JP2013500173A - 予備処理指標及び持続的指標を有する研磨物品 - Google Patents

予備処理指標及び持続的指標を有する研磨物品 Download PDF

Info

Publication number
JP2013500173A
JP2013500173A JP2012522849A JP2012522849A JP2013500173A JP 2013500173 A JP2013500173 A JP 2013500173A JP 2012522849 A JP2012522849 A JP 2012522849A JP 2012522849 A JP2012522849 A JP 2012522849A JP 2013500173 A JP2013500173 A JP 2013500173A
Authority
JP
Japan
Prior art keywords
abrasive
abrasive article
composites
coating
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012522849A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013500173A5 (https=
Inventor
ジェイムズ, エル. マックアードル,
アン, エム. ホーキンス,
ウィリアム, シー. クエイド,
マーティン キュビック,
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2013500173A publication Critical patent/JP2013500173A/ja
Publication of JP2013500173A5 publication Critical patent/JP2013500173A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/24Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245Pads with fixed abrasives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/26Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2012522849A 2009-07-27 2010-07-08 予備処理指標及び持続的指標を有する研磨物品 Pending JP2013500173A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/509,707 US20110021114A1 (en) 2009-07-27 2009-07-27 Abrasive article with preconditioning and persistent indicators
US12/509,707 2009-07-27
PCT/US2010/041275 WO2011016941A2 (en) 2009-07-27 2010-07-08 Abrasive article with preconditioning and persistent indicators

Publications (2)

Publication Number Publication Date
JP2013500173A true JP2013500173A (ja) 2013-01-07
JP2013500173A5 JP2013500173A5 (https=) 2013-04-18

Family

ID=43497737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012522849A Pending JP2013500173A (ja) 2009-07-27 2010-07-08 予備処理指標及び持続的指標を有する研磨物品

Country Status (5)

Country Link
US (1) US20110021114A1 (https=)
EP (1) EP2459345A2 (https=)
JP (1) JP2013500173A (https=)
CN (1) CN102470515A (https=)
WO (1) WO2011016941A2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8118644B2 (en) * 2008-10-16 2012-02-21 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad having integral identification feature
CN103962974B (zh) * 2013-01-31 2017-08-04 盖茨优霓塔传动系统(苏州)有限公司 磨轮
BR112016010724B1 (pt) 2013-11-12 2021-11-16 3M Innovative Properties Company Artigo abrasivo estruturado
US9491997B2 (en) * 2013-12-02 2016-11-15 Soft Lines International, Ltd. Drum assembly, cosmetic device with drum assembly, and battery compartment for cosmetic device
CN106376234B (zh) 2014-05-02 2019-11-05 3M创新有限公司 间断的结构化磨料制品以及抛光工件的方法
KR102420782B1 (ko) * 2014-10-21 2022-07-14 쓰리엠 이노베이티브 프로퍼티즈 컴파니 연마 예비성형품, 연마 용품, 및 접합된 연마 용품을 제조하는 방법
WO2016073227A1 (en) * 2014-11-07 2016-05-12 3M Innovative Properties Company Printed abrasive article
CN106853610B (zh) * 2015-12-08 2019-11-01 中芯国际集成电路制造(北京)有限公司 抛光垫及其监测方法和监测系统
WO2017187320A1 (en) * 2016-04-29 2017-11-02 3M Innovative Properties Company Cleaning articles including scouring bodies that form printed instructions
US12330269B2 (en) * 2017-10-26 2025-06-17 3M Innovative Properties Company Flexible abrasive article with image layer
US12263558B2 (en) * 2018-12-18 2025-04-01 3M Innovative Properties Company Camouflage for abrasive articles
CN113195162A (zh) * 2018-12-18 2021-07-30 3M创新有限公司 图案化磨料基底和方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537133U (https=) * 1978-08-30 1980-03-10
JPS6376470U (https=) * 1986-06-03 1988-05-20
JP2002264025A (ja) * 2001-03-14 2002-09-18 Dainippon Printing Co Ltd 研磨フィルム
JP2003181768A (ja) * 2001-12-19 2003-07-02 Dainippon Printing Co Ltd 識別表示を有する研磨シート
JP2004208886A (ja) * 2002-12-27 2004-07-29 Kenji Nakamura 美容用研磨・艶出しシート
JP2004535306A (ja) * 2001-07-20 2004-11-25 スリーエム イノベイティブ プロパティズ カンパニー 摩耗インジケータを有する固定研磨物品
JP2009241196A (ja) * 2008-03-31 2009-10-22 Asahi Diamond Industrial Co Ltd 工具及び砥粒層チップ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5137542A (en) * 1990-08-08 1992-08-11 Minnesota Mining And Manufacturing Company Abrasive printed with an electrically conductive ink
JP2980682B2 (ja) * 1993-06-02 1999-11-22 大日本印刷株式会社 研磨テープおよびその製造方法
EP0728055A1 (en) * 1994-09-08 1996-08-28 Struers A/S Grinding/polishing cover sheet for placing on a rotatable grinding/polishing disc
US6287184B1 (en) * 1999-10-01 2001-09-11 3M Innovative Properties Company Marked abrasive article
KR100516142B1 (ko) * 2003-12-02 2005-09-21 김기환 홀로그램 기능을 가지며 기능성을 향상시킨 연마도구

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537133U (https=) * 1978-08-30 1980-03-10
JPS6376470U (https=) * 1986-06-03 1988-05-20
JP2002264025A (ja) * 2001-03-14 2002-09-18 Dainippon Printing Co Ltd 研磨フィルム
JP2004535306A (ja) * 2001-07-20 2004-11-25 スリーエム イノベイティブ プロパティズ カンパニー 摩耗インジケータを有する固定研磨物品
JP2003181768A (ja) * 2001-12-19 2003-07-02 Dainippon Printing Co Ltd 識別表示を有する研磨シート
JP2004208886A (ja) * 2002-12-27 2004-07-29 Kenji Nakamura 美容用研磨・艶出しシート
JP2009241196A (ja) * 2008-03-31 2009-10-22 Asahi Diamond Industrial Co Ltd 工具及び砥粒層チップ

Also Published As

Publication number Publication date
WO2011016941A2 (en) 2011-02-10
EP2459345A2 (en) 2012-06-06
US20110021114A1 (en) 2011-01-27
WO2011016941A3 (en) 2011-04-28
CN102470515A (zh) 2012-05-23

Similar Documents

Publication Publication Date Title
JP2013500173A (ja) 予備処理指標及び持続的指標を有する研磨物品
JP6620125B2 (ja) バッキング層および研磨層を有する印刷による化学機械研磨パッド
US6048254A (en) Lapping apparatus and process with annular abrasive area
US6769969B1 (en) Raised island abrasive, method of use and lapping apparatus
US7520800B2 (en) Raised island abrasive, lapping apparatus and method of use
CN101337339B (zh) 用于喷砂处理的研磨剂和使用该研磨剂的喷砂处理方法
US20020077037A1 (en) Fixed abrasive articles
JPH07186030A (ja) 光学レンズの研磨仕上げ方法
CN201026588Y (zh) 磁流变效应曲面研磨抛光装置
US9149904B1 (en) Platen for wafer polishing having diamond-ceramic composites
KR20160015356A (ko) 기재 내에 리세스를 형성하는 방법, 연마 휠, 및 커버
CN102658522A (zh) 球面光学元件加工用固结磨料研磨抛光垫
CN202462224U (zh) 整理盘、研磨垫整理器及研磨装置
CN115666849A (zh) 实验室盘式研磨设备、方法、替换磨盘和磨盘的应用
KR102713740B1 (ko) 정합가능 연마 용품
JP2005088153A (ja) ダイヤモンドラップ定盤による硬脆材料の平面研削加工法
CN207669004U (zh) 磁力钝化研磨机
JP4746788B2 (ja) 平面ホーニング加工用超砥粒ホイール及びそのドレス方法ならびに同ホイールを使用する研削装置
CN204771885U (zh) 多穴式自动定位微调的防氧化磨床
US20070238397A1 (en) Finishing process
KR20170073854A (ko) 연마 장치의 연마 디스크
CN109590917B (zh) 一种基于立体结构技术的磨具
JP2007185753A (ja) 研削研磨砥石
US12605804B2 (en) Abrasive article
CN214603577U (zh) 一种精冲件精磨机床

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130226

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130226

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140204

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20140708