JP2013171964A - 超音波ワイヤボンディング装置および超音波ワイヤボンディング方法 - Google Patents
超音波ワイヤボンディング装置および超音波ワイヤボンディング方法 Download PDFInfo
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- JP2013171964A JP2013171964A JP2012034715A JP2012034715A JP2013171964A JP 2013171964 A JP2013171964 A JP 2013171964A JP 2012034715 A JP2012034715 A JP 2012034715A JP 2012034715 A JP2012034715 A JP 2012034715A JP 2013171964 A JP2013171964 A JP 2013171964A
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Abstract
【解決手段】半導体チップ41上の第1電極46と半導体チップの外部に配置された外部引出し電極45との双方に直径50μm超2mm以下のワイヤ28をウェッジ接合により接合して両電極を電気的に接続する超音波ワイヤボンディング装置であって、ワイヤ28の接合部位28aを加熱する加熱機構54を備える構成とする。加熱機構54は、例えば、ボンディングツール20を、絶縁体51によって互いに接触しない導電性の前側本体部52および後側本体部53に分離し、これらを一対の電極として機能させることで構成される。
【選択図】図4
Description
<超音波ワイヤボンディング装置の構成>
図1〜図5を参照して、まず第1実施形態に係るワイヤボンディング装置1の一例について説明する。図1に示すように、ワイヤボンディング装置1の背面側には、ボンディング前のワーク2aを搬送するワーク供給ライン3が形成され、正面側には、ボンディング後のワーク2dを搬送するワーク排出ライン4が設けられている。ワーク供給ライン3およびワーク排出ライン4はそれぞれベルトコンベア5・6によって構成される。
次に、このように構成されたワイヤボンディング装置1を用いたワイヤボンディング方法について説明する。
銅ワイヤは、常温での硬度がAlワイヤに比べて高いが、加熱することで硬度を低くすることができる。常温(ここでは25℃とした。)で銅ワイヤに所定の荷重を加えたときと、加熱した銅ワイヤに同一荷重を加えたときとの変形量の変化を表すグラフを図6に示す。同図に示すように、銅ワイヤの変形量は温度が高くなるほど大きくなる。
本実施形態のワイヤボンディング装置1は、一対の電極からなる加熱機構54を変形して図7に示すような形態とすることができる。すなわち、ボンディングツール20を1種の金属または合金から構成し、ボンディングツール20の先端を挟む位置に配置した一対の電極61・62により加熱機構54を構成する。ここでは、第2ワイヤガイド31を一方の電極61として利用し、他方の電極62を別途設けている。ボンディングツール20がワイヤ28を半導体チップ41上の電極46に押し付けていない状態でも一対の電極61・62がワイヤ28に接触するように、他方の電極62を、それ自体の弾性や別途設けられた付勢手段によって先端を下方に弾発付勢する構成とするとよい。加熱機構54をこのように構成することにより、第1実施形態と同様の効果を得られるほか、ボンディングツール20の設計自由度を向上することができる。なお、この場合にも、ワイヤ28は直径の5倍以上の長さにわたって加熱するのが好ましく、一対の電極61・62の配置によって加熱長さを適宜に設定する。ボンディングツール20の先端面の前後方向長さは接合面積を確保できる程度、すなわちワイヤ径の2〜3倍程度で足りる。
次に図9を参照して本発明の第2実施形態について説明する。なお、第1実施形態と同様の構成や機能をもつ部材や部位には同一の符号を付し、第1実施形態と重複する説明は省略して異なる点を中心に説明する。第3実施形態についても同様とする。
本実施形態では、図10に示すように、ボンディングツール20は、従来用いられている一般的なものと同様に1種の金属からなる貫通孔のない無垢の構成とされる一方、その周囲に電磁誘導コイル81が配置されている。電磁誘導コイル81は、ガイドホルダ33によって支持され、ボンディングツール20に接触しないように配置されており、その軸心に配置されたボンディングツール20を誘導加熱し、ボンディングツール20の熱伝導によってワイヤ28の接合部位28aを間接的に加熱する。接合部位28aの温度は、主にボンディングツール20の熱伝導率と接触時間とに依存するため、熱伝導率の高い素材でボンディングツール20を形成するとよく、接触時間を適宜設定することによって接合部位28aを所望の温度に加熱することができる。
2 ワーク
7 第1ステージ(加熱ステージ)
8 第2ステージ(予備加熱ステージ)
11 加熱領域
14 非酸化性雰囲気形成機構
19 上下動ブロック(加圧機構)
20 ボンディングツール(接合ツール)
21 振動子ブロック(振動伝達機構)
28 ワイヤ
28a 接合部位
32 ワイヤフィード機構
36 吹付ノズル(ガス吹付手段)
41 半導体チップ
45 外部引出し電極(第2電極)
46 電極(第1電極)
52 前側本体部(電極)
53 後側本体部(電極)
54 加熱機構
61 電極
62 電極
71 レーザ発振器
81 電磁誘導コイル
Claims (10)
- 半導体素子上の第1電極と前記半導体素子の外部に配置された第2電極との双方に直径50μm超2mm以下のワイヤをウェッジ接合により接合して前記両電極を電気的に接続する超音波ワイヤボンディング装置であって、
前記ワイヤに先端を係合させる接合ツールと、前記ワイヤを前記接合ツールに供給するワイヤフィード機構と、前記接合ツールに超音波振動を加える振動伝達機構と、前記接合ツールに荷重を加え、前記電極に接合される前記ワイヤの接合部位を加圧する加圧機構とを有し、
前記ワイヤの前記接合部位を加熱する加熱機構を更に有することを特徴とする超音波ワイヤボンディング装置。 - 前記加熱機構が、前記ワイヤの前記接合部位を前記接合ツールの熱伝導によらず直接加熱することを特徴とする、請求項1に記載の超音波ワイヤボンディング装置。
- 前記加熱機構が、前記ワイヤに接触して前記接合部位に電流を流す一対の電極を含むことを特徴とする、請求項1または請求項2に記載の超音波ワイヤボンディング装置。
- 前記加熱機構が、前記ワイヤの前記接合部位にレーザを照射するレーザ発振器を含むことを特徴とする、請求項1または請求項2に記載の超音波ワイヤボンディング装置。
- 前記加熱機構が、前記接合ツールを誘導加熱し、前記接合ツールの熱伝導により前記ワイヤの前記接合部位を間接的に加熱する電磁誘導コイルを含むことを特徴とする、請求項1に記載の超音波ワイヤボンディング装置。
- 前記ワイヤの前記接合部位に不活性ガスもしくは還元性ガスまたはこれらの混合ガスを吹付けるガス吹付手段を更に有することを特徴とする、請求項1〜請求項5のいずれか一項に記載の超音波ワイヤボンディング装置。
- 前記半導体素子および前記第2電極を含むワークを加熱する加熱ステージを更に有することを特徴とする、請求項1〜請求項6のいずれか一項に記載の超音波ワイヤボンディング装置。
- 前記加熱ステージに並設され、前記加熱ステージに載置される前に前記ワークを予備加熱する予備加熱ステージを更に有することを特徴とする、請求項7に記載の超音波ワイヤボンディング装置。
- 前記加熱されるワークの周囲を不活性ガスもしくは還元性ガスまたはこれらの混合ガスによる非酸化性雰囲気にする非酸化性雰囲気形成機構を更に有することを特徴とする、請求項7または請求項8に記載の超音波ワイヤボンディング装置。
- 半導体素子上の第1電極と前記半導体素子の外部に配置された第2電極とを直径50μm超2mm以下のワイヤにより電気的に接続する超音波ワイヤボンディング方法であって、
供給される前記ワイヤを接合ツールの先端に配置するステップと、
前記接合ツールに超音波振動を加えるとともに荷重を加え、前記接合ツールの先端に配置された前記ワイヤの接合部位を前記接合ツールの先端に係合させて前記第1電極および前記第2電極のどちらか一方にウェッジ接合により接合する第1接合ステップと、
前記接合されたワイヤを前記第1電極および前記第2電極のどちらか他方に架け渡すとともに前記接合ツールの先端に配置するステップと、
前記接合ツールに超音波振動を加えるとともに荷重を加え、前記接合ツールの先端に配置された前記ワイヤの接合部位を前記ツールの先端に係合させて前記第1電極および前記第2電極のどちらか他方にウェッジ接合により接合する第2接合ステップとを有し、
前記ワイヤを前記第1電極に接合するステップの前に、前記ワイヤの前記接合部位を加熱するステップを更に有することを特徴とする超音波ワイヤボンディング方法。
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CN105047572A (zh) * | 2014-04-17 | 2015-11-11 | 富士电机株式会社 | 引线接合装置以及引线接合方法 |
EP3550596A1 (en) * | 2018-04-04 | 2019-10-09 | Infineon Technologies AG | Arrangements and method for providing a wire bond connection |
EP3570318A1 (en) * | 2018-05-15 | 2019-11-20 | Infineon Technologies AG | Method for bonding an electrically conductive element to a bonding partner |
CN112055889A (zh) * | 2019-04-09 | 2020-12-08 | 株式会社海上 | 绝缘覆盖线的结合方法、连接构造、绝缘覆盖线的剥离方法以及接合装置 |
WO2023179817A3 (de) * | 2022-03-25 | 2023-12-21 | Hesse Gmbh | Ultraschallbondvorrichtung und drahtführungsmodul hierfür |
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CN105047572A (zh) * | 2014-04-17 | 2015-11-11 | 富士电机株式会社 | 引线接合装置以及引线接合方法 |
JP2015207592A (ja) * | 2014-04-17 | 2015-11-19 | 富士電機株式会社 | 半導体装置 |
US10896892B2 (en) | 2014-04-17 | 2021-01-19 | Fuji Electric Co., Ltd. | Wire bonding apparatus |
EP3550596A1 (en) * | 2018-04-04 | 2019-10-09 | Infineon Technologies AG | Arrangements and method for providing a wire bond connection |
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CN110491794A (zh) * | 2018-05-15 | 2019-11-22 | 英飞凌科技股份有限公司 | 用于将导电元件键合到键合对象的方法 |
CN112055889A (zh) * | 2019-04-09 | 2020-12-08 | 株式会社海上 | 绝缘覆盖线的结合方法、连接构造、绝缘覆盖线的剥离方法以及接合装置 |
WO2023179817A3 (de) * | 2022-03-25 | 2023-12-21 | Hesse Gmbh | Ultraschallbondvorrichtung und drahtführungsmodul hierfür |
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