JP2013232452A5 - - Google Patents

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Publication number
JP2013232452A5
JP2013232452A5 JP2012102342A JP2012102342A JP2013232452A5 JP 2013232452 A5 JP2013232452 A5 JP 2013232452A5 JP 2012102342 A JP2012102342 A JP 2012102342A JP 2012102342 A JP2012102342 A JP 2012102342A JP 2013232452 A5 JP2013232452 A5 JP 2013232452A5
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JP
Japan
Prior art keywords
substrate
photocured product
anda
producing
circuit board
Prior art date
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Application number
JP2012102342A
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English (en)
Japanese (ja)
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JP2013232452A (ja
JP5930832B2 (ja
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Application filed filed Critical
Priority claimed from JP2012102342A external-priority patent/JP5930832B2/ja
Priority to JP2012102342A priority Critical patent/JP5930832B2/ja
Priority to US14/391,069 priority patent/US10150231B2/en
Priority to CN201380021750.0A priority patent/CN104246976B/zh
Priority to PCT/JP2013/062684 priority patent/WO2013162049A1/en
Priority to KR1020147032394A priority patent/KR101667132B1/ko
Priority to EP13782399.3A priority patent/EP2837019B1/en
Priority to TW102114841A priority patent/TWI524383B/zh
Publication of JP2013232452A publication Critical patent/JP2013232452A/ja
Publication of JP2013232452A5 publication Critical patent/JP2013232452A5/ja
Publication of JP5930832B2 publication Critical patent/JP5930832B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012102342A 2012-04-27 2012-04-27 光硬化物の製造方法 Active JP5930832B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2012102342A JP5930832B2 (ja) 2012-04-27 2012-04-27 光硬化物の製造方法
KR1020147032394A KR101667132B1 (ko) 2012-04-27 2013-04-23 광경화물의 제조 방법
CN201380021750.0A CN104246976B (zh) 2012-04-27 2013-04-23 光固化物的制造方法
PCT/JP2013/062684 WO2013162049A1 (en) 2012-04-27 2013-04-23 Method for manufacturing photo cured material
US14/391,069 US10150231B2 (en) 2012-04-27 2013-04-23 Method for manufacturing photo cured material
EP13782399.3A EP2837019B1 (en) 2012-04-27 2013-04-23 Method for manufacturing photo cured material, optical component, electronic component, and photo-curable composition
TW102114841A TWI524383B (zh) 2012-04-27 2013-04-25 製造經光固化材料的方法，製造具有電路之基板的方法，光學組件，及電子組件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012102342A JP5930832B2 (ja) 2012-04-27 2012-04-27 光硬化物の製造方法

Publications (3)

Publication Number Publication Date
JP2013232452A JP2013232452A (ja) 2013-11-14
JP2013232452A5 true JP2013232452A5 (cg-RX-API-DMAC7.html) 2015-05-07
JP5930832B2 JP5930832B2 (ja) 2016-06-08

Family

ID=49483339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012102342A Active JP5930832B2 (ja) 2012-04-27 2012-04-27 光硬化物の製造方法

Country Status (7)

Country Link
US (1) US10150231B2 (cg-RX-API-DMAC7.html)
EP (1) EP2837019B1 (cg-RX-API-DMAC7.html)
JP (1) JP5930832B2 (cg-RX-API-DMAC7.html)
KR (1) KR101667132B1 (cg-RX-API-DMAC7.html)
CN (1) CN104246976B (cg-RX-API-DMAC7.html)
TW (1) TWI524383B (cg-RX-API-DMAC7.html)
WO (1) WO2013162049A1 (cg-RX-API-DMAC7.html)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6305058B2 (ja) 2013-03-05 2018-04-04 キヤノン株式会社 感光性ガス発生剤、光硬化性組成物
JP6327948B2 (ja) * 2013-06-26 2018-05-23 キヤノン株式会社 光硬化性組成物、硬化物、これを用いた、膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法
JP6327947B2 (ja) * 2013-06-26 2018-05-23 キヤノン株式会社 光硬化性組成物、これを用いた、膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法、硬化物
JP6460672B2 (ja) 2013-09-18 2019-01-30 キヤノン株式会社 膜の製造方法、光学部品の製造方法、回路基板の製造方法及び電子部品の製造方法
CN108583018B (zh) 2013-10-28 2019-11-15 惠普发展公司有限责任合伙企业 以低轮廓封装体封装键合线的方法
JP6584074B2 (ja) 2014-02-26 2019-10-02 キヤノン株式会社 光硬化性組成物、硬化物、これを用いた、パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法
JP6624808B2 (ja) * 2014-07-25 2019-12-25 キヤノン株式会社 光硬化性組成物、これを用いた硬化物パターンの製造方法、光学部品の製造方法、回路基板の製造方法
JP7118580B2 (ja) * 2014-08-26 2022-08-16 キヤノン株式会社 光硬化性組成物、これを用いた硬化物パターンの製造方法、光学部品の製造方法、回路基板の製造方法、およびインプリント用モールドの製造方法
JP6259383B2 (ja) * 2014-09-30 2018-01-10 富士フイルム株式会社 パターン形成体の製造方法、インクジェット用光硬化性組成物およびデバイスの製造方法
JP6324363B2 (ja) 2014-12-19 2018-05-16 キヤノン株式会社 インプリント用光硬化性組成物、これを用いた膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法
JP6779611B2 (ja) * 2014-12-19 2020-11-04 キヤノン株式会社 インプリント用光硬化性組成物、硬化膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法
JP6632200B2 (ja) * 2015-02-27 2020-01-22 キヤノン株式会社 パターンの形成方法、加工基板の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法
JP6700794B2 (ja) * 2015-04-03 2020-05-27 キヤノン株式会社 インプリント材吐出装置
WO2017073388A1 (ja) * 2015-10-29 2017-05-04 国立研究開発法人産業技術総合研究所 インプリント装置
US10845700B2 (en) 2016-03-31 2020-11-24 Canon Kabushiki Kaisha Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
US10578965B2 (en) 2016-03-31 2020-03-03 Canon Kabushiki Kaisha Pattern forming method
US10883006B2 (en) 2016-03-31 2021-01-05 Canon Kabushiki Kaisha Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
US10829644B2 (en) 2016-03-31 2020-11-10 Canon Kabushiki Kaisha Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
US10754243B2 (en) 2016-03-31 2020-08-25 Canon Kabushiki Kaisha Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
US10754245B2 (en) 2016-03-31 2020-08-25 Canon Kabushiki Kaisha Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
US10754244B2 (en) 2016-03-31 2020-08-25 Canon Kabushiki Kaisha Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
KR102344647B1 (ko) * 2016-04-08 2021-12-30 캐논 가부시끼가이샤 경화물 패턴의 형성 방법과, 가공 기판, 광학 부품, 회로 기판, 전자 부품 및 임프린트 몰드의 제조 방법과, 임프린트 전처리 코팅용 재료
JP7066674B2 (ja) 2017-03-08 2022-05-13 キヤノン株式会社 パターン形成方法、インプリント前処理コーティング材料、及び基板の前処理方法
KR102419881B1 (ko) 2017-08-10 2022-07-12 캐논 가부시끼가이샤 패턴 형성 방법
CN109116679A (zh) 2018-09-19 2019-01-01 京东方科技集团股份有限公司 纳米压印方法及纳米压印装置
SG10202005345XA (en) * 2019-06-11 2021-01-28 Canon Kk Simulation method, simulation apparatus, and program
US12428508B2 (en) 2022-02-11 2025-09-30 Canon Kabushiki Kaisha Photocurable composition including a non-reactive polymer

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US6432614B1 (en) 1998-07-31 2002-08-13 Dai Nippon Printing Co., Ltd. Photosensitive resin composition and color filter
JP3615977B2 (ja) * 1999-12-21 2005-02-02 クラリアント インターナショナル リミテッド 感光性樹脂組成物
JP3700001B2 (ja) * 2002-09-10 2005-09-28 独立行政法人産業技術総合研究所 インプリント方法及び装置
DE602005022874D1 (de) * 2004-06-03 2010-09-23 Molecular Imprints Inc Fluidausgabe und tropfenausgabe nach bedarf für die herstellung im nanobereich
US20070228593A1 (en) 2006-04-03 2007-10-04 Molecular Imprints, Inc. Residual Layer Thickness Measurement and Correction
US7670530B2 (en) 2006-01-20 2010-03-02 Molecular Imprints, Inc. Patterning substrates employing multiple chucks
MY144847A (en) 2005-12-08 2011-11-30 Molecular Imprints Inc Method and system for double-sided patterning of substrates
JP5109556B2 (ja) * 2006-11-01 2012-12-26 セントラル硝子株式会社 １，１，２，２−テトラフルオロ−１−メトキシエタンを含む共沸及び共沸様組成物
JP4908369B2 (ja) 2007-10-02 2012-04-04 株式会社東芝 インプリント方法及びインプリントシステム
JP2010106062A (ja) * 2008-10-28 2010-05-13 Fujifilm Corp ナノインプリント用組成物、パターンおよびその形成方法
JP2011066100A (ja) * 2009-09-16 2011-03-31 Bridgestone Corp 光硬化性転写シート、及びこれを用いた凹凸パターンの形成方法
JP5671302B2 (ja) 2009-11-10 2015-02-18 富士フイルム株式会社 インプリント用硬化性組成物、パターン形成方法およびパターン

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