JP2013012667A - 太陽電池用ウエハ、太陽電池およびその製造方法 - Google Patents

太陽電池用ウエハ、太陽電池およびその製造方法 Download PDF

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Publication number
JP2013012667A
JP2013012667A JP2011145692A JP2011145692A JP2013012667A JP 2013012667 A JP2013012667 A JP 2013012667A JP 2011145692 A JP2011145692 A JP 2011145692A JP 2011145692 A JP2011145692 A JP 2011145692A JP 2013012667 A JP2013012667 A JP 2013012667A
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JP
Japan
Prior art keywords
silicon wafer
solar cell
etching
less
solar cells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011145692A
Other languages
English (en)
Japanese (ja)
Inventor
Akihide Takagi
明英 高木
Shoji Nakamura
昌次 中村
Yoshiyuki Hojo
義之 北條
Hiroshi Kumada
浩 熊田
Junzo Wakuta
順三 涌田
Tetsuya Hayashi
林  哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP2011145692A priority Critical patent/JP2013012667A/ja
Priority to PCT/JP2012/065574 priority patent/WO2013002060A1/fr
Priority to TW101123619A priority patent/TW201308420A/zh
Publication of JP2013012667A publication Critical patent/JP2013012667A/ja
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • B23D61/185Saw wires; Saw cables; Twisted saw strips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02363Special surface textures of the semiconductor body itself, e.g. textured active layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H01L31/0682Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
JP2011145692A 2011-06-30 2011-06-30 太陽電池用ウエハ、太陽電池およびその製造方法 Pending JP2013012667A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011145692A JP2013012667A (ja) 2011-06-30 2011-06-30 太陽電池用ウエハ、太陽電池およびその製造方法
PCT/JP2012/065574 WO2013002060A1 (fr) 2011-06-30 2012-06-19 Tranche pour cellule solaire, cellule solaire et procédé de production pour celle-ci
TW101123619A TW201308420A (zh) 2011-06-30 2012-06-29 太陽能電池用晶圓、太陽能電池及其製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011145692A JP2013012667A (ja) 2011-06-30 2011-06-30 太陽電池用ウエハ、太陽電池およびその製造方法

Publications (1)

Publication Number Publication Date
JP2013012667A true JP2013012667A (ja) 2013-01-17

Family

ID=47423958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011145692A Pending JP2013012667A (ja) 2011-06-30 2011-06-30 太陽電池用ウエハ、太陽電池およびその製造方法

Country Status (3)

Country Link
JP (1) JP2013012667A (fr)
TW (1) TW201308420A (fr)
WO (1) WO2013002060A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI650872B (zh) * 2016-11-07 2019-02-11 日商信越化學工業股份有限公司 太陽能電池及其製造方法、太陽能電池模組及太陽能電池發電系統

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5221738B2 (ja) * 2011-11-11 2013-06-26 シャープ株式会社 半導体装置および半導体装置の製造方法
WO2015110410A1 (fr) 2014-01-21 2015-07-30 Smith & Nephew Plc Pansement pliable pour le traitement des plaies par pression négative
DK3288508T3 (da) 2015-04-27 2020-03-09 Smith & Nephew Anordninger med reduceret tryk
GB201711183D0 (en) 2017-07-12 2017-08-23 Smith & Nephew Antimicrobial or wound care materials, devices and uses
WO2020161086A1 (fr) 2019-02-04 2020-08-13 T.J.Smith And Nephew,Limited Couche de contact de plaie et pansement pour l'administration d'iode
GB201907716D0 (en) 2019-05-31 2019-07-17 Smith & Nephew Systems and methods for extending operational time of negative pressure wound treatment apparatuses
GB201916148D0 (en) 2019-11-06 2019-12-18 Smith & Nephew Wound contact layer testing apparatus and method
GB202000274D0 (en) 2020-01-09 2020-02-26 Smith & Nephew Systems and methods for monitoring operational lifetime of negative pressure wound treatment apparatuses
WO2021198461A1 (fr) 2020-04-02 2021-10-07 T.J.Smith And Nephew,Limited Commande et activation de pansements
WO2021198470A1 (fr) 2020-04-02 2021-10-07 T.J.Smith And Nephew,Limited Pansement
GB202004868D0 (en) 2020-04-02 2020-05-20 Smith & Nephew Wound care compositions and methods of preparation thereof
GB202104922D0 (en) 2021-04-07 2021-05-19 Smith & Nephew Temperature monitoring and control for negative pressure wound therapy systems
GB202109154D0 (en) 2021-06-25 2021-08-11 Smith & Nephew Liquid ingress protection for negative pressure wound therapy systems
GB202110240D0 (en) 2021-07-16 2021-09-01 Smith & Nephew Reduced pressure apparatuses and methods
GB202114294D0 (en) 2021-10-06 2021-11-17 Smith & Nephew Wound dressing apparatuses and methods for nitric oxide delivery
GB202114298D0 (en) 2021-10-06 2021-11-17 Smith & Nephew Wound dressing with one or more composite layers
GB202114307D0 (en) 2021-10-06 2021-11-17 Smith & Nephew Wound dressing compositions and methods of use and preparation therof
GB202116857D0 (en) 2021-11-23 2022-01-05 Smith & Nephew Soft-start mechanism for wound monitoring and treatment devices
WO2023135177A1 (fr) 2022-01-14 2023-07-20 T.J.Smith And Nephew, Limited Auto-étalonnage à performance de thérapie dynamique pour dispositifs de thérapie de plaie à pression négative
GB202202788D0 (en) 2022-03-01 2022-04-13 Smith & Nephew Oxygen delivery to a wound

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041266A1 (fr) * 2007-09-28 2009-04-02 Sharp Kabushiki Kaisha Procédé de fabrication de tranche de cellule solaire
JP2010167509A (ja) * 2009-01-20 2010-08-05 Kanai Hiroaki 固定砥粒ソーワイヤ及び切断方法
WO2011024910A1 (fr) * 2009-08-28 2011-03-03 株式会社Sumco Tranche de silicium pour cellules solaires et son procédé de production
JP2011079106A (ja) * 2009-10-08 2011-04-21 Sumco Corp 固定砥粒ワイヤーソーによる被加工物の切断方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041266A1 (fr) * 2007-09-28 2009-04-02 Sharp Kabushiki Kaisha Procédé de fabrication de tranche de cellule solaire
JP2010167509A (ja) * 2009-01-20 2010-08-05 Kanai Hiroaki 固定砥粒ソーワイヤ及び切断方法
WO2011024910A1 (fr) * 2009-08-28 2011-03-03 株式会社Sumco Tranche de silicium pour cellules solaires et son procédé de production
JP2011079106A (ja) * 2009-10-08 2011-04-21 Sumco Corp 固定砥粒ワイヤーソーによる被加工物の切断方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI650872B (zh) * 2016-11-07 2019-02-11 日商信越化學工業股份有限公司 太陽能電池及其製造方法、太陽能電池模組及太陽能電池發電系統
US11631779B2 (en) 2016-11-07 2023-04-18 Shin-Etsu Chemical Co., Ltd. Solar cell with high photoelectric conversion efficiency and method for manufacturing solar cell with high photoelectric conversion efficiency

Also Published As

Publication number Publication date
TW201308420A (zh) 2013-02-16
WO2013002060A1 (fr) 2013-01-03

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