JP2013026238A - Mounting base plate, and electronic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance connection reliability of a conductor pin of a mounting base plate and an electronic component to be mounted thereon.SOLUTION: The mounting base plate has a first conductor pin, a second conductor pin and a support substrate, the support substrate is connected to one end side of the first and second conductor pins, and an electronic component can be connected electrically to the other end side of the first and second conductor pins. At least the first conductor pin has a side surface composed at least of a first side surface on the other end side, and a second side surface on the one end side, and the first and second side surfaces are connected to swell outward on the intersection P1 thereof.

Description

  The present invention relates to a mounting substrate and an electronic device.

  In order to improve heat dissipation and ease of mounting, etc., it has a conductor pin and a support substrate connected to one end of the conductor pin, and an electronic component can be electrically connected to the other end of the conductor pin. A package (mounting substrate) has been proposed (see Patent Document 1). For example, in a conventional package described in Patent Document 1, an electronic component is mounted so as to be sandwiched between a first support substrate and a second support substrate. Specifically, the first support substrate has conductor pins (projecting electrodes), and the electronic component is placed on the second support substrate. And the electrode of an electronic component is electrically connected with the conductor pin which protrudes from a 1st support substrate through solder.

JP 2008-60529 A

  However, it is considered that there is still room for improvement in terms of connection reliability in the conventional method of mounting electronic components on the conductor pins as described in Patent Document 1 (hereinafter referred to as pin bonding).

  An object of the present invention is to improve the connection reliability between a conductor pin of a mounting board and an electronic component mounted thereon.

  The mounting substrate according to the present invention includes a first conductor pin, a second conductor pin, and a support substrate, and the support substrate is connected to one end side of the first conductor pin and the second conductor pin, A mounting substrate capable of electrically connecting an electronic component to the other end side of the first conductor pin and the second conductor pin, wherein at least the first conductor pin has a side surface at least on the other end side The first side surface and the second side surface on the one end side are configured such that the first side surface and the second side surface bulge outward at the intersection.

  It is preferable that the intersection line portion between the first side surface and the second side surface has a portion formed along a curve that goes around the outer periphery of the first conductor pin.

  It is preferable that the intersection part of the first side surface and the second side surface circulates around the outer periphery of the first conductor pin.

  It is preferable that the first side surface is formed in a tapered shape.

  In a cross section including the central axis of the first conductor pin, it is preferable that an angle formed by the first side surface and the central axis is in a range of 5 to 20 °.

  Preferably, the first side surface is a flat surface and the second side surface is a side surface of a cylindrical portion.

  It is preferable that the intersecting line portion is in a range from the other end side end surface of the first conductor pin to 0.2 mm in the axial direction of the conductor pin.

  It is preferable that an angle formed between the first side surface and the second side surface in the intersecting line portion is in a range of 89 to 170 °.

  It is preferable that at least the periphery of the intersecting line portion of the first conductor pin is covered with a covering material.

  It is preferable that a portion of the covering material covering the intersecting line portion is partially thickened.

  It is preferable that the covering material covers only the intersecting line portion of the first conductor pin.

  The covering material is preferably made of an electrolytic plating film.

  Preferably, the first conductor pin is made of any one of copper, gold, and an alloy thereof, and the covering material is made of any one of nickel, chromium, and zinc.

  The second conductor pin preferably has a cylindrical shape on the other end side.

  It is preferable that the first conductor pin is a conductor pin thinner than the second conductor pin.

  It is preferable that the first conductor pins constitute a plurality of first conductor pin groups, and the first conductor pin groups have the same length.

  Preferably, the second conductor pins constitute a plurality of second conductor pin groups, and the second conductor pin groups have the same length.

  It is preferable that the first conductor pin group has the same thickness as the first conductor pin.

  The second conductor pin group preferably has the same thickness as the second conductor pin.

  The electronic device according to the present invention is electrically connected to the mounting substrate, the other end side of the first conductor pin, and the other end side of the second conductor pin via solder. Electronic components.

  At least the intersection portion of the first conductor pin is covered with a covering material, and the covering material is a conductor having lower wettability with respect to the solder than the material constituting the first conductor pin. It is preferable that it consists of.

  Preferably, the electronic component is a transistor, and the first conductor pin is electrically connected to the gate of the transistor.

  According to the present invention, since a sufficiently large solder fillet is formed at the connection portion between the conductor pin of the mounting substrate and the electronic component mounted thereon, the solder pin is less likely to crack and the conductor pin of the mounting substrate The connection reliability with the electronic component mounted thereon can be improved.

It is a top view which shows the electronic device which concerns on embodiment of this invention, and the mounting board | substrate which comprises it. It is sectional drawing which shows the electronic device which concerns on embodiment of this invention, and the mounting board | substrate which comprises it. It is a figure which shows the 2nd conductor pin used for the mounting board | substrate which concerns on embodiment of this invention. It is the figure which looked at the 2nd conductor pin shown in Drawing 3A from the insertion end side. It is a figure which shows the 1st conductor pin used for the board | substrate for mounting which concerns on embodiment of this invention. It is the figure which looked at the 1st conductor pin shown in Drawing 4A from the insertion end side. It is a figure which shows the mounting end vicinity of the 1st conductor pin used for the mounting board | substrate which concerns on embodiment of this invention. It is the figure which looked at the 1st conductor pin shown in Drawing 5A from the mounting end side. It is sectional drawing which shows the connection part of a 1st conductor pin and an electronic component. It is a figure which shows the detail of the shape of the 1st conductor pin which concerns on embodiment of this invention. It is a figure which shows the coating | covering material which covers the intersection part periphery which concerns on embodiment of this invention. It is a figure which shows the connection part of the straight pin and electronic component which concern on a comparative example. It is a figure for demonstrating the creeping of the solder which concerns on a comparative example. It is explanatory drawing of a solder scoop up about the straight pin which concerns on a comparative example. It is explanatory drawing of solder scooping up about the 1st conductor pin which concerns on embodiment of this invention. It is a graph which shows a solder scoop up about each of the straight pin which concerns on a comparative example, and the 1st conductor pin which concerns on embodiment of this invention. It is a figure for demonstrating the process of preparing a support substrate about the manufacturing method of the mounting board | substrate which concerns on embodiment of this invention. It is a figure for demonstrating the process of forming a hole in a support substrate about the manufacturing method of the mounting board | substrate which concerns on embodiment of this invention. It is a figure for demonstrating the process of preparing the conductor pin which has a straight side surface parallel to an axis | shaft near the front-end | tip about the manufacturing method of the mounting board | substrate which concerns on embodiment of this invention. It is a figure for demonstrating the process of pressing the conductor pin shown to FIG. 11A. It is a figure which shows the conductor pin which has an intersection part in the front end side formed by the press work of FIG. 11B. It is a figure for demonstrating the 2nd method of forming the 2nd conductor pin which concerns on embodiment of this invention. It is a figure for demonstrating the process of inserting a conductor pin in the hole of a support substrate about the manufacturing method of the mounting board | substrate which concerns on embodiment of this invention. It is a figure which shows the completed mounting board | substrate which concerns on embodiment of this invention. It is a figure for demonstrating the process of installing an electronic component on a board | substrate about the manufacturing method of the mounting board | substrate which concerns on embodiment of this invention. It is a figure for demonstrating the process of mounting an electronic component in the conductor pin of the mounting board | substrate about the manufacturing method of the mounting board | substrate which concerns on embodiment of this invention. It is a figure which shows the mounting end vicinity of the 1st conductor pin which concerns on the 1st modification of this invention. It is the figure which looked at the 1st conductor pin shown to FIG. 16A from the mounting end side. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 1st modification of this invention. It is a figure which shows the mounting end vicinity of the 1st conductor pin which concerns on the 2nd modification of this invention. It is AA sectional drawing of FIG. 17A. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 2nd modification of this invention. It is a figure which shows the mounting end vicinity of the 1st conductor pin which concerns on the 3rd modification of this invention. It is the figure which looked at the 1st conductor pin shown to FIG. 18A from the mounting end side. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 3rd modification of this invention. It is a figure which shows the mounting end vicinity of the 1st conductor pin which concerns on the 4th modification of this invention. It is AA sectional drawing of FIG. 19A. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 4th modification of this invention. It is a figure which shows the mounting end vicinity of the 1st conductor pin which concerns on the 5th modification of this invention. It is AA sectional drawing of FIG. 20A. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 5th modification of this invention. It is a figure which shows an example of the 1st conductor pin which taper according to embodiment of this invention. It is a figure which shows an example of the 1st conductor pin whose side surface of the taper part which concerns on embodiment of this invention is a curved surface. It is a figure which shows an example in which the side surface of the collar part of the 1st conductor pin which concerns on embodiment of this invention is step shape. It is a figure which shows an example of the intersection part from which the side surface of the 1st conductor pin which concerns on embodiment of this invention consists of an uneven surface. It is a figure which shows an example of the 2nd conductor pin which has an acute angle intersection part about the modification of the 1st conductor pin which concerns on the 3rd modification of this invention. It is a figure which shows an example of the 2nd conductor pin which has an obtuse angle | intersection part about the modification of the 1st conductor pin which concerns on the 3rd modification of this invention. It is a figure which shows an example of the 1st conductor pin which has the uphill which consists of a curved surface in the vicinity of a mounting end about the modification of the 1st conductor pin which concerns on the 3rd modification of this invention. It is a figure which shows an example in which the 1st conductor pin which concerns on the 4th modification of this invention has a square hollow (recessed part). It is a figure which shows an example in which the several hollow which has a different shape is formed along the circumferential direction of the 1st conductor pin which concerns on the 4th modification of this invention. It is a figure which shows an example in which the 1st conductor pin which concerns on the 5th modification of this invention has a square-shaped protrusion (convex part). It is a figure which shows an example in which several protrusion which has a different shape is formed along the circumferential direction of the 1st conductor pin which concerns on the 5th modification of this invention. It is a figure which shows an example of the 1st conductor pin which has a hollow (concave part) and protrusion (convex part) along the circumferential direction based on embodiment of this invention. It is a figure which shows an example of the 1st conductor pin which has a some collar part near the mounting end based on embodiment of this invention. It is a figure which shows an example of the 1st conductor pin which has a step-shaped level | step difference in the mounting end vicinity based on embodiment of this invention. It is a figure which shows the 1st example of the 1st conductor pin which has both a taper part and a collar part based on embodiment of this invention. It is a figure which shows the 2nd example of the 1st conductor pin which has both a taper part and a collar part based on embodiment of this invention. It is a figure which shows an example of the 1st conductor pin partially covered with the coating | covering material (metal film) based on embodiment of this invention. It is a figure which shows an example of the 1st conductor pin which covered only the intersection part based on embodiment of this invention with the coating | covering material (metal film). It is a figure which shows an example of the 1st conductor pin which is not covered with the coating | covering material (metal film) based on embodiment of this invention. It is a figure which shows the 1st example of the 1st conductor pin which does not have a collar part based on embodiment of this invention. It is a figure which shows the 2nd example of the 1st conductor pin which does not have a collar part based on embodiment of this invention. It is a figure which shows an example of the bent 1st conductor pin based on embodiment of this invention. It is a figure which shows the regular tetragon as another example of the shape of the cross section of the conductor pin which concerns on embodiment of this invention. It is a figure which shows the regular hexagon as another example of the shape of the cross section of the conductor pin which concerns on embodiment of this invention. It is a figure which shows the regular octagon as another example of the shape of the cross section of the conductor pin which concerns on embodiment of this invention. It is a figure which shows the ellipse as another example of the shape of the cross section of the cross section of the conductor pin which concerns on embodiment of this invention. It is a figure which shows the cross shape as another example of the shape of the cross section of the conductor pin which concerns on embodiment of this invention. It is a figure which shows the regular polygon star as another example of the shape of the cross section of the conductor pin which concerns on embodiment of this invention. It is a figure which shows the petal shape as another example of the shape of the cross section of the conductor pin which concerns on embodiment of this invention. It is a figure which shows an example which applied the conductor pin which concerns on embodiment of this invention as all the conductor pins of the board | substrate for mounting. It is a figure which shows an example of the board | substrate for mounting in which the conductor pin and support substrate which concern on embodiment of this invention were formed continuously. It is a figure which shows an example which applied the conductor pin which concerns on embodiment of this invention to the electronic device which has a some support substrate. It is a figure which shows an example of the electronic device which has a conductor pin which concerns on embodiment of this invention, and does not have a wiring board.

  The connection reliability of conventional pin bonding as described in Patent Document 1 will be described by comparing pin bonding and wire bonding.

  In wire bonding, an electrode of an electronic component is directly connected (welded) to a wire (for example, a metal wire made of aluminum or the like). Since the wire is flexible, for example, even if the package is distorted (thermal strain) due to the difference in thermal expansion coefficient between the materials constituting the package, the wire is not easily broken.

  On the other hand, in pin bonding, an electrode of an electronic component is electrically connected to a conductor pin via solder. Since the conductor pin is harder than the wire, in such a structure, it is considered that the thermal stress applied to the connection portion between the conductor pin and the electronic component increases as the temperature rises. For this reason, the solder at the connection portion between the conductor pin and the electronic component is easily cracked, and the connection reliability is easily lowered.

  The present invention can improve the connection reliability between a conductor pin of a mounting board and an electronic component mounted thereon.

  Hereinafter, embodiments of the present invention will be described. In the figure, arrows Z1 and Z2 respectively indicate the normal direction of the main surface (front and back surfaces) of the support substrate, that is, the thickness direction of the support substrate. On the other hand, arrows X1, X2 and Y1, Y2 indicate directions perpendicular to the thickness direction of the support substrate (directions parallel to the main surface of the support substrate). The main surface of the support substrate is an XY plane. The side surface of the support substrate is an XZ plane or a YZ plane.

  With respect to the conductor pin, the axis passing through the center of gravity (or the center of the circle if the section is a circle) from one end to the other end of the conductor pin is used as the axis. A cross section perpendicular to the axis (for example, an XY plane) is referred to as a transverse cross section. A section parallel to the axis (for example, an XZ plane or a YZ plane) is referred to as a longitudinal section. In this embodiment, the axis is a straight line in the longitudinal direction of the conductor pin. The longitudinal direction of the conductor pin corresponds to the insertion direction (for example, the Z direction). However, the axis is not necessarily a straight line (see, for example, an axis composed of three straight lines in FIG. 34).

  The circumferential direction means a direction along the outline of the cross section (see direction C1 in FIG. 4B), and the same applies when the outline of the cross section is other than a circle. The radial direction means a direction from an arbitrary point of the outline of the cross section toward the axis (see direction C2 in FIG. 4B), and the same applies to the case where the outline of the cross section is other than a circle. Of the radial direction, the side away from the conductor pin axis is referred to as the outer side, and the side closer to the conductor pin axis is referred to as the inner side. Also, being parallel to the axis is called straight.

  “Insertion” includes not only inserting a member sufficiently thin compared to the hole diameter into the hole but also inserting or screwing the member into the hole.

  “Connection” includes not only a case where there is a seam but also a case where there is no seam. The case where there is a seam means, for example, a case where two separately formed objects are joined with an adhesive or the like. The case where there is no seam means, for example, a case where two parts are formed continuously (integrally) and nothing is interposed between them.

  In addition to wet plating such as electrolytic plating, the plating includes dry plating such as PVD (Physical Vapor Deposition) or CVD (Chemical Vapor Deposition).

  Unless otherwise specified, the “width” of a hole or a column (projection) means a diameter in the case of a circle and means √ (4 × cross-sectional area / π) otherwise.

  In this specification, unless otherwise specified, the conductor pin refers to the first conductor pin, but may be applied to the second conductor pin.

  FIG. 1 is a plan view showing an electronic device according to an embodiment of the present invention and a mounting substrate constituting the electronic device, and FIG. 2 is an electronic device according to an embodiment of the present invention and for mounting constituting the electronic device. It is sectional drawing which shows a board | substrate.

  As shown in FIGS. 1 and 2, the electronic device 100 of this embodiment includes a mounting substrate 100 a, a wiring board 1000, and semiconductor chips 201 and 202 that are electronic components.

  The mounting board of the present embodiment has a first conductor pin, a second conductor pin, and a support board, and the support board is connected to one end side of the first conductor pin and the second conductor pin, and the first conductor A mounting substrate capable of electrically connecting an electronic component to the other end side of the pin and the second conductor pin, wherein at least the first conductor pin has at least a first side surface and one end of the other end side. It is comprised by the 2nd side surface of a side, and the 1st side surface and 2nd are comprised so that it may bulge outside at the intersection part of a side surface.

  The electronic device of the present embodiment is electrically connected to the mounting substrate of the present embodiment, the other end side of the first conductor pin, and the other end side of the second conductor pin via solder. And an electronic component.

  The mounting substrate 100a includes a support substrate 2000 and conductor pin groups 101 to 103. The support substrate 2000 is connected to one end side (Z2 side) of each conductor pin of the conductor pin groups 101 to 103. The pads of the wiring board 1000 and the electrodes of the semiconductor chips 201 and 202 are electrically connected to the other end side (Z1 side) of each conductor pin.

  In the present embodiment, the wiring board 1000 is a printed wiring board having copper wiring. Specifically, the wiring board 1000 is composed of, for example, a ceramic substrate and a conductor layer (copper wiring) formed thereon. However, the wiring board 1000 may be a multilayer wiring board, and the wiring material may be a conductor other than copper. Further, instead of the wiring board 1000, a metal plate may be used. Each of the semiconductor chips 201 and 202 may be a discrete semiconductor such as a transistor such as a FET (Field Effect Transistor), or a Darlington transistor IC combined with these.

  The main surface on the Z1 side of the support substrate 2000 is the first surface F11, and the main surface on the Z2 side of the support substrate 2000 is the second surface F12. The support substrate 2000 includes a first insulating layer 2001, a second insulating layer 2002, and a third insulating layer 2003. Here, the first insulating layer 2001 is made of, for example, thermoplastic polyimide, the second insulating layer 2002 is made of, for example, thermosetting polyimide, and the third insulating layer 2003 is made of, for example, thermoplastic polyimide. However, the material of the support substrate 2000 is not limited to these and is arbitrary. For example, the support substrate 2000 may be a metal plate or a resin substrate.

  The support substrate 2000 is formed with a plurality of holes 2000a (number corresponding to the conductor pins). The hole 2000 a is, for example, a through hole (through hole), and is formed perpendicular to the main surface of the support substrate 2000. One end side (insertion portion) of each conductor pin of the conductor pin groups 101 to 103 is inserted (for example, inserted) into the hole 2000a. The other end side (mounting portion) of each conductor pin of the conductor pin groups 101 to 103 protrudes perpendicularly to the first surface F11 of the support substrate 2000. A conductor film may be formed on the inner surface of the hole 2000a. The hole 2000a may be a bottomed hole. A bottomed hole means a hole with a bottom.

  The conductor pin groups 101 and 103 are each composed of one kind of conductor pins 101a and 103a, and the conductor pin group 102 is composed of two kinds of conductor pins 10 (first conductor pins) and conductor pins 20 (second conductor pins). ).

  The first conductor pins of the present embodiment constitute a plurality of first conductor pin groups, and the first conductor pin groups have the same length.

  The second conductor pins of the present embodiment constitute a plurality of second conductor pin groups, and the second conductor pin groups have the same length.

  In the first conductor pin group of the present embodiment, the thickness of the first conductor pin is uniform.

  In the second conductor pin group of the present embodiment, the thickness of the second conductor pin is uniform.

  The conductor pins 101a, 103a, and 20 are connected to, for example, a power system pad or electrode (for example, a collector electrode or an emitter electrode of a transistor). On the other hand, the conductor pin 10 is connected to a signal system electrode (for example, a base electrode or a gate electrode of a transistor). The lengths of the conductor pins are aligned for each conductor pin group (101a, 10, 20, 103a). That the lengths of the conductor pins are the same means that the lengths are substantially the same. Thereby, since the space | interval of the front-end | tip of a conductor pin and an electric power system pad or electrode becomes equal, the fillet of the solder formed by reflow tends to become a similar shape. For this reason, the dispersion | variation in the fillet shape of solder becomes small, and the connection reliability of the front-end | tip of a conductor pin and a pad or an electrode can be improved.

  Moreover, the thickness of a conductor pin is also uniform for every conductor pin group (101a, 10, 20, 103a). That the thickness of the conductor pin is uniform means that the thickness is substantially the same. For this reason, the variation of the solder fillet shape is reduced, and the formed solder fillet is likely to have a similar shape within the same conductor pin group, thereby improving the connection reliability between the tip of the conductor pin and the pad or electrode. it can.

  The conductor pin 101a is electrically connected to the pad of the wiring board 1000 through the solder 1000a. Each of the conductor pins 10 and 20 is electrically connected to the electrode of the semiconductor chip 201 via the solder 201a. The conductor pin 103a is electrically connected to the electrode of the semiconductor chip 202 via the solder 202a. As a material of the solder 1000a, 201a, 202a, for example, tin or a tin alloy can be used.

  In FIG. 2, the distance between the conductor pin 101a and the wiring board 1000 is the distance d1, the distance between the conductor pins 10 and 20 and the semiconductor chip 201 is the distance d20 and d2, respectively, and the conductor pin 103a and the semiconductor chip 202. Is a distance d3. In the present embodiment, the conductor pin groups 101 to 103 have conductor pins having different lengths. Specifically, in the present embodiment, the semiconductor chips 201 and 202 have different heights. For this reason, the distances from the support substrate 2000 to the wiring board 1000 and the semiconductor chips 201 and 202 are different from each other. In this embodiment, the lengths of the conductor pins of the conductor pin groups 101 to 103 correspond to this difference in distance, and the distances d1, d20, d2, and d3 are equal to each other. As a result, the thickness of the connection layer made of the solder 1000a, 201a, 202a becomes uniform, so that any portion is similarly melted at the time of reflow, so that the formed fillet has a similar shape. For this reason, the dispersion | variation in the fillet shape of solder becomes small, and the connection reliability of the front-end | tip of a conductor pin and a pad or an electrode can be improved. Further, since the amounts of the solders 1000a, 201a, and 202a can be made uniform, it is not necessary to adjust the amount of solder, and the manufacturing process is simplified. The distances d1, d20, d2, and d3 are each preferably in the range of 10 to 50 μm, for example.

  In the present embodiment, since the conductor pin groups 101 to 103 have conductor pins having different lengths, the distance d1 regardless of the distance between the support substrate 2000 and the pads of the wiring board 1000 or the semiconductor chips 201 and 202. , D20, d2, and d3 can be made uniform. In such a structure, connection is possible even if the distance between the support substrate 2000 and the pads of the wiring board 1000 or the semiconductor chips 201 and 202 is different. Therefore, a conductor spacer or the like for aligning the height of the tip of the conductor pin is not required, so the number of parts is reduced and the number of manufacturing steps is not increased.

  3A and 3B show the second conductor pin 20, and FIGS. 4A and 4B show the first conductor pin 10. FIG. FIG. 3A is a diagram illustrating a second conductor pin used in the mounting substrate according to the embodiment of the present invention, and FIG. 3B is a diagram of the second conductor pin illustrated in FIG. 3A as viewed from the insertion end side. is there.

  4A is a diagram showing a first conductor pin used in the mounting board according to the embodiment of the present invention, and FIG. 4B is a diagram of the first conductor pin shown in FIG. 4A as viewed from the insertion end side. is there. The direction C1 in FIGS. 3B and 4B corresponds to the circumferential direction, and the direction C2 in FIGS. 3B and 4B corresponds to the radial direction. In the present embodiment, the structure of the conductor pins 101a and 103a is the same as that of the conductor pin 20 except for the dimensions.

  As shown in FIGS. 3A and 3B, the conductor pin 20 includes a mounting portion 21, a flange portion 22, and an insertion portion 23. One end of the conductor pin 20 is an insertion end F2, and the other end of the conductor pin 20 is a mounting end F1. The conductor pin 20 is inserted into the hole 2000a from the insertion end F2 side, and is connected to the electrode of the semiconductor chip 201 on the mounting end F1 side. The conductor pin 20 is a cylindrical conductor. The shape of the mounting part 21 and the insertion part 23 is a cylinder (straight shape). The shape of the collar part 22 is a disk. The conductor pin 20 is made of, for example, copper or a copper alloy. The said disc means the cylindrical part currently formed rather than the cylinder of the mounting part and the insertion part.

  For example, the mounting part 21, the flange part 22, and the insertion part 23 have diameters d121, d122, and d123, respectively. For example, the diameter d121 of the mounting portion 21 and the diameter d123 of the insertion portion 23 are the same. The diameter d122 of the collar portion 22 is larger than each of the diameters d121 and d123. The side surface of the flange portion 22 projects in the radial direction (outside) with respect to the side surfaces of the mounting portion 21 and the insertion portion 23. For this reason, when inserting the conductor pin 20 in the hole 2000a, the collar part 22 functions as a stopper. That is, excessive insertion is prevented by the collar portion 22. The insertion portion 23 is inserted into the hole 2000a, and the mounting portion 21 and the flange portion 22 protrude from the first surface F11 of the support substrate 2000. The diameter d121 is in the range of 0.25 to 0.6 mm, for example, the diameter d122 is in the range of 0.6 to 1.0 mm, and the diameter d123 is in the range of 0.25 to 0.6 mm, for example. .

  As shown in FIGS. 4A and 4B, the first conductor pin 10 includes a mounting portion 11, a flange portion 12, and an insertion portion 13. A covering material 10 a is formed on the surface of the first conductor pin 10. The covering material 10 a covers the entire first conductor pin 10.

  One end of the first conductor pin 10 is an insertion end F2, and the other end of the first conductor pin 10 is a mounting end F1. The first conductor pin 10 is inserted into the hole 2000a from the insertion end F2 side, and is connected to the electrode of the semiconductor chip 201 on the mounting end F1 side. The first conductor pin 10 is a cylindrical conductor. The shape of the insertion part 13 is a cylinder (straight shape). The shape of the flange portion 12 is a column (straight shape), and the size of the flange portion 12 is larger than that of the mounting portion 11 and the insertion portion 13. In the present embodiment, the mounting portion 11 is tapered in the vicinity of the mounting end F1 (mounting portion 11) so as to become thinner toward the mounting end F1. In FIG. 4A, lengths d114, d115, and d116 are the lengths of the mounting portion 11, the flange portion 12, and the insertion portion 13, respectively. For example, the length d114 is in the range of 0.8 to 3.0 mm, the length d115 is in the range of 0.1 to 0.6 mm, and the length d116 is in the range of 0.4 to 2.0 mm.

  The mounting part 11 (straight part P12), the collar part 12, and the insertion part 13 have diameters d111, d112, and d113, respectively. The diameter d112 of the collar portion 12 is larger than each of the diameters d111 and d113. The side surface of the flange portion 12 protrudes in the radial direction (outside) with respect to the side surfaces of the mounting portion 11 and the insertion portion 13. For this reason, when inserting the conductor pin 10 in the hole 2000a, the collar part 12 functions as a stopper. That is, excessive insertion is prevented by the collar portion 12. The insertion portion 13 is inserted into the hole 2000a, and the mounting portion 11 and the flange portion 12 protrude from the first surface F11 of the support substrate 2000. The diameter d111 of the mounting portion 11 is preferably in the range of 0.25 to 0.6 mm. The diameter d113 of the insertion portion 13 is the same as the diameter d111, for example. The diameter d113 of the collar portion 12 is, for example, 0.6 to 1.0 mm.

  The first conductor pin 10 has an intersection part P1 on a side surface F3 in the vicinity of the mounting end F1. The intersection line portion P1 goes around the outer periphery of the first conductor pin 10. The first conductor pin 10 includes a first side surface F31 on the side of the other end (mounting end F1) and a second side surface F32 on the side of one end (insertion end F2). The first side face F31 and the second side face F32 are connected so as to swell outward at the intersection line portion P1. In addition, the first conductor pin 10 (specifically, the mounting portion 11) is a side surface (first side surface F31) that moves away from the axis C of the conductor pin 10 toward the insertion end F2 side from the mounting end F1 side in the vicinity of the mounting end F1. ) Having a taper portion P11 (uphill portion: first side surface formed in a tapered shape), and a straight portion P12 having a side surface (second side surface F32) parallel to the axis C of the first conductor pin 10; Have. In the intersection line portion P1 of the present embodiment, the inclination of the side surface F3 is outward from the axis C of the first conductor pin 10 (the side away from the axis C) from the mounting end F1 side to the insertion end F2 side. It is a part which changes from the inclination (taper part P11) to the inclination (straight part P12) to the inner side (side approaching the axis C). The intersection line portion P1 is located at the boundary between the taper portion P11 and the straight portion P12, and the taper portion P11, the intersection line portion P1, and the straight portion P12 are arranged in this order from the mounting end F1 side to the insertion end F2 side. Is formed continuously. The intersection line portion P1 is formed at the taper start position.

  FIG. 5A is a diagram showing the vicinity of the mounting end of the first conductor pin used in the mounting substrate according to the embodiment of the present invention, and FIG. 5B shows the first conductor pin shown in FIG. 5A from the mounting end side. FIG. 5C is a cross-sectional view showing a connection portion between the first conductor pin and the electronic component.

  FIG. 6A is a diagram illustrating details of the shape of the first conductor pin according to the embodiment of the present invention, and FIG. 6B is a diagram illustrating a covering material that covers the periphery of the intersection line portion. FIG. 7A is a diagram illustrating a connection portion between a straight pin and an electronic component according to a comparative example, and FIG. 7B is a diagram for explaining solder creeping up according to the comparative example.

  FIG. 8A is an explanatory diagram of solder scooping up for a straight pin according to a comparative example, and FIG. 8B is an explanatory diagram of solder scooping up for a first conductor pin according to an embodiment of the present invention.

  FIG. 9 is a graph showing the solder creep-up for each of the straight pin according to the comparative example and the first conductor pin according to the embodiment of the present invention.

  5A and 5B show the vicinity of the mounting end F1 of the conductor pin 10 in an enlarged manner. In FIG. 5A, the distance d11 is a distance between the mounting end F1 (the other end side end surface) and the intersection line portion P1. The distance d11 is preferably in the range of 0.2 mm. That is, the intersecting line portion P <b> 1 is preferably in a range from the other end side end surface of the first conductor pin 10 to 0.2 mm in the axial direction of the first conductor pin 10. If the intersecting line portion P1 is in such a range, it becomes easy to suppress the solder creeping described later.

  The first conductor pin 10 is electrically connected to the electrode of the semiconductor chip 201 through the solder 201a. FIG. 5C shows a connection portion between the first conductor pin 10 and the semiconductor chip 201. The solder 201a forms a connection layer S201 between the first conductor pin 10 and the semiconductor chip 201, and forms a fillet S202 around the connection layer S201.

  FIG. 6A shows details of the shape of the first conductor pin 10 according to the embodiment of the present invention. In the present embodiment, the side surface of the tapered portion P11 is a slope (a plane inclined with respect to the axis C). The angle θ10 is an angle with respect to the axis C of the side surface of the tapered portion P11. That is, the angle θ10 corresponds to an angle formed by the first side face F31 and the axis C on a plane including the axis C (center axis) of the conductor pin 10. It can also be defined as the angle between the tapered generatrix and the axis C (center axis). The angle θ10 is preferably in the range of 5 to 20 °. Moreover, it is preferable that angle (theta) 1 which 1st side surface F31 and 2nd side surface F32 make in the intersection part P1 exists in the range of 89-170 degrees. If the angle θ10 or θ1 is in such a range, it is easy to obtain the effect of suppressing the solder creeping described later while ensuring the necessary conductivity. The shape of the conductor pin 10 is not limited to the shape shown in FIGS. 4A to 6A (the shape shown in FIGS. 16A to 31B described later may be used).

  The first conductor pin 10 is made of, for example, copper or a copper alloy. The covering material 10a is made of nickel, for example. However, it is not restricted to this, The material of the coating | covering material 10a is arbitrary. However, the material of the covering material 10a is preferably a conductor (for example, metal) having lower wettability with respect to the solder 201a than the material of the first conductor pin 10. Low wettability to solder indicates that the contact angle with the solder is large. For example, when the material of the 1st conductor pin 10 is copper or a copper alloy, it is preferable that the material of the coating | covering material 10a is chromium or zinc. By reducing the wettability of the surface of the first conductor pin 10 (strictly speaking, the covering material 10a) to the solder 201a (increasing the contact angle), the surface of the first conductor pin 10 is slightly crawled up. In (covering material 10a), the angle formed by the solder 201a and the surface of the first conductor pin 10 easily reaches the contact angle. As a result, it is possible to suppress an excessive creeping of the solder 201a and to form a good fillet having a sufficient thickness (see FIG. 9 described later).

  The portion of the covering material 10a that covers the intersection line portion P1 is partially thick as shown in FIG. 6B. When the covering material 10a is thin and the underlying conductor pin 10 (for example, copper) is exposed at the intersecting line portion P1, the contact angle of the solder 201a becomes small at the intersecting line portion P1, so that it is difficult to suppress the creeping up of the solder 201a. In this regard, in the present embodiment, since the portion of the covering material 10a that covers the intersection line portion P1 is partially thick, the underlying conductor pin 10 is difficult to be exposed at the intersection line portion P1. The film thickness d10 of the covering material 10a at the non-intersecting part is in the range of 3 to 20 μm, for example.

  The covering material 10a is preferably an electrolytic plating film. Since current tends to concentrate on the intersection line P1, if the covering material 10a is an electrolytic plating film, it becomes easy to increase the film thickness d12 in the intersection line P1 (see FIG. 6B). Can be made thicker than the surroundings. Further, for example, by performing uniform etching (soft etching) after forming the electrolytic plating film, it is easy to form the covering material 10a that covers only the intersection line P1 of the first conductor pin 10 (described later). FIG. 32B).

  In the present embodiment, the insertion ends (insertion end F2 and the like) of the first and second conductor pins are exposed. Specifically, the insertion ends of the first and second conductor pins coincide with the second surface F12 of the support substrate 2000, for example. However, the present invention is not limited to this, and the first or second conductor pin may penetrate the support substrate 2000, or the insertion end of the first or second conductor pin may not reach the second surface F12 of the support substrate 2000. Good.

  The material of the first or second conductor pin (conductor pin 10 or the like) is not limited to copper or a copper alloy, and is arbitrary. The material of the conductor pin may be, for example, a metal whose main component is aluminum, silver, or gold, or an alloy thereof. The shape of the cross section of the first or second conductor pin (conductor pin 10 or the like) is not limited to a circle, but is arbitrary (may be described later with reference to FIGS. 35A to 36C).

  The size of the first or second conductor pin (conductor pin 10 or the like) is also arbitrary. For example, the second conductor pin is preferably made thicker as the flowing current is larger. In this embodiment, since the first conductor pin 10 of the signal system is made thinner than the second conductor pin 20 of the power system, the ratio of the cross-sectional area of the second conductor pin 20 of the power system of the semiconductor element Can be increased. For this reason, by making the second conductor pin thick, heat generation due to Joule heat from the power system conductor pin can be reduced.

  According to the mounting substrate 100a of the present embodiment, it is possible to suppress creeping of the solder 201a at the connection portion between the first conductor pin 10 and the semiconductor chip 201. Hereinafter, this will be described in detail using a comparative example. In a comparative example, it replaces with the 1st conductor pin 10 which has the intersection part P1, and uses the conductor pin (straight pin) which has a straight-shaped mounting part.

  FIG. 7A is a diagram illustrating a connection portion between a straight pin and an electronic component according to a comparative example, and FIG. 7B is a diagram for explaining solder creeping up according to the comparative example. FIG. 8A is an explanatory diagram of solder scooping up for a straight pin according to a comparative example, and FIG. 8B is an explanatory diagram of solder scooping up for a first conductor pin according to an embodiment of the present invention.

  FIG. 7A shows a connection portion between the conductor pin 500 and the semiconductor chip 201 according to the comparative example. When the connection between the conductor pin and the semiconductor is ideal, as shown in FIG. 7A, it is considered that a sufficiently large fillet S202 is formed and sufficient connection strength can be obtained. However, when the solder 201a creeps up, the fillet S202 tends to be small as shown in FIG. 7B. In this case, in FIG. 7B, stress tends to concentrate on the lower end portion D of the solder 201a, and cracks or the like are likely to occur in the solder 201a. Therefore, it is considered that the connection reliability between the conductor pin 500 and the semiconductor chip 201 is likely to be lowered.

  In the conductor pin 500 according to the comparative example, as shown in FIG. 8A, the solder 201a has an upper end at a position h0 in the melting process of the solder 201a. At this time, the angle formed between the solder 201a and the taper portion P21 of the conductor pin is θ21, which is larger than the contact angle between the conductor pin 500 and the solder 201a. When the time further elapses, the upper end of the solder 201a rises to the position h2, whereby the angle θ22 formed between the conductor pin 500 and the solder 201a reaches the contact angle between the conductor pin 500 and the solder 201a, and the scooping up stops. The angle formed between the conductor pin 500 and the solder 201a is the angle θ21 when the connection between the conductor pin 500 and the semiconductor chip 201 is good, but further creeping occurs in the solder 201a. When the connection with 201 is insufficient, the angle θ22 is smaller than θ21. For this reason, it is difficult to control the height of the upper end of the solder, the fillet shape is deteriorated, the stress is easily concentrated on the solder fillet, and the solder is likely to be cracked. Therefore, it is considered that the connection reliability between the conductor pin 500 and the semiconductor chip is likely to decrease.

  On the other hand, in the first conductor pin 10 according to the present embodiment, as shown in FIG. 8B, the upper end of the solder 201a is at a position h0 in the melting process of the solder 201a. At this time, the angle formed by the solder 201a and the taper portion P11 of the first conductor pin is θ11, which is larger than the contact angle between the first conductor pin 10 and the solder 201a. As time further elapses, the upper end of the solder 201a rises. When the upper end of the solder 201a comes to the position h1 and the angle θ12 formed by the straight portion P12 of the first conductor pin and the solder 201a is smaller than the contact angle between the first conductor pin 10 and the solder 201a, the scooping up stops. . In this case, the solder 201a has a good fillet shape because the height of the upper end of the solder does not rise above h1 even if the solder is sufficiently reflowed, and the solder fillet is difficult to be thinned. It is difficult for partial stress concentration to occur in the solder fillet, and cracks and the like are less likely to occur in the solder. Therefore, it is considered that the connection reliability between the first conductor pin 10 and the semiconductor chip can be easily obtained.

  When the first conductor pin 10 according to the present embodiment and the conductor pin 500 according to the comparative example are compared, the first conductor pin 10 may have a smaller amount of solder 201a than the conductor pin 500. It is considered possible. Hereinafter, this will be described with reference to FIG.

  FIG. 9 is a graph showing the solder creep-up for each of the straight pin according to the comparative example and the first conductor pin according to the embodiment of the present invention.

  As shown in FIG. 9, the angle formed between the first conductor pin 10 of the present embodiment or the conductor pin 500 of the comparative example and the solder 201a as the solder 201a creeps up, that is, as the upper end of the solder 201a becomes higher. It is considered that when the contact angle θ0 (θ22) is reached, the creeping of the solder 201a stops.

  For example, in the conductor pin 500 of the comparative example, as shown by the line L2 in the graph of FIG. 9, as the solder 201a scoops up and the height of the upper ends of the conductor pin 500 and the solder 201a increases, the conductor pin 500 increases. It is considered that when the angle formed by 500 and the solder 201a gradually decreases and eventually reaches the contact angle θ22, the creeping of the solder 201a stops. On the other hand, in the first conductor pin 10 of the present embodiment, as shown by the line L1 in the graph of FIG. 9, the same as in the comparative example until the upper end of the solder 201a reaches the intersection line portion P1. However, when the upper end of the solder 201a reaches the intersection part P1, that is, when the height of the upper end of the solder 201a reaches the position h1, the angle formed between the first conductor pin 10 and the solder 201a is abrupt. Becomes smaller. As a result, the angle becomes equal to or smaller than the contact angle θ0, and the creeping of the solder 201a stops. As described above, the first conductor pin 10 of the present embodiment has the intersecting line portion P1, so that the creeping of the solder 201a is easily stopped. For this reason, according to the first conductor pin 10 of the present embodiment, it is considered that the position of the upper end of the solder 201a when the semiconductor chip 201 is mounted can be easily controlled by the position of the intersection line portion P1.

  Moreover, in this embodiment, as shown to FIG. 6A and 6B, the periphery of the intersection part P1 of the 1st conductor pin 10 is covered with the coating | covering material 10a. The periphery of the intersection line means, for example, a range within 0.1 mm from the intersection line. Since the covering material 10a is made of a material that has low wettability with respect to the solder 201a (a large contact angle), the contact angle θ0 of the solder 201a at the intersection P1 is large. For this reason, the creeping of the solder 201a is likely to stop at the intersection line portion P1. Moreover, in this embodiment, since the part which covers the intersection part P1 of the coating | covering material 10a becomes thick partially, and covers the intersection part P1, the 1st conductor pin of the foundation | substrate in the intersection part P1 10 is difficult to be exposed. Alternatively, the base material may be exposed at the taper portion P11 and the straight portion P12 by reducing the thickness of the covering material 10a or forming the covering material 10a by electrolytic plating and then etching the whole thinly.

  Note that the contact angle θ0 between the first conductor pin 10 and the solder 201a is the state of the surface of the first conductor pin 10 (oxidation or the like), the similarity of the crystal structure between the first conductor pin 10 and the solder 201a, or the like. It is a constant determined by. As the solder material, tin or tin alloy is used. Copper, gold, or an alloy thereof has high wettability with respect to the solder material, and nickel, chromium, or zinc is a material with low wettability with respect to the solder material. Therefore, when copper, gold, or an alloy thereof is used as the material of the first conductor pin 10, the intersecting portion P1 of the first conductor pin 10 is coated with nickel, chromium, or zinc. It is preferable to cover with 10a. As a result, the contact angle θ0 of the solder 201a increases on the surface of the first conductor pin 10 (covering material 10a). As a result, as described with reference to FIG. 9, it is easy to suppress the creeping of the solder 201a.

  As described above, according to the mounting substrate 100a of the present embodiment, the solder 201a can be prevented from creeping up at the connection portion between the first conductor pin 10 and the semiconductor chip 201. In this embodiment, the vicinity of the mounting end F <b> 1 of the first conductor pin 10 is tapered and the vicinity of the mounting end F <b> 1 of the first conductor pin 10 is thinly formed in order to prevent the solder from creeping up. As described above, the intersection line portion P1 is thereby formed and the creeping of the solder 201a is suppressed. In such a structure, the intersection line portion P1 can be easily obtained by tapering the vicinity of the mounting end F1. However, the present invention is not limited to this, and the intersecting line portion P1 may be obtained without thinning the vicinity of the mounting end F1 of the first conductor pin 10 (the shape may be shown in FIGS. 16A to 17C described later). .

  Further, by suppressing the creeping of the solder 201a, it is possible to suppress the fillet S202 of the solder 201a from being thinned due to the creeping of the solder 201a. As a result, the solder fillet shape is improved, the stress in the solder 201a is less likely to concentrate, and the solder is less likely to crack. Therefore, it is considered that the connection reliability between the first conductor pin 10 and the semiconductor chip 201 is improved.

  In the mounting substrate 100a of the present embodiment, only the first thin conductor pin 10 (signal system conductor pin) among the conductor pin groups 101 to 103 has the intersection portion P1 as shown in FIG. 4A. It is in shape. With a thin conductor pin, when the upper end of the solder 201a rises, the fillet S202 tends to be thin, so that the solder fillet shape is deteriorated, and the solder is likely to be cracked. Therefore, stress concentration tends to occur at the end of the connection layer S202, and the connection reliability between the first thin conductor pin and the semiconductor chip decreases.

  The electronic device 100 of this embodiment is manufactured by a method as shown in FIGS. 10A to 15, for example.

  FIG. 10A is a diagram for explaining a step of preparing a support substrate in the method for manufacturing a mounting substrate according to the embodiment of the present invention, and FIG. 10B shows the method for manufacturing the mounting substrate according to the embodiment of the present invention. It is a figure for demonstrating the process of forming a hole in a support substrate.

  FIG. 11A is a diagram for explaining a step of preparing a conductor pin having a straight side surface parallel to an axis near the tip in the manufacturing method of the mounting substrate according to the embodiment of the present invention. FIG. 11C is a diagram for explaining a process of pressing the conductor pin shown in FIG. 11A, and FIG. 11C is a diagram showing the conductor pin having an intersection portion on the tip side formed by the pressing process of FIG. 11B.

  FIG. 12 is a view for explaining a second method of forming the first conductor pin according to the embodiment of the present invention.

  FIG. 13A is a diagram for explaining a process of inserting a conductor pin into a hole of a support substrate in a method for manufacturing a mounting board according to an embodiment of the present invention, and FIG. 13B relates to the embodiment of the present invention. It is a figure which shows the completed mounting board | substrate.

  FIG. 14 is a diagram for explaining a process of installing an electronic component on a substrate in the mounting substrate manufacturing method according to the embodiment of the present invention.

  FIG. 15 is a diagram for explaining a process of mounting an electronic component on a conductor pin of a mounting board in the mounting board manufacturing method according to the embodiment of the present invention.

  In manufacturing the electronic device 100, first, the mounting substrate 100 a is manufactured, and the semiconductor chips 201 and 202 are mounted on the wiring board 1000.

  In manufacturing the mounting substrate 100a, first, as shown in FIG. 10A, a support substrate 2000 is prepared. The support substrate 2000 is made of, for example, a first insulating layer 2001 made of thermoplastic polyimide having a thickness of 3 μm, a second insulating layer 2002 made of thermosetting polyimide having a thickness of 50 μm, and a thermosetting polyimide having a thickness of 3 μm, for example. The third insulating layer 2003 is stacked, and in this state, these are bonded by pressing or heat treatment.

  Subsequently, as shown in FIG. 10B, holes 2000 a are formed in the support substrate 2000. The holes 2000a are formed at the attachment positions of the respective conductor pins of the conductor pin groups 101 to 103. The hole 2000a can be formed by, for example, a drill or a laser.

  Moreover, each conductor pin of the conductor pin groups 101-103 is manufactured. Hereinafter, the manufacturing method of the conductor pin 10 is explained in full detail.

  In manufacturing the first conductor pin 10, first, as shown in FIG. 11A, for example, a conductor pin 30 is prepared. The conductor pin 30 includes a mounting portion 11a, a flange portion 12, and an insertion portion 13. The mounting part 11a corresponds to the mounting part 11 before taper processing, and has a straight shape. That is, the conductor pin 30 has a straight side surface F30 parallel to the axis C in the vicinity of the mounting end F1 (tip). The manufacturing method of the conductor pin 30 is arbitrary. For example, the conductor pin 30 can be manufactured by deforming a straight-shaped conductor with a mold or the like (for example, drawing) or cutting with a processing machine or the like. Alternatively, the conductor pin 30 may be manufactured by casting. In addition, after forming at least one of the mounting portion 11a, the flange portion 12, and the insertion portion 13 in a state separated from the others, the conductor pins 30 are joined by welding or conductive adhesive material or the like. May be manufactured. As the conductive adhesive material, for example, solder such as tin, brazing material such as silver solder, or conductive paste can be used.

  Subsequently, for example, as illustrated in FIG. 11B, a mold 3001 having a shape corresponding to the mounting portion 11 (particularly, the tapered portion P11) is prepared, and the conductor pins 30 are pressed by the mold 3001. Specifically, the straight side F30 is pressed with a mold 3001 to taper the mounting end F1 (tip) side of the straight side F30. As a result, the mounting portion 11a of the conductor pin 30 has a tapered shape, and the first conductor pin 10 having the intersection portion P1 is completed as shown in FIG. 11C. The first conductor pin 10 has a tapered tip as shown in FIGS. 4A and 4B. According to such pressing, the taper portion P11 and the straight portion P12 are formed continuously (integrally). However, the present invention is not limited to this. For example, as shown in FIG. 12, a conductor 30a having a truncated cone shape corresponding to the tapered portion P11 is manufactured separately from the conductor pin 30, and the conductor pin 30 is formed by welding or a conductive adhesive material. And the conductor 30a may be joined. Also by such a method, the 1st conductor pin 10 which has the taper part P11 and the straight part P12 in the mounting end F1 (mounting part 11) can be manufactured.

  The manufacturing method of the 1st conductor pin 10 is not restricted to the said method, but is arbitrary. For example, you may form the 1st conductor pin 10 directly from a rod-shaped conductor by pressing using the metal mold | die which has the reverse shape of a shape as shown to FIG. 4A and 4B. Further, the first conductor pin 10 may be manufactured by casting.

  Subsequently, a covering material 10 a is formed on the surface of the first conductor pin 10. The covering material 10a can be formed by plating, for example. Specifically, for example, by immersing the entire first conductor pin 10 in a plating solution, the covering material 10a is formed so as to cover the entire first conductor pin 10 by wet plating such as electrolytic plating or electroless plating. Form. However, the present invention is not limited to this, and the covering material 10a may be formed by dry plating such as vacuum deposition or sputtering. However, in order to partially thicken the portion of the covering material 10a that covers the intersection portion P1, it is preferable to form the covering material 10a by electrolytic plating. Since current tends to concentrate on the intersecting line portion P1, forming the coating material 10a by electrolytic plating makes it easy to increase the film thickness d12 of the covering material 10a in the intersecting line portion P1 (see FIG. 6B). It is also easy to form the covering material 10a so as to cover the intersecting line portion P1 of the first conductor pin 10 thicker than the periphery and to expose a part of the underlying conductor pin in the periphery. Further, etching may be performed in order to expose a portion of the underlying first conductor pin 10 around the intersection line portion P1. Since the etching proceeds uniformly, it is possible to leave the covering material 10a formed thick at the intersection line portion P1 and to remove the covering material 10a around the intersection line portion P1.

  Conductive pins other than the first conductive pin 10 can be manufactured by a method similar to the method for manufacturing the conductive pin 30, for example.

  Subsequently, as shown in FIG. 13A, the conductor pins of the conductor pin groups 101 to 103 are inserted into the holes 2000a from the first surface F11 side of the support substrate 2000. Each conductor pin is preferably set in a jig in a direction perpendicular to the first surface F11 of the support substrate 2000, for example, and inserted into the hole 2000a at an angle as it is. Each conductor pin may be fitted or fixed with solder after insertion. Furthermore, the solder fixing portion may be reinforced with resin or the like after the insertion of each conductor pin.

  Through the above steps, the mounting substrate 100a according to the embodiment of the present invention is completed as shown in FIG. 13B.

  While the mounting substrate 100 a is manufactured, the semiconductor chips 201 and 202 are mounted on the wiring board 1000. As shown in FIG. 14, the semiconductor chips 201 and 202 are mounted at positions corresponding to the positions of the conductor pin groups 101 to 103 on the wiring board 1000. The semiconductor chips 201 and 202 are fixed on the wiring board 1000 with, for example, solder. Thereby, the pads of the wiring board 1000 and the electrodes of the semiconductor chips 201 and 202 are electrically connected to each other.

  Subsequently, the wiring board 1000 and the semiconductor chips 201 and 202 are mounted on the mounting substrate 100a. Specifically, as shown in FIG. 15, after applying a solder paste (solder 1000a, 201a, 202a) on the pads of the wiring board 1000 and the electrodes of the semiconductor chips 201 and 202, the solder is subjected to heat treatment such as reflow. The paste is melted, and the conductor pins of the conductor pin groups 101 to 103 are connected by solder 1000a, 201a, 202a. As a result, the conductor pin 101a is electrically connected to the pad of the wiring board 1000 via the solder 1000a, and the conductor pins 10 and 20 are electrically connected to the electrodes of the semiconductor chip 201 via the solder 201a. The conductor pin 103a is electrically connected to the electrode of the semiconductor chip 202 via the solder 202a.

  Through the above steps, the electronic device 100 according to the embodiment of the present invention is completed.

  According to the manufacturing method of the present embodiment, the electronic device 100 with high connection reliability between the conductor pin and the semiconductor chip can be obtained at low cost.

  The present invention is not limited to the above embodiment. For example, the present invention can be modified as follows.

  For example, the shape of the mounting portion 11 of the first conductor pin 10 may be a shape as shown in FIGS. 16A to 31B. Hereinafter, these modifications will be described focusing on differences from the first conductor pin 10 shown in FIGS. 4A and 4B.

  A first conductor pin according to a first modification of the present invention is shown in FIGS. 16A, 16B and 16C. 16A is a view showing the vicinity of the mounting end of the first conductor pin according to the first modification of the present invention, and FIG. 16B is a view of the first conductor pin shown in FIG. 16A as viewed from the mounting end side. FIG. 16C is a cross-sectional view showing a connection portion between the first conductor pin and the electronic component according to the first modification of the present invention.

  This first conductor pin has a first mounting portion P21 having a columnar shape, a flange portion P23 having a disc shape, and a columnar shape in the vicinity of the mounting end F1 (mounting portion 11) from the mounting end F1 side. It has 2nd mounting part P22 in this order. The first mounting portion P21 is connected to the mounting end F1 side of the flange portion P23, and the second mounting portion P22 is connected to the insertion end F2 (see FIG. 4A) side of the flange portion P23. The first conductor pin has a flange portion P23 separately from the flange portion 12 (see FIG. 4A). The side surface of the flange portion P23 projects in the radial direction (outside) with respect to the side surfaces of the first mounting portion P21 and the second mounting portion P22. The side surface of the collar portion P23 is not flat and bulges outward. The side surface of the flange portion P23 includes a first side surface F21 on the other end (mounting end F1) side and a second side surface F22 on the one end (insertion end F2) side, and the first side surface F21 and the second side surface. F22 is configured to swell outward at the intersection P2. The intersection line portion P2 has an inclination of the side surface of the first conductor pin toward the insertion end F2 side from the mounting end F1 side toward the outer side with respect to the axis C of the first conductor pin (of the flange portion P23). It becomes a portion that changes from an upward slope on the side surface to an inward slope (down slope on the side surface of the flange P23). That is, the intersection line portion P2 is formed at the apex of the swelled side surface (curved surface) of the flange portion P23. The first conductor pin is widened at the intersection line portion P2. The intersecting line portion P2 is formed along the circumferential direction of the conductor pin, and specifically, continuously formed on the entire circumference of the conductor pin. Even in such a first conductor pin, similarly to the first conductor pin 10 of the embodiment of the present invention, the creeping of the solder 201a is easily stopped by the intersection line portion P2. As shown in FIG. 16C, it is considered that the creeping of the solder 201a is likely to stop particularly at the intersection part P2. In FIG. 16A, the distance d21 is the distance between the mounting end F1 and the intersection line portion P2, and the dimension d22 is the thickness of the flange portion P23. The distance d21 is preferably in the range of 0.2 to 1.0 mm. The dimension d22 is preferably in the range of 0.1 to 0.5 mm.

  A first conductor pin according to a second modification of the present invention is shown in FIGS. 17A, 17B and 17C. 17A is a view showing the vicinity of the mounting end of the first conductor pin according to the second modification of the present invention, FIG. 17B is a cross-sectional view taken along the line AA of FIG. 17A, and FIG. 17C is the present invention. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 2nd modification of this.

  The first conductor pins are arranged in the order of the first mounting portion P31, the third mounting portion P33, and the second mounting portion P32 from the mounting end F1 side in the vicinity of the mounting end F1 (mounting portion 11). Have. The first mounting portion P31 is connected to the mounting end F1 side of the third mounting portion P33, and the second mounting portion P32 is connected to the insertion end F2 (see FIG. 4A) side of the third mounting portion P33. Each of the first to third mounting portions P31 to P33 has a cylindrical shape. However, the width (diameter) of the third mounting portion P33 is smaller than any width of the first mounting portion P31 and the second mounting portion P32. For this reason, the side surface of the third mounting portion P33 is recessed in the radial direction (inner side) with respect to the side surfaces of the first mounting portion P31 and the second mounting portion P32. In this example, the end surface (first side surface F31) on the mounting end F1 side of the second mounting portion P32 and the side surface of the third mounting portion P33 form an angle of 90 °, and the intersection portion P3 is the second mounting portion. It is formed at the corner between the end surface of P32 and the side surface (second side surface F32) of the second mounting portion P32. That is, the intersection line portion P3 has an inclination of the side surface of the first conductor pin toward the insertion end F2 side from the mounting end F1 side to the outside with respect to the axis C of the first conductor pin (90 °). It is a part that changes from an uphill slope to a more inward slope (straight). The first side surface F31 is a flat surface, and the second side surface F32 is a side surface of the cylindrical portion. The first conductor pin is widened at the intersection P3 between the first side face F31 and the second side face F32. The angle of the intersection line portion P3 is 90 °. The intersecting line portion P3 is formed so as to bulge outward along the circumferential direction of the first conductor pin. Specifically, it is continuously formed on the entire circumference of the first conductor pin. Even in such a first conductor pin, like the conductor pin 10 of the embodiment of the present invention, the creeping of the solder 201a is easily stopped by the intersecting line portion P3. As shown in FIG. 17C, it is considered that the creeping up of the solder 201a is likely to stop particularly at the intersection portion P3. In FIG. 17A, the distance d31 is the distance between the mounting end F1 and the intersection line portion P3, and the dimension d32 is the thickness of the third mounting portion P33. The distance d31 is preferably in the range of 0.2 to 1.0 mm. The dimension d32 is preferably in the range of 0.2 to 0.5 mm.

  A conductor pin according to a third modification of the present invention is shown in FIGS. 18A, 18B and 18C. 18A is a view showing the vicinity of the mounting end of the first conductor pin according to the third modification of the present invention, and FIG. 18B is a view of the first conductor pin shown in FIG. 18A as viewed from the mounting end side. FIG. 18C is a cross-sectional view showing a connection portion between the first conductor pin and the electronic component according to the third modification of the present invention.

  The first conductor pin has a first mounting portion P41 and a second mounting portion P42 in this order from the mounting end F1 side in the vicinity of the mounting end F1 (mounting portion 11). The first mounting part P41 is connected to the mounting end F1 side of the second mounting part P42. Each of the first mounting portion P41 and the second mounting portion P42 has a cylindrical shape. However, the width (diameter) of the first mounting portion P41 is smaller than the width of the second mounting portion P42. For this reason, the side surface of the first mounting portion P41 is recessed in the radial direction (inner side) with respect to the side surface of the second mounting portion P42. In this example, the end surface (first side surface F41) on the mounting end F1 side of the second mounting portion P42 and the side surface of the first mounting portion P41 form an angle of 90 °, and the intersection portion P4 is the second mounting portion. It is formed so as to bulge outward at the corner between the end surface of P42 and the side surface (second side surface F42) of the second mounting portion P42. That is, the intersection line portion P4 has an inclination of the side surface of the first conductor pin toward the insertion end F2 side from the mounting end F1 side to the outside with respect to the axis C of the first conductor pin (90 °). It is a part that changes from an uphill slope to a more inward slope (straight). The first conductor pin is widened at the intersection line portion P4. The angle of the intersection line portion P4 is 90 °. The intersecting line portion P4 is formed along the circumferential direction of the first conductor pin, and specifically, continuously formed on the entire circumference of the first conductor pin. Even in such a first conductor pin, similarly to the first conductor pin 10 of the embodiment of the present invention, the creeping of the solder 201a is easily stopped by the intersection line portion P4. As shown in FIG. 18C, it is considered that the creeping of the solder 201a is likely to stop particularly at the intersection line portion P4. In FIG. 18A, a distance d41 is a distance between the mounting end F1 and the intersection line portion P4. The distance d41 is preferably in the range of 0.2 to 1.0 mm.

  A first conductor pin according to a fourth modification of the present invention is shown in FIGS. 19A, 19B and 19C. 19A is a view showing the vicinity of the mounting end of the first conductor pin according to the fourth modification of the present invention, FIG. 19B is a cross-sectional view taken along the line AA of FIG. 19A, and FIG. 19C is the present invention. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 4th modification of this.

  The first conductor pin has a plurality of depressions P50 in the vicinity of the mounting end F1 (mounting portion 11). These depressions P50 are formed at arbitrary intervals (for example, a constant interval) along the circumferential direction of the first conductor pins. The inner surface of the recess P50 is, for example, a curved surface and is recessed in the radial direction (inner side) with respect to the side surface of the first conductor pin. The intersection line portion P5 is formed by the depression P50. Specifically, the inner surface (first side surface F51) of the recess P50 and the second side surface F52 on the insertion end F2 side are configured to swell outward at the intersection P5. The intersection line portion P5 has an inclination of the side surface of the first conductor pin toward the insertion end F2 side from the mounting end F1 side toward the outside with respect to the axis C of the first conductor pin (the inner surface of the depression P50). It becomes a part that changes from an uphill slope to a more inward slope (straight). The intersection line portion P5 corresponds to the edge of the recess P50 on the insertion end F2 side. The intersection part P5 between the first side face F51 and the second side face F52 has a part formed along a curve that goes around the outer periphery of the first conductor pin. A plurality of intersecting line portions P5 are formed along the circumferential direction of the first conductor pins. The first conductor pin is reduced in width at the intersection part P5. Even in such a first conductor pin, as in the conductor pin 10 of the above-described embodiment of the present invention, the creeping of the solder 201a is easily stopped by the intersection line portion P5. As shown in FIG. 19C, it is considered that the creeping of the solder 201a is likely to stop particularly at the intersection line portion P5. In FIG. 19A, the distance d51 is the distance between the mounting end F1 and the intersection line portion P5, and the dimension d52 is the width of the recess P50. The distance d51 is preferably in the range of 0.2 to 1.0 mm. The dimension d52 is preferably in the range of 0.1 to 0.5 mm.

  A first conductor pin according to a fifth modification of the present invention is shown in FIGS. 20A, 20B and 20C. 20A is a view showing the vicinity of the mounting end of the first conductor pin according to the fifth modification of the present invention, FIG. 20B is a cross-sectional view taken along the line AA of FIG. 20A, and FIG. 20C is the present invention. It is sectional drawing which shows the connection part of the 1st conductor pin and electronic component which concern on the 5th modification of this.

  The first conductor pin has a plurality of convex portions P60 in the vicinity of the mounting end F1 (mounting portion 11). These convex portions P60 are formed at an arbitrary interval (for example, a constant interval) along the circumferential direction of the first conductor pin. The convex surface of the convex part P60 is a curved surface, for example, and protrudes in the radial direction (outside) with respect to the side surface of the first conductor pin. The intersection part P6 is formed by the convex part P60. Specifically, the convex surface of the convex portion P60 is composed of a first side surface F61 on the other end (mounting end F1) side and a second side surface F62 on the one end (insertion end F2) side. The second side surface F62 is configured to bulge outward at the intersection line portion P6. The intersection line portion P6 has an inclination of the side surface of the first conductor pin toward the insertion end F2 side from the mounting end F1 side toward the outside with respect to the axis C of the first conductor pin (the protrusion P60 It is a portion that changes from an upward slope on the convex surface to an inward slope (downhill on the convex surface of the convex portion P60). The intersection line portion P6 corresponds to the apex of the convex portion P60. The intersection part P6 between the first side face F61 and the second side face F62 has a portion formed along a curve that goes around the outer periphery of the first conductor pin. A plurality of intersecting line portions P6 are formed along the circumferential direction of the first conductor pins. The first conductor pin is widened at the intersection line portion P6. Even in such a first conductor pin, like the first conductor pin 10 of the embodiment of the present invention, the creeping of the solder 201a is easily stopped by the intersection line portion P6. As shown in FIG. 20C, it is considered that the creeping of the solder 201a is likely to stop particularly at the intersecting line portion P6. In FIG. 20A, the distance d61 is the distance between the mounting end F1 and the intersection line portion P6, and the dimension d62 is the width of the convex portion P60. The distance d61 is preferably in the range of 0.2 to 1.0 mm. The dimension d62 is preferably in the range of 0.1 to 0.5 mm.

  FIG. 21 is a diagram illustrating an example of a first taper pin that is partially tapered according to the embodiment of the present invention. FIG. 22 is a diagram illustrating an example of a first conductor pin according to an embodiment of the present invention in which the side surface of the tapered portion is a curved surface. FIG. 23 is a diagram illustrating an example in which the side surface of the flange portion of the first conductor pin according to the embodiment of the present invention is stepped. FIG. 24 is a diagram illustrating an example of an intersection portion in which the side surface of the first conductor pin according to the embodiment of the present invention is an uneven surface. FIG. 25A is a diagram showing an example of a first conductor pin having an acute intersection line portion in a modification of the first conductor pin according to the third modification of the present invention, and FIG. 25B shows the present invention. It is a figure which shows an example of the 1st conductor pin which has an obtuse angle | corner line part about the modification of the 1st conductor pin which concerns on the 3rd modification of this, FIG. 25C is the 3rd modification of this invention It is a figure which shows an example of the 1st conductor pin which has the uphill which consists of a curved surface in the vicinity of a mounting end about the modification of the 1st conductor pin which concerns on this. FIG. 26A is a diagram showing an example in which a first conductor pin according to a fourth modification of the present invention has a square depression (concave), and FIG. 26B shows a fourth modification according to the fourth modification of the present invention. It is a figure which shows an example in which the several hollow which has a different shape is formed along the circumferential direction of one conductor pin. FIG. 27A is a diagram illustrating an example in which the first conductor pin according to the fifth modification of the present invention has a square protrusion (projection), and FIG. 27B relates to the fifth modification of the present invention. It is a figure which shows an example in which several protrusion which has a different shape is formed along the circumferential direction of a 1st conductor pin. FIG. 28 is a diagram illustrating an example of a first conductor pin having a recess (concave portion) and a protrusion (convex portion) along the circumferential direction according to the embodiment of the present invention. FIG. 29 is a diagram illustrating an example of a first conductor pin having a plurality of flange portions in the vicinity of the mounting end according to the embodiment of the present invention. FIG. 30 is a diagram illustrating an example of a first conductor pin having a stepped step near the mounting end according to the embodiment of the present invention. FIG. 31A is a diagram showing a first example of a first conductor pin having both a tapered portion and a flange portion according to an embodiment of the present invention, and FIG. 31B is a diagram according to an embodiment of the present invention. It is a figure which shows the 2nd example of the 1st conductor pin which has both a taper part and a collar part. FIG. 32A is a diagram illustrating an example of a first conductor pin partially covered with a coating material (metal film) according to the embodiment of the present invention, and FIG. 32B is a diagram according to the embodiment of the present invention. It is a figure which shows an example of the 1st conductor pin with which only the intersection part was covered with the coating | covering material (metal film), FIG. 32C is covered with the coating | covering material (metal film) based on embodiment of this invention. It is a figure which shows an example of the 1st conductor pin which is not. FIG. 33A is a diagram showing a first example of a first conductor pin that does not have a flange according to an embodiment of the present invention, and FIG. 33B has a flange according to an embodiment of the present invention. It is a figure which shows the 2nd example of the 1st conductor pin which is not. FIG. 34 is a diagram illustrating an example of a bent first conductor pin according to an embodiment of the present invention.

  In the embodiment of the present invention, an example in which the entire circumference of the first conductor pin 10 is tapered (see FIG. 5B) is shown, but the present invention is not limited to this, and for example, shown in FIG. 21 (a diagram corresponding to FIG. 5B). As such, the first conductor pin may be partially tapered. In the example of FIG. 21, the two intersecting line portions P1 formed at the taper start positions are formed so as to face each other.

  In the embodiment of the present invention, the example in which the side surface of the taper portion P11 is a slope (a plane inclined with respect to the axis C) has been shown (see FIG. 6). Moreover, the 1st conductor pin whose side surface of the taper part P11 is a curved surface may be sufficient.

  The flange portion P23 of the first conductor pin (FIG. 16A, FIG. 16B) according to the first modification has a curved side surface, but is not limited to this, for example, as shown in FIG. 23, the flange portion P23. May have stepped side surfaces.

  Further, for example, as shown in FIG. 24, it may be a first conductor pin having an intersecting line portion P24 formed of an uneven surface F5. The uneven surface F5 has the same shape as when a plurality of thin flanges P23 (FIGS. 16A and 16B) are stacked, for example.

  Although the angle of the intersecting line portions P3 and P4 of the first conductor pins (FIGS. 17A to 18B) according to the second and third modified examples of the present invention is 90 °, the angle is not limited to this. As shown in 25A, the angle of the intersection line portion P4 may be an acute angle. For example, as shown in FIG. 25B, the angle of the intersection line portion P4 may be an obtuse angle. Further, the end surface (first side surface F41) on the mounting end F1 side of the second mounting portion P42 is not limited to a flat surface, and may be a curved surface as shown in FIG. 25C, for example. Here, the modification of the present invention for the intersection line portion P4 is illustrated, but the same applies to the intersection line portion P3.

  In the first conductor pin (FIGS. 19A and 19B) according to the fourth modification of the present invention, the shape of the recess P50 (recess) is arbitrary. For example, the shape of the recess P50 may be a square as shown in FIG. 26A (cross-sectional view corresponding to FIG. 19B). Moreover, as shown in FIG. 26B (cross-sectional view corresponding to FIG. 19B), a plurality of recesses P50 having different shapes may be formed along the circumferential direction of the first conductor pin.

  In the first conductor pin (FIGS. 20A and 20B) according to the fifth modification of the present invention, the shape of the convex portion P60 (protrusion) is arbitrary. For example, the shape of the convex part P60 may be a square as shown in FIG. 27A (cross-sectional view corresponding to FIG. 20B). Moreover, as shown in FIG. 27B (cross-sectional view corresponding to FIG. 20B), a plurality of convex portions P60 having different shapes may be formed along the circumferential direction of the first conductor pin.

  Further, as shown in FIG. 28 (cross-sectional views corresponding to FIGS. 19B and 20B), both the recess P50 (concave portion) and the convex portion P60 (projection) are formed along the circumferential direction of the first conductor pin. It may be.

  In the first conductor pin (FIG. 16A, FIG. 16B) according to the first modified example of the present invention, the number of the flange portions P23 is one, but is not limited to this, for example, as shown in FIG. It may be a first conductor pin having a plurality of (for example, two) flanges P23 in the vicinity of the mounting end F1 (the mounting portion 11).

  In the first conductor pin (FIGS. 18A and 18B) according to the third modification of the present invention, the number of steps is one, but the present invention is not limited to this. For example, as shown in FIG. It may be a first conductor pin having a plurality of steps (for example, two steps) in the vicinity of F1 (mounting portion 11).

  The shape of the first conductor pin according to the embodiment of the present invention and the shape of the first conductor pin according to the first to fifth modifications of the present invention can be arbitrarily combined. For example, as shown to FIG. 31A and FIG. 31B, the conductor pin which has the taper part P11 and the collar part P23 may be sufficient.

  The first conductor pins shown in FIGS. 16A to 31B can also be manufactured by a method similar to the method for manufacturing the first conductor pins 10 according to the embodiment of the present invention described above. Each part of the first conductor pin may be formed continuously (integrally), or may be formed separately and then joined together. When both are compared, the first conductor pin formed continuously tends to have higher strength in terms of strength, while the first conductor pin joined has a more complicated shape in terms of processing. It is thought that it is easy to cope with.

  In the embodiment of the present invention, the covering material 10a covers the entire first conductor pin 10 (see FIG. 4A). However, the present invention is not limited to this. For example, as shown in FIG. Only a part of the part 11 (for example, the taper part P11) may be the first conductor pin 10 covered with the covering material 10a. In this case, when the covering material 10a becomes a barrier layer and is exposed to a high temperature, the metal (for example, copper) of the first conductor pin 10 elutes to the solder side, thereby causing a void (air bubble) in the first conductor pin. ) Are not easily formed, and cracks starting from voids are less likely to occur, so that connection failure can be prevented. The barrier layer refers to, for example, Ni, Cr, or zinc plating.

  Further, for example, as shown in FIG. 32B, the first conductor pin 10 in which only the intersection line portion P1 is covered with the covering material 10a may be used.

  In addition, the method of partially covering the first conductor pin 10 with the covering material 10a is arbitrary. For example, after covering the entire first conductor pin 10 with the covering material 10a by electrolytic plating or the like, the unnecessary covering material 10a may be etched, or only in a necessary portion of the first conductor pin 10 The covering material 10a may be plated.

  Furthermore, for example, as shown in FIG. 32C, the first conductor pin 10 that is not covered with the covering material 10a may be used.

  In the embodiment of the present invention, the first conductor pin 10 configured by the mounting portion 11, the flange portion 12, and the insertion portion 13 is exemplified (see FIG. 4A). As shown in FIG. 33A and FIG. 33B, the first conductor pin 10 that does not have the flange 12 may be used.

  The first conductor pin 10 shown in FIG. 33A has a tapered portion P11 (uphill portion) having a side surface that is further away from the axis C of the first conductor pin 10 toward the insertion end F2 side from the mounting end F1 side in the vicinity of the mounting end F1. ) And a straight portion P14 having a side surface parallel to the axis C of the first conductor pin 10. The intersection line portion P1 is located at the boundary between the taper portion P11 and the straight portion P14. The taper portion P11, the intersection line portion P1, and the straight portion P14 are moved from the mounting end F1 side toward the insertion end F2 side. In order, they are formed continuously.

  The first conductor pin 10 shown in FIG. 33B has a tapered portion P11 (uphill portion) having a side surface that is further away from the axis C of the first conductor pin 10 toward the insertion end F2 side from the mounting end F1 side in the vicinity of the mounting end F1. ) And a tapered portion P15 (downhill portion) having a side surface that approaches the axis C of the first conductor pin 10 from the mounting end F1 side toward the insertion end F2 side. The intersection line portion P1 is located at the boundary between the taper portion P11 and the taper portion P15, and the taper portion P11, the intersection line portion P1, and the taper portion P15 are moved from the mounting end F1 side toward the insertion end F2 side. In order, they are formed continuously.

  In the embodiment of the present invention, the linear conductor pin 10 is exemplified (see FIG. 4A), but the present invention is not limited to this, and the conductor pin 10 may be bent, for example, as shown in FIG. In the example of FIG. 34, the conductor pin 10 is bent in a crank shape. However, the present invention is not limited to this, and the conductor pin 10 may be bent, for example, in an L shape or a U shape.

  FIG. 35A is a diagram showing a regular square as another example of the cross-sectional shape of the conductor pin according to the embodiment of the present invention, and FIG. 35B is a cross-sectional shape of the conductor pin according to the embodiment of the present invention. FIG. 35C is a diagram showing a regular hexagon as another example, FIG. 35C is a diagram showing a regular octagon as another example of the shape of the cross section of the conductor pin according to the embodiment of the present invention, and FIG. 35D is a diagram of the present invention. It is a figure which shows the ellipse as another example of the shape of the cross section of the cross section of the conductor pin which concerns on embodiment. FIG. 36A is a diagram showing a cross shape as another example of the shape of the cross-section of the conductor pin according to the embodiment of the present invention, and FIG. 36B shows the shape of the cross-section of the conductor pin according to the embodiment of the present invention. It is a figure which shows the regular polygon star as another example, and FIG. 36C is a figure which shows the petal shape as another example of the shape of the cross section of the conductor pin which concerns on embodiment of this invention.

  The shape of the cross section (XY plane) of each conductor pin (first conductor pin 10 or the like) of the conductor pin groups 101 to 103 is not limited to a circle (perfect circle), and is arbitrary, for example, FIG. 35A and FIG. As shown in FIG. 35C, it may be a regular polygon such as a regular square, a regular hexagon, or a regular octagon. In addition, the shape of the polygonal corner is arbitrary, and may be, for example, a right angle, an acute angle, an obtuse angle, or rounded. However, in order to prevent concentration of thermal stress, it is preferable that the corners are rounded.

  Further, as shown in FIG. 35D, the shape of the cross section of the conductor pin may be an ellipse. Moreover, a rectangle or a triangle etc. may be sufficient.

  In addition, as shown in FIGS. 36A to 36C, it is a shape in which a straight line is drawn radially from the center (a shape in which a plurality of blades are arranged radially), such as a cross shape, a regular polygonal star shape, or a petal (cosmos) shape. May be.

  The shape of the cross section of the conductor pin may be a combination (composite) of the above shapes.

  FIG. 37 is a diagram showing an example in which the conductor pins according to the embodiment of the present invention are applied as all the conductor pins of the mounting substrate. FIG. 38 is a diagram showing an example of a mounting substrate in which conductor pins and a support substrate according to the embodiment of the present invention are continuously formed. FIG. 39 is a diagram illustrating an example in which the conductor pin according to the embodiment of the present invention is applied to an electronic device having a plurality of support substrates. FIG. 40 is a diagram illustrating an example of an electronic device that includes the conductor pin according to the embodiment of the present invention and does not include the wiring board.

  In the embodiment of the present invention, an example in which only a part of the plurality of conductor pins (first conductor pin 10) has the intersection portion P1 on the side surface near the mounting end F1 is shown ( For example, as shown in FIG. 37, all the conductor pins have shapes as shown in FIGS. 4A and 4B, and the mounting ends F1 of the respective conductor pins are used. An intersection line portion P1 may be formed on the side surface in the vicinity.

  A connection mode between each of the conductor pins (first conductor pin 10 and the like) of the conductor pin groups 101 to 103 and the support substrate 2000 is arbitrary. In the above embodiment, the conductor pins (conductor pins 10 and the like) of the conductor pin groups 101 to 103 and the support substrate 2000 are separately formed and then joined to each other (see FIG. 2). Instead, for example, by processing a metal plate, the support substrate 2000 and each conductor pin may be formed continuously (integrally) as shown in FIG. By doing so, the process of forming the pin insertion hole 2000a in the support substrate 2000 is not necessary, and the number of processes can be reduced. For example, the end surface of each conductor pin may be joined to the main surface of the support substrate 2000. Even with such a connection method, the formation of the hole 2000a becomes unnecessary.

  In the above embodiment, the number of the support substrate 2000 connected to each conductor pin of the conductor pin groups 101 to 103 is one (see FIG. 2), but is not limited to this, for example, as shown in FIG. Apart from 2000, a support substrate 3000 may be prepared, and the wiring board 1000 and the semiconductor chips 201 and 202 mounted thereon may be sandwiched between the support substrates 2000 and 3000. In the example of FIG. 39, the conductor pins of the conductor pin groups 101 and 102 are connected to the support substrate 2000, and the conductor pins of the conductor pin group 103 are connected to the support substrate 3000.

  For example, as shown in FIG. 40, the electronic device 100 which does not have the wiring board 1000 may be sufficient.

  Further, for example, in order to reduce the weight of the conductor pin and reduce the material, unnecessary portions may be cut or a cavity may be formed.

  The production method of the present invention is not limited to the contents and order shown in the embodiment of the present invention, and the contents and order can be arbitrarily changed without departing from the gist of the present invention. Moreover, you may omit the process which is not required according to a use etc.

  The above embodiment of the present invention and other modifications can be arbitrarily combined. It is preferable to select an appropriate combination according to the application.

10 Conductor pin (first conductor pin)
10a Covering material 11 Mounting portion 11a Mounting portion 12 Gutter portion 13 Insertion portion 20 Conductor pin (second conductor pin)
DESCRIPTION OF SYMBOLS 21 Mounting part 22 Cage part 23 Insertion part 30 Conductor pin 30a Conductor 100 Electronic device 100a Mounting board 101-103 Conductor pin group 101a, 103a Conductor pin 201, 202 Semiconductor chip 201a, 202a Solder 500 Conductor pin 1000 Wiring board 1000a Solder 2000 Support substrate 2000a Hole 2001 First insulating layer 2002 Second insulating layer 2003 Third insulating layer 3000 Support substrate 3001 Mold C-axis F1 Mounting end F2 Insertion end F3 Side surface F5 Concavity and convexity P1 to P6 Intersection F11 First surface F12 First 2nd surface F30 Straight side surface F31 1st side surface F32 2nd side surface F41 1st side surface F42 2nd side surface P11 Tapered part P12 Straight part P14 Straight part P15 Tapered part P21 1st mounting part P22 2nd mounting part P23 2nd part P2 4 intersection part P31 1st mounting part P32 2nd mounting part P33 3rd mounting part P41 1st mounting part P42 2nd mounting part P50 hollow P60 convex part S201 connection layer S202 fillet

Claims (22)

A first conductor pin; a second conductor pin; and a support substrate; the support substrate is connected to one end of the first conductor pin and the second conductor pin; and the first conductor pin and the second conductor pin A mounting board capable of electrically connecting an electronic component to the other end of the conductor pin,
At least the first conductor pin has a side surface constituted by at least a first side surface on the other end side and a second side surface on the one end side, and the first side surface and the second side surface intersect each other. Configured to bulge outward at the part,
A mounting board characterized by that. The intersection line portion between the first side surface and the second side surface has a portion formed along a curve that goes around the outer periphery of the first conductor pin.
The mounting substrate according to claim 1. The intersecting line portion between the first side surface and the second side surface goes around the outer periphery of the first conductor pin,
The mounting substrate according to claim 2. The first side surface is formed in a tapered shape,
The mounting substrate according to any one of claims 1 to 3. In a cross section including the central axis of the first conductor pin, an angle formed by the first side surface and the central axis is in a range of 5 to 20 °.
The mounting substrate according to claim 4. The first side surface is a plane, and the second side surface is a side surface of a cylindrical portion.
The mounting substrate according to claim 1. The intersecting line portion is in a range from the other end side end surface of the first conductor pin to 0.2 mm in the axial direction of the conductor pin.
The mounting substrate according to claim 1, wherein: The angle formed by the first side surface and the second side surface in the intersecting line portion is in a range of 89 to 170 °.
The mounting substrate according to claim 6 or 7, wherein The periphery of at least the intersecting line portion of the first conductor pin is covered with a covering material,
The mounting substrate according to claim 1, wherein the mounting substrate is a mounting substrate. The portion of the covering material that covers the intersecting line portion is partially thick.
The mounting substrate according to claim 9. The covering material covers only the intersecting line portion of the first conductor pin,
The mounting substrate according to claim 9 or 10, wherein: The covering material is made of an electrolytic plating film.
The mounting substrate according to claim 9, wherein the mounting substrate is a mounting substrate. The first conductor pin is made of any one of copper, gold, and alloys thereof,
The covering material is made of any of nickel, chromium, and zinc.
The mounting substrate according to claim 9, wherein the mounting substrate is a mounting substrate. The second conductor pin has a cylindrical shape on the other end side.
The mounting substrate according to claim 1, wherein the mounting substrate is a mounting substrate. The first conductor pin is a conductor pin thinner than the second conductor pin.
The mounting substrate according to claim 14. The first conductor pins constitute a plurality of first conductor pin groups composed of a plurality of conductor pins,
The first conductor pin group has a uniform length,
The mounting substrate according to any one of claims 1 to 15, wherein The second conductor pins constitute a plurality of second conductor pin groups composed of a plurality,
The second conductor pin group has the same length,
The mounting substrate according to claim 1, wherein the mounting substrate is a mounting substrate. In the first conductor pin group, the thickness of the first conductor pin is uniform.
The mounting substrate according to claim 16. The second conductor pin group has the same thickness as the second conductor pin.
The mounting substrate according to claim 17. A mounting substrate according to any one of claims 1 to 19,
An electronic component electrically connected to the other end side of the first conductor pin and the other end side of the second conductor pin via solder;
Having
An electronic device characterized by that. At least the intersecting portion of the first conductor pin is covered with a covering material;
The covering material is made of a conductor having lower wettability to the solder than the material constituting the first conductor pin.
The electronic device according to claim 20. The electronic component is a transistor;
The first conductor pin is electrically connected to a gate of the transistor;
The electronic device according to claim 20 or 21, wherein

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