JP2013110229A - 半導体装置およびその製造方法 - Google Patents
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Abstract
【解決手段】
本発明は、基板上に積層された複数のLSIチップからなる半導体装置であって、シリコン貫通ビアが形成されたLSIチップと、前記シリコン貫通ビアが形成されたLSIチップ上に搭載され、前記シリコン貫通ビアを介して電源経路と電気的に接続する1以上の受動部品と、を有することを特徴とする半導体装置に関する。
【選択図】図1
Description
<実施例1>
図1は、本発明の実施の形態になるTSVを有するLSIチップ上に受動部品を搭載した半導体装置の構成(実施例1)を示す。
(1)パッケージ基板寸法:20〜40mm□
(2)パッケージ基板厚:1mm程度
(3)第一のLSIチップ厚(TSV長):50〜200μm
(4)第一のLSIチップ寸法:10〜25mm□
(5)TSV径:φ5〜20μm
(6)TSVピッチ(第二のLSIチップ搭載部):50〜200μm
(7)TSVピッチ(コンデンサ搭載部):400〜1000μm
(8)第二のLSIチップ厚:50〜500μm
(9)第二のLSIチップ寸法:5〜20mm□
(10)チップコンデンサ寸法:〜2.0mm(L,W)、 〜0.5mm(T)
(11)冷却部材寸法:パッケージ基板と同寸
〔工程1〕パッケージ基板3に第一のLSIチップ1を実装
第一のLSIチップ1の半導体回路集積(以下、回路面という)11にはんだによる接続端子(はんだバンプ101)を形成し、パッケージ基板3の表面パッドに実装する。
〔工程2〕第一のLSIチップ1の裏面に第二のLSIチップ2とコンデンサ4を実装
TSV12の端子面側に、回路面11にはんだバンプ101を回路面11に形成した第二のLSIチップ1とチップコンデンサ4を搭載し、加熱により固定させる。
〔工程3〕冷却部材6を実装
第二のLSIチップ2の裏面と接触し、チップコンデンサ4も覆うように接合し、また、必要に応じてチップコンデンサ4用に窪みを形成しておく。
〔工程1〕冷却部材6に凹み形成
Cuからなる冷却部材6に、第二のLSIチップ2とチップコンデンサ4のそれぞれの高さに応じた溝をウエットなエッチングによって形成させる。
〔工程2〕第2のLSIチップ2及びチップコンデンサ4を搭載
搭載する部品の高さを吸収する溝が形成された冷却部材6に、半導体集積回路21側にはんだバンプ101が形成された第2のLSIチップ2とチップコンデンサ4とをはめ込み搭載する。
〔工程3〕第一のLSIチップ1を積層
こうして冷却部材6,第2のLSIチップ2、およびチップコンデンサ4が一体化された積層体の上に、さらに、TSV12の半導体集積回路11側にはんだバンプ102が形成された第一のLSIチップ1を積層する。
〔工程4〕工程4:パッケージ基板実装
冷却部材6,第2のLSIチップ2、チップコンデンサ4、および第一のLSIチップ1からなる積層体を反転させて、第一のLSIチップ1とパッケージ基板3とを接合させる。
<実施例2>
実施例2では、TSVが形成された複数のLSIチップが積層され、その最上層のLSIチップ上にチップコンデンサを搭載する場合の半導体装置について述べる。
DC抵抗値は、(1)式の通り表される。
R=ρ×L/S ------(1)
但し、ρ:抵抗率(Ω・m) L:配線長さ(m) S:配線断面積(m2)
ここで、配線部とビア部の材料はともにCuを適用のため、ρ=1.68×10−8
したがって、各部の抵抗は以下のように示される。
(配線部の抵抗)
R=1.68×10−8L/(w×t) ------(2)
(ビア部の抵抗)
R=1.68×10−8L/π(r×2)2 ------(3)
図8は、受動部品/LSIチップ間の電源供給経路を模式的に表した図である。図8に示すように、抵抗値の評価に供する試料は以下の通り。
(実施例1)
チップコンデンサ4は、TSV12を有する第一のLSIチップ1の裏面(図の上面)における第二のLSIチップ2近傍の空きスペースに搭載されている。本例では、チップコンデンサ4からLSIチップへの電源供給経路は、第一のLSIチップ1のTSV12と回路面を経由する。
(実施例2)
チップコンデンサ4は、TSV12を有する第一のLSIチップ1上に積層されたTSV22を有する第二のLSIチップ2の裏面(図の上面)に搭載されている。本例では、チップコンデンサ4からLSIチップへの電源供給経路は、直下のTSV22及びTSV12を経由する。
(比較例1)
チップコンデンサ4は、パッケージ基板3の裏面側(図の下面)に搭載されている。本例では、チップコンデンサ4からLSIチップ2への電源供給経路は、パッケージ基板3のコアビアと第一のLSIチップ1のTSV12を経由する。
(比較例2)
チップコンデンサ4は、パッケージ基板3の表面側(図の上面)に搭載されている。本例では、チップコンデンサ4からLSIチップ2への電源供給経路は、パッケージ基板3のコアビアは経由せず、第一のLSIチップ1のTSV12を経由する。
実施例1:
実施例1における電源経路の抵抗値は、LSIチップ1におけるTSV12のビア部抵抗とLSIチップ内の配線部抵抗をそれぞれ計算し、その合計値となる。
実施例2:
実施例2における電源経路の抵抗値は、TSV21とTSV12の抵抗値の合計となる。
比較例1:
パッケージ基板3裏面のキャパシタパッドから第一のLSIチップ1内の半導体集積回路11までの配線抵抗は、2.3mΩとなった。
比較例2:
パッケージ基板表面、LSIチップ横のキャパシタパッドから第一のLSIチップ内の半導体集積回路までの配線抵抗は、10.5mΩとなった。
2 第二のLSIチップ
3 パッケージ基板
4 チップコンデンサ
5 接続部
6 冷却部材
11、21 半導体集積回路
12、22 シリコン貫通ビア(TSV)
101、102、103 はんだバンプ
Claims (7)
- 基板上に積層された複数のLSIチップからなる半導体装置であって、
シリコン貫通ビアが形成されたLSIチップと、
前記シリコン貫通ビアが形成されたLSIチップ上に搭載され、前記シリコン貫通ビアを介して電源経路と電気的に接続する1以上の受動部品と、
を有することを特徴とする半導体装置。 - 前記シリコン貫通ビアは、前記積層された複数のLSIチップの各LSIチップに形成され、前記受動部品は、最上層のLSIチップ上に搭載され、前記シリコン貫通ビアを介して電源経路と電気的に接続させたことを特徴とする請求項1に記載の半導体装置。
- 前記シリコン貫通ビアが形成されたLSIチップの面積が、その上に積層されるLSIチップの面積より大きい場合に、
前記受動部品は、下層に配置されたLSIチップにおいて、上層のLSIチップよって占有された領域以外の部分に搭載され、前記シリコン貫通ビアを介して電源経路と電気的に接続することを特徴とする請求項1に記載の半導体装置。 - 前記シリコン貫通ビアは、
前記受動部品との接続端子として、前記シリコン貫通ビアが形成されたLSIチップ裏面に突出させ、突出させた複数の前記シリコン貫通ビアの間に前記受動部品を挟みこむ形状で電源経路と電気的に接続することを特徴とする請求項3に記載の半導体装置。 - 前記受動部品の接続端子は、前記LSIチップ表面の接続端子と同一の材料もしくは低融点の材料で形成されたことを特徴とする請求項3または4に記載の半導体装置。
- 前記シリコン貫通ビアが形成されたLSIチップにおいて、前記受動部品が搭載される領域の前記シリコン貫通ビアの穴径を、他のLSIチップと接続する領域のシリコン貫通ビアの穴径よりも大きくしたことを特徴とする請求項3乃至5に記載の半導体装置。
- 基板上に、シリコン貫通ビアと受動部品を有する下層のLSIチップとその上に積層された上層のLSIチップと放熱部材を有する半導体装置の製造方法であって、
前記受動部品と前記上層のLSIチップの厚さの差を吸収する凹みを前記放熱部材に形成する工程と、
前記放熱部材に前記受動部品と前記上層のLSIチップを搭載して一体化させ、その後に下層のLSIチップと接合する工程と、
を有することを特徴とする半導体装置の製造方法。
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JP2016535437A (ja) * | 2013-06-27 | 2016-11-10 | ツェットエフ、フリードリッヒスハーフェン、アクチエンゲゼルシャフトZf Friedrichshafen Ag | 負荷を制御する電気回路、および負荷を制御する電気回路の製造方法 |
CN117747444A (zh) * | 2024-02-07 | 2024-03-22 | 中国科学院长春光学精密机械与物理研究所 | 一种半导体功率器件的封装方法及封装结构 |
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JP2016535437A (ja) * | 2013-06-27 | 2016-11-10 | ツェットエフ、フリードリッヒスハーフェン、アクチエンゲゼルシャフトZf Friedrichshafen Ag | 負荷を制御する電気回路、および負荷を制御する電気回路の製造方法 |
CN117747444A (zh) * | 2024-02-07 | 2024-03-22 | 中国科学院长春光学精密机械与物理研究所 | 一种半导体功率器件的封装方法及封装结构 |
CN117747444B (zh) * | 2024-02-07 | 2024-05-14 | 中国科学院长春光学精密机械与物理研究所 | 一种半导体功率器件的封装方法及封装结构 |
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