JP2014127921A5 - - Google Patents

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Publication number
JP2014127921A5
JP2014127921A5 JP2012284482A JP2012284482A JP2014127921A5 JP 2014127921 A5 JP2014127921 A5 JP 2014127921A5 JP 2012284482 A JP2012284482 A JP 2012284482A JP 2012284482 A JP2012284482 A JP 2012284482A JP 2014127921 A5 JP2014127921 A5 JP 2014127921A5
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JP
Japan
Prior art keywords
ultrasonic transducer
vibration film
light
openings
substrate
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Application number
JP2012284482A
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English (en)
Japanese (ja)
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JP2014127921A (ja
JP6182859B2 (ja
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Priority to JP2012284482A priority Critical patent/JP6182859B2/ja
Priority claimed from JP2012284482A external-priority patent/JP6182859B2/ja
Publication of JP2014127921A publication Critical patent/JP2014127921A/ja
Publication of JP2014127921A5 publication Critical patent/JP2014127921A5/ja
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Publication of JP6182859B2 publication Critical patent/JP6182859B2/ja
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JP2012284482A 2012-12-27 2012-12-27 超音波トランスデューサーデバイス、超音波測定装置、プローブ及び超音波診断装置、電子機器 Active JP6182859B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012284482A JP6182859B2 (ja) 2012-12-27 2012-12-27 超音波トランスデューサーデバイス、超音波測定装置、プローブ及び超音波診断装置、電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012284482A JP6182859B2 (ja) 2012-12-27 2012-12-27 超音波トランスデューサーデバイス、超音波測定装置、プローブ及び超音波診断装置、電子機器

Publications (3)

Publication Number Publication Date
JP2014127921A JP2014127921A (ja) 2014-07-07
JP2014127921A5 true JP2014127921A5 (enExample) 2016-01-28
JP6182859B2 JP6182859B2 (ja) 2017-08-23

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JP2012284482A Active JP6182859B2 (ja) 2012-12-27 2012-12-27 超音波トランスデューサーデバイス、超音波測定装置、プローブ及び超音波診断装置、電子機器

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JP (1) JP6182859B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6658291B2 (ja) * 2016-05-16 2020-03-04 セイコーエプソン株式会社 超音波トランスデューサーデバイス、超音波プローブおよび超音波測定装置
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
JP6849483B2 (ja) 2017-03-03 2021-03-24 キヤノンメディカルシステムズ株式会社 超音波変換器及び超音波プローブ
JP7326292B2 (ja) * 2018-01-26 2023-08-15 エーエスエムエル ネザーランズ ビー．ブイ． 基板上のターゲット構造の位置を決定するための装置及び方法
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
EP3830877A4 (en) 2018-08-01 2021-10-20 Exo Imaging Inc. SYSTEMS AND PROCEDURES FOR THE INTEGRATION OF ULTRASONIC CONVERTERS WITH HYBRID CONTACTS
DE102018006127B4 (de) * 2018-08-03 2021-07-08 Pepperl+Fuchs Ag 1D-Ultraschallwandler-Einheit für die Materialerfassung
TW202519098A (zh) 2019-09-12 2025-05-01 美商艾克索影像股份有限公司 經由邊緣溝槽、虛擬樞軸及自由邊界而增強的微加工超音波傳感器(mut)耦合效率及頻寬
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306188A (ja) * 1994-05-11 1995-11-21 Mitsubishi Heavy Ind Ltd 受信用トランスデューサ
JP2002017723A (ja) * 2000-05-02 2002-01-22 Fuji Photo Film Co Ltd 超音波用探触子及びそれを用いた超音波診断装置
JP4953177B2 (ja) * 2008-03-04 2012-06-13 独立行政法人日本原子力研究開発機構 高解像度対応超音波センサ
JP5751026B2 (ja) * 2011-05-31 2015-07-22 セイコーエプソン株式会社 超音波トランスデューサー、生体センサー、及び超音波トランスデューサーの製造方法

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