) | 2016-08-17 | 2017-09-26 | Qualcomm Incorporated | Bondable device including a hydrophilic layer |
CN107675156B (zh) * | 2017-08-14 | 2019-07-26 | 合肥市田源精铸有限公司 | 一种增强离合器壳机械性能的处理方法 |
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- 2011-02-04 EP EP11703795A patent/EP2532023A1/en not_active Ceased
- 2011-02-04 WO PCT/US2011/023726 patent/WO2011097464A1/en active Application Filing
- 2011-02-04 JP JP2012552103A patent/JP5766213B2/ja not_active Expired - Fee Related
- 2011-02-04 KR KR1020127023149A patent/KR101512804B1/ko not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
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CN102812542A (zh) | 2012-12-05 |
JP5766213B2 (ja) | 2015-08-19 |
WO2011097464A1 (en) | 2011-08-11 |
KR101512804B1 (ko) | 2015-04-16 |
CN102812542B (zh) | 2016-04-27 |
KR20120127481A (ko) | 2012-11-21 |
US20110193211A1 (en) | 2011-08-11 |
JP2015079995A (ja) | 2015-04-23 |
EP2532023A1 (en) | 2012-12-12 |
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