JP2012503311A5 - - Google Patents

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Publication number
JP2012503311A5
JP2012503311A5 JP2011526919A JP2011526919A JP2012503311A5 JP 2012503311 A5 JP2012503311 A5 JP 2012503311A5 JP 2011526919 A JP2011526919 A JP 2011526919A JP 2011526919 A JP2011526919 A JP 2011526919A JP 2012503311 A5 JP2012503311 A5 JP 2012503311A5
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JP
Japan
Prior art keywords
energy
substrate
annealing
preheating
substrate support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011526919A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012503311A (ja
JP5611212B2 (ja
Filing date
Publication date
Priority claimed from US12/212,214 external-priority patent/US8314369B2/en
Priority claimed from US12/212,157 external-priority patent/US20100068898A1/en
Application filed filed Critical
Priority claimed from PCT/US2009/055838 external-priority patent/WO2010033389A1/en
Publication of JP2012503311A publication Critical patent/JP2012503311A/ja
Publication of JP2012503311A5 publication Critical patent/JP2012503311A5/ja
Application granted granted Critical
Publication of JP5611212B2 publication Critical patent/JP5611212B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011526919A 2008-09-17 2009-09-03 基板のアニールにおける熱量の管理 Expired - Fee Related JP5611212B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US12/212,214 US8314369B2 (en) 2008-09-17 2008-09-17 Managing thermal budget in annealing of substrates
US12/212,157 2008-09-17
US12/212,214 2008-09-17
US12/212,157 US20100068898A1 (en) 2008-09-17 2008-09-17 Managing thermal budget in annealing of substrates
PCT/US2009/055838 WO2010033389A1 (en) 2008-09-17 2009-09-03 Managing thermal budget in annealing of substrates

Publications (3)

Publication Number Publication Date
JP2012503311A JP2012503311A (ja) 2012-02-02
JP2012503311A5 true JP2012503311A5 (enrdf_load_stackoverflow) 2012-10-18
JP5611212B2 JP5611212B2 (ja) 2014-10-22

Family

ID=42039812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011526919A Expired - Fee Related JP5611212B2 (ja) 2008-09-17 2009-09-03 基板のアニールにおける熱量の管理

Country Status (7)

Country Link
EP (1) EP2342739A4 (enrdf_load_stackoverflow)
JP (1) JP5611212B2 (enrdf_load_stackoverflow)
KR (2) KR101800404B1 (enrdf_load_stackoverflow)
CN (1) CN102160157B (enrdf_load_stackoverflow)
SG (2) SG193882A1 (enrdf_load_stackoverflow)
TW (3) TWI549191B (enrdf_load_stackoverflow)
WO (1) WO2010033389A1 (enrdf_load_stackoverflow)

Families Citing this family (13)

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Publication number Priority date Publication date Assignee Title
US8546805B2 (en) * 2012-01-27 2013-10-01 Ultratech, Inc. Two-beam laser annealing with improved temperature performance
US9376731B2 (en) * 2012-05-08 2016-06-28 Applied Materials, Inc. Magneto-thermal processing apparatus and methods
US9239192B2 (en) * 2013-02-20 2016-01-19 Taiwan Semiconductor Manufacturing Co., Ltd. Substrate rapid thermal heating system and methods
CN104752174A (zh) * 2013-12-30 2015-07-01 上海微电子装备有限公司 一种激光退火装置及方法
TW201610215A (zh) * 2014-03-27 2016-03-16 應用材料股份有限公司 用於低熱預算處理的循環尖峰退火化學曝露
KR20170078795A (ko) * 2014-10-31 2017-07-07 어플라이드 머티어리얼스, 인코포레이티드 전기화학 디바이스 층들의 증착과 레이저 프로세싱의 통합
CN113981414B (zh) * 2015-03-20 2024-11-08 应用材料公司 用于3d共形处理的原子层处理腔室
JP6985249B2 (ja) * 2015-07-29 2021-12-22 アプライド マテリアルズ インコーポレイテッドApplied Materials, Incorporated 回転基板レーザアニール
JP6887234B2 (ja) * 2016-09-21 2021-06-16 株式会社日本製鋼所 レーザ照射装置、レーザ照射方法、及び半導体装置の製造方法
KR102099890B1 (ko) * 2017-05-18 2020-04-14 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
KR102180311B1 (ko) 2018-07-27 2020-11-18 주식회사 코윈디에스티 레이저 어닐링 장치
KR102061424B1 (ko) * 2018-07-27 2019-12-31 주식회사 코윈디에스티 로이 유리 어닐링 장치
CN112038223A (zh) * 2020-08-27 2020-12-04 上海华力集成电路制造有限公司 一种改善双激光退火过程中晶圆表面热分布的方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5696835A (en) * 1979-12-29 1981-08-05 Fujitsu Ltd Manufacture of semiconductor device
JPS58106836A (ja) * 1981-12-18 1983-06-25 Hitachi Ltd レ−ザ−アニ−ル装置
JPS58176929A (ja) * 1982-04-09 1983-10-17 Fujitsu Ltd 半導体装置の製造方法
JPH03266424A (ja) * 1990-03-16 1991-11-27 Sony Corp 半導体基板のアニール方法
US5643801A (en) * 1992-11-06 1997-07-01 Semiconductor Energy Laboratory Co., Ltd. Laser processing method and alignment
US6423585B1 (en) * 1997-03-11 2002-07-23 Semiconductor Energy Laboratory Co., Ltd. Heating treatment device, heating treatment method and fabrication method of semiconductor device
WO1999041777A1 (fr) 1998-02-13 1999-08-19 Seiko Epson Corporation Procede de production d'un dispositif semi-conducteur et appareil de traitement a chaud
US6771895B2 (en) * 1999-01-06 2004-08-03 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers
TW457553B (en) * 1999-01-08 2001-10-01 Sony Corp Process for producing thin film semiconductor device and laser irradiation apparatus
WO2001064591A1 (en) * 2000-03-01 2001-09-07 Heraeus Amersil, Inc. Method, apparatus, and article of manufacture for determining an amount of energy needed to bring a quartz workpiece to a fusion weldable condition
JP2003045820A (ja) * 2001-07-30 2003-02-14 Semiconductor Energy Lab Co Ltd レーザ照射装置およびレーザ照射方法、並びに半導体装置の作製方法
US6987240B2 (en) * 2002-04-18 2006-01-17 Applied Materials, Inc. Thermal flux processing by scanning
JP2004128421A (ja) * 2002-10-07 2004-04-22 Semiconductor Energy Lab Co Ltd レーザ照射方法およびレーザ照射装置、並びに半導体装置の作製方法
US7098155B2 (en) * 2003-09-29 2006-08-29 Ultratech, Inc. Laser thermal annealing of lightly doped silicon substrates
TWI297521B (en) * 2004-01-22 2008-06-01 Ultratech Inc Laser thermal annealing of lightly doped silicon substrates
US7482254B2 (en) * 2005-09-26 2009-01-27 Ultratech, Inc. Apparatus and methods for thermally processing undoped and lightly doped substrates without pre-heating
US20080045040A1 (en) 2006-08-17 2008-02-21 Toshiba America Electronic Components, Inc. Laser Spike Anneal With Plural Light Sources
JP2008080371A (ja) * 2006-09-27 2008-04-10 Sumitomo Heavy Ind Ltd レーザ加工方法、及び、レーザ加工装置

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