JP2013079872A - 分光センサ - Google Patents
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- JP2013079872A JP2013079872A JP2011220180A JP2011220180A JP2013079872A JP 2013079872 A JP2013079872 A JP 2013079872A JP 2011220180 A JP2011220180 A JP 2011220180A JP 2011220180 A JP2011220180 A JP 2011220180A JP 2013079872 A JP2013079872 A JP 2013079872A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/36—Investigating two or more bands of a spectrum by separate detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
- G01J3/513—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
- G01J2003/1234—Continuously variable IF [CVIF]; Wedge type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
- G01J2003/2806—Array and filter array
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
【解決手段】 分光センサ1は、キャビティ層21並びにキャビティ層21を介して対向する第1及び第2のミラー層22,23を有し、所定の波長範囲の光を入射位置に応じて選択的に透過させる干渉フィルタ部20と、第1のミラー層22側に配置され、干渉フィルタ部20に入射する光を透過させる光透過基板3と、第2のミラー層23側に配置され、干渉フィルタ部20を透過した光を検出する光検出基板4と、を備える。キャビティ層21は、第1及び第2のミラー層22,23によって挟まれたフィルタ領域24と、フィルタ領域24から所定の距離をとってフィルタ領域24を包囲する環状の包囲領域25と、フィルタ領域24の光検出基板4側の端部24eと包囲領域25の光検出基板4側の端部25eとを接続する環状の接続領域26と、を有する。
【選択図】 図1
Description
Claims (4)
- キャビティ層並びに前記キャビティ層を介して対向する第1及び第2のミラー層を有し、所定の波長範囲の光を入射位置に応じて選択的に透過させる干渉フィルタ部と、
前記第1のミラー層側に配置され、前記干渉フィルタ部に入射する光を透過させる光透過基板と、
前記第2のミラー層側に配置され、前記干渉フィルタ部を透過した光を検出する光検出基板と、を備え、
前記キャビティ層は、
前記第1及び前記第2のミラー層によって挟まれたフィルタ領域と、
前記光透過基板と前記光検出基板とが対向する方向から見た場合に、前記フィルタ領域から所定の距離をとって前記フィルタ領域を包囲する環状の包囲領域と、
前記フィルタ領域の前記光検出基板側の端部と前記包囲領域の前記光検出基板側の端部とを接続する環状の接続領域と、を有する、分光センサ。 - 前記包囲領域の前記光透過基板側の端面は、前記フィルタ領域における前記第1のミラー層の形成面のうち前記光透過基板に最も近い部分と略同じ高さ、又は当該部分よりも前記光透過基板側に位置している、請求項1記載の分光センサ。
- 前記接続領域の前記光透過基板側の端面は、前記フィルタ領域における前記第1のミラー層の形成面のうち前記光検出基板に最も近い部分と略同じ高さ、又は当該部分よりも前記光検出基板側に位置している、請求項1又は2記載の分光センサ。
- 前記第1のミラー層と対向するように前記光透過基板上に形成され、前記所定の波長範囲の光を透過させる光学フィルタ層を更に備える、請求項1〜3のいずれか一項記載の分光センサ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011220180A JP5878723B2 (ja) | 2011-10-04 | 2011-10-04 | 分光センサ |
CN201280049230.6A CN103842784B (zh) | 2011-10-04 | 2012-09-10 | 分光传感器 |
PCT/JP2012/073080 WO2013051372A1 (ja) | 2011-10-04 | 2012-09-10 | 分光センサ |
DE112012004119.4T DE112012004119B4 (de) | 2011-10-04 | 2012-09-10 | Spektroskopischer Sensor |
US14/349,080 US9587980B2 (en) | 2011-10-04 | 2012-09-10 | Spectroscopic sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011220180A JP5878723B2 (ja) | 2011-10-04 | 2011-10-04 | 分光センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013079872A true JP2013079872A (ja) | 2013-05-02 |
JP5878723B2 JP5878723B2 (ja) | 2016-03-08 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011220180A Active JP5878723B2 (ja) | 2011-10-04 | 2011-10-04 | 分光センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US9587980B2 (ja) |
JP (1) | JP5878723B2 (ja) |
CN (1) | CN103842784B (ja) |
DE (1) | DE112012004119B4 (ja) |
WO (1) | WO2013051372A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6211833B2 (ja) * | 2013-07-02 | 2017-10-11 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタ |
JP6671860B2 (ja) * | 2015-04-28 | 2020-03-25 | 浜松ホトニクス株式会社 | 光検出装置 |
CN108139270B (zh) * | 2015-10-02 | 2021-06-08 | 浜松光子学株式会社 | 光检测装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS58195127A (ja) * | 1982-05-10 | 1983-11-14 | Japan Spectroscopic Co | マルチチヤネル検知器及びマルチチヤネル分光測定装置 |
JPS6457134A (en) * | 1987-08-27 | 1989-03-03 | Minolta Camera Kk | Spectrum measuring sensor |
JPH02257676A (ja) * | 1989-03-29 | 1990-10-18 | Sharp Corp | 波長選択性受光素子 |
JPH03243963A (ja) * | 1990-02-22 | 1991-10-30 | Toshiba Corp | 画像形成装置 |
JPH05322653A (ja) * | 1992-05-26 | 1993-12-07 | Hamamatsu Photonics Kk | 半導体光検出装置 |
JPH06129908A (ja) * | 1992-10-15 | 1994-05-13 | Hamamatsu Photonics Kk | 分光イメージングセンサ |
US5784507A (en) * | 1991-04-05 | 1998-07-21 | Holm-Kennedy; James W. | Integrated optical wavelength discrimination devices and methods for fabricating same |
JP2006058301A (ja) * | 2004-08-23 | 2006-03-02 | Palo Alto Research Center Inc | チップサイズ波長検出器 |
JP2009003284A (ja) * | 2007-06-22 | 2009-01-08 | Hamamatsu Photonics Kk | 光学フィルタ |
Family Cites Families (9)
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US4054389A (en) * | 1976-09-23 | 1977-10-18 | International Business Machines Corporation | Spectrophotometer with photodiode array |
US4957371A (en) * | 1987-12-11 | 1990-09-18 | Santa Barbara Research Center | Wedge-filter spectrometer |
US5144498A (en) | 1990-02-14 | 1992-09-01 | Hewlett-Packard Company | Variable wavelength light filter and sensor system |
JPH07243963A (ja) | 1994-03-07 | 1995-09-19 | Yazaki Corp | 光共振器とその製造方法 |
US7583863B2 (en) * | 2004-05-10 | 2009-09-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method and system for wavelength-dependent imaging and detection using a hybrid filter |
US7426040B2 (en) | 2004-08-19 | 2008-09-16 | University Of Pittsburgh | Chip-scale optical spectrum analyzers with enhanced resolution |
US7734131B2 (en) * | 2006-04-18 | 2010-06-08 | Xerox Corporation | Fabry-Perot tunable filter using a bonded pair of transparent substrates |
WO2008104928A1 (en) | 2007-03-01 | 2008-09-04 | Philips Intellectual Property & Standards Gmbh | Optical detector device |
JP5707107B2 (ja) * | 2010-11-22 | 2015-04-22 | 浜松ホトニクス株式会社 | 分光センサ |
-
2011
- 2011-10-04 JP JP2011220180A patent/JP5878723B2/ja active Active
-
2012
- 2012-09-10 US US14/349,080 patent/US9587980B2/en active Active
- 2012-09-10 DE DE112012004119.4T patent/DE112012004119B4/de active Active
- 2012-09-10 WO PCT/JP2012/073080 patent/WO2013051372A1/ja active Application Filing
- 2012-09-10 CN CN201280049230.6A patent/CN103842784B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS58195127A (ja) * | 1982-05-10 | 1983-11-14 | Japan Spectroscopic Co | マルチチヤネル検知器及びマルチチヤネル分光測定装置 |
JPS6457134A (en) * | 1987-08-27 | 1989-03-03 | Minolta Camera Kk | Spectrum measuring sensor |
JPH02257676A (ja) * | 1989-03-29 | 1990-10-18 | Sharp Corp | 波長選択性受光素子 |
JPH03243963A (ja) * | 1990-02-22 | 1991-10-30 | Toshiba Corp | 画像形成装置 |
US5784507A (en) * | 1991-04-05 | 1998-07-21 | Holm-Kennedy; James W. | Integrated optical wavelength discrimination devices and methods for fabricating same |
JPH05322653A (ja) * | 1992-05-26 | 1993-12-07 | Hamamatsu Photonics Kk | 半導体光検出装置 |
JPH06129908A (ja) * | 1992-10-15 | 1994-05-13 | Hamamatsu Photonics Kk | 分光イメージングセンサ |
JP2006058301A (ja) * | 2004-08-23 | 2006-03-02 | Palo Alto Research Center Inc | チップサイズ波長検出器 |
JP2009003284A (ja) * | 2007-06-22 | 2009-01-08 | Hamamatsu Photonics Kk | 光学フィルタ |
Also Published As
Publication number | Publication date |
---|---|
CN103842784A (zh) | 2014-06-04 |
DE112012004119T5 (de) | 2014-07-10 |
DE112012004119B4 (de) | 2023-08-10 |
WO2013051372A1 (ja) | 2013-04-11 |
CN103842784B (zh) | 2015-09-02 |
JP5878723B2 (ja) | 2016-03-08 |
US9587980B2 (en) | 2017-03-07 |
US20140313514A1 (en) | 2014-10-23 |
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