JP2013141651A - Energy ray irradiation apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an energy ray irradiation apparatus capable of lowering adhesive force of an energy ray curing type adhesion sheet in a small light amount of an energy ray.SOLUTION: The energy ray irradiation apparatus EM1 irradiates with energy rays the adhesion sheet AS having an energy ray curing type adhesive layer AD pasted on one face of an adherend AH and includes: a support means 1 for supporting the adherend AH; an energy ray irradiation means 2 capable of being arranged on one face side of the adherend AH supported with the support means 1; and an inert gas supply means 3 for supplying an inert gas so that at least an energy ray irradiation region of the adhesion sheet AS is an inert gas atmosphere. Furthermore the apparatus is provided with a heating means 4 for heating an inert gas before supplying the inert gas to the energy ray irradiation region.

Description

  The present invention relates to an energy beam irradiation apparatus, and more particularly to a device for irradiating an adhesive sheet having an energy beam curable adhesive layer attached to an adherend surface of an adherend with an energy beam.

  Conventionally, an energy ray is applied to an adhesive sheet having an energy ray curable adhesive layer attached to the adherend surface of the adherend, thereby reducing the adhesive strength of the adhesive sheet, and the adhesive sheet from the adherend. For example, Patent Document 1 discloses an energy beam irradiation apparatus that facilitates peeling. Such an apparatus uses ultraviolet rays as energy rays, an ultraviolet-sensitive adhesive sheet as an adhesive sheet, and supports an adherend to which the ultraviolet-sensitive adhesive sheet is attached in a housing in an inert gas atmosphere. It is configured to irradiate ultraviolet rays toward the ultraviolet sensitive adhesive sheet.

  Here, a high-pressure mercury lamp or the like is generally used as the ultraviolet irradiation means, but this type of ultraviolet irradiation means has a problem of high power consumption. For this reason, in recent years, studies using ultraviolet LED lamps have been made. However, the ultraviolet LED lamp has a smaller amount of light than a high-pressure mercury lamp. Therefore, under the condition that the irradiation time per unit area is the same, in order to reduce the adhesive strength to the same level as the adhesive sheet irradiated with a high-pressure mercury lamp, etc., from the ultraviolet LED lamp It was necessary to increase the amount of light. Therefore, the inventor of the present application has made extensive studies, and if the adhesive sheet is heated to a predetermined temperature when the adhesive sheet is irradiated with energy rays, the adhesive strength of the adhesive sheet is reduced even if the amount of energy rays is small. The knowledge that it can be obtained.

JP-A-6-196555

  This invention makes it the subject to provide the energy beam irradiation apparatus which can reduce the adhesive force of an energy beam curing type adhesive sheet with the light quantity of a small energy beam.

  In order to solve the above-mentioned problems, the energy beam irradiation apparatus of the present invention for irradiating an energy sheet to an adhesive sheet having an energy beam curable adhesive layer adhered to an adherend surface of an adherend is the adherend. A support means for supporting the body, an energy ray irradiation means that can be disposed on the adherend surface side of the adherend supported by the support means, and at least an energy ray irradiation region in the adhesive sheet is an inert gas atmosphere. And an inert gas supply means for supplying the inert gas, and further comprising a heating means for heating the inert gas before supplying the inert gas to the energy beam irradiation region.

  In the present invention, the energy ray irradiating means includes a condensing means for condensing and irradiating energy rays on the energy irradiation region, and the inert gas supply means is an inert gas toward the energy ray irradiation region. It is preferable to have a converging means for converging and blowing out.

  Further, the energy beam irradiation means may be configured to be able to form the energy irradiation region in a linear shape extending in one direction of the adherend.

  According to the present invention, since the energy ray irradiation region in the adhesive sheet is heated with the heated inert gas, the adhesive strength of the adhesive sheet is sufficiently reduced even if the amount of energy rays is small. Moreover, since the energy ray irradiation area | region of an adhesive sheet becomes inert gas atmosphere, it can prevent that the adhesive layer component of an adhesive sheet couple | bonds with atoms and molecules, such as oxygen and water, for example, and causes poor hardening. Furthermore, since the inert gas is heated before the inert gas is supplied to the energy beam irradiation region, the thermal efficiency is better than that for heating the entire atmosphere in which the adherend is placed.

Sectional drawing explaining the structure of the energy beam irradiation apparatus which concerns on 1st Embodiment. (A) And (b) is a graph which shows the result of the experiment which shows the effect of this invention. Sectional drawing explaining the structure of the energy beam irradiation apparatus which concerns on 2nd Embodiment. The other sectional view explaining composition of an energy beam irradiation device concerning a 2nd embodiment.

  Hereinafter, referring to the drawings, the energy rays are ultraviolet rays, and the energy ray curable adhesive sheet is an adhesive sheet AS having an ultraviolet sensitive (ultraviolet curable) adhesive layer AD on one surface of the base sheet BS. The present embodiment will be described by taking an energy beam irradiation device as an example to cure the adhesive layer AD by irradiating the adhesive sheet AS with ultraviolet rays, thereby reducing the adhesive strength and facilitating peeling from the adherend AH. To do. In the first embodiment, all directions such as up, down, left, and right are based on FIG.

  Referring to FIG. 1, an energy beam irradiation apparatus EM1 of the first embodiment is supported by a support unit 1 that supports an adherend AH having an adhesive sheet AS pasted on an upper surface as a pasting surface, and the support unit 1 supports the energy beam irradiation device EM1. The ultraviolet irradiation means 2 as an energy ray irradiation means that can be disposed opposite to the upper surface of the adherend AH, and at least the ultraviolet irradiation area as the energy ray irradiation area of the adhesive sheet AS are in an inert gas atmosphere. An inert gas supply means 3 for supplying an active gas and a heating means 4 for heating the inert gas before supplying the inert gas to the ultraviolet irradiation region are provided.

  The support means 1 includes a table 12 having a placement surface 11 in a direction orthogonal to the paper surface in FIG. 1, and supports the adherend AH placed on the placement surface 11 by a suction means, a chuck means or the like (not shown). Can do.

  The ultraviolet irradiation means 2 includes a holding substrate 22 having a lamp holding surface 21 in a direction orthogonal to the paper surface in FIG. 1, a plurality of ultraviolet LED lamps 23 arranged in the left and right direction and the depth direction of the lamp holding surface 21, and an ultraviolet LED lamp 23. It is comprised with the reflecting plate 24 arrange | positioned so that the circumference | surroundings except the lower surface of the said ultraviolet LED lamp 23 may be enclosed above. The ultraviolet LED lamp 23 is disposed in a region substantially corresponding to the planar shape of the adherend AH, and the reflecting plate 24 is formed in a rectangular or semicircular shape when viewed in cross section. A reflective layer having a high rate is formed, or a reflective film is attached (not shown). As a result, when the ultraviolet LED lamp 23 is turned on, the ultraviolet rays directly downward from the ultraviolet LED lamp 23 and the ultraviolet rays reflected by the inner surface of the reflecting plate 24 are irradiated on the entire surface of the adhesive sheet AS. In this case, the entire area on the adhesive sheet AS is an ultraviolet irradiation area.

  The inert gas supply means 3 includes a sealed container 31 capable of sealing the inside of the container CB with an upper lid CA and an open top container CB, one end connected to a gas supply source (not shown), and the other end of the container CB. A gas supply pipe 32 connected to the right side wall, a supply side control valve 33 provided in the middle of the gas supply pipe 32 and capable of controlling the flow rate of the supplied gas, one end connected to the left side wall of the container CB, and others An end is open or connected to another member, and includes an exhaust pipe 34 that exhausts the gas and inert gas in the hermetic container 31, and an exhaust side control valve 35 that can control the flow rate of the exhausted gas. The upper lid CA is provided so as to be separated from and close to the container CB by a driving device such as a direct acting motor (not shown). Further, the upper lid CA supports the reflecting plate 24 via the spacer 36. Nitrogen gas, argon gas, neon gas, or the like can be used as the inert gas.

  The heating means 4 includes a coil heater 41 provided in the middle of the gas supply pipe 32 on the upstream side of the supply side control valve 33 in the inert gas supply direction. And before the inert gas which flows through the gas supply pipe | tube 32 is supplied in the airtight container 31 by heat exchange when passing the coil heater 41, the said inert gas is heated to predetermined temperature. In addition, heating temperature can be suitably set according to the kind of adhesive sheet AS.

Next, the operation of the energy beam irradiation apparatus EM1 will be described.
First, the upper lid CA is separated from the container CB by a driving device (not shown), and a conveying means (not shown) places the adherend AH on the placement surface 11 of the table 12 and supports the adherend AH. Then, after the upper lid CA is brought close to the container CB to form the sealed container 31, the supply side control valve 33 and the exhaust side control valve 35 are controlled to supply the inert gas from the gas supply pipe 32 into the sealed container 31. At the same time, gas such as the atmosphere and inert gas in the sealed container 31 is exhausted from the exhaust pipe 34. At this time, since the inert gas passes through the coil heater 41 and is heated to a predetermined temperature, the inside of the sealed container 31 is replaced with a heated inert gas atmosphere. Next, when a gas concentration meter (not shown) detects that the inside of the sealed container 31 has reached a predetermined inert gas concentration, the supply side control valve 33 and the exhaust side control valve 35 are controlled to Is stopped, and the supply of the inert gas from the gas supply pipe 32 is stopped. Thereby, at least the ultraviolet irradiation region of the adhesive sheet AS can be made an inert gas atmosphere. Next, when the ultraviolet lamp 23 is turned on to irradiate the entire surface of the adhesive sheet AS with ultraviolet rays, the adhesive layer AD of the adhesive sheet AS is reduced in adhesive force due to ultraviolet curing and easily peeled off from the adherend AH. When the adhesive sheet AS is irradiated with a predetermined amount of ultraviolet light, the upper lid CA is separated from the container CB by a driving device (not shown), and a conveying means (not shown) removes the adherend AH from the table 12 and separates the adhesive sheet peeling device or the like. To the next device. Thereafter, the same operation as described above is repeated.

  According to the present embodiment, since the ultraviolet irradiation region of the adhesive sheet AS is heated by the supply of the heated inert gas, even when the ultraviolet LED lamp 23 is used, the adhesive strength of the adhesive sheet AS is small. Is sufficiently reduced. In addition, since the ultraviolet irradiation region of the adhesive sheet AS becomes an inert gas atmosphere, it is possible to prevent the components of the adhesive layer AD from being bonded to atoms and molecules such as oxygen and water and causing poor curing. Further, since the inert gas is heated by the coil heater 41 before supplying the inert gas to the ultraviolet irradiation region, the entire inside of the sealed container 31 (the entire atmosphere in which the adherend AH is placed) is heated. And heat efficiency is good.

  In order to confirm the above effects, the following experiment was performed using the energy beam irradiation apparatus EM1 shown in FIG. That is, as an adhesive sheet AS, when an A sheet (model: D-210 / Lintec Co., Ltd.) and a B sheet (model: D-867 / Lintec Co., Ltd.) are used and the adhesive sheet AS is not heated, 50 ° C. The adhesive strength (mN / 25 mm) after UV irradiation was measured when a predetermined amount of light (mJ / cm 2) was irradiated from the UV LED lamp 23 under the conditions of heating to 80 ° C. and heating to 80 ° C., respectively. In this case, the adhesive strength was measured according to JIS Z0237 (the adherend AH is SUS304).

  Further, as a comparative experiment, ultraviolet rays were irradiated to the A sheet and the B sheet by a UV curing apparatus (product name “RAD-2000” / Lintec Co., Ltd.) using a high pressure mercury lamp, and the adhesive strength after irradiation (mN / 25 mm). ) Was measured respectively. In the case of the A sheet, the adhesive strength was reduced to 250 to 280 (mN / 25 mm), and in the case of the B sheet, the adhesive strength was reduced to 40 to 70 (mN / 25 mm).

  2A and 2B are graphs showing the relationship between the amount of ultraviolet light and the adhesive strength after ultraviolet irradiation. In FIG. 2, ● represents the result of a comparative experiment. According to this, in the case of the A sheet, under the condition that the A sheet is not heated, the adhesive strength is the above-described adhesive strength of 250 to 280 (mN / 25 mm) as shown by the -o- line in FIG. It can be seen that a light amount of about 700 (mJ / cm 2) is required to reduce the light intensity to. On the other hand, under the condition heated to 50 ° C., the adhesive strength of the A sheet is lowered to the above-mentioned adhesive strength of 250 to 280 (mN / 25 mm) as shown by the line −Δ− in FIG. It is understood that a light amount of about 200 (mJ / cm 2) is sufficient. Further, under the condition of heating to 80 ° C., as shown by-□-in FIG. 2A, about 100 (in order to reduce the adhesive strength to the above-mentioned adhesive strength of 250 to 280 (mN / 25 mm). It can be seen that a light amount of mJ / cm2) is sufficient.

  Next, in the case of the B sheet, under the condition that the B sheet is not heated, the adhesive strength is adjusted to the above-described adhesive strength of 250 to 280 (mN / 25 mm) as shown by the -o- line in FIG. It can be seen that a light amount of about 700 (mJ / cm 2) is required to reduce the light intensity to about 1. On the other hand, under the condition heated to 50 ° C., the adhesive strength of the A sheet is lowered to the above-mentioned adhesive strength of 250 to 280 (mN / 25 mm) as shown by the line −Δ− in FIG. It is understood that a light amount of about 200 (mJ / cm 2) is sufficient. Further, under the condition of heating to 80 ° C., as shown by-□-in FIG. 2A, about 100 (in order to reduce the adhesive strength to the above-mentioned adhesive strength of 250 to 280 (mN / 25 mm). It can be seen that a light amount of mJ / cm2) is sufficient.

  Next, the energy beam irradiation apparatus EM2 of 2nd Embodiment is demonstrated with reference to FIG. In addition, the same code | symbol shall be used about the same member or element as the said 1st Embodiment, and detailed description is abbreviate | omitted. In the second embodiment, when directions such as up, down, left, and right are shown, all are based on FIG.

  The energy beam irradiating device EM2 can be disposed so as to be opposed to the support means 10 for supporting the adherend AH having the adhesive sheet AS attached to one surface (upper surface) and the adherend AH supported by the support means 10. The ultraviolet irradiation means 20, the inert gas supply means 30 for supplying the inert gas so that at least the ultraviolet irradiation area of the adhesive sheet AS becomes an inert gas atmosphere, and before the inert gas is supplied to the ultraviolet irradiation area And a heating means 4 for heating the inert gas.

  The support means 10 includes a table 102 having a mounting surface 101 in a direction orthogonal to the paper surface in FIG. 3 and a moving stage 103 including a driving device such as a linear motion motor (not shown) that can move the table 102 in the left-right direction in FIG. The adherend AH placed on the placement surface 101 can be supported by a suction means, a chuck means or the like (not shown).

  The ultraviolet irradiation means 20 includes a holding substrate 202 having a lamp holding surface 201 in a direction orthogonal to the paper surface in FIG. 3, a plurality of ultraviolet LED lamps 203 arranged on the lamp holding surface 201 in the left-right direction and the depth direction, and an ultraviolet LED lamp 203 It is composed of a reflection plate 204 serving as a light collecting means disposed so as to surround the periphery of the ultraviolet LED lamp 203 except the lower surface thereof. The ultraviolet LED lamp 203 is disposed in a region that is shorter than the width of the adhesive sheet AS in the left-right direction and substantially the same length as the width of the adhesive sheet AS in the direction perpendicular to the paper surface in FIG. It is formed in a semi-cylindrical shape so as to cover the upper part of 203. As a result, when the ultraviolet LED lamp 203 is turned on, the ultraviolet rays directly going downward from the ultraviolet LED lamp 203 and the ultraviolet rays reflected by the inner surface of the reflector 204 extend in one direction, that is, lines extending in the direction perpendicular to the paper surface in FIG. Light is emitted toward the adhesive sheet AS. The focal point of the line light is formed in the same plane as the surface on which the adhesive layer AD is located. In this case, the region irradiated with line light on the adhesive sheet AS is the ultraviolet irradiation region.

  The inert gas supply means 30 is provided as a converging means in which the ultraviolet irradiation means 20 can be accommodated in place of the sealed container 31 and an opening 301 extending in the direction orthogonal to the paper surface in FIG. The present embodiment is different from the inert gas supply means 3 of the first embodiment in that the hood 302 is provided and the exhaust pipe 34 and the exhaust side control valve 35 are not provided. When the gas supply pipe 32 is connected to the hood 302 and an inert gas is supplied from the gas supply pipe 32, the inert gas is focused toward the opening 301, and the inert gas is sprayed onto the ultraviolet irradiation region. Only the ultraviolet irradiation region is an inert gas atmosphere. The opening 301 does not block the line light irradiated from the ultraviolet irradiation means 20.

Next, the operation of the energy beam irradiation apparatus EM2 will be described.
First, a conveying means (not shown) places the adherend AH on the placement surface 101 of the table 102 and supports the adherend AH. Then, when the inert gas is supplied from the gas supply pipe 32 to the hood 302 by controlling the supply side control valve 33, the inert gas is heated to a predetermined temperature by passing through the coil heater 41 and ejected from the opening 301. Is done. Next, when the ultraviolet lamp 203 is turned on, line light is formed focusing on the same plane where the adhesive layer AD is located. Next, when the adherend AH is relatively moved at a constant speed in the right direction in FIG. 3 by the moving stage 103, the inert gas heated to a predetermined temperature is irradiated in the ultraviolet irradiation region facing the opening 301 in the adhesive sheet AS. While being sprayed, line light is irradiated to the ultraviolet irradiation region. Then, when the moving stage 103 moves relatively until the adherend AH passes through the line light, the entire surface of the adherend AH is irradiated with ultraviolet rays. According to this, compared with the energy irradiation apparatus EM1 of the first embodiment, the number of ultraviolet LED lamps 203 can be reduced, and a simple configuration can be achieved without using a sealed container or the like that houses the adherend AH. An energy irradiation device can be realized.

  In addition, it is good also as a structure which blows off inert gas toward an ultraviolet irradiation area | region separately from a focusing means. In the second embodiment, a single ultraviolet LED lamp 203 is used, and instead of the moving stage 103, a linear motion motor or the like that moves the adherend AH in the left-right direction and the direction orthogonal to the paper surface in FIG. An XY stage including equipment may be provided.

  Furthermore, in the second embodiment, as shown in FIG. 4, the inside of the hood 302 is partitioned at equal intervals, and the ultraviolet LED lamps 203 are provided in each of the insides, so that the ultraviolet lamps 203 not corresponding to the adherend AH are provided. You may comprise so that the ultraviolet LED lamp 203 which is not corresponding | compatible can be extinguished.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said thing. In each of the embodiments described above, ultraviolet rays have been described as an example of energy rays, but the present invention can be applied even if X-rays or electron beams are used.
In addition to the ultraviolet LED lamp, a high-pressure mercury lamp, a metal halide lamp, a xenon lamp, a fluorescent lamp, a halogen lamp, or the like may be used as the energy ray light source.
Furthermore, the heating means 4 may employ other heaters such as an infrared heater and a halogen heater in addition to the coil heater 41, and can heat the inert gas to a predetermined temperature before spraying it on the adherend AH. Any form is acceptable.
Moreover, you may comprise so that the adhesive sheet AS side may be supported by a mounting surface, and an ultraviolet-ray may be irradiated from the support means side, and in this case, a to-be-sticked surface becomes a lower surface in FIG.1 and FIG.3. Further, when the adhesive sheet AS is pasted on both the upper and lower surfaces in FIGS. 1 and 3 of the adherend AH, the pasted surfaces are the upper and lower surfaces in FIGS. 1 and 3, and the upper and lower surfaces of the adherend AH. You may comprise so that an ultraviolet-ray may be irradiated.
Further, the light condensing means may be a lens or the like.
Further, the drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).
Further, the type and material of the adherend AH and the adhesive sheet AS in the present invention are not particularly limited. For example, the adhesive sheet AS has an intermediate layer between the base sheet BS and the adhesive layer AD. Or it may have three or more layers such as those having a cover layer on the upper surface of the base sheet BS. Further, the adhesive sheet AS may be one that can peel the base sheet BS from the adhesive layer AD, such as a so-called double-sided adhesive sheet. Alternatively, it may have a multilayer intermediate layer, or a single layer or multilayer without an intermediate layer. Furthermore, the adherend AH may be an appropriate article (for example, a food or a resin container), the adhesive sheet AS may be a label, the adherend AH is a semiconductor wafer, and the adhesive sheet AS is protected. It may be a sheet, a dicing tape, a die attach film, or the like. In this case, the semiconductor wafer can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, etc., and the adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, a dicing tape, a die attach film, but any other sheet, An adhesive sheet having an arbitrary use and shape such as a film and a tape can be applied. Further, the adherend AH may be an optical disk substrate, and the adhesive sheet AS may have a resin layer constituting a recording layer.
As described above, the adherend AH can target not only other plate-like members such as a glass plate, a steel plate, pottery, a wooden plate, and a resin plate, but also members and articles of any form.

AH ... Adherence, AS ... Adhesive sheet, AD ... Adhesive layer, EM1, EM2 ... Energy beam irradiation device, 1 ... Supporting means, 2,20 ... Ultraviolet irradiation means (energy beam irradiation means), 3 ... Inert gas Supply means, 4... Heating means, 204... Reflector (condensing means), 302.

Claims (3)

In the energy beam irradiation device for irradiating the energy sheet to the adhesive sheet having the energy ray curable adhesive layer adhered to the adherend surface of the adherend,
A support means for supporting the adherend;
Energy beam irradiating means that can be arranged on the adherend surface side of the adherend supported by the supporting means;
An inert gas supply means for supplying the inert gas so that at least the energy beam irradiation region in the adhesive sheet has an inert gas atmosphere,
An energy beam irradiation apparatus further comprising heating means for heating the inert gas before supplying the inert gas to the energy beam irradiation region.   The energy ray irradiating means includes a condensing means for condensing and irradiating energy rays to the energy irradiation region, and the inert gas supply means focuses the inert gas toward the energy ray irradiation region. The energy beam irradiation apparatus according to claim 1, further comprising a focusing unit for blowing out. The energy beam irradiation apparatus according to claim 1, wherein the energy beam irradiation unit is configured to be able to form the energy irradiation region in a linear shape extending in one direction of an adherend.

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