JP2012226316A5 - - Google Patents

Info

Publication number

JP2012226316A5

JP2012226316A5 JP2012061928A JP2012061928A JP2012226316A5 JP 2012226316 A5 JP2012226316 A5 JP 2012226316A5 JP 2012061928 A JP2012061928 A JP 2012061928A JP 2012061928 A JP2012061928 A JP 2012061928A JP 2012226316 A5 JP2012226316 A5 JP 2012226316A5

Authority

JP

Japan

Prior art keywords

mask blank

surface treatment

thin film

treatment method

mask

Prior art date

2012-03-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
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• 238000004381 surface treatment Methods 0.000 claims 22
• 238000000034 method Methods 0.000 claims 19
• 239000010409 thin film Substances 0.000 claims 17
• 239000007788 liquid Substances 0.000 claims 9
• 239000000463 material Substances 0.000 claims 8
• 238000001312 dry etching Methods 0.000 claims 7
• 238000005530 etching Methods 0.000 claims 6
• 239000007789 gas Substances 0.000 claims 5
• 239000003112 inhibitor Substances 0.000 claims 5
• 238000004519 manufacturing process Methods 0.000 claims 5
• 238000004140 cleaning Methods 0.000 claims 4
• 239000010408 film Substances 0.000 claims 4
• 150000002500 ions Chemical class 0.000 claims 4
• 239000000758 substrate Substances 0.000 claims 4
• 229910052715 tantalum Inorganic materials 0.000 claims 3
• GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
• OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 2
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
• FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
• 229910052782 aluminium Inorganic materials 0.000 claims 2
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
• 239000011575 calcium Substances 0.000 claims 2
• 229910052791 calcium Inorganic materials 0.000 claims 2
• 150000001875 compounds Chemical class 0.000 claims 2
• 239000011777 magnesium Substances 0.000 claims 2
• 229910052749 magnesium Inorganic materials 0.000 claims 2
• 239000001301 oxygen Substances 0.000 claims 2
• 229910052760 oxygen Inorganic materials 0.000 claims 2
• BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 2
• 229910052710 silicon Inorganic materials 0.000 claims 2
• 239000010703 silicon Substances 0.000 claims 2
• 229910001936 tantalum oxide Inorganic materials 0.000 claims 2
• ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 1
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
• 239000000460 chlorine Substances 0.000 claims 1
• 229910052801 chlorine Inorganic materials 0.000 claims 1
• 229910052802 copper Inorganic materials 0.000 claims 1
• 239000010949 copper Substances 0.000 claims 1
• 239000008367 deionised water Substances 0.000 claims 1
• 229910021641 deionized water Inorganic materials 0.000 claims 1
• 229910052731 fluorine Inorganic materials 0.000 claims 1
• 239000011737 fluorine Substances 0.000 claims 1
• 229910010272 inorganic material Inorganic materials 0.000 claims 1
• 239000011147 inorganic material Substances 0.000 claims 1
• 229910052742 iron Inorganic materials 0.000 claims 1
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
• 229910052757 nitrogen Inorganic materials 0.000 claims 1
• 239000011368 organic material Substances 0.000 claims 1
• 230000007261 regionalization Effects 0.000 claims 1
• 239000004094 surface-active agent Substances 0.000 claims 1
• MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1