JP2012520989A5 - - Google Patents

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Publication number
JP2012520989A5
JP2012520989A5 JP2012500064A JP2012500064A JP2012520989A5 JP 2012520989 A5 JP2012520989 A5 JP 2012520989A5 JP 2012500064 A JP2012500064 A JP 2012500064A JP 2012500064 A JP2012500064 A JP 2012500064A JP 2012520989 A5 JP2012520989 A5 JP 2012520989A5
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JP
Japan
Prior art keywords
piezoelectric elements
shows
elements arranged
rotor
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012500064A
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English (en)
Japanese (ja)
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JP2012520989A (ja
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Publication date
Priority claimed from DE102009013849A external-priority patent/DE102009013849A1/de
Application filed filed Critical
Publication of JP2012520989A publication Critical patent/JP2012520989A/ja
Publication of JP2012520989A5 publication Critical patent/JP2012520989A5/ja
Pending legal-status Critical Current

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JP2012500064A 2009-03-18 2010-03-06 電気機械式位置決め装置と方法 Pending JP2012520989A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009013849.8 2009-03-18
DE102009013849A DE102009013849A1 (de) 2009-03-18 2009-03-18 Vorrichtung und Verfahren zur elektromechanischen Positionierung
PCT/DE2010/000246 WO2010105592A1 (de) 2009-03-18 2010-03-06 Vorrichtung und verfahren zur elektromechanischen positionierung

Publications (2)

Publication Number Publication Date
JP2012520989A JP2012520989A (ja) 2012-09-10
JP2012520989A5 true JP2012520989A5 (enExample) 2013-03-28

Family

ID=42271849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012500064A Pending JP2012520989A (ja) 2009-03-18 2010-03-06 電気機械式位置決め装置と方法

Country Status (6)

Country Link
US (1) US9018823B2 (enExample)
EP (1) EP2409164B1 (enExample)
JP (1) JP2012520989A (enExample)
CN (1) CN102356325B (enExample)
DE (1) DE102009013849A1 (enExample)
WO (1) WO2010105592A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012202945A1 (de) 2011-03-14 2012-12-13 Smaract Gmbh Verfahren zur Ansteuerung eines Trägheitsantriebs
WO2012130555A1 (de) 2011-03-30 2012-10-04 Smaract Gmbh Verfahren zur ansteuerung einer mehraktor-antriebsvorrichtung
DE102012004401A1 (de) 2012-03-02 2013-09-05 SmarAct Holding GmbH Verfahren zur Ansteuerung eines Mehraktorantriebs
DE102012004294A1 (de) 2012-03-02 2013-09-05 SmarAct Holding GmbH Verfahren zur Ansteuerung eines Mehraktorantriebs
DE102012221892B4 (de) 2012-11-29 2016-05-19 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen oder rotatorischen Positionierung
EP2916450B1 (de) 2014-03-03 2017-06-28 Picofine GmbH Antriebsvorrichtung und Verfahren für die Erzeugung einer geführten, linearen oder rotatorischen Bewegung
CN104953889B (zh) * 2014-03-28 2017-07-28 中国科学技术大学 一种利用相向摩擦力压制成的叠堆压电马达
DE102014221001A1 (de) 2014-10-16 2016-04-21 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen und/oder rotatorischen Positionierung
CN104836475B (zh) * 2015-05-06 2017-07-28 中国科学院合肥物质科学研究院 相向摩擦力三折叠压电马达及控制法与扫描探针显微镜
CN105092896B (zh) * 2015-08-03 2018-06-29 中国科学院合肥物质科学研究院 单扫描管驱动的多维压电马达及可搜索扫描探针显微镜
DE112017006853B4 (de) 2017-01-18 2022-11-24 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrischer motor mit haft-gleit-prinzip
DE102017127745B4 (de) 2017-11-23 2020-10-15 Picofine GmbH Vorgespannter Trägheitsantrieb
US10876833B2 (en) * 2018-03-26 2020-12-29 International Business Machines Corporation Apparatus and method for measuring micrometer scale features of electronic component over millimeter scale distances to nanometer scale precision
JP6695543B1 (ja) * 2019-04-25 2020-05-20 株式会社島津製作所 走査型プローブ顕微鏡
DE102021103462A1 (de) 2021-02-15 2022-08-18 SmarAct Holding GmbH Vorrichtung und Verfahren zur linearen oder rotatorischen Positionierung

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
US4874979A (en) 1988-10-03 1989-10-17 Burleigh Instruments, Inc. Electromechanical translation apparatus
WO1994006160A1 (en) 1992-09-07 1994-03-17 Stephan Kleindiek Electromechanical positioning device
EP0740522B1 (de) * 1993-08-30 2000-03-08 STM Medizintechnik Starnberg GmbH Piezoelektrisches Linear-Antriebselement
DE4329163A1 (de) 1993-08-30 1995-03-02 Stm Medtech Starnberg Piezoelektrische Antriebseinheit
JP3193562B2 (ja) 1994-03-18 2001-07-30 オリンパス光学工業株式会社 圧電アクチュエータ
JP2766899B2 (ja) 1994-08-24 1998-06-18 株式会社大塚製薬工場 噴霧式滅菌装置及び滅菌方法
DE4440758A1 (de) 1994-11-15 1996-05-23 Klocke Volker Elektromechanische Positioniereinheit
JPH09247968A (ja) 1996-03-06 1997-09-19 Minolta Co Ltd 電気機械変換素子を使用した駆動装置
US6836056B2 (en) * 2000-02-04 2004-12-28 Viking Technologies, L.C. Linear motor having piezo actuators
JP2002233171A (ja) 2001-02-05 2002-08-16 Minolta Co Ltd 駆動装置
JP2004108979A (ja) 2002-09-19 2004-04-08 Jeol Ltd 走査電子顕微鏡を用いた検査方法および装置
FR2845440B1 (fr) * 2002-10-03 2006-03-31 Sagem Dispositif de commande de valves
CN100413202C (zh) * 2004-11-16 2008-08-20 清华大学 一种利用压电效应箝位的超磁致伸缩直线驱动器
EP1826551A4 (en) 2004-11-27 2010-04-14 Japan Adv Inst Science & Tech POSITIONING MECHANISM AND THIS USING MICROSCOPE
CN100547899C (zh) 2006-12-15 2009-10-07 中国科学技术大学 双压电体线性纳米定位压电驱动器、其控制方法及控制器
JP5391527B2 (ja) 2007-04-12 2014-01-15 コニカミノルタ株式会社 駆動装置
CN102376696B (zh) 2010-08-10 2013-10-16 中国科学技术大学 嵌套双压电管推动的三摩擦力压电步进器与步进扫描器

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