JP2013161990A5 - - Google Patents

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Publication number
JP2013161990A5
JP2013161990A5 JP2012023506A JP2012023506A JP2013161990A5 JP 2013161990 A5 JP2013161990 A5 JP 2013161990A5 JP 2012023506 A JP2012023506 A JP 2012023506A JP 2012023506 A JP2012023506 A JP 2012023506A JP 2013161990 A5 JP2013161990 A5 JP 2013161990A5
Authority
JP
Japan
Prior art keywords
charged particle
particle beams
substrate
drawing apparatus
target speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2012023506A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013161990A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012023506A priority Critical patent/JP2013161990A/ja
Priority claimed from JP2012023506A external-priority patent/JP2013161990A/ja
Priority to KR1020130009682A priority patent/KR20130090806A/ko
Priority to US13/754,216 priority patent/US20130199719A1/en
Publication of JP2013161990A publication Critical patent/JP2013161990A/ja
Publication of JP2013161990A5 publication Critical patent/JP2013161990A5/ja
Abandoned legal-status Critical Current

Links

JP2012023506A 2012-02-06 2012-02-06 描画装置および物品の製造方法 Abandoned JP2013161990A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012023506A JP2013161990A (ja) 2012-02-06 2012-02-06 描画装置および物品の製造方法
KR1020130009682A KR20130090806A (ko) 2012-02-06 2013-01-29 묘화 장치, 및 물품 제조 방법
US13/754,216 US20130199719A1 (en) 2012-02-06 2013-01-30 Drawing apparatus, and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012023506A JP2013161990A (ja) 2012-02-06 2012-02-06 描画装置および物品の製造方法

Publications (2)

Publication Number Publication Date
JP2013161990A JP2013161990A (ja) 2013-08-19
JP2013161990A5 true JP2013161990A5 (enExample) 2015-03-19

Family

ID=48901860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012023506A Abandoned JP2013161990A (ja) 2012-02-06 2012-02-06 描画装置および物品の製造方法

Country Status (3)

Country Link
US (1) US20130199719A1 (enExample)
JP (1) JP2013161990A (enExample)
KR (1) KR20130090806A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017063101A (ja) * 2015-09-24 2017-03-30 株式会社アドバンテスト 露光装置および露光方法
KR102358009B1 (ko) * 2015-11-10 2022-02-04 삼성전자주식회사 빔 투사 장치 및 빔 투사 장치를 이용하여 빔을 투사하는 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528048A (en) * 1994-03-15 1996-06-18 Fujitsu Limited Charged particle beam exposure system and method

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