JP2013160758A - 振動ビーム加速度計 - Google Patents

振動ビーム加速度計 Download PDF

Info

Publication number
JP2013160758A
JP2013160758A JP2012261042A JP2012261042A JP2013160758A JP 2013160758 A JP2013160758 A JP 2013160758A JP 2012261042 A JP2012261042 A JP 2012261042A JP 2012261042 A JP2012261042 A JP 2012261042A JP 2013160758 A JP2013160758 A JP 2013160758A
Authority
JP
Japan
Prior art keywords
resonator
frequency
digital
resonance mode
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012261042A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013160758A5 (enExample
Inventor
Savchenko Arthur
アーサー・サブチェンコ
Petri Fred
フレッド・ペトリ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2013160758A publication Critical patent/JP2013160758A/ja
Publication of JP2013160758A5 publication Critical patent/JP2013160758A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
JP2012261042A 2012-02-03 2012-11-29 振動ビーム加速度計 Pending JP2013160758A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/365,574 2012-02-03
US13/365,574 US10429405B2 (en) 2012-02-03 2012-02-03 Vibrating beam accelerometer

Publications (2)

Publication Number Publication Date
JP2013160758A true JP2013160758A (ja) 2013-08-19
JP2013160758A5 JP2013160758A5 (enExample) 2015-12-03

Family

ID=47605301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012261042A Pending JP2013160758A (ja) 2012-02-03 2012-11-29 振動ビーム加速度計

Country Status (3)

Country Link
US (1) US10429405B2 (enExample)
EP (1) EP2623994B1 (enExample)
JP (1) JP2013160758A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10724897B2 (en) 2015-06-17 2020-07-28 National Science Foundation Cascaded gapped cantilever for low-frequency vibration sensing
US10545167B2 (en) * 2015-10-20 2020-01-28 Analog Devices, Inc. Multiple-axis resonant accelerometers
GB2561889B (en) * 2017-04-27 2022-10-12 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
GB2561886B (en) * 2017-04-27 2022-10-19 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer
DE102019213885A1 (de) 2019-09-11 2021-03-11 Continental Automotive Gmbh Batteriesensor
CN111046578B (zh) * 2019-12-24 2023-07-14 北京航天控制仪器研究所 一种石英振梁加速度计建立输出模型的方法
US11953514B2 (en) * 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
US11965907B2 (en) * 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
US11959935B2 (en) * 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4258572A (en) * 1979-12-03 1981-03-31 General Motors Corporation Single axis crystal constrained temperature compensated digital accelerometer
JPH04361165A (ja) * 1991-06-07 1992-12-14 Japan Aviation Electron Ind Ltd 振動子型加速度計
JPH0996552A (ja) * 1995-09-29 1997-04-08 Omron Corp センサ装置
JP2009156831A (ja) * 2007-12-28 2009-07-16 Epson Toyocom Corp 加速度検知ユニット及び加速度検知装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4912990A (en) * 1989-02-27 1990-04-03 Sundstrand Data Control, Inc. Magnetically driven vibrating beam force transducer
US5331242A (en) * 1992-11-18 1994-07-19 Alliedsignal Inc. Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode
US5501103B1 (en) * 1994-02-15 1998-08-04 Allied Signal Inc Two-port electromagnetic drive for a double-ended tuning fork
US5623098A (en) * 1994-03-25 1997-04-22 Honeywell Inc. Dual mode single cavity compensation for microwave resonators
JP3601822B2 (ja) 2002-09-11 2004-12-15 東洋通信機株式会社 双音さ型振動ジャイロセンサ
US6938334B2 (en) 2003-10-31 2005-09-06 Honeywell International, Inc. Vibrating beam accelerometer two-wafer fabrication process
US7950281B2 (en) * 2007-02-28 2011-05-31 Infineon Technologies Ag Sensor and method for sensing linear acceleration and angular velocity

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4258572A (en) * 1979-12-03 1981-03-31 General Motors Corporation Single axis crystal constrained temperature compensated digital accelerometer
JPH04361165A (ja) * 1991-06-07 1992-12-14 Japan Aviation Electron Ind Ltd 振動子型加速度計
JPH0996552A (ja) * 1995-09-29 1997-04-08 Omron Corp センサ装置
JP2009156831A (ja) * 2007-12-28 2009-07-16 Epson Toyocom Corp 加速度検知ユニット及び加速度検知装置

Also Published As

Publication number Publication date
US10429405B2 (en) 2019-10-01
EP2623994A1 (en) 2013-08-07
EP2623994B1 (en) 2014-04-30
US20130204571A1 (en) 2013-08-08

Similar Documents

Publication Publication Date Title
JP2013160758A (ja) 振動ビーム加速度計
KR101944237B1 (ko) Mems 자이로스코프를 위한 디지털 제어기
EP2572163B1 (en) Angular velocity sensor with quadrature rejection
CN109073381A (zh) 具有力反馈能力的副感测回路
EP3835795B1 (en) Vibrating beam accelerometer with pressure damping
JP7040253B2 (ja) 物理量センサーモジュール、傾斜計、慣性計測装置、構造物監視装置、及び移動体
WO2010092816A1 (ja) 発振回路、発振回路の製造方法、この発振回路を用いた慣性センサ及び電子機器
Chao et al. An aluminum nitride on silicon resonant MEMS accelerometer operating in ambient pressure
TWI531806B (zh) 兩用共振型磁力計
JP4853045B2 (ja) フラックスゲートセンサの信号処理装置
CN112782428A (zh) 具有压力阻尼的振梁加速度计
CN114689103B (zh) 振动整流误差校正装置及方法、以及传感器模块
Ismail et al. A high performance MEMS based digital-output gyroscope
CN112782427A (zh) 用于避免振梁加速度计的电容馈通的谐振器电极配置
US11988685B2 (en) Vibration rectification error correction device, sensor module, and vibration rectification error correction method
Park et al. Self-sustained dual-mode mechanical frequency comb sensors
Northemann et al. Excess loop delay compensated electro-mechanical bandpass sigma-delta modulator for gyroscopes
Ma et al. Micro-temperature sensor based on quartz tuning fork resonator
US12241908B2 (en) Vibration rectification error correction device, sensor module, and vibration rectification error correction method
Xu et al. High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
Sabater et al. Breaking the 1 deg/hr Bias Instability Limit with Frequency Modulated Gyroscopes: Adaptive Notch Filters for Enhanced Bandwidth and Control
JP2012163477A (ja) 角速度センサ
Pileri et al. 60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers
RU2572412C1 (ru) Интерферометр повышенной точности с активным подавлением паразитных вибраций
JP5765544B2 (ja) 物理量検出装置、物理量検出装置の異常診断システム及び物理量検出装置の異常診断方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151016

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20151016

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160714

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160727

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20161027

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170626

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180205