JP2012194020A5 - - Google Patents

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Publication number
JP2012194020A5
JP2012194020A5 JP2011057556A JP2011057556A JP2012194020A5 JP 2012194020 A5 JP2012194020 A5 JP 2012194020A5 JP 2011057556 A JP2011057556 A JP 2011057556A JP 2011057556 A JP2011057556 A JP 2011057556A JP 2012194020 A5 JP2012194020 A5 JP 2012194020A5
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JP
Japan
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fluid
inspected
thin layer
layer shape
buried path
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JP2011057556A
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English (en)
Japanese (ja)
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JP2012194020A (ja
JP5700424B2 (ja
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Priority claimed from JP2011057556A external-priority patent/JP5700424B2/ja
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Publication of JP2012194020A5 publication Critical patent/JP2012194020A5/ja
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JP2011057556A 2011-03-16 2011-03-16 光学デバイス、光学分析チップ、およびその製造方法 Expired - Fee Related JP5700424B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011057556A JP5700424B2 (ja) 2011-03-16 2011-03-16 光学デバイス、光学分析チップ、およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011057556A JP5700424B2 (ja) 2011-03-16 2011-03-16 光学デバイス、光学分析チップ、およびその製造方法

Publications (3)

Publication Number Publication Date
JP2012194020A JP2012194020A (ja) 2012-10-11
JP2012194020A5 true JP2012194020A5 (enExample) 2014-04-17
JP5700424B2 JP5700424B2 (ja) 2015-04-15

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JP2011057556A Expired - Fee Related JP5700424B2 (ja) 2011-03-16 2011-03-16 光学デバイス、光学分析チップ、およびその製造方法

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JP (1) JP5700424B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6365770B2 (ja) 2015-04-24 2018-08-01 株式会社島津製作所 光学分析装置及びその製造方法
US20170351156A1 (en) * 2015-05-29 2017-12-07 Hitachi, Ltd. Optical Device and Optical Device Manufacturing Method
JP6401667B2 (ja) * 2015-06-25 2018-10-10 日本電信電話株式会社 光センサ素子
WO2019163925A1 (ja) * 2018-02-26 2019-08-29 富士フイルム株式会社 流路デバイス
KR102518025B1 (ko) * 2018-09-17 2023-04-06 3디 글래스 솔루션즈 인코포레이티드 접지면을 갖는 고효율 컴팩트형 슬롯 안테나
WO2025216196A1 (ja) * 2024-04-11 2025-10-16 古河電気工業株式会社 光導波路装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2762189B2 (ja) * 1991-12-27 1998-06-04 株式会社日本製鋼所 光学素子
JP2005030905A (ja) * 2003-07-11 2005-02-03 Mitsubishi Chemicals Corp 分析用チップ
JP2006308458A (ja) * 2005-04-28 2006-11-09 Matsushita Electric Ind Co Ltd バイオセンサ
JPWO2007094254A1 (ja) * 2006-02-15 2009-07-02 アイダエンジニアリング株式会社 マイクロ流路チップ及びその製造方法
FR2924274B1 (fr) * 2007-11-22 2012-11-30 Saint Gobain Substrat porteur d'une electrode, dispositif electroluminescent organique l'incorporant, et sa fabrication
JP2010145260A (ja) * 2008-12-19 2010-07-01 Yamaha Corp Ｍｅｍｓセンサの製造方法およびｍｅｍｓ

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