JP2012510184A - 鉛フリーはんだ合金のドーピング、及びそれにより形成される構造体 - Google Patents
鉛フリーはんだ合金のドーピング、及びそれにより形成される構造体 Download PDFInfo
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- JP2012510184A JP2012510184A JP2011538737A JP2011538737A JP2012510184A JP 2012510184 A JP2012510184 A JP 2012510184A JP 2011538737 A JP2011538737 A JP 2011538737A JP 2011538737 A JP2011538737 A JP 2011538737A JP 2012510184 A JP2012510184 A JP 2012510184A
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- lead
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- free solder
- nickel
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- 229910000679 solder Inorganic materials 0.000 title claims abstract description 96
- 229910045601 alloy Inorganic materials 0.000 title description 11
- 239000000956 alloy Substances 0.000 title description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 64
- 239000000463 material Substances 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 39
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 32
- 239000010949 copper Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 229910052802 copper Inorganic materials 0.000 claims abstract description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000004377 microelectronic Methods 0.000 claims abstract description 14
- 229910000765 intermetallic Inorganic materials 0.000 claims description 25
- 229910052718 tin Inorganic materials 0.000 claims description 7
- 229910018082 Cu3Sn Inorganic materials 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001465 metallisation Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910007637 SnAg Inorganic materials 0.000 claims description 3
- -1 SnAgCu Inorganic materials 0.000 claims description 3
- 229910008433 SnCU Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 claims 1
- 230000008569 process Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- HBVFXTAPOLSOPB-UHFFFAOYSA-N nickel vanadium Chemical compound [V].[Ni] HBVFXTAPOLSOPB-UHFFFAOYSA-N 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3463—Solder compositions in relation to features of the printed circuit board or the mounting process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3033—Ni as the principal constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
- C22C13/02—Alloys based on tin with antimony or bismuth as the next major constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
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- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/118—Post-treatment of the bump connector
- H01L2224/11848—Thermal treatments, e.g. annealing, controlled cooling
- H01L2224/11849—Reflowing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01327—Intermediate phases, i.e. intermetallics compounds
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19043—Component type being a resistor
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- Electric Connection Of Electric Components To Printed Circuits (AREA)
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Abstract
Description
Claims (30)
- 鉛フリーはんだ材料をニッケルでドーピングする工程であり、前記ニッケルが最大で前記はんだ材料の約0.2重量%を占める、ドーピングする工程;及び
ニッケルドープされた鉛フリーはんだ材料を、基板の銅パッドに塗布する工程;
を有する方法。 - 前記ニッケルのドーピングは、約0.1ppmと約0.2重量%との間の割合を有する、請求項1に記載の方法。
- 銅と錫との間での金属間化合物(IMC)の形成が抑制され、前記IMCはCu3Sn及びCu5Sn6のうちの少なくとも一方を有する、請求項1に記載の方法。
- 前記はんだ材料は、SnAg、SnAgCu及びSnCuのうちの少なくとも1つを有する、請求項1に記載の方法。
- 前記はんだ材料をリフローして、ニッケルドープされた相互接続構造を形成する工程、を更に有する請求項1に記載の方法。
- 前記相互接続構造は、はんだ接合構造の一部を有する、請求項5に記載の方法。
- 前記相互接続構造におけるエレクトロマイグレーション故障が低減される、請求項5に記載の方法。
- 前記基板は、マイクロエレクトロニクスデバイスの一部を有し、前記マイクロエレクトロニクスデバイスは更に、パッケージ基板に取り付けられる、請求項1に記載の方法。
- 鉛フリーはんだ材料をニッケルでドーピングする工程;
ドープされた鉛フリーはんだ材料を、基板の接合パッド部に塗布する工程;及び
前記ドープされた鉛フリーはんだ材料をリフローして、はんだ相互接続構造を形成する工程;
を有する方法。 - 前記ニッケルのドーピングは、約1ppmと約0.2重量%との間の割合を有する、請求項9に記載の方法。
- 前記接合パッドは、ニッケル、バナジウム及びチタンのうちの少なくとも1つを有するボール・リミティング・メタライゼーション(BLM)を有する、請求項9に記載の方法。
- 前記はんだ相互接続構造は接合構造の一部を有する、請求項9に記載の方法。
- 前記接合構造内での金属間化合物の形成が抑制される、請求項12に記載の方法。
- 前記金属間化合物はCu3Sn及びCu5Sn6のうちの少なくとも一方を有する、請求項13に記載の方法。
- 基板上に配設された接合パッド;及び
前記接合パッド上に配設された鉛フリーはんだ相互接続であり、最大で約0.2重量%のニッケルを有する鉛フリーはんだ相互接続;
を有する構造体。 - 前記鉛フリーはんだ相互接続は、約1ppmと約0.2重量%との間の割合でニッケルを有する、請求項15に記載の構造体。
- 前記鉛フリーはんだ相互接続は、SnAg、SnAgCu及びSnCuのうちの少なくとも1つを有する、請求項15に記載の構造体。
- 前記接合パッドは銅を有し、当該構造体は更にボール・リミティング・メタライゼーション(BLM)を有する、請求項15に記載の構造体。
- 前記鉛フリーはんだ相互接続は、丸っこいはんだ接合構造の一部を有する、請求項15に記載の構造体。
- 前記鉛フリーはんだ相互接続は、ファーストレベルインターコネクト(FLI)の一部を有する、請求項15に記載の構造体。
- 前記基板は、マイクロエレクトロニクスデバイスの一部を有し、前記鉛フリーはんだ相互接続は、はんだ接合の一部を有する、請求項15に記載の構造体。
- はんだ接合内に形成された銅錫金属間化合物が小さい粒径を有する、請求項15に記載の構造体。
- デバイス基板上に配設された接合パッド;
前記接合パッド上に配設された少なくとも1つの鉛フリーはんだ相互接続であり、約1ppmと約0.2重量%との間でニッケルを有する少なくとも1つの鉛フリーはんだ相互接続;及び
前記少なくとも1つの鉛フリーはんだ相互接続に取り付けられたパッケージ基板;
を有する構造体。 - 前記パッケージ基板はBGAパッケージの一部を有する、請求項23に記載の構造体。
- 前記鉛フリーはんだ接続構造は、はんだ接合構造の一部を有する、請求項23に記載の構造体。
- 前記はんだ接合構造の銅−はんだ界面に位置する金属間化合物(IMC)が、約5μm未満の厚さを有する、請求項25に記載の構造体。
- 前記はんだ接合構造は、銅錫界面において実質的にボイドを有しない、請求項25に記載の構造体。
- 前記IMCはCu3Sn及びCu5Sn6のうちの少なくとも一方を有する、請求項26に記載の構造体。
- バスが当該構造体に通信可能に結合されたシステムを更に有し、前記バスにDRAMが通信可能に結合されている、請求項23に記載の構造体。
- 前記パッケージ基板に取り付けられた前記少なくとも1つの鉛フリーはんだ相互接続は、ファーストレベルインターコネクトの一部を有する、請求項28に記載の構造体。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/317,598 | 2008-12-23 | ||
US12/317,598 US8395051B2 (en) | 2008-12-23 | 2008-12-23 | Doping of lead-free solder alloys and structures formed thereby |
PCT/US2009/067113 WO2010074956A2 (en) | 2008-12-23 | 2009-12-08 | Doping of lead-free solder alloys and structures formed thereby |
Publications (1)
Publication Number | Publication Date |
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JP2012510184A true JP2012510184A (ja) | 2012-04-26 |
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ID=42264408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011538737A Pending JP2012510184A (ja) | 2008-12-23 | 2009-12-08 | 鉛フリーはんだ合金のドーピング、及びそれにより形成される構造体 |
Country Status (11)
Country | Link |
---|---|
US (1) | US8395051B2 (ja) |
JP (1) | JP2012510184A (ja) |
KR (1) | KR20110063813A (ja) |
CN (1) | CN102171803B (ja) |
BR (1) | BRPI0923647A2 (ja) |
DE (1) | DE112009004935T5 (ja) |
GB (1) | GB2478892B (ja) |
RU (1) | RU2492547C2 (ja) |
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US8227334B2 (en) * | 2010-07-26 | 2012-07-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Doping minor elements into metal bumps |
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US8698308B2 (en) * | 2012-01-31 | 2014-04-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bump structural designs to minimize package defects |
US20130249066A1 (en) | 2012-03-23 | 2013-09-26 | International Business Machines Corporation | Electromigration-resistant lead-free solder interconnect structures |
US9394619B2 (en) * | 2013-03-12 | 2016-07-19 | Intel Corporation | Methods of adding dopants to conductive interconnect structures in substrate technologies and structures formed thereby |
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US9396991B2 (en) | 2014-08-25 | 2016-07-19 | Globalfoundries Inc. | Multilayered contact structure having nickel, copper, and nickel-iron layers |
TWI688447B (zh) * | 2015-04-03 | 2020-03-21 | 美商英特爾公司 | 半導體裝置及形成焊料互連體之方法 |
US20190067176A1 (en) * | 2016-03-22 | 2019-02-28 | Intel Corporation | Void reduction in solder joints using off-eutectic solder |
WO2023070551A1 (zh) * | 2021-10-29 | 2023-05-04 | 京东方科技集团股份有限公司 | 发光器件、发光模组及其制备方法 |
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GB201112621D0 (en) | 2011-09-07 |
TW201039395A (en) | 2010-11-01 |
CN102171803A (zh) | 2011-08-31 |
DE112009004935T5 (de) | 2012-12-27 |
SG172368A1 (en) | 2011-07-28 |
RU2011130867A (ru) | 2013-01-27 |
US20100155115A1 (en) | 2010-06-24 |
GB2478892B (en) | 2013-07-31 |
RU2492547C2 (ru) | 2013-09-10 |
WO2010074956A3 (en) | 2010-08-26 |
BRPI0923647A2 (pt) | 2016-01-19 |
GB2478892A (en) | 2011-09-21 |
WO2010074956A2 (en) | 2010-07-01 |
KR20110063813A (ko) | 2011-06-14 |
CN102171803B (zh) | 2015-03-18 |
TWI515809B (zh) | 2016-01-01 |
US8395051B2 (en) | 2013-03-12 |
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