JP2012160617A5 - - Google Patents

Download PDF

Info

Publication number
JP2012160617A5
JP2012160617A5 JP2011020090A JP2011020090A JP2012160617A5 JP 2012160617 A5 JP2012160617 A5 JP 2012160617A5 JP 2011020090 A JP2011020090 A JP 2011020090A JP 2011020090 A JP2011020090 A JP 2011020090A JP 2012160617 A5 JP2012160617 A5 JP 2012160617A5
Authority
JP
Japan
Prior art keywords
mark
substrate
imprint
imprint material
inspection method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011020090A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012160617A (ja
JP5709558B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011020090A priority Critical patent/JP5709558B2/ja
Priority claimed from JP2011020090A external-priority patent/JP5709558B2/ja
Publication of JP2012160617A publication Critical patent/JP2012160617A/ja
Publication of JP2012160617A5 publication Critical patent/JP2012160617A5/ja
Application granted granted Critical
Publication of JP5709558B2 publication Critical patent/JP5709558B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011020090A 2011-02-01 2011-02-01 検査方法、インプリント装置及び物品の製造方法 Expired - Fee Related JP5709558B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011020090A JP5709558B2 (ja) 2011-02-01 2011-02-01 検査方法、インプリント装置及び物品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011020090A JP5709558B2 (ja) 2011-02-01 2011-02-01 検査方法、インプリント装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2012160617A JP2012160617A (ja) 2012-08-23
JP2012160617A5 true JP2012160617A5 (enrdf_load_stackoverflow) 2014-03-20
JP5709558B2 JP5709558B2 (ja) 2015-04-30

Family

ID=46840899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011020090A Expired - Fee Related JP5709558B2 (ja) 2011-02-01 2011-02-01 検査方法、インプリント装置及び物品の製造方法

Country Status (1)

Country Link
JP (1) JP5709558B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5960198B2 (ja) 2013-07-02 2016-08-02 キヤノン株式会社 パターン形成方法、リソグラフィ装置、リソグラフィシステムおよび物品製造方法
JP2016154241A (ja) * 2013-07-02 2016-08-25 キヤノン株式会社 パターン形成方法、リソグラフィ装置、リソグラフィシステムおよび物品製造方法
TW201616553A (zh) * 2014-07-17 2016-05-01 Soken Kagaku Kk 分步重複式壓印裝置以及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7309225B2 (en) * 2004-08-13 2007-12-18 Molecular Imprints, Inc. Moat system for an imprint lithography template
WO2007117524A2 (en) * 2006-04-03 2007-10-18 Molecular Imprints, Inc. Method of concurrently patterning a substrate having a plurality of fields and alignment marks
JP4185941B2 (ja) * 2006-04-04 2008-11-26 キヤノン株式会社 ナノインプリント方法及びナノインプリント装置
JP4996488B2 (ja) * 2007-03-08 2012-08-08 東芝機械株式会社 微細パターン形成方法
JP2009088264A (ja) * 2007-09-28 2009-04-23 Toshiba Corp 微細加工装置およびデバイス製造方法
JP5102731B2 (ja) * 2008-09-26 2012-12-19 株式会社日立産機システム 微細構造体

Similar Documents

Publication Publication Date Title
JP2013004744A5 (enrdf_load_stackoverflow)
JP2015170815A5 (enrdf_load_stackoverflow)
JP2014229883A5 (enrdf_load_stackoverflow)
JP2013026288A5 (enrdf_load_stackoverflow)
JP2013062286A5 (enrdf_load_stackoverflow)
JP2012164832A5 (enrdf_load_stackoverflow)
JP2013162045A5 (ja) インプリント装置、インプリント方法、及び物品の製造方法
EP2584408A3 (en) Imprint method and imprint apparatus
TW200712800A (en) Mold, pattern forming method, and pattern forming apparatus
JP2015111657A5 (enrdf_load_stackoverflow)
JP2009220405A5 (enrdf_load_stackoverflow)
ATE554050T1 (de) Prägeverfahren und verfahren zur verarbeitung eines substrats
JP2014203935A5 (enrdf_load_stackoverflow)
JP2012103269A5 (ja) ロード方法、露光方法及び露光装置、並びにデバイス製造方法
JP2016021441A5 (enrdf_load_stackoverflow)
JP2013058517A5 (enrdf_load_stackoverflow)
JP2012238674A5 (enrdf_load_stackoverflow)
JP2005108975A5 (enrdf_load_stackoverflow)
JP2015122373A5 (enrdf_load_stackoverflow)
JP2012134466A5 (enrdf_load_stackoverflow)
JP2015138842A5 (enrdf_load_stackoverflow)
JP2016201485A5 (enrdf_load_stackoverflow)
SG11201807161RA (en) Imprint apparatus, method of operating the same, and method of manufacturing article
JP2011171410A5 (enrdf_load_stackoverflow)
JP2013162046A5 (ja) インプリント装置、インプリント方法、及び物品の製造方法