JP2012181019A5 - - Google Patents

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Publication number
JP2012181019A5
JP2012181019A5 JP2011042073A JP2011042073A JP2012181019A5 JP 2012181019 A5 JP2012181019 A5 JP 2012181019A5 JP 2011042073 A JP2011042073 A JP 2011042073A JP 2011042073 A JP2011042073 A JP 2011042073A JP 2012181019 A5 JP2012181019 A5 JP 2012181019A5
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JP
Japan
Prior art keywords
positioning
constant
period
positioning direction
cycle
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JP2011042073A
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English (en)
Japanese (ja)
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JP2012181019A (ja
JP5882590B2 (ja
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Priority to JP2011042073A priority Critical patent/JP5882590B2/ja
Priority claimed from JP2011042073A external-priority patent/JP5882590B2/ja
Priority to US13/404,313 priority patent/US9417101B2/en
Priority to EP12157073.3A priority patent/EP2492647B1/en
Publication of JP2012181019A publication Critical patent/JP2012181019A/ja
Publication of JP2012181019A5 publication Critical patent/JP2012181019A5/ja
Application granted granted Critical
Publication of JP5882590B2 publication Critical patent/JP5882590B2/ja
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JP2011042073A 2011-02-28 2011-02-28 光学式エンコーダおよび光学式エンコーダを有する装置 Active JP5882590B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011042073A JP5882590B2 (ja) 2011-02-28 2011-02-28 光学式エンコーダおよび光学式エンコーダを有する装置
US13/404,313 US9417101B2 (en) 2011-02-28 2012-02-24 Optical encoder with a scale that has fine and coarse pitch patterns
EP12157073.3A EP2492647B1 (en) 2011-02-28 2012-02-27 Scale, optical encoder and optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011042073A JP5882590B2 (ja) 2011-02-28 2011-02-28 光学式エンコーダおよび光学式エンコーダを有する装置

Publications (3)

Publication Number Publication Date
JP2012181019A JP2012181019A (ja) 2012-09-20
JP2012181019A5 true JP2012181019A5 (enExample) 2014-03-27
JP5882590B2 JP5882590B2 (ja) 2016-03-09

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ID=45688378

Family Applications (1)

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JP2011042073A Active JP5882590B2 (ja) 2011-02-28 2011-02-28 光学式エンコーダおよび光学式エンコーダを有する装置

Country Status (3)

Country Link
US (1) US9417101B2 (enExample)
EP (1) EP2492647B1 (enExample)
JP (1) JP5882590B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5919363B1 (ja) 2014-11-28 2016-05-18 ファナック株式会社 ロータリーエンコーダ
DE112016001860T5 (de) * 2015-04-22 2018-01-18 Faro Technologies, Inc. Indexierter optischer Drehgeber
JP6664211B2 (ja) * 2015-12-22 2020-03-13 株式会社ミツトヨ エンコーダ
JP6705649B2 (ja) * 2015-12-22 2020-06-03 株式会社ミツトヨ エンコーダ
JP6684631B2 (ja) * 2016-03-31 2020-04-22 シチズン時計株式会社 位置変換器
DE102017100506A1 (de) * 2017-01-12 2018-07-12 Sick Ag Optoelektronisches Positionserfassungssystem und Verfahren zur Positionsbestimmung
JP2018138350A (ja) * 2017-02-24 2018-09-06 セイコーエプソン株式会社 記録装置
WO2018190018A1 (ja) * 2017-04-13 2018-10-18 ソニー株式会社 位置検出装置及び位置検出方法
KR102447611B1 (ko) * 2017-06-06 2022-09-26 케이엘에이 코포레이션 레티클 최적화 알고리즘들 및 최적의 타겟 설계
JP7028652B2 (ja) * 2018-01-16 2022-03-02 株式会社ミツトヨ 測定装置
US10502593B1 (en) * 2018-06-07 2019-12-10 Philip M. Johnson Linear and rotary multitrack absolute position encoder and methods using the same
JP7148337B2 (ja) * 2018-09-14 2022-10-05 キヤノン株式会社 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置
CN111457948A (zh) * 2019-01-22 2020-07-28 大银微系统股份有限公司 光学编码器及其控制方法
US20200271484A1 (en) * 2019-02-25 2020-08-27 Hiwin Mikrosystem Corp. Optical encoder and control method thereof
WO2022116017A1 (zh) * 2020-12-01 2022-06-09 深圳市速腾聚创科技有限公司 光栅盘、z相信号的识别方法、光电编码器和激光雷达
WO2025019491A1 (en) * 2023-07-17 2025-01-23 NanoWave Incorporated Movement measurement system with method for reducing interpolation error

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3757128A (en) * 1972-03-20 1973-09-04 Ibm Multiphase tachometer
JPH01113616A (ja) 1987-10-27 1989-05-02 Matsushita Electric Ind Co Ltd 位置検出装置
DE19962278A1 (de) * 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JP4156223B2 (ja) * 2001-10-19 2008-09-24 サムタク株式会社 リニアスケール
JP2007183116A (ja) 2006-01-04 2007-07-19 Fuji Electric Holdings Co Ltd 光学式エンコーダ
JP2009198318A (ja) 2008-02-21 2009-09-03 Mitsutoyo Corp 光電式エンコーダ
WO2009148066A1 (ja) * 2008-06-05 2009-12-10 三菱電機株式会社 光学式エンコーダ
US7934657B2 (en) 2008-06-25 2011-05-03 Xerox Corporation Encoder home position sensing method and system
US7608813B1 (en) 2008-11-18 2009-10-27 Mitutoyo Corporation Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions
JP5566061B2 (ja) * 2009-07-31 2014-08-06 オリンパス株式会社 光学式変位検出装置

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