JPS57167629A - Carrier for semiconductor wafer - Google Patents

Carrier for semiconductor wafer

Info

Publication number
JPS57167629A
JPS57167629A JP5279881A JP5279881A JPS57167629A JP S57167629 A JPS57167629 A JP S57167629A JP 5279881 A JP5279881 A JP 5279881A JP 5279881 A JP5279881 A JP 5279881A JP S57167629 A JPS57167629 A JP S57167629A
Authority
JP
Japan
Prior art keywords
size
carrier
external forms
carriers
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5279881A
Other languages
Japanese (ja)
Inventor
Hideo Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5279881A priority Critical patent/JPS57167629A/en
Publication of JPS57167629A publication Critical patent/JPS57167629A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Abstract

PURPOSE:To conduct the treatment of the washing, drying, etc. of the semiconductor wafer by the same device by equalizing the size of the external forms of the carriers each supporting the semiconductor wafers, the size of external forms thereof differs. CONSTITUTION:The size L3, L6 of the external forms of the carriers 2 supporting wafer are equalized regardless of the size L2, L4 of the external forms of the wafers 1. Accordingly, when the size L3, L6 of the external forms of each carrier 2 are made equal, apparatus, such as a carrier supply section, a cradle, a carrier chuck, etc. can be used in common about other carriers 2 if the size of these apparatus applies to the size L3, L6 of the external forms of one carrier 2 when the wafers are washed or dried.
JP5279881A 1981-04-08 1981-04-08 Carrier for semiconductor wafer Pending JPS57167629A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5279881A JPS57167629A (en) 1981-04-08 1981-04-08 Carrier for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5279881A JPS57167629A (en) 1981-04-08 1981-04-08 Carrier for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS57167629A true JPS57167629A (en) 1982-10-15

Family

ID=12924852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5279881A Pending JPS57167629A (en) 1981-04-08 1981-04-08 Carrier for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS57167629A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176572A (en) * 1983-03-26 1984-10-05 三菱電機株式会社 Chemical treating device for semiconductor wafer
JP2013197488A (en) * 2012-03-22 2013-09-30 Mitsubishi Electric Corp Container group

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176572A (en) * 1983-03-26 1984-10-05 三菱電機株式会社 Chemical treating device for semiconductor wafer
JP2013197488A (en) * 2012-03-22 2013-09-30 Mitsubishi Electric Corp Container group

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