JP2012532438A - Iii−p半導体発光デバイスのpコンタクト層 - Google Patents
Iii−p半導体発光デバイスのpコンタクト層 Download PDFInfo
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- JP2012532438A JP2012532438A JP2012516889A JP2012516889A JP2012532438A JP 2012532438 A JP2012532438 A JP 2012532438A JP 2012516889 A JP2012516889 A JP 2012516889A JP 2012516889 A JP2012516889 A JP 2012516889A JP 2012532438 A JP2012532438 A JP 2012532438A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 8
- UYXHKQZXVSKYCE-UHFFFAOYSA-N tetrabutyl-lambda5-arsane Chemical compound CCCC[AsH](CCCC)(CCCC)CCCC UYXHKQZXVSKYCE-UHFFFAOYSA-N 0.000 claims description 6
- BJQWBACJIAKDTJ-UHFFFAOYSA-N tetrabutylphosphanium Chemical compound CCCC[P+](CCCC)(CCCC)CCCC BJQWBACJIAKDTJ-UHFFFAOYSA-N 0.000 claims description 6
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 238000005253 cladding Methods 0.000 claims description 4
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims description 3
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 238000005275 alloying Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004038 photonic crystal Substances 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- -1 thicknesses Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/387—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape with a plurality of electrode regions in direct contact with the semiconductor body and being electrically interconnected by another electrode layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (13)
- 半導体構造であり:
n型領域とp型領域との間に配置された少なくとも1つのIII−P発光層;及び
x<0.45であるGaAsxP1−xのpコンタクト層;
を有する半導体構造と、
前記GaAsxP1−xのpコンタクト層と直接的に接触する第1の金属コンタクトと、
前記n型領域に電気的に接続された第2の金属コンタクトと
を有し、
前記第1及び第2の金属コンタクトは、前記半導体構造の同一面に形成されている、
デバイス。 - 前記GaAsxP1−xのpコンタクト層は一定の組成量xを有する、請求項1に記載のデバイス。
- 0.2<x<0.4である、請求項2に記載のデバイス。
- 前記GaAsxP1−xのpコンタクト層は、傾斜した組成量xを有する、請求項1に記載のデバイス。
- 前記GaAsxP1−xのpコンタクト層は、x=0からx<0.45まで傾斜された組成量を有する、請求項1に記載のデバイス。
- 前記第1の金属コンタクトは:
ミラー;及び
前記ミラーと前記GaAsxP1−xのpコンタクト層との間に配置された複数のオーミックコンタクト領域;
を有する、請求項1に記載のデバイス。 - 前記ミラーは銀を有し、前記複数のオーミックコンタクト領域はAuZn及びAlのうちの一方を有する、請求項6に記載のデバイス。
- 前記p型領域は:
前記発光層と直接的に接触するクラッド層;及び
前記クラッド層と前記コンタクト層との間に配置された、傾斜した組成量を有する領域;
を有する、請求項1に記載のデバイス。 - 前記クラッド層はAl0.48In0.52Pを有し、且つ
前記傾斜した組成量を有する領域は、AlInPから、(Al0.3Ga0.7)0.47In0.53Pまで傾斜されている、
請求項8に記載のデバイス。 - 成長基板上に半導体構造を成長させる工程であり、該半導体構造は:
n型領域とp型領域との間に配置された少なくとも1つのIII−P発光層;及び
x<0.45であるGaAsxP1−xのpコンタクト層;
を有する、成長させる工程と、
前記GaAsxP1−xのpコンタクト層と直接的に接触する第1の金属コンタクトを形成する工程と、
前記n型領域の一部を露出させるように、前記少なくとも1つのIII−P発光層と前記p型領域との一部をエッチング除去する工程と、
前記n型領域に電気的に接続された第2の金属コンタクトを形成する工程と
を有し、
前記第1及び第2の金属コンタクトは、前記半導体構造の同一面に形成される、
方法。 - 前記半導体構造を成長させる工程は、アルシン源としてテトラブチルアルシン(TBA)を用いて前記pコンタクト層を成長させることを有する、請求項10に記載の方法。
- 前記半導体構造を成長させる工程は、ホスフィン源としてテトラブチルホスフィン(TBP)を用いて前記pコンタクト層を成長させることを有する、請求項10に記載の方法。
- 前記成長基板を除去する工程、を更に有する請求項10に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/494,988 | 2009-06-30 | ||
US12/494,988 US8017958B2 (en) | 2009-06-30 | 2009-06-30 | P-contact layer for a III-P semiconductor light emitting device |
PCT/IB2010/052367 WO2011001308A1 (en) | 2009-06-30 | 2010-05-27 | P-contact layer for a iii-p semiconductor light emitting device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015215687A Division JP2016034036A (ja) | 2009-06-30 | 2015-11-02 | Iii−p半導体発光デバイスのpコンタクト層 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012532438A true JP2012532438A (ja) | 2012-12-13 |
JP5927115B2 JP5927115B2 (ja) | 2016-05-25 |
Family
ID=42651335
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012516889A Active JP5927115B2 (ja) | 2009-06-30 | 2010-05-27 | Iii−p半導体発光デバイスのpコンタクト層 |
JP2015215687A Pending JP2016034036A (ja) | 2009-06-30 | 2015-11-02 | Iii−p半導体発光デバイスのpコンタクト層 |
JP2017065130A Pending JP2017118150A (ja) | 2009-06-30 | 2017-03-29 | Iii−p半導体発光デバイスのpコンタクト層 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015215687A Pending JP2016034036A (ja) | 2009-06-30 | 2015-11-02 | Iii−p半導体発光デバイスのpコンタクト層 |
JP2017065130A Pending JP2017118150A (ja) | 2009-06-30 | 2017-03-29 | Iii−p半導体発光デバイスのpコンタクト層 |
Country Status (8)
Country | Link |
---|---|
US (2) | US8017958B2 (ja) |
EP (1) | EP2449605B1 (ja) |
JP (3) | JP5927115B2 (ja) |
KR (2) | KR101886733B1 (ja) |
CN (1) | CN102473804B (ja) |
BR (1) | BRPI1010215B1 (ja) |
TW (1) | TWI528586B (ja) |
WO (1) | WO2011001308A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017518633A (ja) * | 2014-05-08 | 2017-07-06 | エルジー イノテック カンパニー リミテッド | 発光素子 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8017958B2 (en) * | 2009-06-30 | 2011-09-13 | Koninklijke Philips Electronics N.V. | P-contact layer for a III-P semiconductor light emitting device |
EP2831930B1 (en) | 2012-03-30 | 2018-09-19 | Lumileds Holding B.V. | Sealed semiconductor light emitting device and method of forming thereof |
US9923118B2 (en) * | 2013-02-25 | 2018-03-20 | Sensor Electronic Technology, Inc. | Semiconductor structure with inhomogeneous regions |
CN103594590B (zh) * | 2013-11-07 | 2017-02-01 | 溧阳市江大技术转移中心有限公司 | 一种倒装发光二极管的制造方法 |
KR200495562Y1 (ko) | 2020-05-18 | 2022-07-04 | 주식회사 온슘바이오 농업회사법인 | 의료용 금사 |
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-
2009
- 2009-06-30 US US12/494,988 patent/US8017958B2/en active Active
-
2010
- 2010-05-21 TW TW099116398A patent/TWI528586B/zh active
- 2010-05-27 JP JP2012516889A patent/JP5927115B2/ja active Active
- 2010-05-27 KR KR1020177016803A patent/KR101886733B1/ko active IP Right Grant
- 2010-05-27 KR KR1020127002502A patent/KR101750397B1/ko active IP Right Grant
- 2010-05-27 BR BRPI1010215-9A patent/BRPI1010215B1/pt active IP Right Grant
- 2010-05-27 CN CN201080029721.5A patent/CN102473804B/zh active Active
- 2010-05-27 WO PCT/IB2010/052367 patent/WO2011001308A1/en active Application Filing
- 2010-05-27 EP EP10726298.2A patent/EP2449605B1/en active Active
-
2011
- 2011-08-08 US US13/204,750 patent/US8816368B2/en active Active
-
2015
- 2015-11-02 JP JP2015215687A patent/JP2016034036A/ja active Pending
-
2017
- 2017-03-29 JP JP2017065130A patent/JP2017118150A/ja active Pending
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JP2017518633A (ja) * | 2014-05-08 | 2017-07-06 | エルジー イノテック カンパニー リミテッド | 発光素子 |
US10043947B2 (en) | 2014-05-08 | 2018-08-07 | Lg Innotek Co., Ltd. | Light emitting device |
Also Published As
Publication number | Publication date |
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CN102473804A (zh) | 2012-05-23 |
BRPI1010215B1 (pt) | 2020-03-31 |
US20100327299A1 (en) | 2010-12-30 |
EP2449605B1 (en) | 2020-08-26 |
US20110284891A1 (en) | 2011-11-24 |
KR20170075018A (ko) | 2017-06-30 |
JP5927115B2 (ja) | 2016-05-25 |
KR101886733B1 (ko) | 2018-08-09 |
JP2016034036A (ja) | 2016-03-10 |
TWI528586B (zh) | 2016-04-01 |
CN102473804B (zh) | 2016-11-23 |
KR20120099625A (ko) | 2012-09-11 |
KR101750397B1 (ko) | 2017-06-23 |
US8816368B2 (en) | 2014-08-26 |
TW201106501A (en) | 2011-02-16 |
BRPI1010215A8 (pt) | 2019-01-02 |
JP2017118150A (ja) | 2017-06-29 |
WO2011001308A1 (en) | 2011-01-06 |
EP2449605A1 (en) | 2012-05-09 |
BRPI1010215A2 (pt) | 2017-01-24 |
US8017958B2 (en) | 2011-09-13 |
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