JP2013160758A5 - - Google Patents

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Publication number
JP2013160758A5
JP2013160758A5 JP2012261042A JP2012261042A JP2013160758A5 JP 2013160758 A5 JP2013160758 A5 JP 2013160758A5 JP 2012261042 A JP2012261042 A JP 2012261042A JP 2012261042 A JP2012261042 A JP 2012261042A JP 2013160758 A5 JP2013160758 A5 JP 2013160758A5
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JP
Japan
Prior art keywords
resonator
resonance mode
drive
oscillator
bandpass filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012261042A
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English (en)
Japanese (ja)
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JP2013160758A (ja
Filing date
Publication date
Priority claimed from US13/365,574 external-priority patent/US10429405B2/en
Application filed filed Critical
Publication of JP2013160758A publication Critical patent/JP2013160758A/ja
Publication of JP2013160758A5 publication Critical patent/JP2013160758A5/ja
Pending legal-status Critical Current

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JP2012261042A 2012-02-03 2012-11-29 振動ビーム加速度計 Pending JP2013160758A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/365,574 2012-02-03
US13/365,574 US10429405B2 (en) 2012-02-03 2012-02-03 Vibrating beam accelerometer

Publications (2)

Publication Number Publication Date
JP2013160758A JP2013160758A (ja) 2013-08-19
JP2013160758A5 true JP2013160758A5 (enExample) 2015-12-03

Family

ID=47605301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012261042A Pending JP2013160758A (ja) 2012-02-03 2012-11-29 振動ビーム加速度計

Country Status (3)

Country Link
US (1) US10429405B2 (enExample)
EP (1) EP2623994B1 (enExample)
JP (1) JP2013160758A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10724897B2 (en) 2015-06-17 2020-07-28 National Science Foundation Cascaded gapped cantilever for low-frequency vibration sensing
US10545167B2 (en) * 2015-10-20 2020-01-28 Analog Devices, Inc. Multiple-axis resonant accelerometers
GB2561889B (en) * 2017-04-27 2022-10-12 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
GB2561886B (en) * 2017-04-27 2022-10-19 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer
DE102019213885A1 (de) 2019-09-11 2021-03-11 Continental Automotive Gmbh Batteriesensor
CN111046578B (zh) * 2019-12-24 2023-07-14 北京航天控制仪器研究所 一种石英振梁加速度计建立输出模型的方法
US11953514B2 (en) * 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
US11965907B2 (en) * 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
US11959935B2 (en) * 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4258572A (en) 1979-12-03 1981-03-31 General Motors Corporation Single axis crystal constrained temperature compensated digital accelerometer
US4912990A (en) * 1989-02-27 1990-04-03 Sundstrand Data Control, Inc. Magnetically driven vibrating beam force transducer
JP3072354B2 (ja) 1991-06-07 2000-07-31 日本航空電子工業株式会社 振動子型加速度計
US5331242A (en) * 1992-11-18 1994-07-19 Alliedsignal Inc. Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode
US5501103B1 (en) * 1994-02-15 1998-08-04 Allied Signal Inc Two-port electromagnetic drive for a double-ended tuning fork
US5623098A (en) * 1994-03-25 1997-04-22 Honeywell Inc. Dual mode single cavity compensation for microwave resonators
JP3102320B2 (ja) 1995-09-29 2000-10-23 オムロン株式会社 センサ装置
JP3601822B2 (ja) 2002-09-11 2004-12-15 東洋通信機株式会社 双音さ型振動ジャイロセンサ
US6938334B2 (en) 2003-10-31 2005-09-06 Honeywell International, Inc. Vibrating beam accelerometer two-wafer fabrication process
US7950281B2 (en) * 2007-02-28 2011-05-31 Infineon Technologies Ag Sensor and method for sensing linear acceleration and angular velocity
JP2009156831A (ja) 2007-12-28 2009-07-16 Epson Toyocom Corp 加速度検知ユニット及び加速度検知装置

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