JP2012195652A5 - - Google Patents

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Publication number
JP2012195652A5
JP2012195652A5 JP2011056388A JP2011056388A JP2012195652A5 JP 2012195652 A5 JP2012195652 A5 JP 2012195652A5 JP 2011056388 A JP2011056388 A JP 2011056388A JP 2011056388 A JP2011056388 A JP 2011056388A JP 2012195652 A5 JP2012195652 A5 JP 2012195652A5
Authority
JP
Japan
Prior art keywords
axis
vibrating piece
substrate
piezoelectric
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011056388A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012195652A (ja
JP5787059B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011056388A priority Critical patent/JP5787059B2/ja
Priority claimed from JP2011056388A external-priority patent/JP5787059B2/ja
Publication of JP2012195652A publication Critical patent/JP2012195652A/ja
Publication of JP2012195652A5 publication Critical patent/JP2012195652A5/ja
Application granted granted Critical
Publication of JP5787059B2 publication Critical patent/JP5787059B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011056388A 2011-03-15 2011-03-15 圧電振動片、圧電振動子、電子デバイス Active JP5787059B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011056388A JP5787059B2 (ja) 2011-03-15 2011-03-15 圧電振動片、圧電振動子、電子デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011056388A JP5787059B2 (ja) 2011-03-15 2011-03-15 圧電振動片、圧電振動子、電子デバイス

Publications (3)

Publication Number Publication Date
JP2012195652A JP2012195652A (ja) 2012-10-11
JP2012195652A5 true JP2012195652A5 (enExample) 2014-05-01
JP5787059B2 JP5787059B2 (ja) 2015-09-30

Family

ID=47087191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011056388A Active JP5787059B2 (ja) 2011-03-15 2011-03-15 圧電振動片、圧電振動子、電子デバイス

Country Status (1)

Country Link
JP (1) JP5787059B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6363328B2 (ja) * 2013-03-27 2018-07-25 京セラ株式会社 水晶デバイス
JP6729643B2 (ja) * 2018-07-31 2020-07-22 セイコーエプソン株式会社 発振器、電子機器および移動体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002033640A (ja) * 2000-07-17 2002-01-31 Toyo Commun Equip Co Ltd 圧電デバイス
JP3888107B2 (ja) * 2001-08-31 2007-02-28 株式会社大真空 圧電振動デバイス用圧電振動板のエッチング方法
JP4039284B2 (ja) * 2003-03-17 2008-01-30 セイコーエプソン株式会社 質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置
JP2008109538A (ja) * 2006-10-27 2008-05-08 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2008252859A (ja) * 2007-03-06 2008-10-16 Epson Toyocom Corp 圧電デバイスおよび圧電デバイスの製造方法
JP2008219827A (ja) * 2007-03-08 2008-09-18 Epson Toyocom Corp 圧電振動片、および圧電デバイス
JP2009158999A (ja) * 2007-12-25 2009-07-16 Epson Toyocom Corp 圧電デバイス
JP2010219993A (ja) * 2009-03-18 2010-09-30 Seiko Epson Corp 圧電デバイス

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