JP2013197488A - 収納器群 - Google Patents

収納器群 Download PDF

Info

Publication number
JP2013197488A
JP2013197488A JP2012065616A JP2012065616A JP2013197488A JP 2013197488 A JP2013197488 A JP 2013197488A JP 2012065616 A JP2012065616 A JP 2012065616A JP 2012065616 A JP2012065616 A JP 2012065616A JP 2013197488 A JP2013197488 A JP 2013197488A
Authority
JP
Japan
Prior art keywords
storage
storage device
container
substrate
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012065616A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013197488A5 (enExample
Inventor
Seiji Hayashi
誠治 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2012065616A priority Critical patent/JP2013197488A/ja
Publication of JP2013197488A publication Critical patent/JP2013197488A/ja
Publication of JP2013197488A5 publication Critical patent/JP2013197488A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2012065616A 2012-03-22 2012-03-22 収納器群 Pending JP2013197488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012065616A JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012065616A JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Publications (2)

Publication Number Publication Date
JP2013197488A true JP2013197488A (ja) 2013-09-30
JP2013197488A5 JP2013197488A5 (enExample) 2014-07-31

Family

ID=49396029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012065616A Pending JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Country Status (1)

Country Link
JP (1) JP2013197488A (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167629A (en) * 1981-04-08 1982-10-15 Nec Corp Carrier for semiconductor wafer
JPH1159777A (ja) * 1997-08-22 1999-03-02 Sony Corp 収容器
JPH11354625A (ja) * 1998-06-10 1999-12-24 Nikon Corp 基板カセット
JP2005340264A (ja) * 2004-05-24 2005-12-08 Asahi Kasei Microsystems Kk 基板収納容器用補助具及び基板収納容器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167629A (en) * 1981-04-08 1982-10-15 Nec Corp Carrier for semiconductor wafer
JPH1159777A (ja) * 1997-08-22 1999-03-02 Sony Corp 収容器
JPH11354625A (ja) * 1998-06-10 1999-12-24 Nikon Corp 基板カセット
JP2005340264A (ja) * 2004-05-24 2005-12-08 Asahi Kasei Microsystems Kk 基板収納容器用補助具及び基板収納容器

Similar Documents

Publication Publication Date Title
JP6278751B2 (ja) 搬送方法及び基板処理装置
US8894344B2 (en) Vertical wafer buffering system
JP6332133B2 (ja) 容器搬送設備
JP6052209B2 (ja) 容器搬送設備
JP2011071293A (ja) プロセスモジュール、基板処理装置、および基板搬送方法
KR20140089517A (ko) 로드 포트, ｅｆｅｍ
JP2010129769A (ja) 基板処理システム
JP7062019B2 (ja) 基板を搬送するための装置、このような装置の基板キャリアに適合された収容板を有する処理装置、及び当該基板を搬送するための装置を使用して基板を処理するための方法、並びに処理システム
JP2016216137A5 (enExample)
JP6314161B2 (ja) 基板搬送システムおよび方法
US9214375B2 (en) End effector having multiple-position contact points
US9199805B2 (en) Processing system and processing method
KR20210054992A (ko) 기판 처리 장치 및 기판 수납 용기 보관 방법
KR102058985B1 (ko) 로드 스테이션
JP5639963B2 (ja) 基板処理装置及び基板処理方法並びに基板処理プログラムを記録した記録媒体
US20140151264A1 (en) Wafer carrier and applications thereof
JP5875901B2 (ja) 基板処理装置
JP2013197488A (ja) 収納器群
KR20220093801A (ko) 스토커 장치
WO2018051643A1 (ja) 搬送条件設定装置、基板処理装置、および搬送条件設定方法
JP2014165438A (ja) 基板位置修正方法、基板位置修正装置及び基板処理システム
KR102336558B1 (ko) 반송 유닛 및 이를 포함하는 물품 반송 장치
TWI655704B (zh) 轉載治具及其使用方法
JP2013055363A (ja) プロセスモジュール、基板処理装置、および基板搬送方法
JP4467374B2 (ja) ウエハ立替機、ウエハ処理システム

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140612

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140612

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150304

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150310

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150501

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160105

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20160426

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160711

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20160801

A912 Removal of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20160826