JP2012220338A5 - - Google Patents

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Publication number
JP2012220338A5
JP2012220338A5 JP2011086303A JP2011086303A JP2012220338A5 JP 2012220338 A5 JP2012220338 A5 JP 2012220338A5 JP 2011086303 A JP2011086303 A JP 2011086303A JP 2011086303 A JP2011086303 A JP 2011086303A JP 2012220338 A5 JP2012220338 A5 JP 2012220338A5
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Japan
Prior art keywords
measurement
unit
shape
measured
information
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JP2011086303A
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English (en)
Japanese (ja)
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JP2012220338A (ja
JP5948729B2 (ja
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Publication of JP2012220338A5 publication Critical patent/JP2012220338A5/ja
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JP2011086303A 2011-04-08 2011-04-08 形状測定装置 Active JP5948729B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011086303A JP5948729B2 (ja) 2011-04-08 2011-04-08 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011086303A JP5948729B2 (ja) 2011-04-08 2011-04-08 形状測定装置

Publications (3)

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JP2012220338A JP2012220338A (ja) 2012-11-12
JP2012220338A5 true JP2012220338A5 (cg-RX-API-DMAC7.html) 2014-05-29
JP5948729B2 JP5948729B2 (ja) 2016-07-06

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JP2011086303A Active JP5948729B2 (ja) 2011-04-08 2011-04-08 形状測定装置

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JP (1) JP5948729B2 (cg-RX-API-DMAC7.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015152585A (ja) * 2014-02-19 2015-08-24 小林　茂樹 金属表面の形状測定装置及び形状検査装置
JP6507067B2 (ja) * 2015-08-27 2019-04-24 株式会社日立製作所 計測方法、計測装置及びこれを用いた製造方法
EP3346232B1 (en) * 2015-08-31 2024-02-28 Nikon Corporation Surface-shape measuring device, surface-shape measuring method and surface-shape measuring program
JP6489220B2 (ja) * 2015-08-31 2019-03-27 株式会社ニコン 表面形状測定装置および表面形状測定プログラム
JP6543170B2 (ja) * 2015-11-09 2019-07-10 株式会社東芝 計測装置及び計測方法
JP2018165655A (ja) * 2017-03-28 2018-10-25 凸版印刷株式会社 対象物計測制御装置及び対象物計測制御方法
WO2022189327A1 (de) * 2021-03-12 2022-09-15 Saint-Gobain Glass France Iteratives verfahren zur ermittlung der oberflächenform eines platten- oder schichtartigen gegenstands mit hoher messgenauigkeit
JP7600859B2 (ja) 2021-05-19 2024-12-17 オムロン株式会社 情報処理システム、情報処理方法、プログラム
JP7412652B1 (ja) * 2023-04-14 2024-01-12 三菱電機株式会社 計測経路生成装置、計測経路生成方法および計測システム
JP7531037B1 (ja) 2023-08-30 2024-08-08 株式会社キーエンス 光学式変位計

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63253206A (ja) * 1987-04-10 1988-10-20 Mitsubishi Electric Corp 形状計測装置
JPH04176543A (ja) * 1990-11-08 1992-06-24 Fanuc Ltd デジタイジング制御装置
JPH074932A (ja) * 1993-06-17 1995-01-10 Mazda Motor Corp 物体の形状測定方法およびその装置

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