JP2013080791A - Die feeder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the practicability of a die feeder for picking up and feeding dice from a die aggregate comprising a wafer diced up.SOLUTION: The die feeder in which a plurality of suction nozzles are mounted on a plurality of nozzle mounts of a pickup head, respectively, comprises a nozzle storage device 100 for storing the plurality of suction nozzles 44. The nozzle storage device is configured to store the plurality of suction nozzles in the same relative positional relationship as the plurality of nozzle mounts are, and the nozzle storage device is provided with a nozzle actuation mechanism 120, 122, 124, 126, 128 for simultaneously actuating the plurality of suction nozzles for simultaneous mounting on the pickup head. The plurality of suction nozzles can be mounted quickly, and the pickup head can be simplified in structure and reduced in weight.

Description

  The present invention relates to a die supply machine that picks up and supplies dies from a die assembly formed by dicing a wafer.

  A die supply machine that picks up and supplies dies from a die assembly is, for example, as described in the following patent document, and sucks and holds the die by a suction nozzle of the pickup head, and moves the pickup head. Then, the held die is supplied at a predetermined supply position. In many cases, the supplied die is mounted on a substrate by a component mounting machine.

JP 2010-129949 A

  In order to improve the production speed of die-attached products with dies attached, it is necessary to improve the die supply speed (the number of dies that can be supplied per unit time) by the die supply machine. It is also being considered to equip the suction nozzle. On the other hand, for example, it is desired that the suction nozzle can be replaced in the die supply machine because it is possible to deal with dies of various sizes. Therefore, when mounting a plurality of suction nozzles, it is required to replace and mount a plurality of nozzles. There is still room for improvement in the technique of mounting the plurality of suction nozzles, and it is possible to improve the practicality of a die feeder equipped with a plurality of nozzles by elaborating the device. This invention is made | formed in view of such a situation, and makes it a subject to provide a die feeder with high practicality.

  In order to solve the above-described problems, a die feeder according to the present invention provides a storage device that stores a plurality of suction nozzles mounted on a pickup head, and the plurality of suction nozzles for simultaneously mounting the plurality of suction nozzles on the pickup head. A nozzle operating mechanism for operating the nozzles simultaneously is provided.

  According to the die feeder of the present invention, it is possible to quickly mount a plurality of suction nozzles on the pickup head, and it is not necessary to provide a mechanism for operating the suction nozzles for the mounting in the pickup head. The hip-up head structure can be simplified and lightened. By having such an advantage, the die feeder of the present invention becomes highly practical.

Aspects of the Invention

  In the following, some aspects of the invention that can be claimed in the present application (hereinafter sometimes referred to as “claimable invention”) will be exemplified and described. As with the claims, each aspect is divided into sections, each section is numbered, and is described in a form that cites the numbers of other sections as necessary. This is merely for the purpose of facilitating the understanding of the claimable inventions, and is not intended to limit the combinations of the constituent elements constituting those inventions to those described in the following sections. In other words, the claimable invention should be construed in consideration of the description accompanying each section, the description of the embodiments, etc., and as long as the interpretation is followed, another aspect is added to the form of each section. In addition, an aspect in which some constituent elements are deleted from the aspect of each item can be an aspect of the claimable invention.

  In each of the following items, (1) corresponds to claim 1, (2) corresponds to claim 2, and (5) to (9) correspond to claims 3 to 7, respectively. .

(1) A die feeder that picks up and supplies dies from a die assembly formed by dicing a wafer,
A die assembly holding device for holding the die assembly;
A plurality of nozzle mounting devices each capable of mounting a plurality of suction nozzles each holding and holding a die, and a plurality of suction devices mounted on the plurality of nozzle mounting devices by raising and lowering the plurality of nozzle mounting devices A pickup raising and lowering mechanism for raising and lowering the nozzle, and a pickup head for picking up a die from the die assembly held by the die assembly holding device;
A head moving device that moves the pickup head for pick-up of the die and supply of the picked-up die at a predetermined supply position;
The plurality of suction nozzles are configured to be stored in the same relative positional relationship as the relative positional relationship of the plurality of nozzle attachment devices, and the plurality of stored suction nozzles are attached to the plurality of nozzle attachments. A die feeder comprising: a nozzle storage device having a nozzle operating mechanism for simultaneously operating the plurality of suction nozzles for simultaneous mounting on a tool.

  According to the die feeder of this aspect, the relative positional relationship between the plurality of suction nozzles stored in the nozzle storage device and the relative positional relationship between the plurality of nozzle attachment devices are made equal. That is, the relative positional relationship between the plurality of suction nozzles is the same when the plurality of suction nozzles are mounted on the pickup head and when they are stored in the nozzle storage device. Therefore, when a plurality of suction nozzles are mounted, the plurality of suction nozzles stored in the nozzle storage device are simultaneously engaged with the plurality of nozzle attachment devices by simply using the head moving device and the nozzle lifting mechanism. Or just before engaging. When the suction nozzle is mounted, it is necessary to fix the suction nozzle in the engaged state to the nozzle mounting tool. However, in the die feeding machine according to the aspect of this section, the suction nozzle used for the fixing or the like is used. The nozzle operating mechanism is provided as a mechanism for performing the operation, specifically, the relative operation with respect to the nozzle suction tool for a plurality of suction nozzles simultaneously. Therefore, according to the die feeder of the aspect of this section, it is possible to quickly and quickly attach the plurality of suction nozzles to the pickup head. Further, in the die feeder of the aspect of this section, since the nozzle operating mechanism is provided in the nozzle storage device, it is not necessary to provide the mechanism in the pickup head, and the pickup head structure is simplified and reduced in weight. Will be illustrated. By having such an advantage, the die feeder according to the aspect of this section becomes highly practical.

  It is desirable that the operation of the suction nozzle performed by the nozzle operating mechanism in the aspect of this section is a relative operation between the suction nozzle and the nozzle mounting device that cannot be performed by the head moving device and the nozzle lifting mechanism. In such an operation, the advantages of providing the nozzle operating mechanism in the nozzle storage device can be fully enjoyed. Such an operation includes, for example, an operation for fixing the suction nozzle to the nozzle mounting device as described above, and specifically, the suction nozzle is rotated around its axis. The operation includes an operation of rotating the suction nozzle around some rotation axis.

  The “head moving device” in the aspect of this section is, for example, one that moves the pickup head along a straight line parallel to the die assembly held by the die assembly holding device, or one that is parallel to the die assembly. Includes moving along a plane. That is, one that is moved one-dimensionally and one that is moved two-dimensionally are included. Further, the pickup head may be movable in a direction perpendicular to the die assembly held by the die assembly holding device. In that case, the head moving device may also serve as a “nozzle lifting mechanism”.

(2) The nozzle storage device includes a plurality of nozzle holders that respectively hold the plurality of suction nozzles, and the plurality of suction holders in a state where the plurality of nozzle holders hold the plurality of suction nozzles. Configured to store the nozzle,
The nozzle actuating mechanism is configured to operate the plurality of suction nozzles held by the plurality of nozzle holders simultaneously by operating the plurality of nozzle holders in synchronization with each other in the item (1). Die feeder as described.

  The mode of this section is a mode in which the structure of the nozzle operating mechanism is limited. If the suction nozzle is operated by operating the nozzle holder, the suction nozzle stored in the nozzle storage device can be easily operated.

  (3) The die feeder according to (2), wherein the nozzle storage device includes a plurality of sets of the plurality of nozzle holders and stores a plurality of sets of a plurality of suction nozzles.

  According to the die feeder of the aspect of this section, the nozzle storage device can store a plurality of sets of suction nozzles that can be simultaneously mounted. For example, a plurality of suction nozzles having different sizes, capacities, etc. for each set. If they are stored, the versatility and convenience of the die feeder can be improved by replacing them and mounting them on the pickup head.

  (4) The die feeder according to (3), wherein the nozzle operating mechanism is configured to operate the plurality of nozzle holders of each set in synchronization.

  According to the aspect of this section, a plurality of suction nozzles in any set can be operated in synchronization. Therefore, even if the nozzle storage device is capable of storing a plurality of sets of a plurality of suction nozzles, the structure of the nozzle operating mechanism can be made relatively simple.

  (5) Any one of the items (2) to (4), wherein the nozzle operating mechanism includes one actuator and the plurality of nozzle holders are operated in synchronization by the actuator. Die feeding machine as described in.

  In the die supply apparatus according to this aspect, since only a single actuator is required for the nozzle operation mechanism, the cost of the nozzle operation mechanism, and thus the die supply machine, in particular, the cost of the nozzle operation mechanism is kept low. Is possible. The “actuator” is not particularly limited. For example, the actuator may be operated by an electromagnetic force such as an electromagnetic motor or a solenoid, and may be operated by a fluid pressure such as an air cylinder or a hydraulic cylinder. It may be anything. In addition, in the case of a nozzle storage device capable of storing a plurality of sets of a plurality of suction nozzles, it may be configured to have one actuator for each set of a plurality of nozzle holders, but from the viewpoint of the cost, It is desirable that the plurality of nozzle holders in any set are configured to operate in synchronization with one actuator.

  (6) The nozzle actuating mechanism has one driving member operated by the actuator, a driven member that is engaged with the driving member and driven by the driving member, and the operations of the driven members are The die feeder according to (5), further comprising an operation conversion mechanism that converts the operation to the operation of the nozzle holder.

  According to the aspect of this section, even if the nozzle operating mechanism has a structure having only one actuator, it is possible to easily operate a plurality of suction nozzles synchronously by the force of the actuator. It is. The combination of “driving member” and “driven member” is not specifically limited. For example, racks, pinions, worms and worm wheels, various gears that mesh with each other, cams and cam followers that are directly engaged mechanically, those that are indirectly engaged, Various combinations such as those in which the operation of the driving member is converted into the operation of the driven member by fluid pressure, magnetic force or the like can be employed. Similarly, the “motion converting mechanism” can employ various structures. In the case of a nozzle storage device capable of storing a plurality of sets of a plurality of suction nozzles, it has a plurality of driven members corresponding to a set of a plurality of nozzle holders, and the plurality of driven members are one driving member. And can be configured to be driven by the driving member.

(7) The nozzle storage device
The plurality of nozzle holders, the driven member, and the operation conversion mechanism are configured to include a nozzle housing unit that is unitized,
The die feeder according to item (6), wherein the nozzle housing unit is replaceable with another nozzle housing unit.

  According to the aspect of this section, the nozzle housing unit can be replaced with a nozzle housing unit having a different configuration. For example, by making it possible to replace a nozzle housing unit that is different in the size, number of arrangement, arrangement mode, etc. of the nozzle holder, various types of exchangeable suction nozzles can be used depending on the usage mode of the die feeder. It becomes possible to change, and the convenience and versatility of the die feeding machine is improved. In particular, in the case of a nozzle storage device that can store a plurality of sets of suction nozzles, the convenience and versatility can be further improved by making it possible to exchange with another nozzle housing unit that differs in the number of sets and contents. Become. Further, according to the aspect of this section, since the nozzle housing unit does not include the actuator, that is, the drive source of the nozzle operating mechanism, the cost of each replaceable nozzle housing unit itself can be reduced. It becomes possible.

  (8) The die feeding machine according to (6) or (7), wherein the driving member is a rack and the driven member is a pinion that meshes with the rack.

  In the aspect of this section, the driving member and the driven member are limited to the rack and the pinion. The rack and pinion mechanism is a relatively simple mechanism, and if this mechanism is employed, a nozzle operating mechanism having a relatively simple structure can be realized. In addition, the rack and the pinion can be easily engaged with each other and released from the engagement, which is convenient when the nozzle housing unit is constructed by separating them. In the case of a nozzle storage device capable of storing a plurality of sets of suction nozzles, for example, a plurality of pinions corresponding to each set may be configured to mesh with one rack at an arbitrary position in the axial direction thereof. The degree of freedom of arrangement of the plurality of nozzle holders for each set in the axial direction is high. This is a great advantage particularly in the case of a nozzle storage device that can be replaced with another nozzle housing unit that differs in number of sets and content.

(9) Each of the plurality of suction nozzles is configured to be mounted on itself by being rotated around its own axis with respect to a corresponding one of the plurality of nozzle mounting devices. ,
The nozzle actuating mechanism is configured to rotate the plurality of nozzle holders synchronously around the axis of each of the plurality of suction nozzles held by each of them. The die feeder as described in any one.

  In the case of this example, in the case illustrated later, that is, when the suction nozzle is mounted, by rotating the suction nozzle with respect to the nozzle mounting device, the engaging pin is moved in the slot so that the suction nozzle is the nozzle. This is a convenient mode when it is fixed to the wearing device. Generally, a pickup head of a die supply machine is not provided with a mechanism for rotating the suction nozzle around its axis. Even when adopting a mechanism that rotates the suction nozzle and fixes it to the nozzle attachment device, according to the aspect of this section, it is not necessary to mount a mechanism that rotates the suction nozzle on the pickup head. The pickup head structure can be simplified and lightened. Note that the aspect of this section is a convenient aspect even when the suction mechanism is screwed into and fixed to the nozzle attachment tool by using a screw mechanism.

It is a whole perspective view which shows the die feeder which is an Example of claimable invention. It is a perspective view which shows the die assembly holding | maintenance apparatus which comprises a die supply machine. It is a perspective view which shows the pick-up head which comprises a die supply machine. It is a perspective view which shows the suction nozzle with which a pickup head is mounted | worn. It is a perspective view which shows the state in which the suction nozzle was mounted to the nozzle holder of the pickup head. It is a schematic diagram for demonstrating the action | operation of the nozzle raising / lowering mechanism which a pickup head has. It is a perspective view which shows the nozzle stocker which comprises a die supply machine. It is a perspective view which shows a nozzle stocker in another viewpoint. It is a perspective view which expands and shows a part inside nozzle stocker. It is a top view for demonstrating the nozzle operation mechanism of a nozzle stocker.

  Hereinafter, as a form for carrying out the claimable invention, a die feeder which is an embodiment of the claimable invention will be described in detail with reference to the drawings. In addition to the following examples, the claimable invention is implemented in various forms including various modifications and improvements based on the knowledge of those skilled in the art, including the form described in the above [Aspect of the Invention] section. can do.

≪Overall configuration of die feeding machine≫
1 is a machine for supplying each of a plurality of dies D obtained by dicing from a die assembly DS formed by dicing a wafer in which a dicing sheet is bonded. is there. Incidentally, the dicing sheet has flexibility, and is attached to the back surface of the die assembly DS. The die assembly DS is provided with a dicing sheet so that each die D can be easily peeled off from the dicing sheet. It is supposed to be stretched. Note that the die assembly DS is sometimes simply referred to as a “wafer”, and the die D is sometimes referred to as a “chip”.

  As shown in the figure, this die feeder generally includes a main frame 10 that functions as a base of the die feeder, and a die assembly stacker that is attached to the main frame 10 and accommodates a plurality of die assemblies DS. 12, a die assembly holding device 14 which is disposed on the main frame 10 and holds one die assembly DS fixedly, and a die is fixed from the die assembly DS fixedly held by the die assembly holding device 14. The pickup head 16 includes a pickup head 16 and a head moving device 18 that moves the pickup head 16 along a plane parallel to the die assembly DS fixedly held by the die assembly holding device 14. In the drawing, the right side in the figure is the front side and the left side is the left side, and in the following description, when the direction is expressed, the front and rear direction is related to the front, back, left, and right of the die supply unit. (X direction), left and right direction (Y direction), up and down direction (Z direction).

  The die assembly stacker 12 functions as a die assembly accommodation device, and includes a lift table 22 and a rack 24 (detailed structure is not shown) disposed on the lift table 22. A plurality of die assemblies D are accommodated in the rack 24 as if stacked. From the rack 24, any of the plurality of die assemblies DS can be independently pulled out, and one die assembly DS positioned at a predetermined height position by the lifting and lowering of the lifting table 22 is pulled out. (Details will be described later). That is, the die assembly stacker 12 is a so-called magazine type storage device.

  As shown in FIG. 2, the die assembly holding device 14 is fixed on the main frame 10 and extends in the X direction, and is guided by the pair of guide rails 26 and moves in the X direction. A possible holding frame 28, a frame moving mechanism 30 for moving the holding frame 28 in the X direction, and a die assembly fixing mechanism 32 for fixing the die assembly DS to the holding frame 28 so as to be pressed on both the left and right sides. It is comprised including. In the figure, the holding frame 28 is positioned closer to the front side of the die feeder 24, and the position is a position (working position) when the die D is picked up from the held die assembly DS. ).

  As shown in FIG. 3, the pickup head 16 is supported by the base body 34, the four rods 36, and the base body 34 so that the four rods 36 can be moved in the respective axial directions (vertical direction in the figure). And a rod lifting / lowering mechanism 40 that lifts and lowers the rods 36. At the lower end of each of the four rods 36, a sleeve 42 is attached as a nozzle mounting tool, and the suction nozzle 44 shown in an enlarged view in FIG. 4 is attached to the sleeve 42 as shown in FIG. Installed. That is, the pickup head 16 can be equipped with up to four suction nozzles 44.

  The suction nozzle 44 includes a main cylinder 46, a flange 48 provided so as to protrude from the main cylinder 46, a movable cylinder 50 that is held at a lower end portion of the main cylinder 46 so as to be movable back and forth with respect to the main cylinder 46, A distal end tube 52 is formed at the lower end of the movable tube 50 and the front end functions as a nozzle port. The movable cylinder 50 is urged toward the tip by a spring 54. Inside the suction nozzle 44, a negative pressure path is formed which is connected to a negative pressure source (not shown) and reaches the nozzle opening, and a negative pressure is supplied to the nozzle opening via the negative pressure path ("" Meaning that the negative pressure path is depressurized). By this negative pressure action, the suction nozzle 44 sucks and holds the die D at the tip.

  The attachment of the suction nozzle 44 to the sleeve 42 will be described. The inner diameter of the sleeve 42 is slightly larger than the outer diameter of the main cylinder 46 of the suction nozzle 44. It is installed so that it can be fitted. The suction nozzle 44 has a pair of engaging pins 56 extending radially from the main tube 46, while the sleeve 42 has a pair of generally corresponding to the pair of engaging pins 56. A J-shaped slot 58 is formed. Specifically, each slot 58 has a portion whose one end opens at the lower end of the sleeve 42 and extends in the axial direction of the sleeve 42 (the axial direction of the suction nozzle 44) (hereinafter, may be referred to as “axial direction portion”). And a portion continuously extending in the circumferential direction of the sleeve 42 (hereinafter sometimes referred to as “circumferential portion”). Is sometimes bent slightly lower than the other portions. Further, a retainer ring 62 urged downward by a spring 60 is provided at the lower portion of the sleeve 42.

  When the suction nozzle 44 is mounted, the main tube 46 of the suction nozzle 44 is fitted into the sleeve 42 so that each engaging pin 56 of the suction nozzle 44 moves along the axial direction of each slot 58 of the sleeve 42. Then, in a state where the suction nozzle 44 is in the back of the sleeve 42, the suction nozzle 44 is rotated around its axis so that each engaging pin 56 moves along the circumferential portion of each slot 58. In a state where each engaging pin 56 is fitted in the stop end portion, the retainer ring 62 presses each engaging pin 56 downward by the urging force of the spring 60, whereby the suction nozzle 44 is fixed to the sleeve 42. When the suction nozzle 44 is detached from the sleeve 42, the suction nozzle 44 is rotated in the opposite direction and then extracted from the sleeve 44 in the axial direction.

  The suction nozzle 44 is moved up and down when holding the die D by suction. The suction nozzle 44 is moved up and down by the rod lifting mechanism 40 moving the rod 36 up and down. That is, the rod lifting mechanism 40 functions as a nozzle lifting mechanism that lifts and lowers the suction nozzle 44. The rod lifting mechanism 40 will be described in detail with reference to FIG. 3. The rod lifting mechanism 40 includes a lever block 66 having a plurality of levers 64 that engage with the rod 36, and a lever block that rotates and lifts the lever block 66. And an operating mechanism 68. As can be seen from FIG. 6 schematically shown from the viewpoint from above, the lever block 66 has five levers 64. Of the five levers 64, four levers 64a are arranged at a 90 ° pitch, and the remaining one lever 64b is between two of the four levers 64a with respect to the two. It is arranged at a position shifted by 45 °.

  The lever block operating mechanism 68 has a support shaft 70 that supports the lever block 66, and has a function of rotating the lever block 66 by rotating the support shaft 70 about its axis. FIG. 6A shows a state in which the lever 64b is positioned directly above one of the four rods 36, that is, a state in which one rod can be engaged. In this state, none of the four levers 64 a is positioned above any of the four rods 36. On the other hand, FIG. 6B shows a state in which the four levers 64a are respectively positioned immediately above the four rods 36, that is, a four-rod engaging state. In this state, the remaining one lever 64b is not positioned above any of the four rods 36. The lever block operating mechanism 68 rotates the lever block 66 so as to be in one of these two states.

  The lever block operating mechanism 68 also has a function of raising and lowering the lever block 66 by raising and lowering the support shaft 70. In the above-described state where one rod can be engaged, the lever block 66 is lowered to push down one of the four rods 36 which can be engaged, and is mounted on a sleeve 42 attached to the rod 36. The suction nozzle 44 is lowered. That is, one suction nozzle 44 corresponding to the rotation position of the lever block 66 is lowered. On the other hand, in the state where the four rods can be engaged, by lowering the lever block 66, the suction nozzles 44 attached to the sleeves 42 attached to the four rods, that is, the four suction nozzles 44 are lowered. Be made. By raising the lowered lever block 66, one rod 36 or four rods 36 with which the lever 64 is engaged is one of four springs 72 provided corresponding to the four rods. One or four of the four suction nozzles 44 that have been raised and lowered by one or all of their resilience are raised. As described above, the rod lifting mechanism 40 has a function of moving up and down the four suction nozzles 44 at the same time or arbitrarily selected one of the four suction nozzles 44.

  The pickup head 16 has a nozzle reversing mechanism 74 that is a mechanism for turning the suction nozzle 44 upside down. As shown in FIG. 3, the rod holder 38 is rotatably supported by a support shaft 76 attached to the base body 34 in a posture extending left and right, and a pinion 78 attached to the side surface of the rod holder 38 is provided. It is reversed by rotating it with the rack 80 meshing with it (the operation indicated by the thick arrow in FIG. 3 is performed). By this reversal, the suction nozzle 44 attached to the sleeve 42 attached to the rod 36 is reversed. More specifically, the suction nozzle 44 mounted at the lower end portion of the rod 36 with the posture in which the nozzle port faces downward is changed to a posture in which the nozzle port faces upward. The die D picked up from the die assembly DS is supplied in a state reversed by the nozzle reversing mechanism.

  The head moving device 18 for moving the pickup head 16 is an XY robot type moving device as can be seen from FIG. The head moving device 18 includes a slide base 82 that supports the pickup head 16, a beam 84 that is disposed in a posture extending in the Y direction and supports the slide base 82 so as to be movable in the Y direction, and a main frame in a posture extending in the X direction. A pair of guide members 86 that are fixed to 10 and support the beam 84 so as to be movable in the X direction, a Y direction moving mechanism 88 that moves the slide base 82 in the Y direction, and an X direction that moves the beam 84 in the X direction. And a moving mechanism (not visible in the figure). The head moving device 18 can move the pickup head 16 supported by the slide base 82 along a plane parallel to the surface of the die assembly DS held by the die assembly holding device 14. The pickup head 16 is moved to an arbitrary position or a set position at the time of picking up the die D and the supply of the picked up die D.

  A die camera 90 as an imaging device capable of imaging the surface (upper surface) of the die assembly DS held by the die assembly holding device 14 is fixed to the slide base 82, and the head moving device 18 includes the camera. 90 is also moved together with the pickup head 16. Further, on the back side of the beam 84, when the die assembly DS is drawn from the rack 24 of the die assembly stacker 12 to the holding frame 28 of the die assembly holding device 14, and after the die D is picked up. A die assembly clamp 92 for holding the die assembly DS is lowered when the die assembly DS (strictly speaking, it cannot be called a die assembly) is stored in the rack 24 from the holding frame 28. The head moving device 18, specifically the X direction moving mechanism thereof, has a function of moving the clamp 92 in the X direction.

  In FIG. 1, although hidden by the die assembly DS, it cannot be seen, a die push-up device is disposed below the die assembly holding device 14. The die thrusting device includes a thrusting tool, a lifting tool lifting mechanism for lifting the thrusting tool, and a thrusting tool moving mechanism for moving the thrusting tool within one plane along the die assembly DS. It is comprised including. The die lifting device is an auxiliary device for smoothly picking up the die D. The projecting tool is positioned below the die D to be picked up, and the projecting tool is raised at that position, so that the die D is thrust up by the projecting tool through the dicing sheet. Lifted.

≪Basic operation of die feeding machine≫
Hereinafter, the operation of the die feeder when picking up and supplying the die D will be described. First, one of the die assemblies DS accommodated in the rack 24 of the die assembly stacker 12 is placed on the holding frame 28 of the die assembly holding device 14. At this time, the holding frame 28 is passed under the beam 84 of the head moving device 18 by the frame moving mechanism 30 and is positioned at a position close to the die assembly stacker 12, that is, a position on the rear side. On the other hand, the die assembly DS to be placed is positioned at a predetermined pullable position in the vertical direction by the lifting table of the die assembly stacker 12. The beam 84 is moved rearward by the X-direction moving mechanism of the head moving device 18, and the placed die assembly DS is gripped by the die assembly clamp 92. Next, the beam 84 is moved forward by the X-direction moving mechanism, and the gripped die assembly DS is placed on the holding frame 28. The mounted die assembly DS is fixed to the holding frame 28 by the die assembly fixing mechanism 32, and in this state, the holding frame 28 is moved forward by the frame moving mechanism 30, and a predetermined work position is set. Is located.

  Next, the die camera 90 is positioned above the die D to be picked up by the head moving device 18, and the die D is imaged at that position. Based on the imaging data obtained by imaging the die D, the exact positions of the die D in the X direction and the Y direction are specified. As will be described later, since the four dies D are sucked and held by the four suction nozzles 44, the imaging of the die D and the position specific processing based on the imaging data are performed on the four dies D at a time.

  The pickup head 16 is moved by the head moving device 18 to a position where one suction nozzle 44 is located above the specified position of one die D. At that position, only the one suction nozzle 44 is lowered by the rod lifting mechanism 40, and negative pressure is supplied to the suction nozzle 44 when the nozzle port of the suction nozzle 44 comes into contact with the one die. The one die D is sucked by the suction nozzle 44. After sucking and holding the die D, the suction nozzle 44 is raised by the rod lifting mechanism 40, and the pickup of the die D is completed. During pick-up, as the suction nozzle 44 rises, the die D to be picked up is pushed up by the die push-up device. Such a pickup operation is sequentially performed for each of the four suction nozzles 44, that is, for each of the four dies D, and the pip-up is completed for the four dies D.

  After the pickup of the four dies D is completed, the pickup head 16 is moved to a predetermined supply position by the head moving device 18, and the four suction nozzles 44 are moved to the predetermined position by the nozzle reversing mechanism. Is reversed. Accordingly, the four dies D sucked and held by the four suction nozzles 44 are supplied in a predetermined supply position with respect to each other in an inverted posture. The supplied four dies D are held in their postures by the component holding device of the mounting head of the component mounting machine and used for mounting on the substrate. That is, the four suction nozzles 44 are supplied so as to be delivered to the component holding device of the component mounting machine. During this delivery, the negative pressure supplied to each suction nozzle 44 is released.

  When the series of operations described above is repeated for one die assembly DS, and the die D of the die assembly DS disappears, the die assembly DS is subjected to the reverse operation of the above operation, and the die assembly DS Returned to the stocker 12. Then, another new die assembly DS is held in the die assembly holding device 14 by the above-described operation, and the die D is supplied from the die assembly DS.

  The above-described operations for picking up and supplying the die D are operations when four pickup nozzles 44 are mounted on the pickup head 16. This die feeder does not necessarily have to be equipped with four suction nozzles 44. For example, when the size of the die D is large, it is necessary to mount a large suction nozzle 44. In this case, for example, the outer diameter of the flange 48 of the suction nozzle 44 and the four rods 36 of the pickup head 16 are mutually connected. In some cases, the four suction nozzles 44 cannot be mounted because of the interval. In that case, only two rods 36 present at the diagonal positions are mounted with two suction nozzles 44, or only one of them is mounted with the suction nozzle 44 to pick up and supply. It is possible to perform operations for. In this case, one pick-up operation is performed for every two dies D or one die D.

≪Configuration for replacing the suction nozzle≫
It is desirable to use an appropriate suction nozzle 44 according to the size of the die D to be supplied. For this reason, the present die supply machine is configured to automatically replace the suction nozzle 44. That is, the suction nozzle 44 attached to the pickup head 16 is automatically detached, and another suction head 44 can be automatically attached. In this case, when a plurality of suction nozzles 44 are attached to the pickup head 16, it is possible to simultaneously remove the plurality of suction nozzles 44 and attach another plurality of suction nozzles 44 at the same time. Hereinafter, a configuration for enabling automatic replacement of the suction nozzle 44 will be described.

  The die feeder includes a nozzle stocker 100 that functions as a nozzle storage device. As shown in FIGS. 1 and 2, the nozzle stocker 100 is located at a position between the holding frame 28 of the die assembly holding device 14 and the die assembly stacker 12 when located at the working position. It is arranged on the top. As shown in FIGS. 7 and 8, the nozzle stocker 100 includes a base 102, a nozzle storage unit 104 attached to the base 102, and a base lifting mechanism 106 that lifts and lowers the base 102. (In FIG. 7, the base lifting mechanism 104 is omitted, and in FIG. 8, only a part of the internal structure is shown for the nozzle housing unit 104).

  Referring to FIG. 9 showing a part of the internal structure, the nozzle housing unit 104 includes a unit base 108, a plurality of nozzle housings 110 rotatably supported by the unit base 108, and the unit base 108. And a cover 112 that covers the plurality of nozzle containers 110 (in FIG. 8, the unit base 108 and the cover 112 are omitted). The nozzle container 110 has a storage cylinder 114 that has a cylindrical shape and functions as a nozzle holder. The flange 48 of the suction nozzle 44 is placed on the upper end of the storage cylinder 114 so that the suction is performed. The nozzle 44 is accommodated. A locking pin 116 protrudes from the upper end portion of the housing cylinder 114, and the locking pin 116 is provided with a plurality of notches 118 provided at the outer peripheral end of the flange 48 of the suction nozzle 44 (FIGS. 4 and 4). 5), and the suction nozzle 44 is housed in a state in which the axis of the suction nozzle 44 and the axis of the nozzle container 110 are aligned with each other. In FIG. 9, the accommodation cylinder 114 of one nozzle container 110 is omitted. Incidentally, the locking pin 116 and the notch 118 into which the locking pin 116 is fitted serve as a rotation position defining means for the suction nozzle 44 with respect to the nozzle housing 110 in the housed state, and, as will be described later, by the rotation of the nozzle housing 110. It functions as a rotational force transmission means for rotating the nozzle 44.

  The nozzle housing unit 104 is provided with 12 nozzle containers 110. More specifically, from the left side to the right side of the die supply machine (from the right side to the left side in FIG. 7), one set of four nozzle containers 110 having a relatively small outer diameter, another one Four nozzle containers 110 having a relatively small outer diameter and four nozzle containers 110 having a relatively large outer diameter are arranged in this order. The four nozzle holders 110 in the left set and the center set are arranged in two rows on the left and right sides and two rows on the front and rear sides, specifically, at the positions of the four vertices of the quadrangle when viewed from above. On the other hand, the four nozzle housings 110 on the right side are arranged in a line in the left-right direction. In other words, the nozzle housing unit 104 can accommodate two sets of suction nozzles including four suction nozzles 44. In other words, the nozzle stocker 100 can store a plurality of sets of a plurality of suction nozzles.

  The relative positional relationship between the central axes of the four nozzle containers 110 in the left set and the central set is matched with the relative positional relationship between the central axes of the four sleeves 42 of the pickup head 16. That is, the relative positional relationship of the suction nozzles 44 when the four suction nozzles 44 are mounted on the pickup head 16 and the relative positional relationship of the suction nozzles 44 when stored in the nozzle stocker 100 are equal. It has been done. Note that the four nozzle containers 110 in the center set are the nozzle containers 110 for the four suction nozzles 44 that are currently mounted on the pickup head 16, so in the figure, these four nozzle containers 110 are In any of them, the suction nozzle 44 is not accommodated and is empty.

  Each nozzle container 110 has a gear 120 attached integrally and coaxially with the lower part of the housing cylinder 114. On the other hand, a rack 122 is disposed on the base 102 so as to extend left and right and be movable in the axial direction thereof. As shown also in FIG. 10, the gears 120 of the four nozzle housings 110 on the right side are meshed with the racks 122, and the gears 120 of the four nozzle housings in each of the left and center sets. Are coupled to the rack 122 via two gears 124 and 126 supported by the unit base 108 so as to rotate together. More specifically, the gear 120 of each of the four nozzle containers is engaged with the gear 124 positioned above the unit base 108, and the gear 126 is engaged with the rack 122, respectively. That is, the gear 120 and the gear 126 that mesh with the rack 122 function as a pinion. An actuator 128 is fixed to the base 102, and the actuator 128 reciprocates the rack 122 by a predetermined amount in the axial direction thereof. As the rack 122 reciprocates, each nozzle holder 110 rotates by a predetermined angle around the axis of the suction nozzle 44 held thereby. Incidentally, the length of the circumferential portion of the slot 58 formed in the main cylinder 46 of the suction nozzle 44 corresponds to the predetermined angle.

  From the structure described above, the nozzle stocker 100 has a nozzle operation mechanism, more specifically, a plurality of storage cylinders 114 each functioning as a nozzle holder are rotated by a single actuator 128 in a synchronized manner. It has a mechanism for simultaneously operating the plurality of suction nozzles 44 respectively held by the plurality of storage cylinders 114. Further, regarding the four nozzle containers 110 of the left set and the center set, the nozzle operating mechanism is engaged with the rack 122 which is one drive member operated by the actuator 128 and the rack 122. A gear 126 that is a driven member to be driven includes a gear 126, and an operation conversion mechanism that includes the gear 124 and the gear 120 and converts the rotation operation of the gear 126 into the rotation operation of the plurality of housing cylinders 114. It is composed of. Each gear 126 corresponds to four nozzle containers 110 constituting one set, and the nozzle stocker 100 shown in the figure corresponds to two sets each composed of four nozzle containers 110. Two driven members that engage with each other are engaged with one driving member.

  As shown in FIG. 7, the cover 112 that is an outer shell member of the nozzle housing unit 104 has a plurality of openings 130 on the upper surface corresponding to the plurality of nozzle housings 110. On the other hand, the base 102 is provided with a cover moving mechanism 136 (see FIGS. 8 and 10) including an actuator 132 and a lever 134 that is moved left and right by the actuator 132. Although omitted, the upper end of the lever 134 is engaged with the cover 112. By this actuator 132, the cover 112 is moved a predetermined distance from side to side. The state shown in FIG. 7 is a state in which the cover 112 is positioned at one moving end, and in this state, each opening 130 is displaced from the corresponding nozzle container 110. That is, in this state, the flange 48 interferes with the opening 130, and the suction nozzle 44 cannot be accommodated in the nozzle container 110 through the opening 130, and the suction nozzle 44 accommodated in the nozzle container 110 cannot be accommodated. It cannot be taken out through the opening 130. On the other hand, although illustration is omitted, the state in which the cover 112 is located at the other moving end is a state in which each opening 130 is located at a position that coincides with the corresponding nozzle container 110. The suction nozzle 44 can be accommodated and taken out through 130. That is, the cover 112 and the cover moving mechanism 136 function as a shutter that switches the state of the opening 130 with respect to the nozzle container 110 between a half-open state and a full-open state.

  The holding frame 28 on which the die assembly DS is placed is located at a position close to the die assembly stacker 12 when the die assembly DS is placed on the holding frame 28 or removed from the holding frame 28. Be made. As shown in FIG. 1, the holding frame 28 is positioned above the nozzle stocker 100 at that time. The base lifting mechanism 106 is provided to position the nozzle stocker 100 upward when the suction nozzle 44 is replaced.

  The nozzle storage unit 104 included in the nozzle stocker 100 can be replaced with another nozzle storage unit that differs in size, arrangement, etc. of the nozzle storage tool 110. Specifically, for example, in place of the four nozzle containers 110 arranged in a row, the nozzle container unit may be replaced with a nozzle container unit configured such that two more sets of four nozzle containers 110 are added. Also, conversely, instead of a set of four nozzle containers, one or more nozzle containers 110 are arranged on an extension of the four nozzle containers 110 arranged in one line. It is also possible to replace the nozzle housing unit with the configuration. The gear 120 and the gear 124 that mesh with the rack 122 supported by the base 102 can be easily disengaged from the rack 122 by removing the nozzle housing unit 104 from the base 102 upward. By attaching another nozzle housing unit to the base 102 from above, the gears of the nozzle housing unit can be easily engaged with the rack 122, so that the nozzle housing unit can be replaced with another nozzle housing unit. Can be done easily. Even when the nozzle housing unit is replaced with a nozzle housing unit having a different configuration, by operating the rack 122, the plurality of nozzle housing tools 110 included in the nozzle housing unit can be rotated synchronously.

≪Operation of die feeder when replacing suction nozzle≫
Hereinafter, the operation of the die feeding machine when the suction nozzle 44 mounted on the pickup head 16 is automatically replaced with another suction nozzle 44 will be described with the four suction nozzles 44 in the state shown in each figure described above. The case where the four suction nozzles 44 are simultaneously replaced will be described as an example.

  When the suction nozzle 44 is replaced, first, the holding table 28 of the die assembly holding device 14 is positioned at the working position, and in this state, the nozzle storage unit 104 of the nozzle stocker 100 is moved by the base lifting mechanism 106. The base 102 is raised to a predetermined replacement position. At this time, the cover 112 of the nozzle housing unit 104 is positioned by the cover moving mechanism 136 so that the opening 130 is in the fully opened state. Next, the pickup head 16 is moved to a position where the axes of the four sleeves 42 coincide with the four nozzle containers 110 that are empty, that is, the axes of the four nozzle containers 110 in the center set. It is moved by the moving device 18. At this position, the rod lifting mechanism 40 causes the four suction nozzles 44 mounted on the four sleeves 42 to be simultaneously lowered and accommodated in the four empty nozzle receptacles 110. At this time, each nozzle container 110 is positioned at a rotational position where the locking pin 116 at the upper end of each storage cylinder 114 is fitted into a notch 118 provided in the flange 48 of each suction nozzle 44. 116 fits into the notch 118 of each suction nozzle 44. The nozzle container 110 is positioned at the rotational position by the rack 122 being positioned at one moving end by the actuator 128 constituting the nozzle operating mechanism.

  After each of the four suction nozzles 44 is housed in the corresponding nozzle housing 110, the rack 122 is positioned from one moving end to the other moving end by the actuator 128, and the nozzle housings 110 are synchronized with each other. Can be rotated. By this rotation, the accommodated suction nozzles 44 rotate in synchronization with each other with respect to the four sleeves 42 of the pickup head 16. By this rotation, a pair of engaging pins 56 provided on the main cylinder 46 of each suction nozzle 44 are moved from the circumferential ends of the pair of slots 58 formed on the sleeve 42 to the upper end of the axial direction portion. Will be located. In this state, the cover 112 of the nozzle housing unit 104 is positioned by the cover moving mechanism 136 so that the opening 130 is in the half-open state. Then, the four rods 36 are simultaneously raised by the rod lifting mechanism 40, and the four suction nozzles 44 are extracted from the four sleeves 42 while remaining in the four nozzle containers 110. That is, the engagement state between each of the four suction nozzles 44 and each of the four nozzle containers 110 is released.

  Next, the pickup head 16 is moved by the head moving device 18 until the axes of the four sleeves 42 coincide with the axes of the four nozzle containers 110 in the left set. At that position, the rod elevating mechanism 40 lowers the four sleeves 42 at the same time, and the main cylinders 46 of the four suction nozzles 44 accommodated in the four nozzle receptacles 110 are respectively attached to the four sleeves 42. It is inserted. That is, each of the four suction nozzles 44 and each of the four nozzle containers 110 are brought into an engaged state. At this time, the pair of engaging pins 56 provided on the main cylinder 46 of each suction nozzle 44 are in a rotational position so as to fit into the respective axial portions of the pair of slots 58 formed in the corresponding sleeve 42. The four nozzle containers 110 are rotated. In a state where the main cylinder 46 of each suction nozzle 44 is fitted to the back of the sleeve 42, the rack 122 is positioned from the other moving end to the one moving end by the actuator 128, and each nozzle holder 110 is moved. It is rotated in the opposite direction to the previous direction in synchronization with each other. By this rotation, each of the accommodated suction nozzles 44 rotates in a direction opposite to the previous direction in synchronization with the four sleeves 42 of the pickup head 16. By this rotation, the pair of engaging pins 56 provided on the main cylinder 46 of each suction nozzle 44 is rotated to the toe end of the circumferential portion of the pair of slots 58 formed in the sleeve 42. Become.

  Next, the cover 112 of the nozzle housing unit 104 is positioned by the cover moving mechanism 136 so that the opening 130 is in the fully opened state. Thereafter, the four rods 36 are simultaneously raised by the rod lifting mechanism 40, and the four suction nozzles 44 are raised together with the four sleeves 42 while being fitted into the four sleeves 42. In this way, four suction nozzles 44 other than the four suction nozzles 44 previously mounted are mounted on the pickup head 16 at the same time. Thereafter, the cover 112 is returned to the position where the opening 130 is in the half-open state by the cover moving mechanism 136, and the nozzle housing unit 104 is lowered to the retracted position by the base lifting mechanism 106, and a series of The replacement operation of the suction nozzle 44 ends.

  As described above, in the present die supply machine, when the plurality of suction nozzles 44 are replaced with another plurality of suction nozzles 44, the plurality of suction nozzles 44 are simultaneously detached from the pickup head 16, and another plurality of suction nozzles 44. Can be mounted on the pickup head 16 at the same time, so that the replacement can be performed quickly. Further, a mechanism for performing simultaneous operation of the plurality of suction nozzles 44 for separation and simultaneous operation of the plurality of suction nozzles 44 for mounting, that is, the nozzle operating mechanism is not the pickup head 16 but the nozzle Since it is provided in the stocker 100, the pickup head structure can be simplified and reduced in weight.

  The operation for exchanging the suction nozzles is an operation for exchanging a plurality of suction nozzles 44 with another plurality of suction nozzles. In this die feeder, the plurality of suction nozzles 44 are replaced one by one. It is also possible to replace the suction nozzle 44, which is mounted only on one, with another one. Note that the four nozzle containers 110 arranged in a line on the right side of the nozzle stocker 100 have the left and center sets of nozzle containers 110 opposite to the rotation direction of the rack 122 in the direction of rotation. Therefore, in order to appropriately perform the mounting operation and the detaching operation with respect to the four nozzle storage devices 110 arranged in a row, the rack 122 is stored in the nozzle storage device 110 at the rotation position when the rack 122 is positioned at the one moving end. The engagement pin 56 at the upper end of the housing cylinder 114 so that the pair of engaging pins 56 provided on the main cylinder 42 of the suction nozzle 44 coincide with the axial direction portion of the pair of slots 58 formed in the sleeve 42. 116 is set, and at the rotation position, the rod 42 is moved up and down by the rod lifting mechanism 40 so that the suction nozzle 44 is inserted into and removed from the sleeve 42, and the other moving end is moved to the other moving end. When positioned, the pair of engaging pins 56 may be configured so as to be positioned at the toe ends of the circumferential direction portions of the pair of slots 58 of the sleeve 42. Simply put, the direction of operation of the rack 122 at the time of replacement may be reversed.

12: Die assembly stacker [die assembly accommodation device] 14: Die assembly holding device 16: Pickup head 18: Head moving device 36: Rod 40: Rod lifting mechanism [nozzle lifting mechanism] 42: Sleeve [Nozzle mounting tool 44: suction nozzle 56: engagement pin 58: slot 100: nozzle stocker [nozzle storage device] 104: nozzle storage unit 110: nozzle storage device 114: storage cylinder [nozzle holder] 120: gear [operation conversion mechanism, nozzle operation] Mechanism] 122: Rack [driving member, nozzle actuation mechanism] 124: Gear [motion conversion mechanism, nozzle actuation mechanism] 126: Gear [pinion, driven member, nozzle actuation mechanism] 128: Actuator [nozzle actuation mechanism] D: Die DS: Die assembly

Claims (7)

A die feeder that picks up and supplies dies from a die assembly formed by dicing a wafer,
A die assembly holding device for holding the die assembly;
A plurality of nozzle mounting devices each capable of mounting a plurality of suction nozzles each holding and holding a die, and a plurality of suction devices mounted on the plurality of nozzle mounting devices by raising and lowering the plurality of nozzle mounting devices. A pickup raising and lowering mechanism for raising and lowering the nozzle, and a pickup head for picking up a die from the die assembly held by the die assembly holding device;
A head moving device that moves the pickup head for pick-up of the die and supply of the picked-up die at a predetermined supply position;
The plurality of suction nozzles are configured to be stored in the same relative positional relationship as the relative positional relationship of the plurality of nozzle attachment devices, and the plurality of stored suction nozzles are attached to the plurality of nozzle attachments. A die feeder comprising: a nozzle storage device having a nozzle operating mechanism for simultaneously operating the plurality of suction nozzles for simultaneous mounting on a tool. The nozzle storage device has a plurality of nozzle holders that respectively hold the plurality of suction nozzles, and stores the plurality of suction nozzles in a state where the plurality of nozzle holders hold the plurality of suction nozzles. Is configured to
The nozzle operating mechanism is configured to operate the plurality of suction nozzles held by the plurality of nozzle holders simultaneously by operating the plurality of nozzle holders synchronously. Die feeding machine.   The die feeder according to claim 2, wherein the nozzle operating mechanism has one actuator and is configured to operate the plurality of nozzle holders synchronously by the actuator.   The nozzle actuating mechanism is driven by the actuator, the driven member is engaged with the driving member and driven by the driving member, and the operations of the driven members are held by the plurality of nozzles. The die feeder according to claim 3, further comprising a motion conversion mechanism that converts the motion into a tool motion. The nozzle storage device is
The plurality of nozzle holders, the driven member, and the operation conversion mechanism are configured to include a nozzle housing unit that is unitized,
The die feeder according to claim 4, wherein the nozzle housing unit is replaceable with another nozzle housing unit.   The die feeding machine according to claim 4 or 5, wherein the driving member is a rack and the driven member is a pinion that meshes with the rack. Each of the plurality of suction nozzles is configured to be attached to itself by being rotated around its own axis with respect to a corresponding one of the plurality of nozzle attachment devices,
7. The nozzle operation mechanism according to claim 2, wherein the nozzle operating mechanism is configured to rotate the plurality of nozzle holders synchronously around the axis of each of the plurality of suction nozzles held by each of the plurality of nozzle holders. The die feeder according to one.

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