JP2013190624A5 - - Google Patents
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- Publication number
- JP2013190624A5 JP2013190624A5 JP2012057103A JP2012057103A JP2013190624A5 JP 2013190624 A5 JP2013190624 A5 JP 2013190624A5 JP 2012057103 A JP2012057103 A JP 2012057103A JP 2012057103 A JP2012057103 A JP 2012057103A JP 2013190624 A5 JP2013190624 A5 JP 2013190624A5
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- path changing
- rotating plate
- light source
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012057103A JP5973756B2 (ja) | 2012-03-14 | 2012-03-14 | 焦点位置変更装置およびこれを用いた共焦点光学装置 |
| US13/610,112 US9435982B2 (en) | 2012-03-14 | 2012-09-11 | Focus position changing apparatus and confocal optical apparatus using the same |
| TW101136680A TWI486555B (zh) | 2012-03-14 | 2012-10-04 | 焦點位置改變裝置及使用其之共焦光學裝置 |
| KR1020120118659A KR101428864B1 (ko) | 2012-03-14 | 2012-10-24 | 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치 |
| CN201210488295.2A CN103309030B (zh) | 2012-03-14 | 2012-11-26 | 焦点位置改变设备及使用其的共焦光学设备 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012057103A JP5973756B2 (ja) | 2012-03-14 | 2012-03-14 | 焦点位置変更装置およびこれを用いた共焦点光学装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013190624A JP2013190624A (ja) | 2013-09-26 |
| JP2013190624A5 true JP2013190624A5 (https=) | 2015-02-12 |
| JP5973756B2 JP5973756B2 (ja) | 2016-08-23 |
Family
ID=49134432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012057103A Active JP5973756B2 (ja) | 2012-03-14 | 2012-03-14 | 焦点位置変更装置およびこれを用いた共焦点光学装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9435982B2 (https=) |
| JP (1) | JP5973756B2 (https=) |
| KR (1) | KR101428864B1 (https=) |
| CN (1) | CN103309030B (https=) |
| TW (1) | TWI486555B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2511852B1 (de) * | 2011-04-15 | 2013-03-13 | Sick Ag | Beleuchtungsvorrichtung für einen kamerabasierten Codeleser |
| CN105258686B (zh) * | 2015-10-22 | 2019-02-01 | 青岛镭创光电技术有限公司 | 激光投线仪 |
| US10254105B2 (en) * | 2016-12-05 | 2019-04-09 | Quality Vision International, Inc. | Exchangeable lens module system for probes of optical measuring machines |
| JP6819362B2 (ja) * | 2017-03-02 | 2021-01-27 | オムロン株式会社 | 共焦点計測装置 |
| EP4044898A4 (en) * | 2019-10-19 | 2023-10-18 | Apollo Medical Optics, Ltd. | OPTICAL SYSTEM AND ASSOCIATED INTERFERENCE OBJECTIVE MODULE |
| TWI885129B (zh) * | 2021-04-16 | 2025-06-01 | 安盟生技股份有限公司 | 干涉物鏡模組、使用其之干涉系統及成像方法 |
| CN115091107B (zh) * | 2022-08-24 | 2023-04-25 | 中国工程物理研究院激光聚变研究中心 | 一种用于激光加工的高精度装夹装置及装夹方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH095046A (ja) * | 1995-06-21 | 1997-01-10 | Takaoka Electric Mfg Co Ltd | 立体形状測定装置 |
| US6426835B1 (en) * | 1999-03-23 | 2002-07-30 | Olympus Optical Co., Ltd. | Confocal microscope |
| JP2001083426A (ja) | 1999-07-09 | 2001-03-30 | Olympus Optical Co Ltd | 共焦点顕微鏡 |
| JP2001093426A (ja) * | 1999-09-28 | 2001-04-06 | Matsushita Electric Ind Co Ltd | Ac型プラズマディスプレイパネルおよびその駆動方法 |
| JP2001133695A (ja) * | 1999-11-01 | 2001-05-18 | Nikon Corp | 顕微鏡装置 |
| DE60131510T2 (de) * | 2000-03-27 | 2008-10-23 | Toyota Jidosha Kabushiki Kaisha, Toyota-shi | Abgasreinigungsvorrichtung |
| TW555954B (en) * | 2001-02-28 | 2003-10-01 | Olympus Optical Co | Confocal microscope, optical height-measurement method, automatic focusing method |
| JP4148350B2 (ja) | 2002-05-24 | 2008-09-10 | 独立行政法人科学技術振興機構 | 共焦点顕微鏡及び微小開口回転盤 |
| JP2005010516A (ja) * | 2003-06-19 | 2005-01-13 | Olympus Corp | 顕微鏡 |
| US8238019B2 (en) * | 2003-11-01 | 2012-08-07 | Silicon Quest Kabushiki-Kaisha | Projection apparatus with coherent light source |
| US7704402B2 (en) * | 2004-10-27 | 2010-04-27 | Nikon Corporation | Optical element manufacturing method, optical element, Nipkow disk, confocal optical system and 3-D measurement device |
| JP2006235250A (ja) * | 2005-02-25 | 2006-09-07 | Nikon Corp | 測定顕微鏡 |
| TWI279580B (en) * | 2005-12-22 | 2007-04-21 | Metal Ind Res & Dev Ct | Co-focal microscopic imaging system with adjustable light source pattern |
| JP4867354B2 (ja) | 2006-01-16 | 2012-02-01 | 横河電機株式会社 | 共焦点顕微鏡 |
| JP4678601B2 (ja) * | 2006-08-15 | 2011-04-27 | 横河電機株式会社 | 創薬スクリーニング装置 |
| JP2008096895A (ja) * | 2006-10-16 | 2008-04-24 | Olympus Corp | 顕微鏡用照明装置 |
| JPWO2008069220A1 (ja) * | 2006-11-30 | 2010-03-18 | 株式会社ニコン | 結像装置及び顕微鏡 |
| JP4970211B2 (ja) * | 2007-10-18 | 2012-07-04 | ヘキサゴン・メトロジー株式会社 | 3次元形状測定器 |
| WO2009055607A1 (en) * | 2007-10-23 | 2009-04-30 | Sherman Kenneth L | Improved removable, rotatable gobo holder assembly |
| JP2009168964A (ja) | 2008-01-15 | 2009-07-30 | Nikon Corp | 共焦点顕微鏡 |
-
2012
- 2012-03-14 JP JP2012057103A patent/JP5973756B2/ja active Active
- 2012-09-11 US US13/610,112 patent/US9435982B2/en active Active
- 2012-10-04 TW TW101136680A patent/TWI486555B/zh active
- 2012-10-24 KR KR1020120118659A patent/KR101428864B1/ko active Active
- 2012-11-26 CN CN201210488295.2A patent/CN103309030B/zh active Active
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