JP2013086217A5 - - Google Patents
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- Publication number
- JP2013086217A5 JP2013086217A5 JP2011229669A JP2011229669A JP2013086217A5 JP 2013086217 A5 JP2013086217 A5 JP 2013086217A5 JP 2011229669 A JP2011229669 A JP 2011229669A JP 2011229669 A JP2011229669 A JP 2011229669A JP 2013086217 A5 JP2013086217 A5 JP 2013086217A5
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- urethane resin
- polishing pad
- isocyanate group
- reactive compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 13
- 239000011342 resin composition Substances 0.000 claims description 9
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 9
- 239000012948 isocyanate Substances 0.000 claims description 8
- 150000002513 isocyanates Chemical group 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 4
- 229920002635 polyurethane Polymers 0.000 claims description 4
- 239000004814 polyurethane Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- IBOFVQJTBBUKMU-UHFFFAOYSA-N 4,4'-methylene-bis-(2-chloroaniline) Chemical compound C1=C(Cl)C(N)=CC=C1CC1=CC=C(N)C(Cl)=C1 IBOFVQJTBBUKMU-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- XLYOFNOQVPJJNP-DYCDLGHISA-N deuterium hydrogen oxide Chemical compound [2H]O XLYOFNOQVPJJNP-DYCDLGHISA-N 0.000 claims 1
- 239000004088 foaming agent Substances 0.000 claims 1
- 229910021485 fumed silica Inorganic materials 0.000 claims 1
- 229920005862 polyol Polymers 0.000 claims 1
- 150000003077 polyols Chemical class 0.000 claims 1
- 239000003517 fume Substances 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011229669A JP2013086217A (ja) | 2011-10-19 | 2011-10-19 | 研磨パッド用ウレタン樹脂組成物、ポリウレタン研磨パッド及びポリウレタン研磨パッドの製造方法 |
| KR1020120103093A KR20130043060A (ko) | 2011-10-19 | 2012-09-18 | 연마 패드용 우레탄 수지 조성물 및 폴리우레탄 연마 패드 |
| TW101134971A TW201323496A (zh) | 2011-10-19 | 2012-09-24 | 拋光墊用胺基甲酸酯樹脂組成物及聚胺基甲酸酯拋光墊 |
| CN201210397917.0A CN103059551B (zh) | 2011-10-19 | 2012-10-18 | 研磨垫用氨基甲酸酯树脂组合物以及聚氨酯研磨垫 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011229669A JP2013086217A (ja) | 2011-10-19 | 2011-10-19 | 研磨パッド用ウレタン樹脂組成物、ポリウレタン研磨パッド及びポリウレタン研磨パッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013086217A JP2013086217A (ja) | 2013-05-13 |
| JP2013086217A5 true JP2013086217A5 (enExample) | 2014-10-23 |
Family
ID=48102466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011229669A Pending JP2013086217A (ja) | 2011-10-19 | 2011-10-19 | 研磨パッド用ウレタン樹脂組成物、ポリウレタン研磨パッド及びポリウレタン研磨パッドの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2013086217A (enExample) |
| KR (1) | KR20130043060A (enExample) |
| CN (1) | CN103059551B (enExample) |
| TW (1) | TW201323496A (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5821133B2 (ja) * | 2012-03-29 | 2015-11-24 | 富士紡ホールディングス株式会社 | 研磨パッド及び研磨パッドの製造方法 |
| JP2015059199A (ja) * | 2013-09-20 | 2015-03-30 | Dic株式会社 | ウレタン組成物及び研磨材 |
| US20150306731A1 (en) * | 2014-04-25 | 2015-10-29 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad |
| CN104261726B (zh) * | 2014-09-18 | 2016-02-03 | 蓝思科技股份有限公司 | 一种光学玻璃双面精加工专用研磨垫及其制备方法 |
| JP6504385B2 (ja) * | 2014-12-15 | 2019-04-24 | Dic株式会社 | 研磨パッド |
| CN104742031B (zh) * | 2015-04-07 | 2017-11-17 | 蓝思科技(长沙)有限公司 | 一种调节研磨垫磨削切削力的组合物、方法及模具 |
| CN104772693B (zh) * | 2015-04-20 | 2017-10-17 | 蓝思科技(长沙)有限公司 | 一种用于加工超硬陶瓷的金刚石研磨垫及其制备方法 |
| SG11201704554SA (en) * | 2016-04-06 | 2017-11-29 | Kpx Chemical Co Ltd | Method of manufacturing polishing pad |
| JP6424986B2 (ja) * | 2016-06-16 | 2018-11-21 | Dic株式会社 | 研磨パッド、研磨パッドの製造方法及び研磨方法 |
| CN106985061A (zh) * | 2017-03-21 | 2017-07-28 | 安徽禾臣新材料有限公司 | 一种适用于精打磨的吸附垫 |
| KR101949905B1 (ko) * | 2017-08-23 | 2019-02-19 | 에스케이씨 주식회사 | 다공성 폴리우레탄 연마패드 및 이의 제조방법 |
| KR101949911B1 (ko) * | 2017-09-11 | 2019-02-19 | 에스케이씨 주식회사 | 다공성 폴리우레탄 연마패드 및 이의 제조방법 |
| CN109689299A (zh) * | 2017-09-11 | 2019-04-26 | Skc株式会社 | 多孔聚氨酯抛光垫及其制备方法 |
| US20210380845A1 (en) * | 2018-11-09 | 2021-12-09 | Kuraray Co., Ltd. | Polyurethane for polishing layers, polishing layer, polishing pad and method for modifying polishing layer |
| JP7331453B2 (ja) * | 2019-05-17 | 2023-08-23 | Dic株式会社 | 多孔体の製造方法 |
| WO2021011260A1 (en) * | 2019-07-12 | 2021-01-21 | Cabot Microelectronics Corporation | Polishing pad employing polyamine and cyclohexanedimethanol curatives |
| CN111534079A (zh) * | 2020-05-27 | 2020-08-14 | 安徽禾臣新材料有限公司 | 聚氨脂高抛研磨材料及其制备方法 |
| CN112094493A (zh) * | 2020-08-14 | 2020-12-18 | 沈阳化工大学 | 一种纳米改性热塑性聚氨酯弹性体抛光材料及其制备方法 |
| CN112226192B (zh) * | 2020-09-30 | 2022-06-28 | 深圳善跑体育产业集团有限公司 | 一种单组分热塑性聚氨酯胶粘剂及其制备方法 |
| KR20230135081A (ko) * | 2021-01-29 | 2023-09-22 | 가부시끼가이샤 도꾸야마 | 환상 다관능 모노머를 포함하는 경화성 조성물 |
| CN114874409A (zh) * | 2022-04-26 | 2022-08-09 | 江苏利宏科技发展有限公司 | 一种基于聚醚多元醇的聚氨酯树脂及其制备方法 |
| CN114957965A (zh) * | 2022-07-07 | 2022-08-30 | 福建长泰万泰矿物制品有限公司 | 一种高耐热聚氨酯组合物、聚氨酯盘及其制备方法 |
| CN115319649B (zh) * | 2022-09-03 | 2023-08-04 | 深圳市永霖科技有限公司 | 一种用于玻璃抛光pu抛光砂纸及其制备方法 |
| CN116444977B (zh) * | 2023-06-16 | 2023-09-05 | 山东一诺威聚氨酯股份有限公司 | 聚氨酯弹性体及利用其制备抛光磨块的方法 |
| CN119426743B (zh) * | 2025-01-10 | 2025-04-18 | 合肥真萍电子科技有限公司 | 一种晶圆级回流焊设备 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002113662A (ja) * | 2000-10-04 | 2002-04-16 | Sinto Brator Co Ltd | 回転テーブル及び噴射ノズルの制御方法 |
| JP3826702B2 (ja) * | 2000-10-24 | 2006-09-27 | Jsr株式会社 | 研磨パッド用組成物及びこれを用いた研磨パッド |
| US20040224622A1 (en) * | 2003-04-15 | 2004-11-11 | Jsr Corporation | Polishing pad and production method thereof |
| JP2005068168A (ja) * | 2003-08-21 | 2005-03-17 | Kanebo Ltd | ガラス研磨ポリウレタンパッド用2液型組成物、該組成物を用いたガラス研磨ポリウレタンパッド、及びその製造方法 |
| US7598315B2 (en) * | 2005-01-24 | 2009-10-06 | Lubrizol Advanced Materials, Inc. | Aqueous dispersions of nanoparticle/polyurethane composites |
| WO2010123744A2 (en) * | 2009-04-23 | 2010-10-28 | Cabot Microelectronics Corporation | Cmp porous pad with particles in a polymeric matrix |
| KR101352235B1 (ko) * | 2009-05-27 | 2014-01-15 | 로저스코포레이션 | 연마 패드, 이를 위한 폴리우레탄층, 및 규소 웨이퍼의 연마 방법 |
| KR101750775B1 (ko) * | 2009-06-29 | 2017-06-26 | 디아이씨 가부시끼가이샤 | 연마 패드용 2액형 우레탄 수지 조성물, 폴리우레탄 연마 패드, 및 폴리우레탄 연마 패드의 제조 방법 |
| CN101812229B (zh) * | 2010-04-02 | 2012-06-20 | 宜兴市新光科技有限公司 | 隔热减震防护膜及其制造方法 |
-
2011
- 2011-10-19 JP JP2011229669A patent/JP2013086217A/ja active Pending
-
2012
- 2012-09-18 KR KR1020120103093A patent/KR20130043060A/ko not_active Ceased
- 2012-09-24 TW TW101134971A patent/TW201323496A/zh unknown
- 2012-10-18 CN CN201210397917.0A patent/CN103059551B/zh active Active
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