JP2012523363A - 連続的に移動する基材上においてカーボン・ナノチューブを製造する装置及び方法 - Google Patents
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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Abstract
【選択図】図1
Description
本願は、2009年4月10日出願の米国仮特許出願第61/168,516号、及び2010年1月15日出願の米国仮特許出願第61/295,624号に基づいて優先権を主張するものであり、これらは参照により全て本明細書に組み込まれる。
適用なし。
Claims (19)
- 巻き取り可能な長さの基材が通過できる大きさに形成された基材入口を有する少なくとも1つのカーボン・ナノチューブ成長ゾーンと、
前記カーボン・ナノチューブ成長ゾーンと熱的に連結した少なくとも1つの加熱器と、
前記カーボン・ナノチューブ成長ゾーンと流体的に連結した少なくとも1つの供給ガス流入口と、
を含んで構成され、
運転中、大気に開放されている装置。 - パージゾーンを含んで構成された請求項1に記載の装置。
- 前記カーボン・ナノチューブ成長ゾーンの両側に少なくとも2つのパージゾーンを含んで構成された請求項1に記載の装置。
- 基材出口を含んで構成された請求項1に記載の装置。
- 前記供給ガス流入口が、前記カーボン・ナノチューブ成長ゾーンにある請求項1に記載の装置。
- 前記パージゾーンにパージガス流入口を含んで構成された請求項2に記載の装置。
- 前記カーボン・ナノチューブ成長ゾーンの横断面積が、前記巻き取り可能な長さの基材の横断面積の約10000倍以下である請求項1に記載の装置。
- 前記カーボン・ナノチューブ成長ゾーンが、前記巻き取り可能な長さの基材の一部の容積の約10000倍以下の内部容積を備え、前記巻き取り可能な長さの基材の前記一部は、前記カーボン・ナノチューブ成長ゾーンの長さと略等しい長さを備えた請求項1に記載の装置。
- 前記カーボン・ナノチューブ成長ゾーンが、金属を含んで構成される筐体により形成された請求項1に記載の装置。
- 前記金属は、ステンレス鋼を含んで構成された請求項9に記載の装置。
- 少なくとも2つのカーボン・ナノチューブ成長ゾーンを含んで構成された請求項1に記載の装置。
- 巻き取り可能な長さの基材が通過できる大きさに形成された基材入口を備えた少なくとも1つのカーボン・ナノチューブ成長ゾーンを有し、大気に開放された装置を提供するステップと、
基材を提供するステップと、
前記基材の一部を、前記基材入口を介して前記カーボン・ナノチューブ成長ゾーンに導入するステップと、
供給ガスを、前記カーボン・ナノチューブ成長ゾーンに導入するステップと、
前記基材の前記一部を前記カーボン・ナノチューブ成長ゾーンに通し、これにより、カーボン・ナノチューブを前記基材の前記一部に形成するステップと、
を含んで構成された方法。 - 前記カーボン・ナノチューブ成長ゾーンから、前記基材の前記一部、及び、この上に形成されたカーボン・ナノチューブを取り出すステップを含んで構成された請求項12に記載の方法。
- 前記ステップが請求項12に記載された順序で行われる請求項12に記載の方法。
- 前記装置は、少なくとも1つのパージゾーンを備え、前記カーボン・ナノチューブ成長ゾーンに前記基材の前記一部を導入する前に、前記パージゾーンをパージするステップを更に含んで構成された請求項12に記載の方法。
- 前記カーボン・ナノチューブ成長ゾーンに前記供給ガスを導入する前に、前記供給ガスを予熱するステップを更に含んで構成された請求項12に記載の方法。
- 前記装置は、前記カーボン・ナノチューブ成長ゾーンのうち前記パージゾーンの反対側に追加のパージゾーンを含んで構成され、前記基材の前記一部が前記カーボン・ナノチューブ成長ゾーンを通過した後に、前記追加のパージゾーンをパージするステップを更に含んで構成された請求項15に記載の方法。
- 前記装置は、少なくとも2つのカーボン・ナノチューブ成長ゾーンを備え、前記基材の前記一部を前記カーボン・ナノチューブ成長ゾーンの夫々に通すステップを含んで構成された請求項12に記載の方法。
- 前記基材は巻き取り可能な長さの基材であり、前記巻き取り可能な長さの基材を前記装置に連続的に通すステップを含んで構成された請求項12に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16851609P | 2009-04-10 | 2009-04-10 | |
US61/168,516 | 2009-04-10 | ||
US29562410P | 2010-01-15 | 2010-01-15 | |
US61/295,624 | 2010-01-15 | ||
PCT/US2010/025660 WO2010117515A1 (en) | 2009-04-10 | 2010-02-26 | Apparatus and method for the production of carbon nanotubes on a continuously moving substrate |
Publications (2)
Publication Number | Publication Date |
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JP2012523363A true JP2012523363A (ja) | 2012-10-04 |
JP5629756B2 JP5629756B2 (ja) | 2014-11-26 |
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Application Number | Title | Priority Date | Filing Date |
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JP2012504678A Active JP5629756B2 (ja) | 2009-04-10 | 2010-02-26 | 連続的に移動する基材上においてカーボン・ナノチューブを製造する装置及び方法 |
Country Status (11)
Country | Link |
---|---|
US (1) | US20100260933A1 (ja) |
EP (1) | EP2417286B1 (ja) |
JP (1) | JP5629756B2 (ja) |
KR (1) | KR101696212B1 (ja) |
CN (1) | CN102388171B (ja) |
AU (1) | AU2010235123A1 (ja) |
BR (1) | BRPI1010288A2 (ja) |
CA (1) | CA2756852A1 (ja) |
DK (1) | DK2417286T3 (ja) |
WO (1) | WO2010117515A1 (ja) |
ZA (1) | ZA201106735B (ja) |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015040134A (ja) * | 2013-08-20 | 2015-03-02 | 日立造船株式会社 | カーボンナノチューブの製造装置 |
JP2015071501A (ja) * | 2013-10-02 | 2015-04-16 | 日立造船株式会社 | カーボンナノチューブ用cvd装置 |
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BRPI1010288A2 (pt) | 2016-03-22 |
JP5629756B2 (ja) | 2014-11-26 |
DK2417286T3 (en) | 2015-08-17 |
KR20120014116A (ko) | 2012-02-16 |
ZA201106735B (en) | 2012-08-28 |
CN102388171B (zh) | 2015-02-11 |
KR101696212B1 (ko) | 2017-01-13 |
CA2756852A1 (en) | 2010-10-14 |
AU2010235123A1 (en) | 2011-10-06 |
EP2417286A1 (en) | 2012-02-15 |
WO2010117515A1 (en) | 2010-10-14 |
EP2417286B1 (en) | 2015-05-20 |
EP2417286A4 (en) | 2012-08-15 |
US20100260933A1 (en) | 2010-10-14 |
CN102388171A (zh) | 2012-03-21 |
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