JP2012220338A5

JP2012220338A5 -

Info

Publication number: JP2012220338A5
Application number: JP2011086303A
Authority: JP
Filing date: 2011-04-08
Publication date: 2014-05-29
Anticipated expiration: 2031-04-08

Description

上記問題を解決するために、本発明は、被測定物にライン状の測定光を照射する照射部及び前記測定光の照射方向とは異なる方向から前記被測定物に照射された前記測定光を検出する検出部を有するセンサー部と、前記検出部からの検出結果に基づいて前記被測定物の形状情報を算出する形状測定部と、前記センサー部と前記被測定物とを相対移動させる駆動部と、先に取得した前記被測定物の形状情報に基づいて、測定時の前記センサー部と前記被測定物との少なくとも一方の姿勢を制御する測定制御部とを備えることを特徴とする形状測定装置である。 In order to solve the above problems, the present invention provides an irradiation unit that irradiates a measurement object with a line-shaped measurement light, and the measurement light irradiated on the measurement object from a direction different from the irradiation direction of the measurement light. A sensor unit having a detection unit to detect, a shape measurement unit that calculates shape information of the object to be measured based on a detection result from the detection unit, and a drive unit that relatively moves the sensor unit and the object to be measured And a measurement control unit that controls at least one posture of the sensor unit and the measurement object at the time of measurement based on the shape information of the measurement object acquired in advance. Device.

Claims

A sensor unit having an irradiation unit for irradiating the measurement object with a linear measurement light and a detection unit for detecting the measurement light irradiated on the measurement object from a direction different from the irradiation direction of the measurement light;
A shape measuring unit that calculates shape information of the object to be measured based on a detection result from the detecting unit;
A drive unit for relatively moving the sensor unit and the object to be measured;
A shape measuring apparatus comprising: a measurement control unit that controls at least one posture of the sensor unit and the device under measurement based on the shape information of the device under test previously acquired .

  The measurement control unit
  Based on the shape information of the measurement object calculated by the shape measurement unit based on detection results detected in the past by the sensor unit, the normal direction of the measurement object at the current measurement position is calculated, and the normal line Determine at least one posture of the sensor unit and the object to be measured according to a direction.
  The shape measuring apparatus according to claim 1.

The measurement control unit
Claim 2, wherein the repeating the calculation of the shape information of the object to be measured by the shape measuring unit, and a control of the posture after the relative movement based on the shape information of the calculated device under test The shape measuring device described in 1.

  The measurement control unit
  The measurement object calculated by the shape measurement unit based on the shape information of the measurement object calculated by the shape measurement unit based on the detection results detected in the past by the sensor unit, and the detection result acquired from the sensor unit at the present time. Based on the shape information of the object, the attitude of at least one of the sensor unit and the object to be measured when measuring at the next measurement position is determined.
  The shape measuring apparatus according to claim 1.

The measurement control unit
Based on the shape information of the object to be measured, wherein the shape measurement unit is calculated, the as the detection unit falls within a range capable of detecting the measurement light, controls the distance between the measured object and the sensor unit shape measuring apparatus according to any one of claims 1 to 4, characterized in that.

The measurement control unit
Based on the shape information of the measurement object calculated by the shape measurement unit , the normal direction of the measurement object in the measurement light is calculated, and the measurement light is irradiated based on the calculated normal direction. The shape measuring device according to any one of claims 1 to 5 , wherein the orientation of the sensor unit is controlled.

A shape storage unit that stores shape information of the measurement object calculated by the shape measurement unit in correspondence with a relative position between the sensor unit and the measurement object controlled by the measurement control unit;
The measurement control unit
The read from the shape memory unit, based on the shape information of the object to be measured corresponding to the relative position when it is detected the to the shape information and the past from the current object to be measured for the current of said relative position, the current The shape measuring apparatus according to claim 6 , wherein the normal line direction at the relative position of is calculated.

A moving unit for moving the sensor unit in each of the coordinate axis directions of the three-dimensional coordinate system;
A rotation mechanism that rotatably supports the sensor unit with respect to the moving unit,
The measurement control unit
7. The control according to claim 6, wherein the control unit is configured to control the moving unit and the rotating mechanism such that the calculated direction of the normal direction coincides with an irradiation direction of the measurement light. Item 8. The shape measuring apparatus according to Item 7 .

The shape measuring unit is
Calculating shape information of the object to be measured as position information of a point cloud detected based on the measurement light;
The measurement control unit
The relative position between the sensor unit and the object to be measured is changed, and the shape measuring unit repeatedly calculates the position information of the point group, and the position information of the newly detected point group is already detected. The shape according to any one of claims 6 to 8 , wherein the measurement of the shape of the object to be measured is terminated when it is within a predetermined range including the value of the position information. measuring device.

The measurement control unit
The shape measuring apparatus according to claim 9 , wherein the measurement of the shape of the object to be measured is terminated when the direction of the normal direction is outside a predetermined range.

The measurement control unit
The number of the relative position the point cloud which is detected by changing the is equal to or less than a predetermined value, according to claim 9 or claim 10, characterized in that to terminate the measurement of the shape of the object to be measured The shape measuring device described in 1.

A path storage unit that stores position information of the sensor unit corresponding to the changed relative position as a path of the relative position;
The measurement control unit
Wherein when causing the shape measuring unit to repeat the position information of the point group calculated, stores the position information of the sensor unit corresponding to the relative position is changed in the route storage unit,
When calculating the shape information of the object to be measured again, the position information of the sensor unit is changed based on the path of the relative position read from the path storage unit, and the position of the point cloud is set to the shape measurement unit. shape measuring apparatus according to any one of claims 11 claim 9, characterized in that makes repeatedly calculated information.