JP2013047178A - 配向カーボンナノチューブの製造方法 - Google Patents
配向カーボンナノチューブの製造方法 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/08—Aligned nanotubes
Abstract
【解決手段】還元ガス、原料ガス及び触媒賦活物質を噴出させ、基板の触媒被膜形成面に直交する方向に配向するカーボンナノチューブを化学気相成長により製造するための方法であり、基板の触媒被膜形成面を臨む位置に設けられた複数の噴出孔を備えるシャワーヘッドの該噴出孔から還元ガスを噴出させ、該噴出された還元ガスによって触媒被膜形成面に存在する金属触媒粒子の密度を1.0×1011から1.0×1013個/cm2に調整させ、かつ、該シャワーヘッドの噴出孔から原料ガス及び触媒賦活物質を噴出させ、該噴出された原料ガス及び触媒活性物質を前記成長して配向したカーボンナノチューブの集合体中を拡散させて触媒被覆形成面と接触させるようにしたことを特徴とする。
【選択図】図1
Description
Kenji Hata et al, Water-Assisted Highly Efficient Synthesis of Impurity-Free Single-Walled Carbon Nanotubes, SCIENCE, 2004.11.19, vol.306, p.1362-1364
2 基板
2a 触媒被膜形成面
3 反応チャンバ
4 加熱手段
5、6 ガス供給管
14 シャワーヘッド
21 噴出孔開口面
22 噴出孔
31 配向CNT集合体
S1 第1の過程
S2 第2の過程
S3 第3の過程
Claims (2)
- 還元ガス、原料ガス及び触媒賦活物質を噴出させ、基板の触媒被膜形成面に直交する方向に配向するカーボンナノチューブを化学気相成長により製造するための方法であって、
前記基板の触媒被膜形成面を臨む位置に設けられた複数の噴出孔を備えるシャワーヘッドの該噴出孔から前記還元ガスを噴出させ、該噴出された還元ガスによって前記触媒被膜形成面に存在する金属触媒粒子の密度を1.0×1011から1.0×1013個/cm2に調整させ、かつ、
該シャワーヘッドの噴出孔から前記原料ガス及び前記触媒賦活物質を噴出させ、該噴出された前記原料ガス及び前記触媒活性物質を前記成長して配向したカーボンナノチューブの集合体中を拡散させて前記触媒被覆形成面と接触させるようにしたことを特徴とする配向カーボンナノチューブの製造方法。 - 前記触媒賦活物質として、含酸素化合物を用いることを特徴とする請求項1記載の配向カーボンナノチューブの製造方法。
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JP2012222921A JP5594704B2 (ja) | 2007-02-05 | 2012-10-05 | 配向カーボンナノチューブの製造方法 |
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Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102272045A (zh) * | 2008-12-30 | 2011-12-07 | 独立行政法人产业技术综合研究所 | 取向单层碳纳米管集合体、块状取向单层碳纳米管集合体、粉体状取向单层碳纳米管集合体、及其制造方法 |
JP5574265B2 (ja) * | 2009-02-10 | 2014-08-20 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造装置 |
CN102459074A (zh) * | 2009-06-17 | 2012-05-16 | 独立行政法人产业技术综合研究所 | 高比表面积的碳纳米管集合体的制造方法 |
WO2010147192A1 (ja) * | 2009-06-17 | 2010-12-23 | 独立行政法人産業技術総合研究所 | 高比表面積のカーボンナノチューブ集合体の製造方法 |
US8883260B2 (en) * | 2009-06-17 | 2014-11-11 | National Institute Of Advanced Industrial Science And Technology | Apparatus and method for producing carbon |
CN102471065B (zh) * | 2009-07-01 | 2014-03-26 | 日本瑞翁株式会社 | 取向碳纳米管集合体的制造装置 |
JP2011148658A (ja) * | 2010-01-22 | 2011-08-04 | Hitachi Zosen Corp | 熱cvd装置 |
JP5791157B2 (ja) * | 2010-12-15 | 2015-10-07 | 国立研究開発法人産業技術総合研究所 | 合成炉 |
JP5622101B2 (ja) * | 2010-12-15 | 2014-11-12 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造方法 |
KR101806916B1 (ko) * | 2011-03-17 | 2017-12-12 | 한화테크윈 주식회사 | 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법 |
WO2013027797A1 (ja) | 2011-08-24 | 2013-02-28 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造装置及び製造方法 |
KR20150096678A (ko) * | 2012-12-20 | 2015-08-25 | 니폰 제온 가부시키가이샤 | 카본 나노튜브의 제조 방법 |
JP6372285B2 (ja) * | 2014-09-29 | 2018-08-15 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造装置 |
JP6399596B2 (ja) * | 2014-12-11 | 2018-10-03 | 大陽日酸株式会社 | カーボンナノ材料製造装置、及びカーボンナノ材料製造方法 |
JP6419982B2 (ja) * | 2015-09-30 | 2018-11-07 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置および記録媒体 |
KR102566150B1 (ko) * | 2020-10-07 | 2023-08-14 | 이화여자대학교 산학협력단 | 광 프로브 |
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JP2001234341A (ja) * | 2000-01-26 | 2001-08-31 | Cheol Jin Lee | 熱化学気相蒸着装置及びこれを用いた炭素ナノチューブの合成方法 |
JP2004523460A (ja) * | 2001-04-04 | 2004-08-05 | コモンウエルス サイエンティフィック アンド インダストリアル リサーチ オーガナイゼーション | 炭素ナノチューブを製造するための方法及び装置 |
WO2006011655A1 (ja) * | 2004-07-27 | 2006-02-02 | National Institute Of Advanced Industrial Scienceand Technology | 単層カーボンナノチューブおよび配向単層カーボンナノチューブ・バルク構造体ならびにそれらの製造方法・装置および用途 |
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US7338684B1 (en) * | 2004-02-12 | 2008-03-04 | Performance Polymer Solutions, Inc. | Vapor grown carbon fiber reinforced composite materials and methods of making and using same |
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JP4706852B2 (ja) | 2006-03-27 | 2011-06-22 | 株式会社豊田中央研究所 | カーボンナノチューブの製造方法 |
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JP2001234341A (ja) * | 2000-01-26 | 2001-08-31 | Cheol Jin Lee | 熱化学気相蒸着装置及びこれを用いた炭素ナノチューブの合成方法 |
JP2004523460A (ja) * | 2001-04-04 | 2004-08-05 | コモンウエルス サイエンティフィック アンド インダストリアル リサーチ オーガナイゼーション | 炭素ナノチューブを製造するための方法及び装置 |
WO2006011655A1 (ja) * | 2004-07-27 | 2006-02-02 | National Institute Of Advanced Industrial Scienceand Technology | 単層カーボンナノチューブおよび配向単層カーボンナノチューブ・バルク構造体ならびにそれらの製造方法・装置および用途 |
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US20100062157A1 (en) | 2010-03-11 |
US8455050B2 (en) | 2013-06-04 |
WO2008096699A1 (ja) | 2008-08-14 |
JP5594704B2 (ja) | 2014-09-24 |
JPWO2008096699A1 (ja) | 2010-05-20 |
JP5339281B2 (ja) | 2013-11-13 |
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