JP2013024782A - 電磁誘導式絶対位置測定用エンコーダ - Google Patents
電磁誘導式絶対位置測定用エンコーダ Download PDFInfo
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- JP2013024782A JP2013024782A JP2011161399A JP2011161399A JP2013024782A JP 2013024782 A JP2013024782 A JP 2013024782A JP 2011161399 A JP2011161399 A JP 2011161399A JP 2011161399 A JP2011161399 A JP 2011161399A JP 2013024782 A JP2013024782 A JP 2013024782A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2073—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to two or more coils
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Abstract
【解決手段】スケール10上に、測定方向に沿って互いに異なるスケールピッチで多数配列された2列以上のスケールコイル14−1、14−2と、前記スケールに対して測定方向に相対移動自在なグリッド12上に、前記スケールコイルと対向するように配設された送信コイル24−1、24−2及び受信コイル20−1、20−2とを備え、前記送信コイルを励磁した時に、前記スケールコイルを経由して前記受信コイルで検出される磁束の変化から、前記スケールに対する前記グリッドの絶対位置測定を可能とする2つ以上のトラックを有する電磁誘導式絶対位置測定用エンコーダにおいて、少なくとも1つのトラックの前記スケールコイルの測定方向の少なくとも片側にコイル配線(14−1b、14−1c、14−2b、14−2c)を付加する。
【選択図】図8
Description
12…グリッド
14−1、14−2…スケールコイル
14−1a、14−2a…本体コイル
14−1b、14−1c、14−2b、14−2c…付加コイル
14−3…接続コイル
20−1、20−2…受信コイル
24−1、24−2…送信コイル
Claims (2)
- スケール上に、測定方向に沿って互いに異なるスケールピッチで多数配列された2列以上のスケールコイルと、
前記スケールに対して測定方向に相対移動自在なグリッド上に、前記スケールコイルと対向するように配設された送信コイル及び受信コイルとを備え、
前記送信コイルを励磁した時に、前記スケールコイルを経由して前記受信コイルで検出される磁束の変化から、前記スケールに対する前記グリッドの絶対位置測定を可能とする2つ以上のトラックを有する電磁誘導式絶対位置測定用エンコーダにおいて、
少なくとも1つのトラックの前記スケールコイルの測定方向の少なくとも片側にコイル配線を付加したことを特徴とする電磁誘導式絶対位置測定用エンコーダ。 - 前記スケールコイルの測定方向両側にコイル配線を付加したことを特徴とする電磁誘導式絶対位置測定用エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011161399A JP5798397B2 (ja) | 2011-07-22 | 2011-07-22 | 電磁誘導式絶対位置測定用エンコーダ |
US13/550,040 US8928311B2 (en) | 2011-07-22 | 2012-07-16 | Electromagnetic induction type absolute position measuring encoder |
EP12177166.1A EP2549239B1 (en) | 2011-07-22 | 2012-07-19 | Electromagnetic induction type absolute position measuring encoder |
CN201210254896.7A CN102889899B (zh) | 2011-07-22 | 2012-07-20 | 电磁感应式绝对位置测量用编码器 |
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JP2011161399A JP5798397B2 (ja) | 2011-07-22 | 2011-07-22 | 電磁誘導式絶対位置測定用エンコーダ |
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JP2013024782A true JP2013024782A (ja) | 2013-02-04 |
JP5798397B2 JP5798397B2 (ja) | 2015-10-21 |
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US (1) | US8928311B2 (ja) |
EP (1) | EP2549239B1 (ja) |
JP (1) | JP5798397B2 (ja) |
CN (1) | CN102889899B (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5809479B2 (ja) * | 2011-08-03 | 2015-11-11 | 株式会社ミツトヨ | 電磁誘導式絶対位置測定用エンコーダ |
DE102013218768A1 (de) * | 2013-09-19 | 2015-03-19 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
US9733317B2 (en) * | 2014-03-10 | 2017-08-15 | Dmg Mori Seiki Co., Ltd. | Position detecting device |
US9435663B2 (en) * | 2014-08-22 | 2016-09-06 | Mitutoyo Corporation | Absolute position encoder scale having layers in a stacked configuration |
US9612136B1 (en) * | 2015-09-30 | 2017-04-04 | Mitutoyo Corporation | Absolute position encoder including a redundant spatial phase signal |
JP6234497B2 (ja) * | 2016-03-15 | 2017-11-22 | Thk株式会社 | エンコーダ装置及びエンコーダ装置付き運動案内装置 |
US10775199B2 (en) * | 2016-08-24 | 2020-09-15 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
US10612943B2 (en) * | 2016-08-24 | 2020-04-07 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
US10520335B2 (en) * | 2016-08-24 | 2019-12-31 | Mitutoyo Corporation | Winding configuration for inductive position encoder |
JP6877829B2 (ja) * | 2017-03-23 | 2021-05-26 | 株式会社ミツトヨ | 電磁誘導型変位検出装置およびこれを用いた測定器 |
US10690517B2 (en) * | 2017-11-01 | 2020-06-23 | Integrated Device Technology, Inc. | Sensor Coil optimization |
US10585149B2 (en) * | 2017-11-01 | 2020-03-10 | Integrated Device Technology, Inc. | Sensor coil optimization |
JP7118627B2 (ja) * | 2017-12-01 | 2022-08-16 | 株式会社ミツトヨ | 電磁誘導式位置検出装置 |
JP6970640B2 (ja) * | 2018-04-13 | 2021-11-24 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
CN209605843U (zh) | 2019-04-11 | 2019-11-08 | 郝佳 | 感应式位置测量传感器 |
US11181395B2 (en) | 2020-03-23 | 2021-11-23 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11067414B1 (en) | 2020-03-23 | 2021-07-20 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11169008B2 (en) | 2020-03-23 | 2021-11-09 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11713983B2 (en) | 2021-06-30 | 2023-08-01 | Mitutoyo Corporation | Sensing winding configuration for inductive position encoder |
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US5886519A (en) * | 1997-01-29 | 1999-03-23 | Mitutoyo Corporation | Multi-scale induced current absolute position transducer |
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DE10111975B9 (de) * | 2000-03-13 | 2012-11-15 | Mitutoyo Corp. | Verfahren zur Fehlererfassung für eine Vorrichtung zur Positionserfassung mit elektromagnetischer Induktion |
JP4172918B2 (ja) * | 2001-01-22 | 2008-10-29 | 株式会社ミツトヨ | 電磁誘導型絶対位置トランスデューサ |
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JP5224838B2 (ja) | 2008-02-04 | 2013-07-03 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
CN101806575B (zh) * | 2010-04-24 | 2012-04-25 | 上海交通大学 | 组合编码式涡流栅绝对位置传感器 |
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2011
- 2011-07-22 JP JP2011161399A patent/JP5798397B2/ja active Active
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2012
- 2012-07-16 US US13/550,040 patent/US8928311B2/en active Active
- 2012-07-19 EP EP12177166.1A patent/EP2549239B1/en active Active
- 2012-07-20 CN CN201210254896.7A patent/CN102889899B/zh active Active
Patent Citations (8)
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JPH02278119A (ja) * | 1989-04-19 | 1990-11-14 | Omron Corp | 電磁誘導式変位センサ |
JPH07190806A (ja) * | 1993-12-27 | 1995-07-28 | Nec Corp | インダクトシンセンサ |
JP2003247862A (ja) * | 2002-02-27 | 2003-09-05 | Mitsutoyo Corp | 誘導型位置トランスデューサ |
JP2003254783A (ja) * | 2002-02-28 | 2003-09-10 | Mitsutoyo Corp | 誘導型位置トランスデューサ |
JP2006503282A (ja) * | 2002-10-16 | 2006-01-26 | エレクトロニクス テクノロジー リミテッド | 検出装置および方法 |
JP2004198253A (ja) * | 2002-12-18 | 2004-07-15 | Mitsutoyo Corp | 磁気式エンコーダのスケール及び磁気式エンコーダ |
JP2004309419A (ja) * | 2003-04-10 | 2004-11-04 | Mitsutoyo Corp | 誘導型トランスデューサ |
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Publication number | Publication date |
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EP2549239B1 (en) | 2018-04-18 |
JP5798397B2 (ja) | 2015-10-21 |
CN102889899B (zh) | 2016-11-23 |
US20130021024A1 (en) | 2013-01-24 |
CN102889899A (zh) | 2013-01-23 |
EP2549239A2 (en) | 2013-01-23 |
EP2549239A3 (en) | 2017-07-05 |
US8928311B2 (en) | 2015-01-06 |
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