JP2013188968A5 - - Google Patents

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Publication number
JP2013188968A5
JP2013188968A5 JP2012057638A JP2012057638A JP2013188968A5 JP 2013188968 A5 JP2013188968 A5 JP 2013188968A5 JP 2012057638 A JP2012057638 A JP 2012057638A JP 2012057638 A JP2012057638 A JP 2012057638A JP 2013188968 A5 JP2013188968 A5 JP 2013188968A5
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JP
Japan
Prior art keywords
silicon substrate
substrate
oxide film
laminated
sequentially
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012057638A
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English (en)
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JP2013188968A (ja
JP5645863B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012057638A priority Critical patent/JP5645863B2/ja
Priority claimed from JP2012057638A external-priority patent/JP5645863B2/ja
Priority to US13/802,603 priority patent/US8685763B2/en
Priority to CN201310080906.4A priority patent/CN103302987B/zh
Publication of JP2013188968A publication Critical patent/JP2013188968A/ja
Publication of JP2013188968A5 publication Critical patent/JP2013188968A5/ja
Application granted granted Critical
Publication of JP5645863B2 publication Critical patent/JP5645863B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (1)

  1. 前記積層基板は、第３シリコン基板上に前記酸化膜及び前記第１シリコン基板を順番に
    積層してなるＳＯＩ基板と、前記第１シリコン基板上に積層された前記第２シリコン基板
    とを有するものであり、
    前記開口露呈工程では、前記第３シリコン基板と前記酸化膜とを順番に除去する請求項
    １から１０のいずれか１項記載のノズルプレートの製造方法。
JP2012057638A 2012-03-14 2012-03-14 ノズルプレートの製造方法 Expired - Fee Related JP5645863B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012057638A JP5645863B2 (ja) 2012-03-14 2012-03-14 ノズルプレートの製造方法
US13/802,603 US8685763B2 (en) 2012-03-14 2013-03-13 Method of manufacturing nozzle plate
CN201310080906.4A CN103302987B (zh) 2012-03-14 2013-03-14 制造喷嘴板的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012057638A JP5645863B2 (ja) 2012-03-14 2012-03-14 ノズルプレートの製造方法

Publications (3)

Publication Number Publication Date
JP2013188968A JP2013188968A (ja) 2013-09-26
JP2013188968A5 true JP2013188968A5 (ja) 2013-11-07
JP5645863B2 JP5645863B2 (ja) 2014-12-24

Family

ID=49128895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012057638A Expired - Fee Related JP5645863B2 (ja) 2012-03-14 2012-03-14 ノズルプレートの製造方法

Country Status (3)

Country Link
US (1) US8685763B2 (ja)
JP (1) JP5645863B2 (ja)
CN (1) CN103302987B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013103392A (ja) * 2011-11-14 2013-05-30 Seiko Epson Corp 液体噴射装置
EP2794276B1 (en) * 2011-12-21 2018-07-25 Hewlett-Packard Development Company, L.P. Fluid dispenser
US10189704B2 (en) * 2013-06-15 2019-01-29 Brookhaven Science Associates, Llc Formation of superhydrophobic surfaces
JP6333016B2 (ja) * 2014-03-28 2018-05-30 キヤノン株式会社 液体吐出ヘッドの製造方法
WO2018047576A1 (ja) 2016-09-12 2018-03-15 コニカミノルタ株式会社 液滴吐出ヘッド及び液滴吐出装置
CN106541706B (zh) * 2016-09-30 2019-04-16 西安交通大学 一种直通式压电喷墨打印头及其制造方法
US11179935B2 (en) * 2019-02-19 2021-11-23 Canon Kabushiki Kaisha Liquid ejection head, liquid ejection module, and method of manufacturing liquid ejection head
EP4212343A4 (en) 2020-09-09 2023-10-11 Konica Minolta, Inc. INK JET HEAD, INK JET HEAD MANUFACTURING METHOD AND INK JET RECORDING APPARATUS
JPWO2022208701A1 (ja) * 2021-03-31 2022-10-06

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5308442A (en) * 1993-01-25 1994-05-03 Hewlett-Packard Company Anisotropically etched ink fill slots in silicon
US5589083A (en) 1993-12-11 1996-12-31 Electronics And Telecommunications Research Institute Method of manufacturing microstructure by the anisotropic etching and bonding of substrates
JPH09216360A (ja) * 1996-02-15 1997-08-19 Seiko Epson Corp インクジェットヘッド及びその製造方法
US7347532B2 (en) * 2004-08-05 2008-03-25 Fujifilm Dimatix, Inc. Print head nozzle formation
JP2008049673A (ja) * 2006-08-28 2008-03-06 Fujifilm Corp ノズル板の製造方法および液体吐出ヘッドの製造方法
JP4832325B2 (ja) * 2007-02-02 2011-12-07 富士フイルム株式会社 ノズルプレートおよび画像形成装置
US8197029B2 (en) * 2008-12-30 2012-06-12 Fujifilm Corporation Forming nozzles

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