JP2012526373A5 - - Google Patents

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Publication number
JP2012526373A5
JP2012526373A5 JP2012508944A JP2012508944A JP2012526373A5 JP 2012526373 A5 JP2012526373 A5 JP 2012526373A5 JP 2012508944 A JP2012508944 A JP 2012508944A JP 2012508944 A JP2012508944 A JP 2012508944A JP 2012526373 A5 JP2012526373 A5 JP 2012526373A5
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JP
Japan
Prior art keywords
optical component
band
narrow
module according
prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012508944A
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English (en)
Japanese (ja)
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JP2012526373A (ja
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Publication date
Priority claimed from DE102009020501A external-priority patent/DE102009020501A1/de
Application filed filed Critical
Publication of JP2012526373A publication Critical patent/JP2012526373A/ja
Publication of JP2012526373A5 publication Critical patent/JP2012526373A5/ja
Pending legal-status Critical Current

Links

JP2012508944A 2009-05-08 2010-05-04 レーザビームのスペクトルバンド幅を設定するための狭帯域化モジュール Pending JP2012526373A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US17654509P 2009-05-08 2009-05-08
US61/176,545 2009-05-08
DE102009020501A DE102009020501A1 (de) 2009-05-08 2009-05-08 Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls
DE102009020501.2 2009-05-08
PCT/EP2010/002722 WO2010127831A1 (en) 2009-05-08 2010-05-04 Bandwidth narrowing module for setting a spectral bandwidth of a laser beam

Publications (2)

Publication Number Publication Date
JP2012526373A JP2012526373A (ja) 2012-10-25
JP2012526373A5 true JP2012526373A5 (enExample) 2013-05-30

Family

ID=42542902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012508944A Pending JP2012526373A (ja) 2009-05-08 2010-05-04 レーザビームのスペクトルバンド幅を設定するための狭帯域化モジュール

Country Status (4)

Country Link
US (1) US20120099612A1 (enExample)
JP (1) JP2012526373A (enExample)
DE (1) DE102009020501A1 (enExample)
WO (1) WO2010127831A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103676498B (zh) * 2013-11-18 2017-04-05 中国科学院上海光学精密机械研究所 光刻机光瞳整形单元结构及其衍射光学元件设计方法
US10921608B2 (en) * 2015-02-18 2021-02-16 Imax Theatres International Limited Despeckling system for projected light
US9666191B1 (en) * 2016-03-17 2017-05-30 Vocalzoom Systems Ltd. Laser-based system and optical microphone having increased bandwidth
KR101753355B1 (ko) 2016-07-20 2017-07-06 서울대학교산학협력단 레이저 홀로그래픽 리소그래피 장치 및 패턴 제조 방법
DE102018209602B4 (de) 2018-06-14 2022-05-12 Carl Zeiss Smt Gmbh Optische Baugruppe zur Verringerung einer spektralen Bandbreite eines Ausgabestrahls eines Lasers
PL446827A1 (pl) * 2023-11-23 2025-05-26 Uniwersytet Warszawski Sposób widmowego zawężania impulsów laserowych światła oraz układ do widmowego zawężania impulsów laserowych światła
EP4560851A1 (en) 2023-11-23 2025-05-28 Uniwersytet Warszawski Method and system for spectral narrowing of laser light pulses

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980703204A (ko) * 1995-04-03 1998-10-15 안자끼 사토루 협대역 레이저 장치
JP4102457B2 (ja) * 1997-05-09 2008-06-18 株式会社小松製作所 狭帯域化レーザ装置
US6757316B2 (en) * 1999-12-27 2004-06-29 Cymer, Inc. Four KHz gas discharge laser
JP3590524B2 (ja) * 1998-03-25 2004-11-17 株式会社小松製作所 狭帯域化レーザの波面制御装置
US6061382A (en) * 1998-05-04 2000-05-09 Lambda Physik Gmbh Laser system and method for narrow spectral linewidth through wavefront curvature compensation
US6285701B1 (en) * 1998-08-06 2001-09-04 Lambda Physik Ag Laser resonator for improving narrow band emission of an excimer laser
US6424666B1 (en) * 1999-06-23 2002-07-23 Lambda Physik Ag Line-narrowing module for high power laser
US6163559A (en) * 1998-06-22 2000-12-19 Cymer, Inc. Beam expander for ultraviolet lasers
US6542243B2 (en) * 2000-01-27 2003-04-01 Lambda Physik Ag Resonator optics monitoring method
US6856638B2 (en) * 2000-10-23 2005-02-15 Lambda Physik Ag Resonator arrangement for bandwidth control
US7653095B2 (en) * 2005-06-30 2010-01-26 Cymer, Inc. Active bandwidth control for a laser
JP5157004B2 (ja) * 2006-07-04 2013-03-06 株式会社小松製作所 狭帯域化レーザのスペクトル幅調整方法
JP5114767B2 (ja) * 2006-10-10 2013-01-09 株式会社小松製作所 狭帯域化レーザのスペクトル幅調整装置

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