JPS6457134A - Spectrum measuring sensor - Google Patents

Spectrum measuring sensor

Info

Publication number
JPS6457134A
JPS6457134A JP21409287A JP21409287A JPS6457134A JP S6457134 A JPS6457134 A JP S6457134A JP 21409287 A JP21409287 A JP 21409287A JP 21409287 A JP21409287 A JP 21409287A JP S6457134 A JPS6457134 A JP S6457134A
Authority
JP
Japan
Prior art keywords
wavelength region
transmitting
interference
spd
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21409287A
Other languages
Japanese (ja)
Inventor
Satoshi Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Minolta Co Ltd
Original Assignee
Minolta Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minolta Co Ltd filed Critical Minolta Co Ltd
Priority to JP21409287A priority Critical patent/JPS6457134A/en
Publication of JPS6457134A publication Critical patent/JPS6457134A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE:To facilitate the positioning of BPFs and to miniaturize a sensor, by providing photodetector arrays in two or more lines, providing interference filters, whose transmitting wavelengths are sequentially changed, and providing the BPFs and the like, which transmit lights in wavelength regions having different interference orders. CONSTITUTION:The transmitting wavelengths of interference filters 2 are sequentially changed along the aligning direction of photodetectors (SPD) 1. The filters 2 have a transmitting wavelength region of, e.g., 500-1,000nm. A BPF 3a has a transmitting wavelength region of 500-1,000nm so that primary interference light is transmitted. A silicon photodiode (SPD) array 1a measures said wavelength region. A BPF 3b has a transmitting wavelength region of 400-500nm so that e.g., secondary interference light is transmitted. An SPD array 1b measures said wavelength region. The array 1b can have a length (z) corresponding to the part of the wavelength region of 800-1,000nm in the interference filters 2. Therefore, the lengths of the arrays 1a and 1b can be made short even if the wavelength region to be measured is wide. Since the diameter of the projecting light can be made small, the sensor can be made compact, and the light receiving efficiency can be made high.
JP21409287A 1987-08-27 1987-08-27 Spectrum measuring sensor Pending JPS6457134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21409287A JPS6457134A (en) 1987-08-27 1987-08-27 Spectrum measuring sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21409287A JPS6457134A (en) 1987-08-27 1987-08-27 Spectrum measuring sensor

Publications (1)

Publication Number Publication Date
JPS6457134A true JPS6457134A (en) 1989-03-03

Family

ID=16650094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21409287A Pending JPS6457134A (en) 1987-08-27 1987-08-27 Spectrum measuring sensor

Country Status (1)

Country Link
JP (1) JPS6457134A (en)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03230147A (en) * 1990-02-05 1991-10-14 Fuji Photo Film Co Ltd Exposure controller
JPH03230145A (en) * 1990-02-05 1991-10-14 Fuji Photo Film Co Ltd Exposure controller
JPH03230146A (en) * 1990-02-05 1991-10-14 Fuji Photo Film Co Ltd Exposure controller
JPH06167389A (en) * 1992-03-25 1994-06-14 Hughes Aircraft Co Coating for laser-detector etalon
JPH06235660A (en) * 1993-02-10 1994-08-23 Nec Corp Spectral analyzer
WO2001001070A1 (en) * 1999-06-29 2001-01-04 Omron Corporation Light source device, spectroscope comprising the light source device, and film thickness sensor
JPWO2003091676A1 (en) * 2002-04-23 2005-09-02 前田　弘 Small package spectroscopic sensor unit
JP2009058948A (en) * 2007-08-07 2009-03-19 Fujifilm Corp Spectroscopy device, spectroscopy apparatus and spectroscopy method
WO2012070302A1 (en) * 2010-11-22 2012-05-31 浜松ホトニクス株式会社 Spectroscopic sensor
WO2012070301A1 (en) * 2010-11-22 2012-05-31 浜松ホトニクス株式会社 Method for producing spectroscopic sensor
JP2012127917A (en) * 2010-12-17 2012-07-05 Denso Corp Wavelength selective infrared detector
WO2012176616A1 (en) * 2011-06-21 2012-12-27 オリンパス株式会社 Spectral image capturing device
WO2013051374A1 (en) * 2011-10-04 2013-04-11 浜松ホトニクス株式会社 Spectroscopic sensor
WO2013051372A1 (en) * 2011-10-04 2013-04-11 浜松ホトニクス株式会社 Spectroscopic sensor
JP2016166797A (en) * 2015-03-10 2016-09-15 日置電機株式会社 Light-amount measurement device
JP2018141766A (en) * 2017-02-27 2018-09-13 采▲ぎょく▼科技股▲ふん▼有限公司ＶｉｓＥｒａ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏｍｐａｎｙ Ｌｉｍｉｔｅｄ Spectrum inspection device
JP2019132607A (en) * 2018-01-29 2019-08-08 株式会社Ｊｖｃケンウッド Spectrometer
JP2021519511A (en) * 2018-03-30 2021-08-10 ヴィシャイ インターテクノロジー, インコーポレイテッドVishay Intertechnology, Inc. Multispectral optical sensor
JP2021144039A (en) * 2015-08-05 2021-09-24 ヴァイアヴィ・ソリューションズ・インコーポレイテッドViavi Solutions Inc. Optical filters and spectrometer

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03230147A (en) * 1990-02-05 1991-10-14 Fuji Photo Film Co Ltd Exposure controller
JPH03230145A (en) * 1990-02-05 1991-10-14 Fuji Photo Film Co Ltd Exposure controller
JPH03230146A (en) * 1990-02-05 1991-10-14 Fuji Photo Film Co Ltd Exposure controller
JPH06167389A (en) * 1992-03-25 1994-06-14 Hughes Aircraft Co Coating for laser-detector etalon
JPH06235660A (en) * 1993-02-10 1994-08-23 Nec Corp Spectral analyzer
WO2001001070A1 (en) * 1999-06-29 2001-01-04 Omron Corporation Light source device, spectroscope comprising the light source device, and film thickness sensor
JPWO2003091676A1 (en) * 2002-04-23 2005-09-02 前田　弘 Small package spectroscopic sensor unit
JP2009058948A (en) * 2007-08-07 2009-03-19 Fujifilm Corp Spectroscopy device, spectroscopy apparatus and spectroscopy method
WO2012070302A1 (en) * 2010-11-22 2012-05-31 浜松ホトニクス株式会社 Spectroscopic sensor
WO2012070301A1 (en) * 2010-11-22 2012-05-31 浜松ホトニクス株式会社 Method for producing spectroscopic sensor
JP2012112722A (en) * 2010-11-22 2012-06-14 Hamamatsu Photonics Kk Spectroscopic sensor
JP2012112723A (en) * 2010-11-22 2012-06-14 Hamamatsu Photonics Kk Method for manufacturing spectroscopic sensor
US8715443B2 (en) 2010-11-22 2014-05-06 Hamamatsu Photonics K.K. Method for producing spectroscopic sensor
US8873056B2 (en) 2010-11-22 2014-10-28 Hamamatsu Photonics K.K. Spectroscopic sensor
JP2012127917A (en) * 2010-12-17 2012-07-05 Denso Corp Wavelength selective infrared detector
JPWO2012176616A1 (en) * 2011-06-21 2015-02-23 オリンパス株式会社 Spectral imaging device
WO2012176616A1 (en) * 2011-06-21 2012-12-27 オリンパス株式会社 Spectral image capturing device
US10168213B2 (en) 2011-10-04 2019-01-01 Hamamatsu Photonics K.K. Spectroscopic sensor including interference filter unit having silicon oxide cavity
JP2013079873A (en) * 2011-10-04 2013-05-02 Hamamatsu Photonics Kk Spectral sensor
WO2013051372A1 (en) * 2011-10-04 2013-04-11 浜松ホトニクス株式会社 Spectroscopic sensor
CN103842783A (en) * 2011-10-04 2014-06-04 浜松光子学株式会社 Spectroscopic sensor
WO2013051374A1 (en) * 2011-10-04 2013-04-11 浜松ホトニクス株式会社 Spectroscopic sensor
JP2013079872A (en) * 2011-10-04 2013-05-02 Hamamatsu Photonics Kk Spectral sensor
US9587980B2 (en) 2011-10-04 2017-03-07 Hamamatsu Photonics K.K. Spectroscopic sensor
JP2016166797A (en) * 2015-03-10 2016-09-15 日置電機株式会社 Light-amount measurement device
JP2021144039A (en) * 2015-08-05 2021-09-24 ヴァイアヴィ・ソリューションズ・インコーポレイテッドViavi Solutions Inc. Optical filters and spectrometer
US10145740B2 (en) 2017-02-27 2018-12-04 Visera Technologies Company Limited Sensing multiple peak wavelengths using combination of dual-band filters
JP2018141766A (en) * 2017-02-27 2018-09-13 采▲ぎょく▼科技股▲ふん▼有限公司ＶｉｓＥｒａ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏｍｐａｎｙ Ｌｉｍｉｔｅｄ Spectrum inspection device
JP2019132607A (en) * 2018-01-29 2019-08-08 株式会社Ｊｖｃケンウッド Spectrometer
JP2021519511A (en) * 2018-03-30 2021-08-10 ヴィシャイ インターテクノロジー, インコーポレイテッドVishay Intertechnology, Inc. Multispectral optical sensor
US11862648B2 (en) 2018-03-30 2024-01-02 Vishay Intertechnology, Inc. Optoelectronic device arranged as a multi-spectral light sensor having a photodiode array with aligned light blocking layers and n-well regions

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