JP2013125764A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2013125764A JP2013125764A JP2011272084A JP2011272084A JP2013125764A JP 2013125764 A JP2013125764 A JP 2013125764A JP 2011272084 A JP2011272084 A JP 2011272084A JP 2011272084 A JP2011272084 A JP 2011272084A JP 2013125764 A JP2013125764 A JP 2013125764A
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- support substrate
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- light absorption
- semiconductor
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Abstract
【解決手段】半導体装置の製造方法は、半導体機能部10と、レーザ光を透過させる支持基板部20と、を、半導体機能部と支持基板部との間に設けられた接合部30を介して互いに対向させる配置工程を備える。接合部は、接合層33と、光吸収層31と、を含む。光吸収層は、接合層と支持基板部との間に設けられ、レーザ光に対する吸収率が接合層のレーザ光に対する吸収率以上である。製造方法は、レーザ光を、支持基板部を介して光吸収層に照射し、レーザ光により加熱された光吸収層からの熱伝導により接合層を溶融させ、半導体機能部と支持基板部とを接合する工程をさらに備える。
【選択図】図1
Description
なお、図面は模式的または概念的なものであり、各部分の厚みと幅との関係、部分間の大きさの比率などは、必ずしも現実のものと同一とは限らない。また、同じ部分を表す場合であっても、図面により互いの寸法や比率が異なって表される場合もある。
なお、本願明細書と各図において、既出の図に関して前述したものと同様の要素には同一の符号を付して詳細な説明は適宜省略する。
図1(a)及び図1(b)は、第1の実施形態に係る半導体装置の製造方法を例示する模式断面図である。
図1(a)に表したように、本実施形態に係る半導体装置の製造方法においては、半導体機能部10と、支持基板部20と、が用いられる。本製造方法では、半導体機能部10と、支持基板部20と、を接合部30を介して互いに対向させる(配置工程)。
レーザ光により加熱された光吸収層31からの熱伝導により第1接合膜33aおよび第2接合膜33bを溶融させ、半導体機能部10と支持基板部20とを接合する。このとき、レーザ光を光吸収層31の主面31xに沿って走査し、上記の溶融と上記の接合を、例えば、接合面33fの全面に渡って行う。
光吸収層31は、例えば、レーザ光に対し低反射高光吸収率を有する。これにより、光吸収層31において、レーザ光を効率よく熱に変換できる。光吸収層31の反射率をRm、支持基板部20の光吸収率をr(0<r≪1−Rm)とすれば、支持基板部20に入射したレーザ光のうちで、光吸収層31において吸収されるエネルギーEA31は、
EA31=(1−Rm)(1−r) ・・・(1)
と表される。
EA20=r(1+(1−r)Rm) ・・・(2)
と表される。
レーザ光の光吸収層31への侵入長Lは、
例えば、支持基板部20がSi基板を含む場合、光吸収層31は、Cr、TiおよびCから選択された少なくとも1つを含む。また、光吸収層31の厚さは、10nm以上、200nm以下であることが望ましい。CrおよびTiは、光吸収の機能に加えて、支持基板部20と、接合部30と、の間の密着性を向上させる。カーボン(C)(但し、結晶質ではない)は、レーザ光を効率良く吸収する。このため、カーボンを用いると低エネルギーのレーザ光で接合層33の溶融が可能となる。すなわち、カーボンを光吸収層31に用いると、レーザ光のスポット(照射範囲)を広くすることが可能となり、生産性を向上できる。
図2(a)に示すように、半導体機能部10と、第2接合膜33b(例えばはんだ材)と、の間に中間層17を設けても良い。例えば、中間層17の全体、または、中間層17の半導体機能部に接する第1の部分17aを反射層としても良い。例えば、半導体機能部10の機能が発光である場合、半導体機能部10から放射される光に対する中間層17の反射率を、第2接合膜33bよりも高くする。これにより、第2接合膜33bにおける光の損失を抑制でき、半導体機能部10から外部への光取り出し効率を向上できる。
尚、図5には、条件CA、CBおよびCCについて、レーザ光の照射時間とピーク温度の関係を示したが、それぞれの条件の間では殆ど差異がない。
図11(a)、図11(b)および図12は、第2の実施形態係る半導体装置の製造方法を例示する模式断面図である。
図11(a)は、半導体機能部10と、支持基板部20と、を対向させた状態を示している。図11(b)は、第1接合面33xと第2接合面33yとを接触させ、加圧して密着させた状態を示している。図12は、支持基板部20の側から光吸収層31にレーザ光を照射し、接合層33を溶融する状態を示している。
図13は、第3の実施形態に係る半導体装置の製造方法を例示する模式断面図である。本実施形態では、第2接合膜33bと第1接合膜33aとに、Au/Inの積層構造を適用する。それ以外は、第1の実施形態と同じである。
図17、図18(a)、図18(b)、図19(a)および図19(b)は、第1及び第3の実施形態に係る製造方法における特性を示すグラフである。
図17は、接合層33を所定の温度とするレーザ光の照射時間tLと、光吸収層31のピーク温度TPと、の関係について、第1実施形態と第3実施形態との特性を示している。
図20(a)および図20(b)は、第4の実施形態に係る半導体装置の製造方法を例示する模式断面図である。図20(a)は、半導体機能部10と、支持基板部50と、を対向させた状態を示している。図20(b)は、第1接合膜33aと第2接合膜33bとを接触させ、支持基板部50の側から光吸収層31にレーザ光を照射する状態を示している。
図21(a)に示すように、複数の半導体機能部10を含む基板53と、支持基板部50と、を対向させる。
また、各具体例のいずれか2つ以上の要素を技術的に可能な範囲で組み合わせたものも、本発明の要旨を包含する限り本発明の範囲に含まれる。
Claims (10)
- 半導体機能部と、レーザ光を透過させる支持基板部と、を、前記半導体機能部と前記支持基板部との間に設けられた接合部を介して互いに対向させる配置工程であって、前記接合部は、接合層と、前記接合層と前記支持基板部との間に設けられレーザ光に対する吸収率が前記接合層の前記レーザ光に対する吸収率以上である光吸収層と、を含む、配置工程と、
前記レーザ光を、前記支持基板部を介して前記光吸収層に照射し、前記レーザ光により加熱された前記光吸収層からの熱伝導により前記接合層を溶融させ、前記半導体機能部と前記支持基板部とを接合する工程と、
を備えた半導体装置の製造方法。 - 前記光吸収層の前記レーザ光に対する反射率は、60パーセント以下であり、
前記接合層の融点は、摂氏100度以上、摂氏300度以下である請求項1記載の半導体装置の製造方法。 - 前記支持基板部の熱伝導率は、前記接合部の熱伝導率よりも高い請求項1または2に記載の半導体装置の製造方法。
- 前記光吸収層の1つの照射位置における前記レーザ光の照射時間は、40マイクロ秒以下である請求項1〜3のいずれか1つに記載の半導体装置の製造方法。
- 前記光吸収層は、Cr、Ti、W、Ni、V、Mn、Fe、Co、Ge、CおよびSiから選択された少なくとも1つを含む請求項1〜4のいずれか1つに記載の半導体装置の製造方法。
- 前記支持基板部は、Si、SiC、ダイヤモンド、GaN、AlGaN、AlNおよびBNのいずれかを含む請求項1〜5のいずれか1つに記載の半導体装置の製造方法。
- 前記支持基板部は、Si基板を含み、
前記光吸収層は、Cr、TiおよびCから選択された少なくとも1つを含む請求項1〜5のいずれか1つに記載の半導体装置の製造方法。 - 前記光吸収層の厚さは、10ナノメートル以上、200ナノメートル以下であり、
前記接合部の厚さは、1マイクロメートル以上である請求項1〜7のいずれか1つに記載の半導体装置の製造方法。 - 前記接合層は、Au、Ag、In、Sn、Zn、Pb、Ga、BiおよびCdから選択された少なくとも1つを含む請求項1〜8のいずれか1つに記載の半導体装置の製造方法。
- 半導体機能部と、
支持基板部と、
前記半導体機能部と前記支持基板部との間に設けられ、前記支持基板部の熱伝導率よりも低い熱伝導率を有する接合層と、前記接合層と前記支持基板部との間に設けられた光吸収層と、を含み、前記半導体機能部と前記支持基板部とを接合する接合部と、
を備えた半導体装置。
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