JP2013206919A5 - - Google Patents

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Publication number
JP2013206919A5
JP2013206919A5 JP2012071028A JP2012071028A JP2013206919A5 JP 2013206919 A5 JP2013206919 A5 JP 2013206919A5 JP 2012071028 A JP2012071028 A JP 2012071028A JP 2012071028 A JP2012071028 A JP 2012071028A JP 2013206919 A5 JP2013206919 A5 JP 2013206919A5
Authority
JP
Japan
Prior art keywords
film
thin film
electrode
transistor according
film transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012071028A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013206919A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012071028A priority Critical patent/JP2013206919A/ja
Priority claimed from JP2012071028A external-priority patent/JP2013206919A/ja
Priority to US13/738,540 priority patent/US9054204B2/en
Priority to CN2013100118418A priority patent/CN103219388A/zh
Publication of JP2013206919A publication Critical patent/JP2013206919A/ja
Publication of JP2013206919A5 publication Critical patent/JP2013206919A5/ja
Pending legal-status Critical Current

Links

JP2012071028A 2012-01-20 2012-03-27 薄膜トランジスタおよびその製造方法ならびに表示装置 Pending JP2013206919A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012071028A JP2013206919A (ja) 2012-03-27 2012-03-27 薄膜トランジスタおよびその製造方法ならびに表示装置
US13/738,540 US9054204B2 (en) 2012-01-20 2013-01-10 Thin-film transistor, method of manufacturing the same, display unit, and electronic apparatus
CN2013100118418A CN103219388A (zh) 2012-01-20 2013-01-11 薄膜晶体管、其制造方法、显示单元和电子装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012071028A JP2013206919A (ja) 2012-03-27 2012-03-27 薄膜トランジスタおよびその製造方法ならびに表示装置

Publications (2)

Publication Number Publication Date
JP2013206919A JP2013206919A (ja) 2013-10-07
JP2013206919A5 true JP2013206919A5 (enExample) 2015-04-02

Family

ID=49525755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012071028A Pending JP2013206919A (ja) 2012-01-20 2012-03-27 薄膜トランジスタおよびその製造方法ならびに表示装置

Country Status (1)

Country Link
JP (1) JP2013206919A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9887291B2 (en) * 2014-03-19 2018-02-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, or the display module
CN106463090B (zh) 2014-05-09 2019-11-01 株式会社日本有机雷特显示器 显示装置、显示装置的驱动方法和电子设备
JP7239598B2 (ja) * 2018-03-09 2023-03-14 アプライド マテリアルズ インコーポレイテッド 金属含有材料の高圧アニーリングプロセス
CN111834465B (zh) * 2019-12-09 2024-08-02 云谷（固安）科技有限公司 阵列基板、显示面板及显示装置
CN113745246B (zh) 2021-08-16 2023-10-03 深圳市华星光电半导体显示技术有限公司 基板及显示面板

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109769A (ja) * 1991-10-18 1993-04-30 Fuji Xerox Co Ltd 薄膜トランジスタの製造方法
US7211825B2 (en) * 2004-06-14 2007-05-01 Yi-Chi Shih Indium oxide-based thin film transistors and circuits
JP5117667B2 (ja) * 2005-02-28 2013-01-16 カシオ計算機株式会社 薄膜トランジスタパネル
TWI746064B (zh) * 2009-08-07 2021-11-11 日商半導體能源研究所股份有限公司 半導體裝置和其製造方法
KR101746198B1 (ko) * 2009-09-04 2017-06-12 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시장치 및 전자기기
DE112011101410B4 (de) * 2010-04-23 2018-03-01 Semiconductor Energy Laboratory Co., Ltd. Verfahren zum Herstellen einer Halbleitervorrichtung

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