JP2012526373A - レーザビームのスペクトルバンド幅を設定するための狭帯域化モジュール - Google Patents

レーザビームのスペクトルバンド幅を設定するための狭帯域化モジュール Download PDF

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Publication number
JP2012526373A
JP2012526373A JP2012508944A JP2012508944A JP2012526373A JP 2012526373 A JP2012526373 A JP 2012526373A JP 2012508944 A JP2012508944 A JP 2012508944A JP 2012508944 A JP2012508944 A JP 2012508944A JP 2012526373 A JP2012526373 A JP 2012526373A
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module
optical component
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JP2012526373A5 (enExample
Inventor
ドイベル マーカス
レンゲル アントン
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カール ツァイス レーザー オプティクス ゲーエムベーハー
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Publication of JP2012526373A publication Critical patent/JP2012526373A/ja
Publication of JP2012526373A5 publication Critical patent/JP2012526373A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G02B26/0883—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G02B26/0883—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism
    • G02B26/0891—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism forming an optical wedge
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4244—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in wavelength selecting devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2012508944A 2009-05-08 2010-05-04 レーザビームのスペクトルバンド幅を設定するための狭帯域化モジュール Pending JP2012526373A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US17654509P 2009-05-08 2009-05-08
US61/176,545 2009-05-08
DE102009020501A DE102009020501A1 (de) 2009-05-08 2009-05-08 Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls
DE102009020501.2 2009-05-08
PCT/EP2010/002722 WO2010127831A1 (en) 2009-05-08 2010-05-04 Bandwidth narrowing module for setting a spectral bandwidth of a laser beam

Publications (2)

Publication Number Publication Date
JP2012526373A true JP2012526373A (ja) 2012-10-25
JP2012526373A5 JP2012526373A5 (enExample) 2013-05-30

Family

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JP2012508944A Pending JP2012526373A (ja) 2009-05-08 2010-05-04 レーザビームのスペクトルバンド幅を設定するための狭帯域化モジュール

Country Status (4)

Country Link
US (1) US20120099612A1 (enExample)
JP (1) JP2012526373A (enExample)
DE (1) DE102009020501A1 (enExample)
WO (1) WO2010127831A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101753355B1 (ko) 2016-07-20 2017-07-06 서울대학교산학협력단 레이저 홀로그래픽 리소그래피 장치 및 패턴 제조 방법

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103676498B (zh) * 2013-11-18 2017-04-05 中国科学院上海光学精密机械研究所 光刻机光瞳整形单元结构及其衍射光学元件设计方法
US10921608B2 (en) * 2015-02-18 2021-02-16 Imax Theatres International Limited Despeckling system for projected light
US9666191B1 (en) * 2016-03-17 2017-05-30 Vocalzoom Systems Ltd. Laser-based system and optical microphone having increased bandwidth
DE102018209602B4 (de) 2018-06-14 2022-05-12 Carl Zeiss Smt Gmbh Optische Baugruppe zur Verringerung einer spektralen Bandbreite eines Ausgabestrahls eines Lasers
PL446827A1 (pl) * 2023-11-23 2025-05-26 Uniwersytet Warszawski Sposób widmowego zawężania impulsów laserowych światła oraz układ do widmowego zawężania impulsów laserowych światła
EP4560851A1 (en) 2023-11-23 2025-05-28 Uniwersytet Warszawski Method and system for spectral narrowing of laser light pulses

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10313143A (ja) * 1997-05-09 1998-11-24 Komatsu Ltd 狭帯域化レーザ装置
JPH11274632A (ja) * 1998-03-25 1999-10-08 Komatsu Ltd 狭帯域化レーザの波面制御装置
EP0955706A1 (en) * 1998-05-04 1999-11-10 Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh Laser system and method for narrow spectral linewidth through wavefront curvature compensation
US20010033383A1 (en) * 2000-01-27 2001-10-25 Matthias Kramer Resonator optics monitoring method
US20020021728A1 (en) * 1999-12-27 2002-02-21 Newman Peter C. Four KHz gas discharge laser
US20070001127A1 (en) * 2005-06-30 2007-01-04 Cymer, Inc. Active bandwidth control for a laser
JP2008098282A (ja) * 2006-10-10 2008-04-24 Komatsu Ltd 狭帯域化レーザのスペクトル幅調整装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980703204A (ko) * 1995-04-03 1998-10-15 안자끼 사토루 협대역 레이저 장치
US6285701B1 (en) * 1998-08-06 2001-09-04 Lambda Physik Ag Laser resonator for improving narrow band emission of an excimer laser
US6424666B1 (en) * 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser
US6163559A (en) * 1998-06-22 2000-12-19 Cymer, Inc. Beam expander for ultraviolet lasers
US6856638B2 (en) * 2000-10-23 2005-02-15 Lambda Physik Ag Resonator arrangement for bandwidth control
JP5157004B2 (ja) * 2006-07-04 2013-03-06 株式会社小松製作所 狭帯域化レーザのスペクトル幅調整方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10313143A (ja) * 1997-05-09 1998-11-24 Komatsu Ltd 狭帯域化レーザ装置
JPH11274632A (ja) * 1998-03-25 1999-10-08 Komatsu Ltd 狭帯域化レーザの波面制御装置
EP0955706A1 (en) * 1998-05-04 1999-11-10 Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh Laser system and method for narrow spectral linewidth through wavefront curvature compensation
US20020021728A1 (en) * 1999-12-27 2002-02-21 Newman Peter C. Four KHz gas discharge laser
US20010033383A1 (en) * 2000-01-27 2001-10-25 Matthias Kramer Resonator optics monitoring method
US20070001127A1 (en) * 2005-06-30 2007-01-04 Cymer, Inc. Active bandwidth control for a laser
JP2008098282A (ja) * 2006-10-10 2008-04-24 Komatsu Ltd 狭帯域化レーザのスペクトル幅調整装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101753355B1 (ko) 2016-07-20 2017-07-06 서울대학교산학협력단 레이저 홀로그래픽 리소그래피 장치 및 패턴 제조 방법

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Publication number Publication date
US20120099612A1 (en) 2012-04-26
DE102009020501A1 (de) 2010-12-23
WO2010127831A1 (en) 2010-11-11

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