JP2007035827A - ワイヤボンディング装置 - Google Patents
ワイヤボンディング装置 Download PDFInfo
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- JP2007035827A JP2007035827A JP2005215446A JP2005215446A JP2007035827A JP 2007035827 A JP2007035827 A JP 2007035827A JP 2005215446 A JP2005215446 A JP 2005215446A JP 2005215446 A JP2005215446 A JP 2005215446A JP 2007035827 A JP2007035827 A JP 2007035827A
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- 239000004020 conductor Substances 0.000 claims abstract description 100
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 abstract description 14
- 230000005540 biological transmission Effects 0.000 abstract description 8
- 230000004888 barrier function Effects 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45014—Ribbon connectors, e.g. rectangular cross-section
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78313—Wedge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8512—Aligning
- H01L2224/85148—Aligning involving movement of a part of the bonding apparatus
- H01L2224/85169—Aligning involving movement of a part of the bonding apparatus being the upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
- H01L2224/8518—Translational movements
- H01L2224/85181—Translational movements connecting first on the semiconductor or solid-state body, i.e. on-chip, regular stitch
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- H—ELECTRICITY
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】導電体6をボンディングツール7の先端付近まで導く供給経路を、ボンディングツール7と概ね平行とし、ボンディングツール7に対して共振体と相反する側のできるだけ近い位置にとるように、導電体ガイド11,12を配設する。
【選択図】図1
Description
2 BLT振動子
3 コーン
4 ホーン
5 導電体通過穴
6 導電体
7 ボンディングツール
8 ボンディングツールセットねじ
9 導電体カッタ
10 導電体ガイドホルダ
11 第1の導電体ガイド
12 第2の導電体ガイド
13 導電体スプール
14 ブロック
15 ホルダ
20 ケーシング
21 主回路端子
22 半導体素子
Claims (3)
- 振動子から発生された超音波振動を伝達する共振体と、
前記共振体の先端部付近に、前記共振体の中心軸に略直交する向きに延出されたボンディングツールと、
前記ボンディングツール先端に導かれる導電体を供給する導電体供給体とを有し、
被ボンディング材に導電体を接合するワイヤボンディング装置であって、
前記ボンディングツールの先端付近にあって前記共振体と相反する側に配設された導電体ガイドを有し、
前記導電体供給体を前記導電体ガイドの上方に配設することにより、
前記導電体を前記ボンディングツールと概ね平行に前記ボンディングツールの先端付近まで導くことを特徴とするワイヤボンディング装置。 - 振動子から発生された超音波振動を伝達する共振体と、
前記共振体の先端部付近に、前記共振体の中心軸に略直交する向きに延出されたボンディングツールと、
前記ボンディングツール先端に導かれる導電体を供給する導電体供給体とを有し、
被ボンディング材に導電体を接合するワイヤボンディング装置であって、
前記ボンディングツールの先端付近にあって前記共振体と相反する側に配設された第1の導電体ガイドと、
前記第1の導電体ガイドの上方に配設された第2の導電体ガイドとを有することにより、
前記導電体を前記ボンディングツールと概ね平行に前記ボンディングツールの先端付近まで導くことを特徴とするワイヤボンディング装置。 - 前記導電体が、リボンであることを特徴とする請求項1または請求項2のいずれか一項に記載のワイヤボンディング装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005215446A JP4271674B2 (ja) | 2005-07-26 | 2005-07-26 | ワイヤボンディング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005215446A JP4271674B2 (ja) | 2005-07-26 | 2005-07-26 | ワイヤボンディング装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007035827A true JP2007035827A (ja) | 2007-02-08 |
JP2007035827A5 JP2007035827A5 (ja) | 2007-05-24 |
JP4271674B2 JP4271674B2 (ja) | 2009-06-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005215446A Expired - Fee Related JP4271674B2 (ja) | 2005-07-26 | 2005-07-26 | ワイヤボンディング装置 |
Country Status (1)
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JP (1) | JP4271674B2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7537149B2 (en) * | 2006-09-26 | 2009-05-26 | Orthodyne Electronics Corporation | Deep access large ribbon bond head |
JP2009113083A (ja) * | 2007-11-07 | 2009-05-28 | Ultrasonic Engineering Co Ltd | 超音波接合ツール及び超音波接合ツールの取付方法 |
JP2010524314A (ja) * | 2007-04-04 | 2010-07-15 | エセック エージー | 超音波トランスデューサ |
JP2013171964A (ja) * | 2012-02-21 | 2013-09-02 | Ultrasonic Engineering Co Ltd | 超音波ワイヤボンディング装置および超音波ワイヤボンディング方法 |
CN105598573A (zh) * | 2009-02-06 | 2016-05-25 | 奥托戴尼电气公司 | 带式焊接工具及采用所述工具的方法 |
JP2016127174A (ja) * | 2015-01-06 | 2016-07-11 | 株式会社アドウェルズ | ワイヤボンディング装置 |
US10847491B2 (en) | 2009-02-06 | 2020-11-24 | Kulicke And Soffa Industries, Inc. | Ribbon bonding tools and methods of using the same |
-
2005
- 2005-07-26 JP JP2005215446A patent/JP4271674B2/ja not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7537149B2 (en) * | 2006-09-26 | 2009-05-26 | Orthodyne Electronics Corporation | Deep access large ribbon bond head |
JP2010524314A (ja) * | 2007-04-04 | 2010-07-15 | エセック エージー | 超音波トランスデューサ |
JP2009113083A (ja) * | 2007-11-07 | 2009-05-28 | Ultrasonic Engineering Co Ltd | 超音波接合ツール及び超音波接合ツールの取付方法 |
CN105598573A (zh) * | 2009-02-06 | 2016-05-25 | 奥托戴尼电气公司 | 带式焊接工具及采用所述工具的方法 |
US9929122B2 (en) | 2009-02-06 | 2018-03-27 | Orthodyne Electronics Corporation | Ribbon bonding tools and methods of using the same |
US10847491B2 (en) | 2009-02-06 | 2020-11-24 | Kulicke And Soffa Industries, Inc. | Ribbon bonding tools and methods of using the same |
US11978718B2 (en) | 2009-02-06 | 2024-05-07 | Kulicke and Soffa Industries, Inc,. | Ribbon bonding tools and methods of using the same |
JP2013171964A (ja) * | 2012-02-21 | 2013-09-02 | Ultrasonic Engineering Co Ltd | 超音波ワイヤボンディング装置および超音波ワイヤボンディング方法 |
JP2016127174A (ja) * | 2015-01-06 | 2016-07-11 | 株式会社アドウェルズ | ワイヤボンディング装置 |
Also Published As
Publication number | Publication date |
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JP4271674B2 (ja) | 2009-06-03 |
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