JP2012502792A5 - - Google Patents

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Publication number
JP2012502792A5
JP2012502792A5 JP2011527812A JP2011527812A JP2012502792A5 JP 2012502792 A5 JP2012502792 A5 JP 2012502792A5 JP 2011527812 A JP2011527812 A JP 2011527812A JP 2011527812 A JP2011527812 A JP 2011527812A JP 2012502792 A5 JP2012502792 A5 JP 2012502792A5
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JP
Japan
Prior art keywords
liquid
chamber
gas
edge
guide surface
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Application number
JP2011527812A
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English (en)
Japanese (ja)
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JP5314150B2 (ja
JP2012502792A (ja
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Priority claimed from US12/284,035 external-priority patent/US7854792B2/en
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Publication of JP2012502792A publication Critical patent/JP2012502792A/ja
Publication of JP2012502792A5 publication Critical patent/JP2012502792A5/ja
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Publication of JP5314150B2 publication Critical patent/JP5314150B2/ja
Active legal-status Critical Current
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JP2011527812A 2008-09-17 2009-09-15 反応性ガス制御 Active JP5314150B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/284,035 2008-09-17
US12/284,035 US7854792B2 (en) 2008-09-17 2008-09-17 Reactive gas control
PCT/US2009/005159 WO2010033184A1 (en) 2008-09-17 2009-09-15 Reactive gas control

Publications (3)

Publication Number Publication Date
JP2012502792A JP2012502792A (ja) 2012-02-02
JP2012502792A5 true JP2012502792A5 (https=) 2012-11-01
JP5314150B2 JP5314150B2 (ja) 2013-10-16

Family

ID=41460196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011527812A Active JP5314150B2 (ja) 2008-09-17 2009-09-15 反応性ガス制御

Country Status (6)

Country Link
US (2) US7854792B2 (https=)
EP (1) EP2340101B1 (https=)
JP (1) JP5314150B2 (https=)
KR (1) KR101659432B1 (https=)
TW (1) TWI375767B (https=)
WO (1) WO2010033184A1 (https=)

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